JPS6130277Y2 - - Google Patents

Info

Publication number
JPS6130277Y2
JPS6130277Y2 JP1977127208U JP12720877U JPS6130277Y2 JP S6130277 Y2 JPS6130277 Y2 JP S6130277Y2 JP 1977127208 U JP1977127208 U JP 1977127208U JP 12720877 U JP12720877 U JP 12720877U JP S6130277 Y2 JPS6130277 Y2 JP S6130277Y2
Authority
JP
Japan
Prior art keywords
electron
substrate
graphite
metal spring
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977127208U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5453352U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977127208U priority Critical patent/JPS6130277Y2/ja
Publication of JPS5453352U publication Critical patent/JPS5453352U/ja
Application granted granted Critical
Publication of JPS6130277Y2 publication Critical patent/JPS6130277Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP1977127208U 1977-09-21 1977-09-21 Expired JPS6130277Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977127208U JPS6130277Y2 (enrdf_load_stackoverflow) 1977-09-21 1977-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977127208U JPS6130277Y2 (enrdf_load_stackoverflow) 1977-09-21 1977-09-21

Publications (2)

Publication Number Publication Date
JPS5453352U JPS5453352U (enrdf_load_stackoverflow) 1979-04-13
JPS6130277Y2 true JPS6130277Y2 (enrdf_load_stackoverflow) 1986-09-05

Family

ID=29089767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977127208U Expired JPS6130277Y2 (enrdf_load_stackoverflow) 1977-09-21 1977-09-21

Country Status (1)

Country Link
JP (1) JPS6130277Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417549B2 (enrdf_load_stackoverflow) * 1973-12-07 1979-06-30

Also Published As

Publication number Publication date
JPS5453352U (enrdf_load_stackoverflow) 1979-04-13

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