JPS63221968A - Carrier - Google Patents

Abstract

PURPOSE:To reinforce each root of all teeth as well as to prevent any operating hindrance attributable to tooth breakage, by embedding a fiber along each external form of gears of a carrier holding a workpiece to be polished. CONSTITUTION:All but holes of a carrier 1 holding each workpiece 4 are reinforced with a glass fiber 3 going direct, and another glass fiber 2 is set up along each external form of the gears, whereby each root of all teeth is reinforced. If so, at the time of polishing, force to be added to these teeth for rotating the carrier 1 can be made larger. Therefore, any operating hindrance against a duplex polishing device due to tooth breakage is preventable, thus improvement in conspicuous profitability and reliability can be well expected.

Description

[Detailed Description of the Invention] [Summary] A carrier for a double-sided polishing machine in which fibers are embedded along the outer shape of the gears of the carrier that holds an object to be polished to reinforce the strength of the teeth.

[Industrial application field]

The present invention relates to a double-sided polishing apparatus, and particularly to an improvement of a carrier for holding an object to be polished.

Polishing is widely used for processing semiconductor substrates and other substrates because it reduces the roughness of the surface of the object to be polished and improves the processing accuracy such as flatness and parallelism of the object to be polished.

This polishing method can be roughly divided into two types: single-sided polishing and double-sided polishing, and the structures of the equipment used for each are different.

The single-sided polishing method does not use a carrier and is performed by gluing and fixing the object to be polished to a holder, and although high processing accuracy cannot be expected, the fixing force of the object to be polished is strong, so the processing pressure can be increased. It is possible to achieve a high polishing rate, and it is possible to achieve a mirror finish in a short time.

On the other hand, the double-sided polishing method using a carrier can improve processing accuracy, but the carrier used for thin objects to be polished requires a thinner carrier, which reduces the strength and makes it difficult to process when polishing. Since the pressure cannot be increased, a high polishing rate cannot be expected.

Under the above circumstances, there is a demand for a carrier that can increase processing pressure.

[Conventional technology]

As shown in FIG. 2, a conventional planetarium-type double-sided polishing device places the workpiece 4 in a hole in a carrier 21 between two surface plates (22, 23) that rotate in opposite directions and have polishing cloths attached thereto. The object to be polished 4 is held therein and pressurized while supplying abrasive from the upper surface plate 22 to simultaneously polish both sides of the object to be polished.

This carrier 21 has a thickness of about 40 mm as shown in FIG.
It is a 0 μm thin disk surrounded by gears, and while it revolves around a rotating sun gear 24 and an internal gear 25, it rotates on its own axis depending on the combination of the rotational speeds of the internal gear 25 and the sun gear 24.

The carrier 21 is made of metal or of epoxy resin reinforced with mutually orthogonal glass fiber fibers 3 as shown in FIG.

[Problem that the invention seeks to solve]

The problem with the conventional carriers described above is that metal carriers may contaminate the object to be polished, while epoxy resin carriers reinforced with orthogonal glass fibers are free from contamination, but the material The strength of the teeth is low, and the tooth parts, which are particularly loaded, are easily damaged.

That is, since the reinforcing glass fiber fibers 3 are present in the epoxy resin in a perpendicular state, some teeth have a glass fiber reinforcing effect, some teeth have almost no glass fiber reinforcing effect, and some teeth have no glass fiber reinforcing effect. There are teeth that have no reinforcing effect, and the latter two in particular cannot be expected to have any reinforcing effects.

The present invention aims to provide a carrier reinforced with glass fibers in view of the above-mentioned circumstances.

[Means for solving problems]

The above problems are solved by the carrier according to the present invention, in which fibers are embedded along the outer shape of the gear of the carrier that holds the object to be polished.

[Effect]

That is, in the present invention, since the fibers are embedded along the outer shape of all the gears of the carrier, the roots of all the teeth are covered with fibers against the force applied to the teeth of the carrier when polishing an object to be polished. This enables uniform reinforcement.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

As shown in FIG. 1, the carrier 1 of this embodiment has an object 4 to be polished
The outside of the hole plate that is inserted and held is reinforced with glass fiber fibers 3 that run perpendicularly, and the bases of all teeth are reinforced by arranging glass fiber fibers 2 along the outer shape of the teeth. The thickness of carrier 1 is approximately 400 mm.
It is μm.

Since it has such a structure and all the teeth are reinforced, it is possible to increase the force applied to the teeth to rotate the carrier 1 during polishing.

〔Effect of the invention〕

As explained above, according to the present invention, by embedding glass fiber fibers with an extremely simple structure along the sides of all teeth of the gear, all the teeth are reinforced, and the double-sided polishing device is able to eliminate teeth breakage. It has the advantage of being able to prevent operational failures, and can be expected to have significant economic and reliability effects, making it extremely useful industrially.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the present invention, FIG. 2 is a side sectional view of a double-side polishing apparatus, and FIG. 3 is a plan view of a conventional carrier. In the figure, 1 is a carrier, 2 is a fiber, 3 is a fiber, and 4 is an object to be polished. FIG. 2 is a plan view showing an embodiment of the present invention, and a sectional side view of a double-sided polishing apparatus.

Claims (1)

[Claims] A carrier (1) for holding an object (4) to be polished in a double-sided polisher, characterized in that fibers (2) are embedded along the outer shape of a gear of the carrier (1).