JPS6322084B2 - - Google Patents
Info
- Publication number
- JPS6322084B2 JPS6322084B2 JP14619779A JP14619779A JPS6322084B2 JP S6322084 B2 JPS6322084 B2 JP S6322084B2 JP 14619779 A JP14619779 A JP 14619779A JP 14619779 A JP14619779 A JP 14619779A JP S6322084 B2 JPS6322084 B2 JP S6322084B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- oscillation frequency
- vibrators
- electrodes
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14619779A JPS5669913A (en) | 1979-11-12 | 1979-11-12 | Piezoelectric oscillator assembly |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14619779A JPS5669913A (en) | 1979-11-12 | 1979-11-12 | Piezoelectric oscillator assembly |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5669913A JPS5669913A (en) | 1981-06-11 |
JPS6322084B2 true JPS6322084B2 (enrdf_load_stackoverflow) | 1988-05-10 |
Family
ID=15402316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14619779A Granted JPS5669913A (en) | 1979-11-12 | 1979-11-12 | Piezoelectric oscillator assembly |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5669913A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61131607A (ja) * | 1984-11-29 | 1986-06-19 | Murata Mfg Co Ltd | 圧電振動子ウエハおよび圧電振動子の製造方法 |
KR100790334B1 (ko) * | 2007-06-22 | 2008-01-03 | 주식회사 신성플랜트 | 집진기용 필터백 |
-
1979
- 1979-11-12 JP JP14619779A patent/JPS5669913A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5669913A (en) | 1981-06-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7098574B2 (en) | Piezoelectric resonator and method for manufacturing the same | |
US7857983B2 (en) | Method for manufacturing piezoelectric resonator | |
US4418299A (en) | Face-shear mode quartz crystal vibrators and method of manufacture | |
JP4687993B2 (ja) | 圧電振動片、圧電振動子、および圧電振動片の周波数調整方法 | |
JP5528337B2 (ja) | 水晶振動子の製造方法 | |
US20050006988A1 (en) | Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor | |
JPS6322084B2 (enrdf_load_stackoverflow) | ||
JP2010154513A (ja) | 水晶振動子の製造方法 | |
JP4196641B2 (ja) | 超薄板圧電デバイスとその製造方法 | |
US20050134151A1 (en) | Piezoelectric resonator and the method for making the same | |
JP3543786B2 (ja) | 圧電振動片及び圧電振動子の製造方法 | |
JPS5829648B2 (ja) | 音叉形水晶振動子の固有周波数調整方法 | |
JP3528811B2 (ja) | 圧電振動片の電極形成方法、圧電振動片の電極形成用マスク、圧電振動子および圧電発振器 | |
JPH0329206B2 (enrdf_load_stackoverflow) | ||
US5445708A (en) | Method for preparing ultrathin piezoelectric resonator plates | |
JPH04294622A (ja) | 圧電素子の製造方法 | |
US7950120B2 (en) | Method for manufacturing piezoelectric resonator | |
JP6611534B2 (ja) | 圧電振動片及び圧電振動子 | |
JP7454962B2 (ja) | 圧電ウエハ、圧電ウエハの製造方法、及び圧電振動片の製造方法 | |
US20230179164A1 (en) | Method For Manufacturing Vibrator Element | |
JP3351119B2 (ja) | 圧電共振子の製造方法 | |
US20230097025A1 (en) | Method Of Manufacturing Vibration Element | |
US20230102578A1 (en) | Method Of Manufacturing Vibration Element | |
JPH0145246B2 (enrdf_load_stackoverflow) | ||
JP4341340B2 (ja) | 圧電振動デバイスの製造方法および製造装置 |