JPS63218139A - イオンビ−ム装置 - Google Patents

イオンビ−ム装置

Info

Publication number
JPS63218139A
JPS63218139A JP62051575A JP5157587A JPS63218139A JP S63218139 A JPS63218139 A JP S63218139A JP 62051575 A JP62051575 A JP 62051575A JP 5157587 A JP5157587 A JP 5157587A JP S63218139 A JPS63218139 A JP S63218139A
Authority
JP
Japan
Prior art keywords
signal
ion beam
circuit
output signal
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62051575A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0588503B2 (https=
Inventor
Hachiro Shimayama
島山　八郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62051575A priority Critical patent/JPS63218139A/ja
Publication of JPS63218139A publication Critical patent/JPS63218139A/ja
Publication of JPH0588503B2 publication Critical patent/JPH0588503B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP62051575A 1987-03-06 1987-03-06 イオンビ−ム装置 Granted JPS63218139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62051575A JPS63218139A (ja) 1987-03-06 1987-03-06 イオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62051575A JPS63218139A (ja) 1987-03-06 1987-03-06 イオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS63218139A true JPS63218139A (ja) 1988-09-12
JPH0588503B2 JPH0588503B2 (https=) 1993-12-22

Family

ID=12890746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62051575A Granted JPS63218139A (ja) 1987-03-06 1987-03-06 イオンビ−ム装置

Country Status (1)

Country Link
JP (1) JPS63218139A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009010078A (ja) * 2007-06-27 2009-01-15 Nuflare Technology Inc 電子ビーム描画装置及び電子ビームの電流密度調整方法
CN108695128A (zh) * 2017-04-11 2018-10-23 上海伟钊光学科技股份有限公司 具有束流自动反馈控制的考夫曼离子源

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158852A (ja) * 1982-03-17 1983-09-21 Jeol Ltd 荷電粒子フイルタ
JPS6039748A (ja) * 1983-08-12 1985-03-01 Jeol Ltd イオンビ−ム集束装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158852A (ja) * 1982-03-17 1983-09-21 Jeol Ltd 荷電粒子フイルタ
JPS6039748A (ja) * 1983-08-12 1985-03-01 Jeol Ltd イオンビ−ム集束装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009010078A (ja) * 2007-06-27 2009-01-15 Nuflare Technology Inc 電子ビーム描画装置及び電子ビームの電流密度調整方法
CN108695128A (zh) * 2017-04-11 2018-10-23 上海伟钊光学科技股份有限公司 具有束流自动反馈控制的考夫曼离子源

Also Published As

Publication number Publication date
JPH0588503B2 (https=) 1993-12-22

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