JPS6321573Y2 - - Google Patents

Info

Publication number
JPS6321573Y2
JPS6321573Y2 JP1982196639U JP19663982U JPS6321573Y2 JP S6321573 Y2 JPS6321573 Y2 JP S6321573Y2 JP 1982196639 U JP1982196639 U JP 1982196639U JP 19663982 U JP19663982 U JP 19663982U JP S6321573 Y2 JPS6321573 Y2 JP S6321573Y2
Authority
JP
Japan
Prior art keywords
pipe system
chamber
sputtering
gas introduction
main gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982196639U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59100855U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19663982U priority Critical patent/JPS59100855U/ja
Publication of JPS59100855U publication Critical patent/JPS59100855U/ja
Application granted granted Critical
Publication of JPS6321573Y2 publication Critical patent/JPS6321573Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP19663982U 1982-12-24 1982-12-24 連続スパツタ装置 Granted JPS59100855U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19663982U JPS59100855U (ja) 1982-12-24 1982-12-24 連続スパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19663982U JPS59100855U (ja) 1982-12-24 1982-12-24 連続スパツタ装置

Publications (2)

Publication Number Publication Date
JPS59100855U JPS59100855U (ja) 1984-07-07
JPS6321573Y2 true JPS6321573Y2 (cs) 1988-06-14

Family

ID=30421766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19663982U Granted JPS59100855U (ja) 1982-12-24 1982-12-24 連続スパツタ装置

Country Status (1)

Country Link
JP (1) JPS59100855U (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5119100Y2 (cs) * 1972-06-27 1976-05-20
JPS56130470A (en) * 1980-03-14 1981-10-13 Hitachi Ltd Sputtering apparatus

Also Published As

Publication number Publication date
JPS59100855U (ja) 1984-07-07

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