JPS63214918A - 薄膜形成装置等におけるフイルム走行装置 - Google Patents

Info

Publication number

JPS63214918A

JPS63214918A JP4917787A JP4917787A JPS63214918A JP S63214918 A JPS63214918 A JP S63214918A JP 4917787 A JP4917787 A JP 4917787A JP 4917787 A JP4917787 A JP 4917787A JP S63214918 A JPS63214918 A JP S63214918A

Authority

JP

Japan

Prior art keywords

roller

film

polymer film

high molecular

sub

Prior art date

1987-03-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

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• 239000010409 thin film Substances 0.000 title claims abstract description 15
• 239000010408 film Substances 0.000 title claims description 29
• 229910052751 metal Inorganic materials 0.000 claims abstract description 11
• 239000002184 metal Substances 0.000 claims abstract description 11
• 229920006254 polymer film Polymers 0.000 claims description 34
• 239000003779 heat-resistant material Substances 0.000 claims description 5
• 238000004544 sputter deposition Methods 0.000 claims description 4
• 238000001771 vacuum deposition Methods 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 abstract description 5
• 229910052782 aluminium Inorganic materials 0.000 abstract description 3
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
• 229910001220 stainless steel Inorganic materials 0.000 abstract description 3
• 239000010935 stainless steel Substances 0.000 abstract description 3
• 238000004519 manufacturing process Methods 0.000 abstract description 2
• 239000002120 nanofilm Substances 0.000 abstract 5
• 239000004411 aluminium Substances 0.000 abstract 1
• 239000000463 material Substances 0.000 description 8
• 239000007769 metal material Substances 0.000 description 4
• 230000000694 effects Effects 0.000 description 3
• 230000037303 wrinkles Effects 0.000 description 3
• 238000005498 polishing Methods 0.000 description 2
• 238000007738 vacuum evaporation Methods 0.000 description 2
• 238000007740 vapor deposition Methods 0.000 description 2
• 238000004804 winding Methods 0.000 description 2
• 239000004642 Polyimide Substances 0.000 description 1
• 239000000919 ceramic Substances 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 230000008602 contraction Effects 0.000 description 1
• 238000005520 cutting process Methods 0.000 description 1
• 230000007547 defect Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 238000004806 packaging method and process Methods 0.000 description 1
• 229920001721 polyimide Polymers 0.000 description 1
• 230000001105 regulatory effect Effects 0.000 description 1
• 238000009751 slip forming Methods 0.000 description 1

Cited By (2)