JPS63214907A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To improve mass productivity and reliability by forming laminated films consisting of magnetic metallic material films or said films and insulator films on a nonmagnetic substrate, depositing glass for welding by evaporation further thereon, placing another sheet of nonmagnetic substrate further thereon and subjecting the substrates to high-temp. welding. CONSTITUTION:The laminated films consisting of the magnetic metallic materials 2 and the insulator films 3 are laminated on the nonmagnetic substrate 1a and the welding glass 5 is deposited on the laminated films and the substrate 1b. The substrates 1a, 1b are then subjected to the high-temp. welding by the welding glass 5 with the laminated films in-between. Plural pieces of the core half bodies cut to a prescribed size are arrayed on an L-shaped base and the gap surfaces 9 are polished. Gap materials are deposited on the polished surfaces. The other piece formed with a winding groove 7 and a cut groove 8 for glass is formed. These pieces are butted to each other and the low melting welding glass is disposed therebetween. Weight is applied to the pieces so that the substrates are welded at a high temp. The L-shaped base is removed and the part joined by the glass is cut to a prescribed size. A magnetic head having the high reliability is thus obtd. with the high mass productivity.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic head suitable for high-density magnetic recording,
The present invention relates to a method of manufacturing a magnetic head for V'I'R, which has performance suitable for recording and reproducing data on a high coercive force medium at a high frequency of about several tens of MHsg.

[Conventional technology]

In recent years, with the increasing density of magnetic recording, ferrite is insufficient as a magnetic head material and magnetic metals (sendust, amorphous, permalloy) with high saturation magnetic flux density have been used to record sufficiently on high coercive force media such as metal tapes. It is necessary to use it.

Various types of magnetic heads using this metal magnetic material have been proposed. For example, in JP-A No. 60-32107 shown in FIG. 10, a ferromagnetic fermented core half (14a) is used.

14b) Alternately form metal magnetic films and insulating films on the top.23) Core halves (14a) and (14b) are butted together with gap material (1g) in between and welded with non-magnetic column material (13). do.

Further, the magnetic head shown in FIG. 11 includes a non-magnetic substrate (la),
(lb) with metal magnetic films and insulating films alternately laminated (2
31L, gap material (gl is sandwiched and butted together.

Furthermore, Fig. 12 shows a non-magnetic core (31
) are pasted together.

[Problem that the invention seeks to solve]

However, the magnetic head shown in Fig. 10 can withstand use if the maximum operating frequency is around 5 to 6 MHz, as the effect of eddy current loss is not significant, but eddy current loss increases with the square of the thickness and the square of the frequency. Since it is proportional to the resistivity and inversely proportional to the resistivity, this magnetic head (Figure 10), in which the metal magnetic film is greatly tilted with respect to the magnetic path, and the upper thickness has apparently increased, has a frequency of several tens of MHz.
At such high frequencies, eddy current loss increases rapidly, making it unusable. Further, the laminated insulating films act as a pseudo gap, causing a so-called contour effect in which the frequency characteristics wave. In addition, in the magnetic head shown in Fig. 11, the metal magnetic film is parallel to the magnetic path, so the above drawback does not occur, but there is a gap (gl is not in the center of the head but closer to the edge, making contact with the tape poor, resulting in electromagnetic It deteriorates the characteristics and is not suitable for practical use.To avoid this, the magnetic head shown in Fig. 12 can be considered.This is a magnetic head in which a non-magnetic material core (31) is bonded to the metal magnetic film side of Fig. 11. However, this method is not suitable for mass production because the head chips are bonded one by one, and the bonding for bonding is done with an organic adhesive, which deteriorates over time and does not provide reliable bonding. There is a gap between the non-magnetic material core (31) and the laminated film (23), and the tape binder gets clogged when the tape runs, resulting in a lack of reliability.

This invention was made in order to solve the above-mentioned problems, and in order to withstand use at frequencies of several tens of MHz, the magnetic path is made up of a metal magnetic film or a laminated film made of it and an insulating film. It is an object of the present invention to provide a manufacturing method for obtaining a magnetic head having a parallel structure, which is highly effective in mass production, and has high reliability.

[Means for solving problems]

The manufacturing method of the present invention includes first forming a metal magnetic film or a laminated film of a metal magnetic film and an insulating film on a non-magnetic substrate, then depositing glass for welding on top of the metal magnetic film, and then depositing another non-magnetic substrate. Place it on top and weld it at high temperature.

[Effect]

In this invention, there is no need to bond the non-magnetic material core (31) to each head chip, and since the cores are joined by glass welding, there is no gap between the non-magnetic material core and the metal magnetic film. A highly reliable magnetic head can be obtained without causing any damage.

〔Example〕

FIG. 1 is a sectional view showing an embodiment of the present invention, and (l
a) and (lb) are nonmagnetic substrates.

FIG. 2 is a diagram in which a laminated film (23) consisting of a metal magnetic film (2) and an insulating film (31) is laminated on a non-magnetic substrate (1a) by a method such as sputtering.The film of the laminated film (23) The thickness corresponds to the track width (4).

Furthermore, as in the third factor, a welded glass (5) is laminated on the laminated film (23) and the substrate (1b) by a method such as sputtering.

And as shown in FIG. 4, there is a substrate (la).

(1b) is welded at high temperature with welding glass (5) with a laminated film in between.

This is cut into predetermined dimensions to form a plurality of core halves as shown in FIG.

A plurality of such core halves are mounted on an L-shaped stand (
6), the gap surface (9) is polished, and the gap material (12) is stacked on this surface (see FIG. 8).

On the other hand, as shown in FIG. 7, a winding groove (7) and a glass cut groove (8) are formed.

The part formed in Fig. 6 and the part formed in Fig. 7 are butted together as shown in Fig. 8, and the low melting point welded glass (10) is
are placed and a load (11) is applied to perform high-temperature welding. Thereafter, the L-shaped base (6) is removed and the glass bonded portion is cut to a predetermined size to form a magnetic head.

FIG. 9 tar is a perspective view of the obtained magnetic head, and FIG. It is natural that a magnetic head with an azimuth angle can be created by cutting or tilting the head.

The magnetic head obtained using this manufacturing method is capable of recording and reproducing information on high coercive force media, and has a digital VT of several tens of MH2.
Not only does it satisfy the performance of having sufficiently high recording and reproducing characteristics even at frequencies corresponding to R, but it also has a non-mass production process of laminating non-magnetic materials one by one.
All bonding is done with fused glass, so reliability is high.

In the above embodiment, a laminated film was described, but if the track width is extremely narrow or the operating frequency is several MHz, a single layer of metal magnetic material film may be used.

However, the embodiments shown in FIGS. 6 to 8 are merely examples, and it goes without saying that other mass-producible embodiments can be adopted.

Further, although the laminated films are stacked on only one substrate in FIGS. 2 and 3, the metal magnetic films or their laminated films may be stacked on both substrates equally or in other proportions. however,
Naturally, the total film thickness becomes the track width.

Furthermore, various methods are available for forming laminated films or depositing glass, such as sputtering, 0VI) (chemical vapor deposition), plasma OVD,
Light C! Examples include VD, electron beam evaporation, etc., and there are no restrictions on the apparatus or method.

〔Effect of the invention〕

As explained above, in this invention, two non-magnetic substrates are bonded with a welded glass with a metal magnetic film sandwiched between them, so that a magnetic head that can handle high coercive force media and high frequencies has high reliability and This method has the advantage that it can be applied to a method with excellent mass productivity.

[Brief explanation of the drawing]

Figures 1 to 9 are diagrams showing one embodiment of the present invention, in which the manufacturing steps are sequentially arranged. Figure 1 is a perspective view of two non-magnetic substrates, and Figure 2 is a perspective view of one non-magnetic substrate. Figure 3 (a) is a diagram showing a laminated film of a metal magnetic film and an insulating film formed on a substrate.
) is a diagram in which a welded glass film is laminated on a non-magnetic substrate having a laminated film, Figure 83(t)l is a diagram in which a welded glass film is laminated on a non-magnetic substrate without a laminated film, and Figure 4 is a diagram in which a welded glass film is laminated on a non-magnetic substrate without a laminated film. The one obtained in Figure (IL) and the one obtained in Figure 3 (1) l are welded at high temperature with a film of welded glass, and Figure 5 is a diagram showing how the one in Figure 4 is cut. FIG. 6 shows how to rearrange the pieces obtained by cutting in FIG. 5, and FIG. 7 shows a process parallel to FIG. 6, with winding grooves formed.
Fig. 8 is a diagram showing how the material obtained in Fig. 6 and the material obtained in Fig. 7 are butted together and welded at high temperature with welding glass, Fig. 9 (at is the material obtained in Fig. 8) Figure 9 (1) 1 is a diagram showing a magnetic head obtained by further cutting the
FIG. 3 is an enlarged view showing a gap portion of at. 10 (branch) is #Ki's m flight header. Fig. 11 is a perspective view showing another conventional magnetic head. Fig. 12 is still another conventional example. 1 is a perspective view showing a magnetic head. In the figure, (la) and (lb) are non-magnetic substrates, (2) is a metal magnetic film, (3) is an insulating film, (4) is a track width, and (23) is a magnetic head. ) is a laminated film consisting of a metal magnetic film and an insulating film,
(5) is fused glass, (6) is a 5-shaped stand, (7) is a winding groove, (8) is a glass cut groove, (9) is a gap m,
(10) is low melting point glass, (11) is weight, (12) is gap material, (g) is gap, (13) is non-magnetic film,
(14a) and (14b) are magnetic core halves, and (31) is a non-magnetic material core. Note that the same reference numerals in each drawing indicate the same or corresponding parts. Agent Patent Attorney Masuo Oiwa Figure 1 Figure 2 Figure 5 Figure 6 N Rumors False 5 to 5

Claims (3)

[Claims] (1) A process of forming a metal magnetic film on one or both of two nonmagnetic substrates using physical or chemical vapor deposition to a film thickness equivalent to the track width, and then welding it on one or both of the substrates. The process of forming a glass film using physical or chemical vapor deposition for the core half, and the process of sandwiching the metal magnetic film between the two substrates and welding them with the glass formed in the previous process. A method of manufacturing a magnetic head, the method comprising: (2) The method for manufacturing a magnetic head according to claim 1, wherein the metal magnetic film is a so-called laminated film in which metal magnetic films and insulating films are alternately laminated in order to cause eddy current loss. (3) A method for manufacturing a magnetic head according to claim 1, in which a large number of core halves are obtained by cutting a non-magnetic substrate after welding a large area.