JPH02168406A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE:To avoid the deviation of a track width by forming split grooves in a grating on one face of a nonmagnetic substrate so as to form a projection, laminating a ferromagnetic metallic thin film and an insulation thin film on the projection and forming a joining layer on the other side of the substrate so as to form a laminated board. CONSTITUTION:A nonmagnetic bonding layer 17 is formed to a lower face of a nonmagnetic substrate 16 made of a crystalline glass, then split grooves 18 are formed as a lattice on the upper face of a substrate 16 to form projections 19 whose size is 3X1mm, and a ferromagnetic metallic thin film 20 made of a 'Sendust(R)' and an insulation thin film 21 made of an SiO2 are coated alternately on the upper face by 3-6 layers to form a laminated substrate 23 having a laminated thin film 22. The thin film 22 in a film thickness of 10-30mum forms a track width of the magnetic head. The substrates 23 are arranged by a jig, heated and bonded to form a lamination layer block 25. Then the block is cut along with broken lines E-E', F-F' to form a laminated head piece 26, and the magnetic head is formed by joining the pieces 26 with a low temperature glass 9. Since the block 25 is at the split grooves 18 in the cut process, shock due to cut-off is not directly exerted onto the laminated thin film 22 and neither crack nor peeling is caused.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a method of manufacturing a magnetic head suitable for efficiently recording and reproducing high frequency signals.

(B) Prior Art Conventionally, in devices for recording and reproducing high frequency signals such as VTRs, ferrite materials with low high frequency loss have been used as magnetic materials for video heads. However, in recent years, the development of systems that handle wider band signals, such as high-definition VTRs and digital VTRs, has become active, and recording media have also become denser to record such large amounts of information. In the current trend, there is a shift from iron oxide based media to high coercive force media such as alloy powder media and metal evaporated media. On the other hand, in a ferrite head, the maximum magnetic flux density is at most 50
00 Gauss, and in order to efficiently reproduce short wavelength signals, it is necessary to make the gap narrow, and in the case of high coercive force media with a coercive force Hc of 10,000 e or more as mentioned above, the ferrite core at the tip of the gap is Saturation occurs and sufficient recording is not possible. Therefore, magnetic heads using metal magnetic materials such as sendust and amorphous magnetic alloys with high maximum magnetic flux density are being developed. is not suitable for

Conventionally, in order to eliminate such drawbacks, for example, Japanese Patent Application Laid-open No. 6
A multilayer magnetic head for high frequency has been proposed as disclosed in Japanese Patent No. 2-119709 (G11B5/127) and the like.

FIG. 13 is a perspective view showing the external appearance of the high-frequency multilayer magnetic head.

In the figure, (la) and (lb) are nonmagnetic substrates (2) (2) (2) (2) made of crystallized glass, nonmagnetic ceramic, etc., respectively.
) are sandwiched between the main core halves (6) (6) consisting of a laminated thin film (3) of a metal magnetic thin film (4) such as Sendust and an insulating thin film (5) such as Sin. There are two core halves, and a winding groove (7) is formed in the second core half (1b). Further, a glass filling groove (8) is formed in the second core half (lb). The first and second core halves (la) and (lb) are connected to the glass filling groove (8) and the winding groove (7) with their gap forming surfaces abutting each other.
) is joined by a low melting point glass (9) filled at the upper end, and a working gap (10) made of Sin, etc. is formed at the joint surface.

As a method for manufacturing the above-mentioned laminated magnetic head, there is, for example, a method disclosed in Japanese Patent Laid-Open No. 70418/1983 (GtIB5.'16).

In this manufacturing method, first, as shown in FIG. 14, a ferromagnetic metal thin film (4) and an insulating thin film (5) are alternately deposited on a non-magnetic substrate (2) to form a laminated thin film (3). Form.

Next, prepare a plurality of nonmagnetic substrates (2) shown in FIG. 14, stack a plurality of the substrates (2) as shown in FIG. (2°) and are integrated by glass bonding or the like to form a laminated block (11).

Next, the laminated block (11) is connected to the broken lines AA', B
-13' to form the laminated head piece (12) shown in FIG.

Next, as shown in FIG. 17, the laminated head piece (1
After preparing a pair of laminated head pieces (2), as shown in FIG. 12) A laminated head block (13) is formed by joining (12) with low melting glass (9) (9).

Finally, the end surface of the laminated head block (13) on the medium sliding surface side is rounded, and then the head block (13) is cut to complete the magnetic head shown in FIG. 13.

Although this manufacturing method is suitable for mass production, it is difficult to form the laminated block (11) shown in FIG.
) Laminated thin film by uniformly forming bonded glass on the bottom surface (3)
It is necessary to bond the upper surface to the lower surface of the nonmagnetic substrate (2) over a large area. Therefore, in the laminated block (11), the laminated thin layer I11! Since gas remains between (3) and the non-magnetic substrate (2), the contact strength may decrease,
As shown in FIG. 21, due to variations in the thickness of the bonded glass (14), the pitches of the laminated thin film (3) TP, TP,
As a result, when the pair of laminated head pieces (12) (12) are abutted and gap-bonded in FIG. 18, the track width varies and the manufacturing yield deteriorates.

Also, JP-A-62-33309 (G11B5/147)
discloses a method of manufacturing a magnetic head that eliminates the above-mentioned drawbacks.

This manufacturing method involves cutting the nonmagnetic substrate (2) on which the laminated thin film (3) is formed along broken lines CC' and D-Do shown in FIG. Magnetic laminate (1
5), and a plurality of both magnetic laminates (15) are laminated and bonded to form a laminate head piece (12) shown in FIG. 16.

Although this manufacturing method can eliminate the above-mentioned drawbacks, it has the problem that it is not suitable for mass production. In addition, in the step shown in FIG. 19, the non-magnetic substrate (2) is connected to the broken line
When cutting along DD', there is also the problem that cracks and peeling occur in the laminated thin film (3). Incidentally, the occurrence of cracks and peeling can be avoided in the above-mentioned manufacturing method when the laminated block (11) is drawn along the broken lines AA'' and BB' in the step shown in FIG.
It also occurs when cutting.

(C) Problems to be Solved by the Invention The present invention has been made in view of the drawbacks of the above-mentioned conventional examples.
It is an object of the present invention to provide a method for manufacturing a magnetic head that suppresses variations in the track width of the working gap without deteriorating mass productivity or causing cracks or peeling in laminated thin films.

(d) Means for Solving the Problems In the method for manufacturing a magnetic head of the present invention, dividing grooves are formed in a lattice shape on one surface of a non-magnetic substrate to form convex portions, and a strong magnetic head is formed on the convex portions. forming a laminated thin film of a magnetic metal thin film and an insulating thin film and forming a bonding material layer on the other surface of the non-magnetic substrate to form a laminated substrate; and after stacking a plurality of the laminated substrates, a step of melting a bonding material layer and filling the dividing groove with the bonding material and bonding the plurality of laminated substrates to form a laminated block; and cutting the laminated substrate along the dividing groove to form a laminated head piece. It is characterized by having the step of forming.

Furthermore, the method for manufacturing a magnetic head of the present invention is characterized in that a nonmagnetic spacer is formed at an end of the upper surface of the laminated thin film formed on the convex portion of the nonmagnetic substrate.

(e) According to the manufacturing method described in Operation-1-, when a plurality of laminated substrates are bonded to form a laminated block, gas between the bonding surfaces of the laminated substrates and excess bonding material flow out through the dividing groove. and a uniform and homogeneous adhesive layer is formed between the plurality of laminated substrates,
Strongly bonded. Furthermore, since the laminated block is cut along the dividing grooves, the impact caused by the cutting is not directly transmitted to the laminated thin film.

Furthermore, it is laminated! ! The thickness of the melted and solidified bonding material layer can be made more uniform over the entire stacked block by the nonmagnetic spacer formed at the end of the upper surface of the film.

(F) Example Hereinafter, a first example of the present invention will be described in detail with reference to the drawings.

FIGS. 2 to 10 are diagrams showing a method of manufacturing the magnetic head according to the first embodiment.

In the method of manufacturing the magnetic head of the first embodiment, first, as shown in FIG. 2, N a l O-B ffi 01-8 l O
Non-magnetic bonding material layer (17) made of bonded glass etc.
is formed with a thickness of 1 to 20 μm by coating, vapor deposition, sputtering, etc. The nonmagnetic substrate (16) has a length of 25 mm, a width of 25 mm, and a thickness of 1 mm, the thickness parallelism is 1 μm or less, and the surface roughness is 200 Å or less (for example, Photoceram manufactured by Corning).

Next, as shown in FIG. 3, dividing grooves (18) are formed in the upper surface of the non-magnetic substrate (16) in a lattice shape. A convex portion (19) is formed which is divided into sections (approximately equal in area to the area of two core halves).

Incidentally, after changing the order of the process shown in FIG. 2 and the process shown in FIG. layer (17)
may be formed.

Next, as shown in FIG. 4, a 2-7 μm thick ferromagnetic metal thin film (20) made of sendust or the like is placed on the convex portion (19) on the upper surface of the non-magnetic substrate (16), and a ferromagnetic metal thin film (20) made of Sendust, etc. 1
Insulating thin films (21) having a thickness of ~0.5 μm are alternately deposited to form a laminated substrate (component) having a laminated thin film (22) having a 3-6 layer structure. The thickness of the laminated thin film (22) is 10
~30 μm, and this value becomes the track width of the magnetic head. The laminated thin film (22) is formed by sputtering, vapor deposition, etc., and is not formed in the dividing groove (18) by masking, etching, etc. Incidentally, as long as the thickness of the laminated thin film (22) is ⅓ or less of the depth of the dividing groove (18), there is no problem even if the laminated thin film is formed within the dividing groove (18).

Next, place the laminated substrate (23) shown in FIG. X number of substrates (23) are prepared, and as shown in FIG.
) using a predetermined jig so that they are in contact with each other.

A non-magnetic substrate (16') in which only a contacting material layer (17) is formed at both ends of the array of the plurality of laminated substrates (23).
, a non-magnetic substrate (+
The non-magnetic substrate (16") is in contact with the non-magnetic substrate (16").
Instead of using the bonding material layer (17) of the lowermost layered substrate (23), the bonding material layer (17) may be removed.

Next, an array of multiple laminated substrates (competition) shown in FIG.
The bonding material layer (17) is melted by applying pressure in the vertical direction in a heated atmosphere of 00 to 700° C., and the dividing groove (18) is filled with the bonding material (17a) as shown in FIG. The plurality of laminated substrates (coins) are joined to form a laminated bronc (25).

FIG. 11 is a sectional view showing the bonded state of the laminated substrate (23), where (a) shows the state before bonding and (b) shows the state after bonding. A bonding material layer (
17) is pressurized in a heated atmosphere so that the gas and excess bonding material at the bonding boundary escape into the dividing groove (18),
A homogeneous adhesive layer (17b) of 1 μm or less is formed at the boundary between the laminated thin film (22) and the substrate (16), and the laminated substrate (23) is firmly bonded. Therefore, as shown in FIG. 12, the contact points TP of the laminated thin film (22) in the lamination process (sub) are uniform. In addition, the groove width W of the dividing groove (18)
, and depth d are determined by the thickness of the bonding material layer (17 inches) and the area aXb of the convex portion (19) (i.e., the volume of the bonding material poured into the dividing groove (18)), and the relationship is I
(a+w)(b+w)-abl d>abt 3 For example, when the thickness of the bonding material layer (17) is 20 μm and the area of the convex portion (19) is 3×111III′, the dividing groove (18 ) is preferably 0.5 mm in width and 47 μm or more in depth. In addition, the thickness of the adhesive layer (17b) can be adjusted by changing the heating conditions and pressurizing conditions. For example, under the conditions of 700°C and 50 to 100 g/round 1, the thickness of the adhesive layer (17b) can be adjusted to 1 μm. It can be: As a result, the adverse effects caused by uneven wear of the adhesive layer (171>) exposed on the tape sliding surface of the magnetic head are almost ignored.

Next, in the manufacturing method of the seventeenth embodiment, as shown in FIG. The section 1Il (18) is removed by grinding and polishing the surface to form the laminated head piece (26) shown in FIG. In this cutting method, since the laminated thin film (22) is not directly cut, cracks and peeling do not occur in the laminated thin film (22).

Thereafter, the magnetic head of this embodiment shown in FIG. 1 is completed through the steps shown in FIGS. 9 and 10 in the same manner as in the production example.

In the manufacturing method as described above, in the bonding process of the laminated substrate (component) shown in FIG. In addition, in order to be homogeneous, the pitch TP of the laminated thin film (22) is approximately equal over the entire laminated bronch as shown in FIG. 12, and in the gap joining process shown in FIG. The laminated thin films (22) (22) of 7 pieces (competition) do not shift in position, and the track shift of the magnetic head is prevented. In addition, in the cutting process shown in Fig. 7, the laminated block (reverse) has dividing grooves (18).
Since the cut is made at the portion 7L, no impact is directly applied to the laminated thin film (22) due to the cutting, and no cracks, peeling, etc. occur in the laminated thin film (22).

Next, a second embodiment of the present invention will be described in detail.

FIGS. 22 to 26 are diagrams showing a method of manufacturing the magnetic head of the second embodiment.

The manufacturing method of the magnetic head of the second embodiment is as follows: First, as shown in FIGS. 22 and 23, a nonmagnetic substrate (16) made of crystallized glass has a width of 0.1 mm parallel to each other on both sides of the F plane.
~0. A pair of glass escape grooves (27) (27) of approximately 5 mm and depth of 0.1 mm are formed, and the grooves (27) (27
) in the region between Na, 0-B2O-5in, and the contact bf of the system
A bonding material layer (17) made of f lath or the like is formed with a thickness of 1 to 20 μm. 22 is a perspective view of the non-magnetic substrate (16) viewed from above, and FIG. 23 is a perspective view of the non-magnetic substrate (16) viewed from below.

Next, as shown in FIG. 24, dividing grooves (18) are formed in a lattice shape on the upper surface of the non-magnetic substrate (6), and about 3×1 mm square (first, The convex portion (19) is divided into two sections (approximately equal in area to the second core half) and
．． 5-4. Convex portions (1
9°). Note that the convex portions (19°) are located on both sides of the nonmagnetic substrate (16).

Next, as shown in FIG. 25, a 2-7 μm thick ferromagnetic metal thin film made of sendust or the like is placed on the convex portion (19) (19°) on the upper surface of the non-magnetic substrate (16). (20) and Sin
, etc. 0.1~0.5I1m thick insulating thin film (21
) are alternately deposited to form a laminated thin film with a 3 to 6 layer structure (2
A laminated thin film (29) having 2) is formed.

Thereafter, a laminated thin film (
22) Width Q, l-Q, 5ma+, thickness 1-5μ made of CuCr, Ti, 5iOz, etc. on both ends of the upper substrate.
m nonmagnetic spacers (28) are deposited by sputtering or the like. Note that the thickness of the nonmagnetic spacer (28) is thinner than the thickness of the self-adhesive bonding material layer (17).

Next, a plurality of laminated substrates (29) shown in FIG. 25 are prepared, and as shown in FIG. (17)
By melting and solidifying the bonding material (
17a) and bond the plurality of substrates (29) to form a laminated block (Oki). Incidentally, at the top end of the laminated block (concave), a bonding material layer (17) and a glass relief groove (27) are formed on the bottom surface, and a non-magnetic substrate (16') with nothing formed on the top surface. are joined, and the lowermost end of the laminated block (30) is provided with a dividing groove (18) on the upper surface.
) and a non-magnetic spacer (28) are formed, and a non-magnetic substrate (16") with nothing formed on the bottom surface is bonded. In this laminated block (30) shown in FIG. Even if the pressure is not uniform over the entire area of the laminated block (30), the thickness of the adhesive layer (17b) is equal to the thickness of the non-magnetic spacer (28) over the entire area. ), then the 28th
As shown in the figure, the pitch of the laminated thin film (22) is TP, TP
,,TP,.

As shown in FIG. 27, the pitch TP of the laminated thin film (22) is adjusted to the laminated block (22) without any variation in TP.
30) Become uniform throughout. Moreover, since the thickness of the adhesive layer (17b) is greater than the thickness of the non-magnetic spacer (28), the pressing force at the time of bonding is
), and the molten bonding material spreads uniformly. Also,
The glass escape groove (27) prevents the melted bonding material from entering the gap between the laminated thin film (22) and the nonmagnetic spacer (28). In addition, the laminated block (
In the concave portion, the end of the glass relief groove (27) and the end of the non-magnetic spacer (28) coincide with each other.

Next, the laminated block (30) is placed along the dividing groove (18) and the glass escape groove (27) (broken lines GG', H
-H'), and the magnetic head shown in FIG. 1 is completed in the same manner as in FIGS. 8 to 10 of the first embodiment.

In the manufacturing method of the second embodiment as described above, the thickness of the adhesive layer (17b) in the laminated block (30) shown in FIG. 26 is made more uniform over the entire area by the non-magnetic spacer (28) than in the first embodiment. Therefore, the pitch TP of the laminated thin film (22) becomes even more equal throughout the laminated block (4), and the tracking accuracy of the magnetic head is further improved.

In addition, in the first and second embodiments described above, the operating gearing (l
In order to make O) have an azimuth angle θ, in the cutting process shown in FIGS. good. Note that the dividing groove (1) is formed along this inclined cutting direction.
If the laminated substrates are shifted and bonded in advance so that 8) is positioned, cracking, peeling, etc. of the laminated thin film can be prevented as explained in section -E.

(g) Effects of the Invention According to the present invention, it is possible to provide a method for manufacturing a magnetic head that can produce a magnetic head with good mass productivity without deviations in track width, cracks in laminated thin films, and peeling.

[Brief explanation of the drawing]

FIG. 1 to FIG. 12 relate to the first embodiment of the present invention.
The figure is a perspective view showing the external appearance of the magnetic head. FIG. 11 is a cross-sectional view showing the bonding of laminated substrates, and FIG. 12 is a diagram showing the pitch of laminated thin films. 13 to 20 relate to the conventional example, and FIG. 13 is a perspective view showing the external appearance of the magnetic head, and FIGS. 14, 15, 16, 17, and 18.
19 and 20 are perspective views showing a conventional method of manufacturing a magnetic head, respectively, and FIG. 21 is a diagram showing the pitch of laminated thin films. 22 to 28 relate to a second embodiment of the present invention, and FIGS. 22, 23, 24, 25, and 26 are perspective views showing a method of manufacturing a magnetic head, respectively;
FIGS. 27 and 28 are diagrams showing the pitch of laminated thin films, respectively. (16>...Nonmagnetic substrate, (17)...Binding material layer,
(17a)...Joining material, (18)...Dividing groove, (1
9)...Protrusion, (20)...Ferromagnetic metal thin film, (
21)... Insulating thin film, (22)... Laminated thin film, (2
3)(29)...Laminated substrate, (25)(30)...
Laminated block, (piece)...Laminated head piece.

Claims (2)

[Claims] (1) In a method for manufacturing a magnetic head in which a pair of main core halves made of a laminated thin film of a ferromagnetic metal thin film and an insulating thin film are adhered between nonmagnetic substrates, forming dividing grooves in a lattice shape to form convex portions, forming a laminated thin film of a ferromagnetic metal thin film and an insulating thin film on the convex portions, and forming a bonding material layer on the other surface of the nonmagnetic substrate. forming a laminated substrate by stacking a plurality of laminated substrates, and then melting the bonding material layer to fill the dividing groove with a bonding material and bonding the plurality of laminated substrates to form a laminated block. A method for manufacturing a magnetic head, comprising: a step of cutting the laminated substrate along the dividing groove to form a laminated head piece. (2) The method of manufacturing a magnetic head according to claim (1), wherein a nonmagnetic spacer is formed at an end of the upper surface of the laminated thin film formed on the convex portion of the nonmagnetic substrate.