JPS63214346A - プラズマプロセス装置 - Google Patents

プラズマプロセス装置

Info

Publication number
JPS63214346A
JPS63214346A JP4636687A JP4636687A JPS63214346A JP S63214346 A JPS63214346 A JP S63214346A JP 4636687 A JP4636687 A JP 4636687A JP 4636687 A JP4636687 A JP 4636687A JP S63214346 A JPS63214346 A JP S63214346A
Authority
JP
Japan
Prior art keywords
plasma
sample
plasma generation
generation chamber
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4636687A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510427B2 (enrdf_load_stackoverflow
Inventor
Kyoichi Komachi
小町　恭一
Sumio Kobayashi
純夫 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP4636687A priority Critical patent/JPS63214346A/ja
Publication of JPS63214346A publication Critical patent/JPS63214346A/ja
Publication of JPH0510427B2 publication Critical patent/JPH0510427B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP4636687A 1987-02-27 1987-02-27 プラズマプロセス装置 Granted JPS63214346A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4636687A JPS63214346A (ja) 1987-02-27 1987-02-27 プラズマプロセス装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4636687A JPS63214346A (ja) 1987-02-27 1987-02-27 プラズマプロセス装置

Publications (2)

Publication Number Publication Date
JPS63214346A true JPS63214346A (ja) 1988-09-07
JPH0510427B2 JPH0510427B2 (enrdf_load_stackoverflow) 1993-02-09

Family

ID=12745156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4636687A Granted JPS63214346A (ja) 1987-02-27 1987-02-27 プラズマプロセス装置

Country Status (1)

Country Link
JP (1) JPS63214346A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003037503A1 (fr) * 2001-10-30 2003-05-08 Setsu Anzai Appareil a micro-ondes generateur de plasma

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61281872A (ja) * 1985-06-07 1986-12-12 Matsushita Electric Ind Co Ltd 非晶質シリコンゲルマニウム膜の形成方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61281872A (ja) * 1985-06-07 1986-12-12 Matsushita Electric Ind Co Ltd 非晶質シリコンゲルマニウム膜の形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003037503A1 (fr) * 2001-10-30 2003-05-08 Setsu Anzai Appareil a micro-ondes generateur de plasma

Also Published As

Publication number Publication date
JPH0510427B2 (enrdf_load_stackoverflow) 1993-02-09

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