JPS63213660A - コロナ放電処理用対向電極の製造方法 - Google Patents

コロナ放電処理用対向電極の製造方法

Info

Publication number
JPS63213660A
JPS63213660A JP4652587A JP4652587A JPS63213660A JP S63213660 A JPS63213660 A JP S63213660A JP 4652587 A JP4652587 A JP 4652587A JP 4652587 A JP4652587 A JP 4652587A JP S63213660 A JPS63213660 A JP S63213660A
Authority
JP
Japan
Prior art keywords
corona discharge
product
electrode
counter electrode
conductive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4652587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0359094B2 (enExample
Inventor
Tomotada Tochitani
栃谷 奉忠
Yasuhiko Ogisu
康彦 荻巣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Gosei Co Ltd
Original Assignee
Toyoda Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Gosei Co Ltd filed Critical Toyoda Gosei Co Ltd
Priority to JP4652587A priority Critical patent/JPS63213660A/ja
Publication of JPS63213660A publication Critical patent/JPS63213660A/ja
Publication of JPH0359094B2 publication Critical patent/JPH0359094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
JP4652587A 1987-02-28 1987-02-28 コロナ放電処理用対向電極の製造方法 Granted JPS63213660A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4652587A JPS63213660A (ja) 1987-02-28 1987-02-28 コロナ放電処理用対向電極の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4652587A JPS63213660A (ja) 1987-02-28 1987-02-28 コロナ放電処理用対向電極の製造方法

Publications (2)

Publication Number Publication Date
JPS63213660A true JPS63213660A (ja) 1988-09-06
JPH0359094B2 JPH0359094B2 (enExample) 1991-09-09

Family

ID=12749694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4652587A Granted JPS63213660A (ja) 1987-02-28 1987-02-28 コロナ放電処理用対向電極の製造方法

Country Status (1)

Country Link
JP (1) JPS63213660A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5288664A (en) * 1990-07-11 1994-02-22 Fujitsu Ltd. Method of forming wiring of semiconductor device
EP0789505A1 (en) * 1996-02-09 1997-08-13 Nippon Paint Co., Ltd. Small-sized atmospheric plasma generating apparatus and surface processing method using the apparatus
JP2004138268A (ja) * 2002-10-15 2004-05-13 Yamaoka Kinzoku Kogyo Kk イオン風を利用したカーテン装置およびカーテン装置を使用した分煙システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126339U (enExample) * 1986-02-01 1987-08-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126339U (enExample) * 1986-02-01 1987-08-11

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5288664A (en) * 1990-07-11 1994-02-22 Fujitsu Ltd. Method of forming wiring of semiconductor device
EP0789505A1 (en) * 1996-02-09 1997-08-13 Nippon Paint Co., Ltd. Small-sized atmospheric plasma generating apparatus and surface processing method using the apparatus
JP2004138268A (ja) * 2002-10-15 2004-05-13 Yamaoka Kinzoku Kogyo Kk イオン風を利用したカーテン装置およびカーテン装置を使用した分煙システム

Also Published As

Publication number Publication date
JPH0359094B2 (enExample) 1991-09-09

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