JPS6320193B2 - - Google Patents

Info

Publication number
JPS6320193B2
JPS6320193B2 JP11654783A JP11654783A JPS6320193B2 JP S6320193 B2 JPS6320193 B2 JP S6320193B2 JP 11654783 A JP11654783 A JP 11654783A JP 11654783 A JP11654783 A JP 11654783A JP S6320193 B2 JPS6320193 B2 JP S6320193B2
Authority
JP
Japan
Prior art keywords
ozone
purity water
water
purity
sterilization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11654783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS607990A (ja
Inventor
Ryuichi Sazuka
Toshiaki Kuwabara
Tsuyoshi Ishikawa
Kyokatsu Ueda
Ryoichi Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP11654783A priority Critical patent/JPS607990A/ja
Publication of JPS607990A publication Critical patent/JPS607990A/ja
Publication of JPS6320193B2 publication Critical patent/JPS6320193B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Water By Oxidation Or Reduction (AREA)
JP11654783A 1983-06-28 1983-06-28 高純度水供給システムの殺菌方法 Granted JPS607990A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11654783A JPS607990A (ja) 1983-06-28 1983-06-28 高純度水供給システムの殺菌方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11654783A JPS607990A (ja) 1983-06-28 1983-06-28 高純度水供給システムの殺菌方法

Publications (2)

Publication Number Publication Date
JPS607990A JPS607990A (ja) 1985-01-16
JPS6320193B2 true JPS6320193B2 (enrdf_load_stackoverflow) 1988-04-26

Family

ID=14689813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11654783A Granted JPS607990A (ja) 1983-06-28 1983-06-28 高純度水供給システムの殺菌方法

Country Status (1)

Country Link
JP (1) JPS607990A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63171694A (ja) * 1986-12-29 1988-07-15 Katsumi Takao オゾン溶解水供給装置

Also Published As

Publication number Publication date
JPS607990A (ja) 1985-01-16

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