JPS607990A - 高純度水供給システムの殺菌方法 - Google Patents

高純度水供給システムの殺菌方法

Info

Publication number
JPS607990A
JPS607990A JP11654783A JP11654783A JPS607990A JP S607990 A JPS607990 A JP S607990A JP 11654783 A JP11654783 A JP 11654783A JP 11654783 A JP11654783 A JP 11654783A JP S607990 A JPS607990 A JP S607990A
Authority
JP
Japan
Prior art keywords
ozone
water
purity water
purity
sterilization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11654783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6320193B2 (enrdf_load_stackoverflow
Inventor
Ryuichi Sazuka
佐塚　隆一
Toshiaki Kuwabara
利明 桑原
Tsuyoshi Ishikawa
石川　強
Kiyokatsu Ueda
上田　清勝
Ryoichi Tamura
田村　了一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON ROSUIKI KOGYO KK
Fuji Electric Co Ltd
Original Assignee
NIPPON ROSUIKI KOGYO KK
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON ROSUIKI KOGYO KK, Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical NIPPON ROSUIKI KOGYO KK
Priority to JP11654783A priority Critical patent/JPS607990A/ja
Publication of JPS607990A publication Critical patent/JPS607990A/ja
Publication of JPS6320193B2 publication Critical patent/JPS6320193B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Water By Oxidation Or Reduction (AREA)
JP11654783A 1983-06-28 1983-06-28 高純度水供給システムの殺菌方法 Granted JPS607990A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11654783A JPS607990A (ja) 1983-06-28 1983-06-28 高純度水供給システムの殺菌方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11654783A JPS607990A (ja) 1983-06-28 1983-06-28 高純度水供給システムの殺菌方法

Publications (2)

Publication Number Publication Date
JPS607990A true JPS607990A (ja) 1985-01-16
JPS6320193B2 JPS6320193B2 (enrdf_load_stackoverflow) 1988-04-26

Family

ID=14689813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11654783A Granted JPS607990A (ja) 1983-06-28 1983-06-28 高純度水供給システムの殺菌方法

Country Status (1)

Country Link
JP (1) JPS607990A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63171694A (ja) * 1986-12-29 1988-07-15 Katsumi Takao オゾン溶解水供給装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63171694A (ja) * 1986-12-29 1988-07-15 Katsumi Takao オゾン溶解水供給装置

Also Published As

Publication number Publication date
JPS6320193B2 (enrdf_load_stackoverflow) 1988-04-26

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