JPS6320011B2 - - Google Patents

Info

Publication number
JPS6320011B2
JPS6320011B2 JP57155862A JP15586282A JPS6320011B2 JP S6320011 B2 JPS6320011 B2 JP S6320011B2 JP 57155862 A JP57155862 A JP 57155862A JP 15586282 A JP15586282 A JP 15586282A JP S6320011 B2 JPS6320011 B2 JP S6320011B2
Authority
JP
Japan
Prior art keywords
island
single crystal
pattern
silicon
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57155862A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5946021A (ja
Inventor
Shigenobu Akyama
Shigeji Yoshii
Koichi Kugimya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57155862A priority Critical patent/JPS5946021A/ja
Publication of JPS5946021A publication Critical patent/JPS5946021A/ja
Publication of JPS6320011B2 publication Critical patent/JPS6320011B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/24—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
    • H01L21/02683—Continuous wave laser beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02439—Materials
    • H01L21/02488—Insulating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H10P14/2905—
    • H10P14/3238—
    • H10P14/3411—
    • H10P14/3458—
    • H10P14/3814—
    • H10P14/3818—
    • H10P14/382—

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Element Separation (AREA)
  • Recrystallisation Techniques (AREA)
JP57155862A 1982-09-09 1982-09-09 半導体装置の製造方法 Granted JPS5946021A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57155862A JPS5946021A (ja) 1982-09-09 1982-09-09 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57155862A JPS5946021A (ja) 1982-09-09 1982-09-09 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5946021A JPS5946021A (ja) 1984-03-15
JPS6320011B2 true JPS6320011B2 (OSRAM) 1988-04-26

Family

ID=15615128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57155862A Granted JPS5946021A (ja) 1982-09-09 1982-09-09 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5946021A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2978117B2 (ja) * 1996-07-01 1999-11-15 ティーディーケイ株式会社 つぼ型コアを用いた面実装部品
JP3992976B2 (ja) * 2001-12-21 2007-10-17 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4519400B2 (ja) * 2001-12-27 2010-08-04 株式会社半導体エネルギー研究所 半導体装置の作製方法

Also Published As

Publication number Publication date
JPS5946021A (ja) 1984-03-15

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