JPS63194786A - Washing method and device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a cleaning method and a cleaning device, for example, an IC1 electronic cartridge contaminated with oil, fat, 7 lux, etc.
This invention relates to improvements in a cleaning method and cleaning device suitable for cleaning precision equipment such as liquid crystal panels.

(Prior art) Cleaning equipment removes oil, etc. by immersing precision instruments contaminated with oil, 7lux, etc. in cleaning solvents such as chlorofluorocarbons and trichlene. is the third
As shown in the figure, a hot bath 1 has a heater 1a, and a cold bath W has an ultrasonic vibrator 2a! 2, a vapor tank 3 having a heater 3a, a conveyor 4 with a guard for conveying a magazine 6 containing objects to be cleaned, and a cooling corrugated pipe 5. As shown in FIG. 4, the magazine 6 consists of a pair of plates 8, 8 having a plurality of fitting grooves 7 carved therein. is fitted. This magazine 6 is attached to the conveyor 4 and carried into the cleaning device, and the object to be cleaned 9 is first immersed in the cleaning solution in the hot bath 1, and the oil and fat attached to the object to be cleaned 9 is expanded and partially removed. Dissolve in the wash solution. Next, the object 9 is immersed in a cleaning solution in the cold bath 2, and foreign substances such as oil and fat are removed from the object 9 by the action of ultrasonic waves, and at the same time the object 9 is cooled.

Next, the object 9 is carried into the vapor tank 3 and exposed to a vapor atmosphere, and the cleaning solution is condensed on the surface of the object 9 to be rinsed. Thereafter, the object 9 to be cleaned was moved to the upper part of the cooling tube 5, dried, and taken out.

According to the above-mentioned conventional apparatus, for example, when the amount of oil attached to one object to be cleaned is 10 wg/piece,
Oil amount 1. In order to achieve a cleaning quality of B/piece or less, each of the hot tub 1, cold tub 2, and vapor tank 3 must be immersed for 180 seconds or more, which takes a long time to clean and requires a large amount of energy. was consuming. Moreover, at least three tanks were required, making it inevitable to increase the size of the equipment.

In contrast, the present applicant previously disclosed in Japanese Patent Application Laid-Open No. 60-12187 a compression step of compressing a cleaning solvent, a heating step of heating the cleaning solvent compressed in the compression step to a temperature above atmospheric pressure, and a compression step of compressing the cleaning solvent. A cleaning method consisting of an injection step of injecting a cleaning solvent compressed and heated in a heating step onto an object to be cleaned, and JP-A-60-137481 discloses a cleaning method comprising a compression step of compressing a cleaning solvent and A heating process in which the cleaning solvent is heated to above atmospheric pressure, a compression process, and a heating process in which the compressed and heated cleaning solvent is sprayed onto the object located in the cleaning solvent solution. We proposed a cleaning method consisting of the following steps.

(Problems to be Solved by the Invention) According to the above-mentioned cleaning method proposed by the present applicant, foreign substances such as oil and fat attached to the object to be cleaned can be removed in a short time by boiling the cleaning solution. In order to spray the boiling cleaning solution all over the front and back surfaces of the object to be cleaned, there is a problem in that a large number of spraying means must be provided, making the mechanism complicated.

(Means for Solving Problem 8 7α) The present invention aims to solve the above-mentioned problems, and the cleaning method of the present invention that meets the purpose of darning involves pressurizing to a pressure higher than atmospheric pressure and The gist of this method is to immerse the object to be cleaned in a cleaning solution heated to a temperature lower than the boiling point α at the pressure and higher than the boiling point α at atmospheric pressure, and then instantly release the cleaning solution to atmospheric pressure.

A cleaning device suitable for carrying out the above-mentioned cleaning method includes a sealable processing tank having an opening for introducing the object to be cleaned and an opening/closing means for opening the inside to atmospheric pressure, and a cleaning device. The gist of the present invention is to include a pump for pressurizing and supplying a solution to a processing tank, and a heating means for heating a cleaning solution supplied to the processing tank by the pump.

(Function) According to the present invention, under atmospheric pressure or higher, atmospheric pressure,
By instantly releasing the cleaning solution heated above α to atmospheric pressure, boiling occurs, and the cleaning solution evaporates with contaminants such as oil adhering to the surface of the object to be cleaned as nuclei, and the contaminants are removed from the object to be cleaned. Separate from the surface of an object.

(Example) The present invention will be explained below based on the drawings.

FIG. 1 is a sectional view showing the entire cleaning apparatus 10 for carrying out the method of the present invention. The cleaning device 10 has an outer shape formed by an outer frame 11 made of a heat insulating material, and the inside is divided into an A station for rough cleaning and a B station for finishing cleaning. At the top of the left and right side walls of the outer frame 11, objects to be cleaned 9 stored in the magazine 6 by the jig material conveyor 12 are placed.
An opening 11'' for transporting the magazine 6 into the cleaning device 10 and an opening 11'' for transporting the magazine 6 to the jig material conveyor 12'' are formed. An elevating device 13 made of a hydraulic sill or the like is provided, and an elevating carrier 14 on which a magazine storage section 14A114B is vertically disposed is connected to this elevating device 13, and is disposed in the cleaning device 10 so as to be able to rise and fall freely. A processing tank 15A and a processing tank 415B are provided in the middle of the interior of the apparatus 10.

On the upper surface of the processing 115A and 1.5B, there is a storage area 14.
A, 14B75r opening 15'AS 15'
B is formed and this opening 15'A.

Gaskets 16A and 1.6B are arranged around 15'B to lower the elevating carrier 14 and open the magazine storage section 14.
When A and 14B are immersed in the cleaning solution in the processing tanks 15A and 15B, the lower surface of the lifting carrier 14 is exposed to the gasket 16A.
, 16B, and the processing tanks 15A and 15B are sealed. A storage tank 17A and a storage 117B for storing cleaning solution are provided below these processing tanks 15A and 15B. Storage tanks 17A and 17B both have opening 1
1' and 11'' to atmospheric pressure. Also, a pump 18A for supplying the cleaning solution in the storage tank 17A to the processing tank 15A under pressure is connected to the pipe line 19A connecting the storage tank 17A and the processing tank 15A. In addition to the pump 18A, this conduit 19A is also equipped with a heater 2OA for heating the cleaning solution.
is provided.

Further, the processing 4fi 15 A and the storage tank 17A are connected to the pipe 2
2A and conduit 24A. Conduit 22
A pressure control valve 21A for maintaining the pressure in the sealed treatment tank 15A at a constant pressure is installed in the pipe line 2.
4A is provided with an on-off valve 23A. This on-off valve 2
When 3A is opened, the sealed process m15A is connected to pipe 24A.
Since the storage tank 17A is open to atmospheric pressure, the processing tank 15A is also opened to atmospheric pressure.

Similarly, processing 115B and storage tank 17B are connected to pipe line 1, respectively.
Connected by 9B, 22B, 24B, conduit 1.9
B is provided with a pump 18B and a heater 20B, a conduit 22B is provided with a pressure control valve 21B, and a conduit 24B is provided with an on-off valve 23B.

Reference numeral 25 denotes a cooling corrugated pipe, which is disposed between the openings 11°, 11" and the processing tanks 15A, 15B, and cools the cleaning solution into steam so that the cleaning solution flows into the openings 11", 1.
1 ゛ and scattering to the outside of the cleaning device 10.

The apparatus of this embodiment has the above configuration, and its operation will be explained next.

In the figure, when the elevating carrier 14 is at the position shown by the dashed line, an unloader (not shown) lifts the machine to 11'.
The magazine 6 in the magazine 114B is carried out to the conveyor 12', and the magazine 6 in the magazine storage part 14A is transferred to the magazine storage part 14B by a lobe (not shown), and the unprocessed magazine 6 is stored in the 77y-thin from the conveyor 12. It is carried into the section 14A. On the other hand, storage tanks 17A and 17B
The cleaning solution inside is pressurized by each pump 18A, 18B, then heated by heaters 2OA, 20B, and flows into processing tanks 15A, 15B.

When using Freon as a cleaning solution, the boiling point of Freon at atmospheric pressure is 47, as shown in Figure 2.
．． 6°C, and the boiling point under 2 atmospheres is 84°C. Therefore, for example, when a Freon cleaning liquid heated to about 60° C. is supplied to the processing units 115A and 15B, when the elevating carrier 14 is in the raised position, the processing tanks 15A and 15B are not sealed and the openings 11'' and 11'' Since the water is exposed to atmospheric pressure through the processing tank 15A, 15B, it boils and overflows from the openings 15'A, 15'B.
It flows down into the storage tanks 17A, 17B. Lifting carrier 1
4 is lowered, the magazine 6 is immersed in the boiling Freon cleaning liquid, and the lower surface of the elevating carrier 14 is pressed against the gaskets 16A, 16B to process WJ15A,
15B is sealed, the Freon cleaning liquid can no longer overflow from the openings 15'A and 15'B, and the internal pressure of the processing tanks 15A and 15B is reduced to the pressure control valves 21A and 15B.
21B, e.g. 2 kg/cI1
It rises to 12.

Under a pressure of 2 kg/atn2, the boiling point of the Freon cleaning solution is 84°C as shown in Figure 2, so the
Freon cleaning liquid heated to 0°C no longer boils.

Therefore, the sealed state of processing [15A and 15B is
When the temperature is maintained for seconds, the temperature of the object 9 to be cleaned rises to nearly the temperature of the Freon cleaning liquid. The operation of the on-off valves 23A, 23B is controlled by a timer circuit or the like (not shown), and when the required sealing time has elapsed, the on-off valves 23A, 23B are fully opened.
The processing tanks 15A, 15B and the storage tanks 17A, 17B are instantly brought into communication, and the fluorocarbon cleaning liquid in the processing tanks 15A, 15B is discharged into the storage tanks 17A, 17B, respectively. Then, since the storage layers 17A and 17B are open to atmospheric pressure, the internal pressure of the processing tanks 15A and 15B also becomes atmospheric pressure. On the other hand, since the Freon cleaning liquid is heated above the atmospheric pressure boiling point, it boils all at once by opening the processing [1, 5A, 15B to atmospheric pressure, and as a result, contamination attached to the surface of the object 9 to be cleaned is removed. Steam bubbles are generated with the object as the core, and the contaminated material is the object to be cleaned 9
separated from the surface. Then, the on-off valves 23A, 2
When 3B is closed, the internal pressure of processing tanks 15A and 15B is restored.
The temperature rises and the boiling state subsides. In this way, the processing tank 15A,
By opening and closing the on-off valve 23A123B with the 15B sealed, boiling of the Freon cleaning liquid is repeated, for example, about 10 times. Thereafter, the elevating carrier 14 is raised to the position indicated by the dashed-dotted line in the figure, and here the magazine 6 that has been roughly cleaned at the A station is transferred to the B station, and the magazine 6 that has been finished and cleaned at the B station is carried out to the outside of the cleaning device 10. do.

According to the device of this embodiment described above, conventionally 70 m g 7
It used to take more than 540 seconds to clean 1 vag of contaminated items to 1 vag/piece, but it took 120 seconds.
We were able to achieve the same or better cleaning effect in seconds.

In the above embodiment, two stations A and B are provided to perform two-stage cleaning operations: rough cleaning and final cleaning. Multiple stations may be provided to achieve a cleaning effect.

(Effects of the Invention) According to the present invention, an object to be cleaned is immersed in a cleaning solution heated to a temperature lower than the boiling point at the pressure and higher than the boiling point at the atmospheric pressure under a pressure equal to or higher than atmospheric pressure; By instantly releasing the cleaning solution to atmospheric pressure, the cleaning solution is boiled all at once and removes contaminants that have adhered to the surface of the object to be cleaned, without the need for special spraying means. can be removed, and the time and energy required for cleaning can also be reduced.

Furthermore, even if the object to be cleaned is fragile and may be damaged by ultrasonic cleaning, it can be cleaned without causing any damage.

Furthermore, since the object to be cleaned is heated by the cleaning solution to a temperature higher than the atmospheric pressure boiling point of the cleaning solution, the drying condition after cleaning is improved, and it is possible to prevent the occurrence of stains and the like due to moisture that adheres during vapor cleaning as in the past.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing a cleaning device for carrying out the method of the present invention, FIG. 2 is a boiling curve diagram of the cleaning solution used in the method of the present invention, FIG. 3 is a sectional view of a conventional device, and FIG. FIG. 3 is a perspective view showing a magazine that stores objects to be cleaned.

Claims (2)

[Claims] (1) The object to be cleaned is immersed in a cleaning solvent that is pressurized to a pressure higher than atmospheric pressure and heated to a temperature lower than the boiling point at that pressure and higher than the boiling point at atmospheric pressure, and then the cleaning solvent is instantly brought to atmospheric pressure. A cleaning method characterized by opening. (2) A sealable processing tank that has an opening for putting the objects to be cleaned and a means for opening and closing the inside to open to atmospheric pressure, and a pump that pressurizes the cleaning solvent and supplies it to the processing tank. and a heating means for heating the cleaning solvent supplied to the processing tank by the pump.