JP3393389B2 - Vacuum degreasing cleaning method and vacuum cleaning machine - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum degreasing cleaning method for steam-cleaning a workpiece such as a metal or synthetic resin machine part, a heat-treated part, or a plated part under reduced pressure, and a vacuum cleaner used for the method. .

[0002]

2. Description of the Related Art Conventionally, when cleaning a work with steam, a chlorine-based solvent such as 1.1.1 trichloroethane or a fluorine-based solvent such as Freon 113 has been used. The reason is that these solvents have a high cleaning effect.

However, when a chlorine-based solvent is used, the work environment is likely to be deteriorated due to its strong toxicity.

When a fluorine-based solvent is used,
Since it destroys the ozone layer, it causes a wide range of pollution.

Furthermore, when these solvents are used, a wastewater treatment facility is required from the viewpoint of pollution prevention.
Further, since these solvents are easily volatilized, it is unavoidable that they are diffused into the atmosphere when the work is carried in or out of the cleaning chamber. Therefore, 50 to 70% of the used amount cannot be recovered.

Therefore, when these solvents are used, the initial cost and the running cost at the time of cleaning are increased.

In order to prevent diffusion into the atmosphere, vapor may be liquefied and collected. For example, the cooling coil may be arranged at the opening of the cleaning chamber. However, even with such a configuration, when the work is large, the solvent vapor largely moves when the work is carried in and out, so that the solvent vapor cannot be prevented from diffusing into the atmosphere.

Further, when a chlorine-based solvent is used,
It was difficult to regenerate by distillation and it was uneconomical. This is because, if 30% or more of oils and fats are mixed in the solvent when cleaning the work, the boiling point rises and the solvent decomposes to generate chlorine gas. Therefore, the amount of fats and oils mixed in the solvent is 30%.
If it exceeds, the solvent must be exchanged and the distillation cannot be regenerated.

Furthermore, when a chlorine-based solvent is used, the work may be rusted. Because
Water droplets generated in the cooling coil provided in the opening of the cleaning chamber, water content of the water-soluble cutting agent, and water content such as frost after the sub-zero treatment,
Easy to mix in solvent. Then, in the chlorine-based solvent, an azeotropic phenomenon occurs due to the mixing of these waters. When the azeotropic phenomenon occurs, it boils at a temperature lower than the boiling point of the solvent alone, and steam containing chlorine is generated. This is because if the water vapor containing chlorine condenses on the work, it will cause rust on the work.

An object of the present invention is to solve the above-mentioned problems, and it is possible to prevent the deterioration of the working environment and the occurrence of pollution, reduce the initial cost and running cost, and enhance the cleaning effect without any trouble. (EN) A vacuum degreasing cleaning method capable of cleaning oil and a vacuum cleaning machine used for the method.

[0011]

The first vacuum degreasing and cleaning method of the present invention uses a petroleum-based solvent, and the work is steam-cleaned with the vapor of the petroleum-based solvent under reduced pressure to degrease adhering oils and fats. Is the way.

The second vacuum degreasing cleaning method of the present invention is
This is a method of dipping and cleaning with the petroleum solvent before steam cleaning with the petroleum solvent.

A first vacuum cleaner of the present invention is a steam generator for generating steam of petroleum-based solvent, and the steam generator is connected to clean a work under reduced pressure.
And a cleaning chamber for drying the work under reduced pressure.

A second vacuum cleaner of the present invention is a vacuum cleaner in which the petroleum solvent immersion tank is arranged below the cleaning chamber.

A third vacuum cleaner of the present invention comprises a steam generator for generating steam of petroleum solvent, a cleaning chamber for connecting the steam generator to steam-clean a work under reduced pressure, And a drying chamber that is installed in parallel in the cleaning chamber and that dries the work after steam cleaning under reduced pressure.

A fourth vacuum cleaner according to the present invention is a vacuum cleaner in which the petroleum solvent dipping bath is arranged below a cleaning chamber of the third vacuum cleaner.

A fifth vacuum cleaner according to the present invention is the same as the third vacuum cleaner, wherein a cleaning chamber is provided with an immersion cleaning chamber for immersing and cleaning the work with the petroleum solvent. .

As the above petroleum solvent used in the present invention, those having the detergency of the fourth and third petroleums are desirable. This is because this type of solvent enables the storage volume under the Fire Service Law to be less than 2000 liters which is a large volume. Such a petroleum solvent is generally called a cleaning solvent, and specifically, "Clean Sol G" (manufactured by Nippon Oil Co., Ltd.), "Daphne Solvent" (manufactured by Idemitsu Oil Co., Ltd.) and the like can be used.

The degree of depressurization during the steam cleaning is appropriately depressurized in the cleaning chamber depending on the petroleum solvent used and the work. For example, when the work is made of steel, the work is tempered at a temperature of around 140 ° C. or lower so that the boiling point of the petroleum solvent to be used is reduced. When the work is made of a synthetic resin product, the pressure is reduced so that the boiling point of the petroleum solvent used is equal to or lower than the heat deformation temperature of the work.
Generally, it is in the range of about 5 to 100 Torr, but it is not limited to this range depending on the petroleum solvent used.

[0020]

According to the first vacuum degreasing and cleaning method of the present invention, a petroleum solvent is used and vapor cleaning is performed with the vapor of the petroleum solvent under reduced pressure. At the time of cleaning, the vapor of the petroleum solvent adheres to the surface of the work, which has been at room temperature, to dissolve and flow down the fats and oils to clean the work. Such cleaning will be continued until the workpiece reaches the vapor temperature of the solvent.

In this vacuum degreasing cleaning method, since the solvent used for the steam cleaning is a petroleum solvent, it has low toxicity and is harmless, unlike conventional chlorine solvents and fluorine solvents. Therefore, in the present invention, the work can be washed without using the wastewater treatment facility. Also,
In the present invention, prevent the deterioration of work environment and the occurrence of pollution,
The work can be washed.

Further, since the steam cleaning is carried out under reduced pressure, the solvent spreads to every corner of the work, so that good cleaning can be carried out.

Further, the petroleum-based solvent can be recovered almost entirely as compared with the chlorine-based solvent and the fluorine-based solvent. Because, petroleum-based solvents have a relative volatility of 1/300 to 1/60
It is hard to volatilize as 0. Then, if the work is carried in or carried out after the pressure is restored to atmospheric pressure or cooled so as not to generate steam, the volatile content becomes negligible.

Furthermore, the petroleum solvent used can maintain a high cleaning effect for a long time without replacement. This is because when the petroleum-based solvent is evaporated under reduced pressure, the difference in relative volatility between the petroleum-based solvent and the fats and oils mixed with the petroleum-based solvent increases as the pressure is reduced. That is, even if the washed petroleum solvent becomes dirty and becomes a mixed liquid with fats and oils after the work is washed, the petroleum solvent having a high purity can be evaporated. Therefore, the petroleum-based solvent can maintain a high cleaning effect for a long time without replacement, and the running cost can be reduced.

In principle, even if 99.9% or more of fats and oils are mixed, it can be used for steam cleaning. However,
Practically, it is desirable to wash the work within a range of about 70% of mixing of oils and fats due to evaporation cost, takt time and the like.

Furthermore, since it is a steam cleaning under reduced pressure,
The boiling point of the vaporized petroleum solvent drops. Therefore, in the equipment including the heat source to be used and measures against thermal expansion of the washing room,
A simple one can be used. Therefore, in the first vacuum degreasing cleaning method of the present invention, the initial cost can be reduced.

Furthermore, according to the first vacuum degreasing cleaning method of the present invention, the work can be cleaned without being affected by heat. This is because the cleaning method is steam cleaning under reduced pressure. Therefore, the boiling point of the petroleum solvent is lowered, and even if the work is a steel material or a synthetic resin product, the work can be washed at a tempering temperature or lower or a heat deformation temperature or lower.

Further, in this cleaning method, there is no risk of causing rust or the like on the work. This is because even if water is mixed in the petroleum solvent, the azeotropic phenomenon does not occur in the petroleum solvent. Further, even if water adheres to the work, it is under reduced pressure, so that the water evaporates before the petroleum solvent becomes vapor.

Furthermore, this cleaning method allows safe cleaning. Because of reduced pressure (eg 5-10
(0 Torr), since the petroleum solvent is evaporated,
This is because the oxygen required for ignition is extremely low. Furthermore, since the reduced pressure is maintained during the cleaning, the cleaning chamber has a closed structure, and the ignition of the petroleum solvent is suppressed.

It is possible to prevent ignition even when the work after cleaning is taken out. That is, if an inert gas such as nitrogen gas is introduced into the cleaning chamber to restore the pressure,
This is because the amount of oxygen is reduced and the evaporated petroleum solvent is liquefied due to the increase in pressure, so that it is possible to prevent ignition at the time of taking out the work.

Therefore, in the vacuum degreasing and cleaning method according to the first aspect of the present invention, the work can be cleaned while preventing the deterioration of the working environment and the occurrence of pollution. Further, in the first cleaning method of the present invention, it is possible to reduce the initial cost and the running cost when cleaning the work. Further, according to the first cleaning method of the present invention, it is possible to safely clean a work without affecting the work by heat and without causing rust on the work.

In the second vacuum degreasing and cleaning method of the present invention, the cleaning effect can be improved because the immersion cleaning with the petroleum-based solvent is performed before the steam cleaning with the petroleum-based solvent. Also, it is suitable for the case where the work is made of a material such as grease that slowly dissolves, or when the work having many holes such as screw holes is washed.

The first vacuum cleaning machine of the present invention can perform the first vacuum degreasing cleaning method of the present invention, and separates the steam generator for generating the vapor of the petroleum solvent from the cleaning chamber. Therefore, as compared with the case where the vapor of the petroleum solvent is generated in the cleaning chamber, the following actions and effects are exhibited.

That is, it is not necessary to heat the petroleum solvent after the work is put in the cleaning chamber, and the takt time is 2 /
It can be shortened to 3. This is because the vapor cleaning process can be performed by constantly generating solvent vapor in the vapor generator and introducing the vapor into the cleaning chamber immediately after the work is placed in the cleaning chamber. Therefore, as compared with the case where the petroleum solvent is heated after the work is put in the cleaning chamber, the preparation step of heating the petroleum solvent is not necessary.

Further, it is not necessary to heat the petroleum-based solvent after putting the work in the cleaning chamber and cool the work together with the petroleum-based solvent after cleaning, and the work can be cleaned with energy saving. This is because if the solvent vapor is constantly generated in the vapor generator, it is not necessary to heat and cool the petroleum solvent in each cycle when the workpiece is vapor-washed in one cycle.

Further, since the vapor generator always vacuum-distills the petroleum-based solvent, it can generate a solvent vapor of high purity and is separated from the cleaning chamber. Temperature control and replacement work can be easily performed.

The second vacuum cleaner of the present invention is provided with a dipping tank capable of dipping and cleaning a workpiece with a petroleum solvent at the lower part of the cleaning chamber of the first vacuum cleaner described above. The second vacuum degreasing and cleaning method according to the present invention can be carried out by the first vacuum cleaning machine.

Since the third vacuum cleaning machine of the present invention comprises the cleaning chamber and the drying chamber connected to the steam generator, the steam for generating the vapor of the petroleum solvent is contained in one cleaning chamber. The takt time can be shortened to 1/3 as compared with the case where the cleaning step and the drying step are performed. Because
Since the steam generator is connected to the cleaning chamber, the preparatory process for heating the petroleum solvent is not required, and the subsequent work can be processed in the steam cleaning process during the drying process of the preceding work. Because.

The fourth vacuum cleaner of the present invention is provided with a dipping tank in the lower part of the cleaning chamber for dipping and cleaning the work with a petroleum solvent. Therefore, in the third vacuum cleaner of the present invention, The second vacuum degreasing cleaning method of the present invention can be carried out.

The fifth vacuum cleaning machine of the present invention is an immersion cleaning room for dipping and cleaning a work with a petroleum solvent in the cleaning room of the third vacuum cleaning machine of the present invention to which a steam generator is connected. Are installed side by side, and the work can be cleaned through the three steps of the immersion cleaning process, the steam cleaning process, and the drying process.
A large number of works can be continuously transferred to each step for cleaning. Therefore, the takt time can be shortened to 1/3 as compared with the case where the vapor cleaning step for generating the vapor of the petroleum solvent and the drying step are performed in one cleaning chamber, and the cleaning is performed by immersion cleaning. The effect can be enhanced.

[0041]

Embodiments of the present invention will be described below with reference to the drawings.

The vacuum cleaner M1 used in the embodiment is shown in FIG.
As shown in FIG. 3, the peripheral wall of the cleaning chamber 1 is composed of the vacuum container 2. The vacuum container 2 is provided with an opening / closing door 3 for loading / unloading the work W.

A pedestal (not shown) on which the work W is placed is arranged in the upper portion of the cleaning chamber 1. A petroleum solvent 4 is stored in the lower part of the cleaning chamber 1.

Further, predetermined pipes 5 and 6 are connected to the cleaning chamber 1. The pipes 5 and 6 are connected to an inert gas source G and a vacuum pump P as a decompression source, respectively.
In addition, V is a solenoid valve and C is a capacitor.

Further, a heater 7 is provided in the lower part of the cleaning chamber 1.
Is provided. The heater 7 is for heating the petroleum solvent 4. A cooling coil 8 is arranged below the cleaning chamber 1. The cooling coil 8 is for cooling the petroleum solvent 4.

When the work W is cleaned by using the vacuum cleaner M1, as shown in the process diagram of FIG. 2, it is carried out through three steps of a preparation step, a steam cleaning step and a drying step.

First, in the preparation step, the work W is placed on the pedestal (not shown) in the cleaning chamber 1 with the opening / closing door 3 opened. Then, after closing the opening / closing door 3, the inside of the cleaning chamber 1 is changed to 5-1.
Reduce the pressure to 00 Torr. Further, the heater 7 starts heating the petroleum solvent 4.

Next, in the steam cleaning step, the heater 7
When the petroleum solvent 4 is heated to 50 to 180 ° C. by
The cleaning chamber 1 is filled with the solvent vapor, and the work W is vapor-cleaned. At this time, the work W is 30 at room temperature.
The temperature rises from about C to 45 to 170C.

At this time, the solvent vapor of the petroleum solvent 4 adheres to the surface of the work W which has been at room temperature. Then, the adhering solvent causes the oils and fats to dissolve and flow down to wash the work W. This cleaning is continued until the workpiece W reaches the vapor temperature of the solvent 4.

After that, the heating of the heater 7 is stopped in the drying step. Further, cold water is passed through the cooling coil 8 to cool the petroleum solvent 4 and dry the surface of the work W. Then, nitrogen gas or the like from the inert gas source G is introduced into the cleaning chamber 1 to restore the pressure in the cleaning chamber 1 to atmospheric pressure. After that, the opening / closing door 3 is opened and the cleaned work W is carried out, whereby the cleaning work of the work W can be completed.

The pressure in the cleaning chamber 1 and the temperature for heating the solvent 4 are appropriately set according to the type of the solvent 4.

By the way, when "Clean Sol G" (manufactured by Nippon Oil Co., Ltd.) is used as the petroleum solvent 4, the flash point is 75 ° C., the boiling point at atmospheric pressure is 194 to 216 ° C., 60
Boiling point at Torr is 90 to 120 ° C. Therefore, the pressure inside the cleaning chamber 1 is reduced to 60 Torr, and the solvent 4
Steam cleaning with heating temperature of 120 ° C (in this case,
The temperature of the work W is about 110 ° C). After that, the temperature of the solvent 4 may be cooled to a temperature below the flash point, for example, 65 ° C. before the work W is unloaded.

The washing machine used is as shown in FIGS.
The vacuum cleaners M2, M3, M4, M5, M6 shown in can be used.

In the vacuum cleaner M2 shown in FIG. 3, the part 22 for generating the vapor of the solvent 4 is separated from the cleaning chamber 21. When the vacuum cleaner M2 is used, the work W is cleaned in two steps including a steam cleaning step and a drying step.

When using this vacuum cleaner M2,
The solvent 4 is heated by the heater 7 in advance, and the steam generator 22 is heated.
Generate solvent vapor inside.

Then, in the steam cleaning step, the work W
Is placed on a pedestal (not shown) of the cleaning chamber 21 by opening the opening / closing door 3 and closing the opening / closing door 3,
The pressure is reduced to 0 Torr and the left and right solenoid valves V are opened. Then, the inside of the cleaning chamber 21 is filled with the solvent vapor that has flowed in from the electromagnetic valve V on the left side, and the work W is vapor-cleaned.

At this time, the solvent in which the oils and fats are dissolved returns to the steam generator 22 from the solenoid valve V on the right side and is circulated for use.

Then, in the drying process, the solenoid valves V
Is closed and the surface of the work W is dried. Then, nitrogen gas or the like from the inert gas source G is introduced into the cleaning chamber 21 to restore the pressure in the cleaning chamber 21 to the atmospheric pressure. After that, the opening / closing door 3 is opened and the cleaned work W is carried out, whereby the cleaning work of the work W can be completed.

When the steam generator 22 is separated from the cleaning chamber 21 like the vacuum cleaner M2, the takt time can be shortened to 2/3 as compared with the case where the vacuum cleaner M1 is used. it can. Because the steam generator 2 is always
If the solvent vapor is generated in 2, and the electromagnetic valve V on the left side is opened at a predetermined time, the vapor cleaning step can be performed. Therefore, when using the vacuum cleaner M2, the vacuum cleaner M
This is because the preparatory step of heating the solvent 4 when using 1 is unnecessary.

Further, when the vacuum cleaning machine M2 is used, the work W can be cleaned with less energy as compared with the case where the vacuum cleaning machine M1 is used. This is because if solvent vapor is constantly generated in the vapor generator 22, it is not necessary to heat and cool the solvent 4 for each cycle when the workpiece W is vapor-washed in one cycle.

In the steam generator 22, the solvent 4 is vacuum-distilled, so that highly pure solvent steam can be generated. Further, since it is separated from the cleaning chamber 21, temperature control of the solvent 4 and replacement work can be easily performed.

By the way, when the above-mentioned "Clean Sol G" is used as the solvent 4, when the mixed fat and oil content reaches 70%, the boiling point at 60 Torr becomes 170 ° C. Therefore, when the temperature in the steam generator 22 reaches 170 ° C., it can be used as a guide for replacing the solvent 4.

The vacuum cleaner M3 shown in FIG. 4 separates the steam generator 34 from the cleaning chamber 31. Also, the washing room 3
An immersion tank 32 is provided at the lower part of the inside of 1. In the dipping tank 32, a dipping solvent 33 similar to the solvent 4 is stored.
The vacuum cleaning machine M3 is configured such that a pedestal on which the work W in the cleaning chamber 31 is placed can be moved up and down so that the work W can be immersed and cleaned in a stage before steam cleaning. That is, when the vacuum cleaner M3 is used, the work W is cleaned in two steps including a steam cleaning step and a drying step, and immersion cleaning is also performed in the steam cleaning step.

When using this vacuum cleaner M3,
In advance, the solvent 4 is heated by the heater 7, and the steam generator 34
Generate solvent vapor inside.

Then, in the steam cleaning step, first, the work W is opened and placed on a pedestal (not shown) of the cleaning chamber 31 and the opening / closing door 3 is closed.
Depressurize to ~ 100 Torr. Then, the gantry (not shown) is moved downward and upward several times to wash the work W in the immersion tank 32, and then the gantry is moved up again to open the upper and lower solenoid valves V. Then, the inside of the cleaning chamber 31 is filled with the solvent vapor that has flowed in from the upper solenoid valve V, and the work W is to be cleaned by vapor. At this time, the solvent in which the oils and fats are dissolved is dropped into the immersion tank 32, returned from the electromagnetic valve V below to the steam generator 34, and is circulated and used.

Then, in the drying process, the solenoid valves V
Is closed and the surface of the work W is dried. Then, nitrogen gas or the like from the inert gas source G is introduced into the cleaning chamber 31 to restore the pressure in the cleaning chamber 31 to the atmospheric pressure. After that, the opening / closing door 3 is opened and the cleaned work W is carried out, whereby the cleaning work of the work W can be completed.

When using this vacuum cleaner M3,
Since the immersion cleaning is performed in the steam cleaning step, the cleaning time is added by 5 to 20 minutes as compared with the case of using the vacuum cleaner M2. However, when the vacuum cleaner M3 is used, the cleaning effect can be improved as compared with the case where the vacuum cleaner M2 is used. Therefore, this vacuum cleaner M
No. 3 is suitable for the case where the work W with a large amount of oil and fat is contaminated, the case where the work W is contaminated with a material such as grease that dissolves slowly, and the case where the work W having many holes such as screw holes is washed.

The temperature of the immersion solvent 33 is controlled below the flash point. Further, when there is a lot of dirt, the work W may be rocked using a gantry (not shown) during the immersion in the immersion solvent 33.

The vacuum cleaner M4 shown in FIG.
2 is provided with a carry-in door 43, an intermediate door 44, and a carry-out door 45. Further, the vacuum container 42 is separated into two chambers, a cleaning chamber 41 and a drying chamber 46, and a vapor generator 47 for the solvent 4 is provided in the cleaning chamber 41.
Is connected. That is, this vacuum cleaner M4
In the case of using, the work W is cleaned in two steps including the steam cleaning step and the drying step, and the subsequent work W is subjected to the steam cleaning in the steam cleaning step while the preceding work W is being dried in the drying step.

When using this vacuum cleaner M4,
The solvent 4 is heated by the heater 7 in advance, and the steam generator 47 is heated.
Generate solvent vapor inside.

Then, in the steam cleaning step, first, the work W is opened, the loading door 43 is opened, and the work W is placed on a pedestal (not shown) of the cleaning chamber 41, and the loading door 43 is closed. Reduce the pressure to 100 Torr. After that, left and right solenoid valves V
・ Open V. Then, the inside of the cleaning chamber 41 is filled with the solvent vapor flowing from the electromagnetic valve V on the left side, and the work W is vapor-cleaned.

At this time, the solvent in which the oils and fats are dissolved returns to the steam generator 47 through the electromagnetic valve V on the right side and is circulated.

Then, in the drying process, the solenoid valves V
Is closed, the inside of the drying chamber 46 is decompressed to 5 to 100 Torr, the intermediate door 44 is opened and closed, the work W is transferred to the drying chamber 46, and the surface of the work W is dried. And the drying room 46
Nitrogen gas or the like from the inert gas source G is introduced into the drying chamber 46 to restore the pressure in the drying chamber 46 to the atmospheric pressure. After that, if the carry-out door 45 is opened and the cleaned work W is carried out, the work W
The cleaning work of can be completed.

While the work W is being dried in the drying chamber 46, nitrogen gas or the like from the inert gas source G is introduced on the cleaning chamber 41 side to restore the pressure in the cleaning chamber 41 to atmospheric pressure. ,
The carry-in door 43 is opened and closed to carry in the succeeding work W onto a pedestal (not shown) in the cleaning chamber 41. And the cleaning room 41
The inside is decompressed, the solenoid valves V and V are opened, and the subsequent work W is cleaned by steam.

Then, after the preceding work W is carried out from the drying chamber 46, the following work W is sequentially transferred to the drying process for processing.

When using this vacuum cleaner M4,
The takt time can be shortened to 1/3 as compared with the case where the vacuum cleaner M1 is used. This is because, when the vacuum cleaner M4 is used, as compared with the case where the vacuum cleaner M1 is used, a preparatory step of heating the solvent 4 is not required, and the subsequent work is dried during the drying step of the preceding work W. W
It can be processed in the steam cleaning step.

The vacuum cleaner M5 shown in FIG.
However, the immersion tank 32 is provided below the cleaning chamber 42 of the vacuum cleaning machine M4. The immersion tank 32 stores the same immersion solvent 33 as the solvent 4. That is, when using this vacuum cleaner M5, the vacuum cleaner M4
The work W is cleaned by adding immersion cleaning during the steam cleaning process when using.

When using this vacuum cleaner M5,
The solvent 4 is heated by the heater 7 in advance, and the steam generator 47 is heated.
Generate solvent vapor inside.

Then, in the steam cleaning step, first, the work W is opened, the load door 43 is opened, and the work W is placed on a pedestal (not shown) of the cleaning chamber 41. Reduce the pressure to 100 Torr. Then, the gantry (not shown) is moved downward and upward several times so that the work W is immersed in the immersion tank 32.
After dipping and washing in, raise the gantry again. afterwards,
Open the left and right solenoid valves V and V. Then, the washing room 51
The inside is filled with solvent vapor flowing from the solenoid valve V on the left,
The work W is to be washed with steam.

At this time, the solvent in which the oils and fats are dissolved returns to the steam generator 47 through the electromagnetic valve V on the right side and is circulated for use.

Then, in the drying process, the solenoid valves V
Is closed, the inside of the drying chamber 46 is decompressed to 5 to 100 Torr, the intermediate door 44 is opened and closed, the work W is transferred to the drying chamber 46, and the surface of the work W is dried. And the drying room 46
Nitrogen gas or the like from the inert gas source G is introduced into the drying chamber 46 to restore the pressure in the drying chamber 46 to the atmospheric pressure. After that, if the carry-out door 45 is opened and the cleaned work W is carried out, the work W
The cleaning work of can be completed.

While the work W is being dried in the drying chamber 46, nitrogen gas or the like from the inert gas source G is introduced on the cleaning chamber 51 side to restore the pressure inside the cleaning chamber 51 to atmospheric pressure. ,
The carry-in door 43 is opened and closed to carry in the succeeding work W onto a rack (not shown) in the cleaning chamber 51. And the cleaning room 51
The inside is decompressed and a gantry (not shown) is moved up and down to dip and wash the following work W, and the solenoid valves V and V are opened to wash the following work W with steam.

Then, after the preceding work W is carried out from the drying chamber 46, the succeeding works W are sequentially transferred to the drying process for processing.

When using this vacuum cleaner M5,
In the steam cleaning process when using the vacuum cleaner M4,
Since the immersion cleaning is added, the cleaning effect of the work W can be enhanced as compared with the case where the vacuum cleaning machine M4 is used.

Further, in this vacuum cleaning machine M5, as compared with the vacuum cleaning machine M3, the drying step of the preceding work W can be processed during the immersion cleaning or the steam cleaning of the subsequent steam cleaning step of the work W. Time can be shortened to 2/3.

The vacuum cleaner M6 shown in FIG.
2 is provided with a carry-in door 63, an intermediate door 64, 65, and a carry-out door 66. Further, the vacuum container 62 is separated into three chambers of an immersion cleaning chamber 67, a steam cleaning chamber 61 and a drying chamber 68, and the immersion cleaning chamber 6 is separated.
The immersion solvent 33 is stored inside 7. Further, a steam generator 69 is connected to the steam cleaning chamber 61. That is, when the vacuum cleaner M6 is used, the work W
Is subjected to the three steps of the immersion cleaning step, the steam cleaning step, and the drying step, and a large number of works W are continuously transferred to each step for cleaning.

When using this vacuum cleaner M6,
The solvent 4 is heated by the heater 7 in advance, and the steam generator 69 is heated.
Generate solvent vapor inside.

In the immersion cleaning step, first, the work W is opened, the loading door 63 is opened, and the work W is placed on a pedestal (not shown) in the immersion cleaning chamber 67. After the loading door 63 is closed, the inside of the immersion cleaning chamber 67 is closed. Reduce pressure to 5-100 Torr. Then, the pedestal (not shown) is moved downward and upward several times to dip and wash the work W with the dipping solvent 33.

Thereafter, in the steam cleaning step, the inside of the steam cleaning chamber 61 is decompressed to 5 to 100 Torr, and the work W subjected to the immersion cleaning is placed on the pedestal (not shown) of the steam cleaning chamber 61 by opening and closing the intermediate door 63. To do. After that, left and right solenoid valves V
Open the valve. Then, the inside of the vapor cleaning chamber 61 is filled with the solvent vapor that has flowed in from the electromagnetic valve V on the left side, and the workpiece W is vapor-cleaned.

During the steam cleaning step, nitrogen gas or the like from the inert gas source G is introduced into the immersion cleaning chamber 67 to restore the pressure in the immersion cleaning chamber 67 to atmospheric pressure. Then, the carry-in door 63 is opened and closed, and the subsequent work W is immersed in the immersion cleaning chamber 67.
Bring it in. Furthermore, the inside of the cleaning chamber 67 is 5 to 100 Torr.
The pressure is reduced to 1, and the subsequent work W is immersed and washed.

Then, the preceding work W is placed in the steam cleaning chamber 61.
If steam cleaning is performed inside, the preceding work W is transferred to the drying process. That is, the left and right solenoid valves V and V are closed to reduce the pressure in the drying chamber 68 to 5 to 100 Torr, and the intermediate door 6
5 is opened and closed to transfer the preceding work W into the drying chamber 68 to dry the surface of the work W. And the drying room 6
Introduce nitrogen gas or the like from the inert gas source G into 8,
The pressure inside the drying chamber 68 is restored to atmospheric pressure. After that, the carry-out door 66
The cleaning work of the work W can be completed by opening the door and carrying out the cleaned work W.

During the drying step, the subsequent workpiece W that has been subjected to the immersion cleaning is transferred to the steam cleaning step for steam cleaning. Then, after the preceding work W is carried out from the drying chamber 68, the following work W is sequentially transferred to the drying process and processed.

When using this vacuum cleaner M6,
The takt time can be shortened to 1/3 as compared with the case where the vacuum cleaner M1 is used. Further, when the vacuum cleaner M6 is used, compared with the case where the vacuum cleaner M1 is used, the immersion cleaning is performed, so that the cleaning effect can be enhanced.

[Brief description of drawings]

FIG. 1 is a schematic view of a vacuum cleaner used in an embodiment of the present invention.

FIG. 2 is a process drawing of one cycle of the same example.

FIG. 3 is a schematic view showing another vacuum cleaner.

FIG. 4 is a schematic view showing still another vacuum cleaner.

FIG. 5 is a schematic view showing still another vacuum cleaner.

FIG. 6 is a schematic view showing still another vacuum cleaner.

FIG. 7 is a schematic view showing still another vacuum cleaner.

[Explanation of symbols]

1, 21, 31, 41, 51, ... Washing room, 4 ... (petroleum-based) solvent, 7 ... heater, 22, 34, 47, 69 ... Steam generator, 32 ... Immersion tank, 33 ... Immersion solvent, 46.68 ... drying room, 61 ... Steam cleaning room, 67 ... Immersion cleaning room, W ... work, M1, M2, M3, M4, M5, M6 ... Vacuum cleaner.

─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-4-280988 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) C23G 5/04 B08B 3/08 C23G 5 / 024

Claims (2)

(57) [Claims] 1. A vacuum cleaner having the following structure. (a) A steam generator that generates steam of petroleum-based solvent, (b) a cleaning chamber for connecting the steam generator to steam-clean a work under reduced pressure, and (c) a cleaning chamber installed in parallel in the cleaning chamber. A drying chamber for drying the work after cleaning under reduced pressure , (d) storing the petroleum solvent, and
Immersion tank to be placed . 2. A vacuum cleaner having the following structure. (a) A steam generator for generating a vapor of petroleum solvent, (b) a cleaning chamber for connecting the steam generator to steam-clean a work under reduced pressure, and (c) a cleaning chamber provided in parallel in the cleaning chamber. A drying chamber for drying the cleaned work under reduced pressure , (d) storing the petroleum solvent , and arranging the petroleum solvent in parallel in the cleaning chamber
Immersion cleaning in which the workpiece is immersed in the petroleum solvent for cleaning.
Room .