JP2003028570A - Drying apparatus - Google Patents

Drying apparatus

Info

Publication number
JP2003028570A
JP2003028570A JP2001213459A JP2001213459A JP2003028570A JP 2003028570 A JP2003028570 A JP 2003028570A JP 2001213459 A JP2001213459 A JP 2001213459A JP 2001213459 A JP2001213459 A JP 2001213459A JP 2003028570 A JP2003028570 A JP 2003028570A
Authority
JP
Japan
Prior art keywords
solution
dried
vacuum
vacuum container
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001213459A
Other languages
Japanese (ja)
Other versions
JP3818876B2 (en
Inventor
Kiyoshi Mito
清 水戸
Katsuhisa Ota
勝久 太田
Shinji Masuoka
真二 増岡
Yutaka Asada
裕 浅田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Sharp Manufacturing Systems Corp
Original Assignee
Sharp Corp
Sharp Manufacturing Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp, Sharp Manufacturing Systems Corp filed Critical Sharp Corp
Priority to JP2001213459A priority Critical patent/JP3818876B2/en
Priority to CNA028140990A priority patent/CN1527749A/en
Priority to PCT/JP2002/007137 priority patent/WO2003006184A1/en
Publication of JP2003028570A publication Critical patent/JP2003028570A/en
Application granted granted Critical
Publication of JP3818876B2 publication Critical patent/JP3818876B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Drying Of Solid Materials (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a drying apparatus wherein in a drying apparatus for drying in a vacuum parts cleaned with a cleaning solution such as water or a hydrogen carbon system, heat is applied to the parts to be dried to effectively dry the parts in safety with the low cost. SOLUTION: A basket 4 containing an article to be dried after cleaned is contained in a vacuum container 1, and a cover 2 is closed to start evacuation, an upper chamber 5b of a heating container 5 is reduced in pressure, and further a heater 7 in a lower chamber 5c is actuated to heat a solution 6 contained in the upper chamber 5b. Thereafter, when pressure in the vacuum container 1, pressure in the upper chamber 5b, and temperature of the solution 6 become predetermined values, once an air driven valve 10 on a communication piping 9 is opened, the solution 6 is rapidly sucked from a lower end 9b of the communication piping 9 to an upper end 9a of the same, and is injected upward in a boiled state to rapidly raise the temperature in the vacuum container 1 and provide heat to the article 3 for rapid heating of the same.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、水又は炭化水素系
等の洗浄液によって洗浄された電子、機械、成形関連等
の部品を真空状態で乾燥させる乾燥装置にする。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drying device for drying, in a vacuum state, electronic, mechanical, molding-related parts that have been cleaned with a cleaning liquid such as water or hydrocarbon.

【0002】[0002]

【従来の技術】従来より、部品を洗浄する洗浄液として
は、フロン等のフッ素系や、1,1,1-トリクロロエタン等
の塩素系の溶液が多く用いられてきた。しかしながら、
気化したこれらの溶液はオゾン層を破壊する性質を有し
ているとされ、1987年に、「オゾン層を破壊する物
質に関するモントリオール議定書」が、「オゾン層保護
に関するウィーン条約」に基づき採択されて、特定フロ
ン等を対象に生産量の段階的な削減や規制等が規定され
た。その後も何度か見直しがなされており、規制物質の
追加や規制スケジュールの前倒し等の改正が行われてい
る。
2. Description of the Related Art Conventionally, as a cleaning liquid for cleaning parts, fluorine-based solutions such as CFCs and chlorine-based solutions such as 1,1,1-trichloroethane have been widely used. However,
It is said that these vaporized solutions have the property of depleting the ozone layer. In 1987, the "Montreal Protocol on Substances that Deplete the Ozone Layer" was adopted under the "Vienna Convention on the Protection of the Ozone Layer". , Specified chlorofluorocarbons, etc. have been specified for gradual reduction of production volume and regulations. It has been reviewed several times since then, and revisions have been made such as the addition of controlled substances and the advancement of the regulatory schedule.

【0003】日本においては、1998年9月30日
に、上記したウィーン条約及びモントリオール議定書が
批准された。この議定書では、CFC(塩素・フッ素・
炭素化合物)に代わるフッ素系であるHCFC(水素・
塩素・フッ素・炭素化合物)についても、2020年ま
でに全廃することが決められており、その全廃時期につ
いては、今後更に、前倒しが予想される。また、これら
に関連して、塩素系に対しても、水質や大気汚染に関す
る規制の見直しが図られており、年毎にその規制が強化
されつつある。
In Japan, the Vienna Convention and the Montreal Protocol were ratified on September 30, 1998. In this protocol, CFC (chlorine, fluorine,
HCFC (hydrogen, which is a fluorine-based alternative to carbon compounds)
It has been decided that all chlorine, fluorine, and carbon compounds) will be abolished by 2020, and the timing of the total abolition is expected to be further advanced in the future. In relation to these, the regulations regarding water quality and air pollution are being reviewed for chlorine-based substances, and the regulations are being strengthened year by year.

【0004】一方、地球温暖化防止に関する活動も活発
になってきており、1997年12月の「地球温暖化防
止京都会議」では、日本に対して、温暖化ガスの6%削
減が義務づけられた。この温暖化ガスの対象としては、
代替フロンであるHFC(水素・フッ素・炭素化合物)
やパーフルオロカーボンも含まれており、更に代替フロ
ンにおいても排出規制が強化されることになった訳であ
る。従って、今後、規制動向に対して十二分なウオッチ
が必要であるとともに、早急に対処策を講じていくこと
が強く要求される。
On the other hand, activities related to the prevention of global warming are becoming active, and at the "Global Warming Prevention Kyoto Conference" in December 1997, Japan was obliged to reduce greenhouse gas by 6%. . The target of this greenhouse gas is
HFC (hydrogen / fluorine / carbon compound) as an alternative CFC
It also includes perfluorocarbons, and the emission regulations for alternative CFCs have been tightened. Therefore, in the future, it will be necessary to have a watch that is more than sufficient for regulatory trends, and there is a strong demand for urgent measures to be taken.

【0005】このような背景のもと、近年、オゾン層破
壊のおそれが少ないとされる水又は非塩素系の溶液を用
いて部品を洗浄することが注目されているが、以下の点
に留意する必要がある。
Against this background, in recent years, attention has been paid to cleaning parts using water or a non-chlorine-based solution, which is said to be less likely to cause ozone layer depletion, but the following points should be noted. There is a need to.

【0006】先ず、水を用いる場合であるが、第1に、
水自体は安価である反面、水の取り扱いに関連する多く
の付帯設備を必要とし、その付帯設備の据え付けに多大
な費用が生じることである。付帯設備としては、洗浄装
置本体の他に、例えば、貯水設備、沈澱・浄化・汚泥処
理設備、排水設備、或いは、純度の低い水を用いた場合
の前処理用設備が挙げられ、しかも、これらの設置スペ
ースや、メンテナンスのための補助スペースも必要とな
る。また、これら付帯設備の運転、保守、或いは、排水
管理等には、初期投資とともに、維持に係わる経費も必
然的に発生することはいうまでもない。特に、排水管理
においては、使用後の水を排水する際に水質基準値を満
足し得るような配慮が必要である。
First, in the case of using water, firstly,
Water itself is cheap, but on the other hand, it requires a lot of incidental equipment related to the handling of water, and the installation of the incidental equipment is very expensive. Examples of incidental equipment include, in addition to the main body of the cleaning apparatus, water storage equipment, sedimentation / purification / sludge treatment equipment, drainage equipment, or pretreatment equipment when low-purity water is used. Installation space and auxiliary space for maintenance are also required. Needless to say, the operation, maintenance, drainage management, and the like of these incidental facilities inevitably involve initial investment and maintenance costs. In particular, in drainage management, it is necessary to give consideration so that the water quality standard value can be satisfied when draining water after use.

【0007】第2に、水の有する濡れ性により、期待さ
れる程の洗浄効果が得られない可能性があることであ
る。水の表面張力は、45℃において68.74±0.
05dyn/cm、20℃において72.75±0.05dyn/
cmとベース値がかなり高い。一方、従来多用されてきた
フッ素系や塩素系の溶液では、例えば、フロンCFC1
13が20℃において17dyn/cm、1,1,1-トリクロロエ
タンが25dyn/cmと水に対して1/3〜1/4に過ぎな
い。つまり、水は、従来多用されてきた溶液と比較して
濡れ性が悪いということがいえる。従って、水を用いて
従来と同様の手法で洗浄が行われた場合、部品同士の重
なり部分や密着部分、或いは、部品に形成されている小
さな穴や隅部等には、水は容易に浸透、進入できなくな
り、これらの部分に付着し存在している汚れ等を洗浄で
きず、洗浄効果が劣ってしまうことになる。
Secondly, there is a possibility that the expected cleaning effect may not be obtained due to the wettability of water. The surface tension of water is 68.74 ± 0.
05 dyn / cm, 72.75 ± 0.05 dyn / at 20 ° C.
cm and base value are quite high. On the other hand, in a fluorine-based or chlorine-based solution which has been frequently used, for example, Freon CFC1 is used.
13 is 17 dyn / cm at 20 ° C., and 1,1,1-trichloroethane is 25 dyn / cm, which is only 1/3 to 1/4 with respect to water. That is, it can be said that water has poor wettability as compared with a solution that has been frequently used. Therefore, when water is used for cleaning in the same way as the conventional method, water easily penetrates into the overlapping parts and the close contact parts of parts, or the small holes and corners formed in parts. However, it becomes impossible to enter, and it is impossible to clean dirt and the like adhering to these portions and existing, so that the cleaning effect becomes poor.

【0008】第3に、空気が混在する雰囲気や、加温さ
れた常圧等の環境下で洗浄が行われた場合、洗浄される
部品が金属部分を有すると、水の有する酸化力により錆
が誘発され易くなるため、防錆対策が不可欠となる。特
に、そのような環境下では乾燥時間が長くなるため、水
シミ等も発生し易く、折角洗浄しても外観が損なわれて
しまう。
Thirdly, when the parts to be cleaned have a metal portion when the cleaning is performed in an atmosphere where air is mixed or in an environment where the atmospheric pressure is heated, rust is caused by the oxidizing power of water. Corrosion is apt to be induced, so rust prevention measures are essential. In particular, in such an environment, the drying time becomes long, water stains and the like are likely to occur, and the appearance will be impaired even when corner cleaning is performed.

【0009】一方、非塩素系であるシリコン系、炭化水
素系、或いは、アルコール系等の溶液を用いる場合であ
るが、第1に、その沸点が高いもので200℃程度もあ
るため、常圧下でその溶液を蒸気化して蒸気による部品
洗浄が行われる場合、蒸気温度が極めて高くなり、洗浄
される部品の熱変形や変質等の問題が発生する。しか
も、従来多用されてきたフッ素系や塩素系の溶液と比較
して、乾燥性が劣るという問題もある。第2に、炭化水
素系の溶液は引火点が50〜80℃と低いため、火災、
爆発等に対して安全性の確保が強く要求される。
On the other hand, when a non-chlorine-based solution such as a silicon-based solution, a hydrocarbon-based solution, or an alcohol-based solution is used, firstly, since the high boiling point thereof is about 200.degree. When the solution is vaporized and the parts are washed with steam, the steam temperature becomes extremely high, and problems such as thermal deformation and deterioration of the parts to be washed occur. Moreover, there is also a problem that the drying property is inferior as compared with the conventionally used fluorine-based or chlorine-based solutions. Second, since the hydrocarbon-based solution has a low flash point of 50 to 80 ° C., a fire,
It is strongly required to ensure safety against explosions.

【0010】このように、水又は非塩素系の溶液を用い
る場合の留意点は種々あるが、特に、乾燥性の向上、及
び、炭化水素系に対する安全性の確保という点に対して
は、減圧環境下で洗浄や乾燥が行える装置が望ましい。
何故ならば、減圧環境を形成する装置は、真空容器を含
む配管系が密閉構造となった、いわゆる、クローズドシ
ステムとなるので、配管系内部を負圧に保つことによっ
て、その内部の酸素濃度が極めて低くなり引火を抑止で
きるし、万一配管系に欠損箇所があったとしても、その
負圧により内部の溶液や蒸気が外部に漏れ出ることはな
く、安全性の確保につながるからである。しかも、減圧
下では飽和蒸気圧が下がるので、溶液の沸点が実質下が
り、常圧雰囲気下と比較して溶液は容易に蒸発でき、乾
燥性の向上に対して有利となるからである。
As described above, there are various points to be noted when using water or a non-chlorine type solution, but in particular, in terms of improving the drying property and ensuring safety for hydrocarbon type, reduced pressure is used. A device that can be washed and dried in the environment is desirable.
Because the device that forms the depressurized environment is a so-called closed system in which the piping system including the vacuum vessel has a closed structure, so that the oxygen concentration inside the piping system is kept negative by maintaining a negative pressure inside the piping system. This is because it becomes extremely low and ignition can be suppressed, and even if there is a defective portion in the piping system, the negative pressure will not leak the internal solution or vapor to the outside, which will ensure safety. Moreover, since the saturated vapor pressure is reduced under reduced pressure, the boiling point of the solution is substantially lowered, and the solution can be easily evaporated as compared with the normal pressure atmosphere, which is advantageous for improving the drying property.

【0011】[0011]

【発明が解決しようとする課題】減圧環境下で乾燥が行
える装置として、真空乾燥装置がある。この真空乾燥装
置では、洗浄液が付着している被乾燥物を真空容器内に
置き、真空状態にすることによって、被乾燥物に付着し
ている洗浄液が、気化するために必要な熱(蒸発潜熱)
を被乾燥物から奪いながら沸騰、蒸発し、真空乾燥が進
行する。一方、乾燥が進行するに伴い被乾燥物の品温は
徐々に低下し、この品温が飽和蒸気圧温度を下回ると、
真空容器内の真空度が同一状態であるならば、その時点
で洗浄液の沸騰、蒸発は停止してしまうので、この事態
を回避するために、一般には、更に真空能力を上げ到達
真空度を高めたり、真空引き開始時点の被乾燥物の品温
を高めたり、真空引き中の被乾燥物に熱を供給したりす
る工夫が必要とされる。
There is a vacuum drying device as a device capable of drying under a reduced pressure environment. In this vacuum drying device, the material to be dried to which the cleaning liquid is attached is placed in a vacuum container and placed in a vacuum state, so that the cleaning liquid attached to the material to be dried has the heat (evaporation latent heat) necessary for vaporization. )
Is taken from the material to be dried, boiled and evaporated, and vacuum drying proceeds. On the other hand, the product temperature of the material to be dried gradually decreases as the drying progresses, and when this product temperature falls below the saturated vapor pressure temperature,
If the degree of vacuum in the vacuum container is the same, boiling and evaporation of the cleaning liquid will stop at that point, so in order to avoid this situation, in general, raise the vacuum capacity to raise the ultimate vacuum degree. It is necessary to take measures such as increasing the temperature of the material to be dried at the start of evacuation or supplying heat to the material to be dried during evacuation.

【0012】例えば、真空引き開始時点の被乾燥物の品
温を高める簡便な手法として、真空容器内に温風を吹き
込む温風加熱方式がある。しかし、限られた時間の加熱
では、真空容器の側壁の温度が十分上昇しないままで乾
燥状態に入ることになるため、蒸発した洗浄液のガスは
その側壁に接して冷却、凝縮し、その凝縮状態のまま真
空容器内に残留して、乾燥を阻害するという問題があっ
た。更に、細管や入り組んだ形状を有する複雑な形状の
被乾燥物を乾燥させる場合は、特に部位毎に品温差が生
じ易く、この品温差により、部位毎の乾燥状態が不均一
となって輪ジミや発錆の要因となり、洗浄、乾燥させた
被乾燥物の外観を著しく損ねるという問題もあった。ま
た、別の手法として、蒸気を被乾燥物に向けて強制的に
噴射させる蒸気噴射加熱方式もあるが、蒸気化に伴う設
備や噴射用のポンプを設ける必要があり、コストアップ
が生じてしまう。
[0012] For example, as a simple method for raising the product temperature of the material to be dried at the start of evacuation, there is a hot air heating method in which hot air is blown into the vacuum container. However, when heating for a limited time, the temperature of the side wall of the vacuum container does not rise sufficiently and enters the dry state, so the gas of the evaporated cleaning liquid cools and condenses on the side wall, and the condensed state There is a problem in that it remains in the vacuum container as it is and impedes drying. Furthermore, when drying an object to be dried that has a complicated shape such as a thin tube or a complicated shape, a product temperature difference is likely to occur particularly between parts, and this product temperature difference causes a non-uniform drying state between parts, resulting in a ring stain. There is also a problem that it becomes a factor of rusting and rusts and remarkably impairs the appearance of the dried and washed object. Further, as another method, there is also a steam injection heating method for forcibly injecting steam toward the object to be dried, but it is necessary to provide equipment and a pump for injection accompanying vaporization, which results in cost increase. .

【0013】そこで、本発明は、上記の問題に鑑みてな
されたものであり、水又は炭化水素系等の洗浄液によっ
て洗浄された部品を真空状態で乾燥させる乾燥装置であ
って、被乾燥物である部品に熱を与えることにより、効
率よくかつ安全に乾燥が行え、しかも、低コストで得る
ことができる乾燥装置を提供することを目的とするもの
である。
Therefore, the present invention has been made in view of the above problems, and is a drying device for drying a component cleaned by a cleaning liquid such as water or a hydrocarbon system in a vacuum state. It is an object of the present invention to provide a drying device that can be dried efficiently and safely by applying heat to a certain component, and that can be obtained at low cost.

【0014】[0014]

【課題を解決するための手段】上記目的を達成するた
め、本発明による乾燥装置は、被乾燥物を収容し真空状
態を取り得る真空容器と、加熱された溶液を収容する加
熱容器と、真空容器と加熱容器を連通する配管と、を備
え、配管の一端は被乾燥物に向けて開口し、配管の他端
は溶液に浸漬しており、真空容器が真空状態のときに配
管が開放されて、溶液が沸騰状態で配管の前記一端から
被乾燥物に向けて噴射されるようになっている。
In order to achieve the above object, a drying apparatus according to the present invention includes a vacuum container for containing a material to be dried and a vacuum state, a heating container for containing a heated solution, and a vacuum. A pipe that connects the container and the heating container is provided, one end of the pipe opens toward the object to be dried, the other end of the pipe is immersed in the solution, and the pipe is opened when the vacuum container is in a vacuum state. Then, the solution is sprayed in a boiling state from the one end of the pipe toward the material to be dried.

【0015】被乾燥物に向けて噴射される溶液は、被乾
燥物の品温がそれほど高くなくても蒸発できる蒸発潜熱
の低いものであることが望ましく、例えば、その溶液は
炭化水素系の溶液である。
It is desirable that the solution jetted toward the material to be dried has a low latent heat of vaporization capable of evaporating even if the temperature of the material to be dried is not so high. For example, the solution is a hydrocarbon-based solution. Is.

【0016】また、溶液を加熱する際、ヒータ等の熱源
が直接溶液に触れると、火災や爆発のおそれがあるた
め、これを回避する目的から、加熱容器は隔壁で2室に
分割されていて、一方に溶液を収容し、他方に熱源を設
けており、熱源からの熱が隔壁を通じて溶液に与えら
れ、溶液が加熱されるようになっている。
Further, when the heat source such as a heater directly touches the solution when heating the solution, there is a risk of fire or explosion. For the purpose of avoiding this, the heating container is divided into two chambers by a partition wall. The solution is contained in one side and the heat source is provided in the other side, and the heat from the heat source is applied to the solution through the partition wall to heat the solution.

【0017】被乾燥物に向けて噴射された沸騰状態の溶
液の状態、及び、被乾燥物の品温状態を安定化させる観
点から、配管の経路に駆動弁が設けられており、真空容
器内の圧力と、溶液が収容されている加熱容器内の圧力
と、溶液の温度とに基づき、駆動弁の開閉度合いが調節
されるようになっている。
From the viewpoint of stabilizing the state of the solution in a boiling state sprayed toward the material to be dried and the product temperature state of the material to be dried, a drive valve is provided in the path of the pipe, and the inside of the vacuum container is provided. The opening / closing degree of the drive valve is adjusted based on the pressure of the above, the pressure in the heating container containing the solution, and the temperature of the solution.

【0018】更に、被乾燥物に熱を与えて凝縮した溶液
が再度蒸気化して被乾燥物に熱を与えたり、真空容器内
の温度をより急速に高めるたりすることができれば、よ
り効率が上がるので、真空容器の内側面と底面とのう
ち、少なくとも1つに加熱手段を設けている。
Further, if the solution condensed by applying heat to the material to be dried is vaporized again to give heat to the material to be dried or the temperature in the vacuum container can be raised more rapidly, the efficiency is further improved. Therefore, the heating means is provided on at least one of the inner side surface and the bottom surface of the vacuum container.

【0019】そして、被乾燥物に向けて噴射される溶液
のランニングコストを抑える観点から、溶液の性質を損
なわず再利用することを考慮して、被乾燥物に向けて噴
射されて真空容器内に存する蒸気化した溶液を回収し凝
縮させる溶液凝縮手段と、溶液凝縮手段により凝縮した
溶液を加熱容器に供給する供給手段とを備えている。
Then, from the viewpoint of suppressing the running cost of the solution sprayed toward the material to be dried, in consideration of reusing the solution without impairing the property of the solution, the solution is sprayed toward the material to be dried and is injected into the vacuum container. The apparatus is provided with a solution condensing means for collecting and condensing the vaporized solution existing in 1) and a supplying means for supplying the solution condensed by the solution condensing means to the heating container.

【0020】また、被乾燥物に向けて噴射される溶液は
常に浄化された新液状態であることが望ましく、更に、
被乾燥物に向けて噴射されて真空容器の底面に溜まった
溶液を回収して排出する溶液排出手段を備えている。
Further, it is desirable that the solution jetted toward the material to be dried is always in a fresh liquid state that has been purified.
A solution discharge means is provided for collecting and discharging the solution that has been sprayed toward the material to be dried and accumulated on the bottom surface of the vacuum container.

【0021】[0021]

【発明の実施の形態】以下に、本発明の実施形態につい
て図面を参照しながら説明する。先ず、本発明の第1実
施形態について説明する。図1は乾燥装置全体の構成図
が、図2は図1における乾燥部の要部構成図がそれぞれ
示されている。乾燥装置は、図1に示されるように、概
略、乾燥部と蒸留部とに大別される。なお、蒸留部は、
蒸留器、再熱器、凝縮器、冷熱源、温熱源、水分除去ユ
ニット等で構成されるが、本発明と直接関係しないの
で、詳細の説明は省略する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. First, a first embodiment of the present invention will be described. FIG. 1 is a block diagram of the entire drying apparatus, and FIG. 2 is a block diagram of a main part of a drying unit in FIG. As shown in FIG. 1, the drying device is roughly divided into a drying section and a distillation section. The distillation section
Although it is composed of a distiller, a reheater, a condenser, a cold heat source, a hot heat source, a moisture removing unit, etc., it is not directly related to the present invention, and therefore its detailed description is omitted.

【0022】図1、2に基づき、乾燥部の構成を以下に
説明する。1は真空容器、2は真空容器1の蓋、3は洗
浄液で洗浄された電子、機械、成形関連部品等の被乾燥
物、4は被乾燥物3を入れるバスケット、5は加熱容
器、6は炭化水素系の溶液、7はコイル状のヒータ、8
は加熱媒体、9は真空容器1と加熱容器5を連通する連
通配管、10は連通配管9の開閉を司るエアー駆動弁で
ある。
The structure of the drying section will be described below with reference to FIGS. Reference numeral 1 is a vacuum container, 2 is a lid of the vacuum container 1, 3 is an article to be dried such as electronic, mechanical, and molding-related parts that have been washed with a washing liquid, 4 is a basket for containing the article to be dried 3, 5 is a heating container, Hydrocarbon-based solution, 7 is a coiled heater, 8
Is a heating medium, 9 is a communication pipe that connects the vacuum container 1 and the heating container 5, and 10 is an air-driven valve that controls the opening and closing of the communication pipe 9.

【0023】真空容器1は、乾燥部の上方を形成し、上
部が開放した円筒状に形成されており、その開放した上
部には、基軸2aを中心に回動する蓋2を備えている。
つまり、蓋2を回動させて開いた状態で、被乾燥物3の
入った網状のバスケット4が真空容器1の内外へ出し入
れされ、一方、閉じた状態で真空容器1が密閉されるよ
うになっている。なお、真空容器1の側面には真空排気
口1aや吸気口1bが形成され、真空容器1の底面、内
側面には各々ヒータ21、22が設けられており、ま
た、圧力センサ31、温度センサ32、及び、液位セン
サ33も設けられている。
The vacuum container 1 is formed in a cylindrical shape which forms an upper part of the drying part and has an open upper part, and the open upper part is provided with a lid 2 which rotates about a base shaft 2a.
That is, with the lid 2 rotated and opened, the net-like basket 4 containing the material to be dried 3 is put in and taken out of the vacuum container 1, while the vacuum container 1 is sealed in the closed state. Has become. A vacuum exhaust port 1a and an intake port 1b are formed on the side surface of the vacuum container 1, heaters 21 and 22 are provided on the bottom surface and the inner side surface of the vacuum container 1, respectively, and a pressure sensor 31 and a temperature sensor are provided. 32 and a liquid level sensor 33 are also provided.

【0024】加熱容器5は、乾燥部の下方を形成し、熱
伝導性の優れた金属製の隔壁5aで上下2室に分割され
ていて、上室5bには、溶液6が収容され、圧力センサ
41、温度センサ42、及び、液位センサ43が設けら
れている。一方、下室5cにはヒータ7、圧力センサ4
4、温度センサ45、及び、過昇温防止スイッチ46が
設けられ、加熱媒体8が収容されている。つまり、ヒー
タ7の作動によって加熱媒体8が加熱され、その加熱さ
れた加熱媒体8の熱が隔壁5aを通じて、間接的に溶液
6が加熱されるようになっており、しかも、溶液6の加
熱温度が、直接的には温度センサ42で、間接的には温
度センサ45で検知され、仮にその温度が異常上昇した
場合には過昇温防止スイッチ46により、ヒータ7を停
止させるようになっていることから、火災や爆発の危険
性が極めて少ない構造といえる。なお、上室5bには、
排気口5d、供液口5e、及び、排出口5fが形成され
ている。
The heating container 5 forms the lower part of the drying section and is divided into two chambers, an upper chamber and a lower chamber, by a partition wall 5a made of a metal having excellent thermal conductivity. A sensor 41, a temperature sensor 42, and a liquid level sensor 43 are provided. On the other hand, the lower chamber 5c has a heater 7 and a pressure sensor 4 in the lower chamber 5c.
4, a temperature sensor 45, and an excessive temperature rise prevention switch 46 are provided, and the heating medium 8 is accommodated therein. That is, the heating medium 8 is heated by the operation of the heater 7, and the heat of the heated heating medium 8 indirectly heats the solution 6 through the partition wall 5a. However, the temperature sensor 42 directly detects the temperature, and the temperature sensor 45 indirectly detects the temperature. If the temperature rises abnormally, the heater 7 is stopped by the excessive temperature rise prevention switch 46. Therefore, it can be said that the structure has extremely low risk of fire and explosion. In addition, in the upper chamber 5b,
An exhaust port 5d, a liquid supply port 5e, and a discharge port 5f are formed.

【0025】また、連通配管9は真空容器1と加熱容器
5を連通しており、上端9aが真空容器1の底面に開口
し、下端9bが溶液6に浸漬していて、その経路にエア
ー駆動弁10が設けられている。
Further, the communication pipe 9 connects the vacuum container 1 and the heating container 5, the upper end 9a is opened to the bottom surface of the vacuum container 1, and the lower end 9b is immersed in the solution 6, and the path is driven by air. A valve 10 is provided.

【0026】真空容器1の真空排気口1a、及び、加熱
容器5の上室5aの排気口5dは、真空排気配管50か
ら分岐した2つの端各々に連結され、その分岐した真空
排気配管50の経路には各々エアー駆動弁51、52が
設けられていて、一方、真空排気配管50の他端は真空
ポンプ53に連結されている。更に、真空ポンプ53の
下流側にはセパレータ54が設けられている。つまり、
エアー駆動弁51又は52の開閉によって、真空容器1
又は加熱容器5の上室5aが減圧されるようになってい
る。
The vacuum exhaust port 1a of the vacuum container 1 and the exhaust port 5d of the upper chamber 5a of the heating container 5 are connected to each of the two ends branched from the vacuum exhaust pipe 50, and the branched vacuum exhaust pipe 50 is connected. Air driven valves 51 and 52 are provided in the respective paths, while the other end of the vacuum exhaust pipe 50 is connected to a vacuum pump 53. Further, a separator 54 is provided downstream of the vacuum pump 53. That is,
By opening and closing the air driven valve 51 or 52, the vacuum container 1
Alternatively, the upper chamber 5a of the heating container 5 is depressurized.

【0027】真空容器1の吸気口1bは、詳細は後述す
る乾燥が完了した後の真空容器1の真空状態を常圧に戻
す(ベント)ときに活用され、ベント用ガス配管61の
一端に接続されている。このベント用ガス配管61の他
端は、2本に分岐しており、一方は、エアー駆動弁62
やレギュレータ63等を介して、窒素ガス等の不活性ガ
スを封したガスボンベ64に接続され、他方は、逆止弁
65及びエアー駆動弁66を介して、圧縮空気や開放し
た大気等の空気67に接続されている。つまり、本実施
形態は、ベント用ガスとしてガスボンベ64中のガスと
空気67との2者を選択できるようにした形態である
が、もちろん、一方のみ備えていれば足りる。なお、予
防安全面の観点から、ベント用ガスとしては不活性ガス
を用いる方が好ましい。
The intake port 1b of the vacuum container 1 is utilized when returning the vacuum state of the vacuum container 1 to the normal pressure (venting) after completion of drying, which will be described in detail later, and is connected to one end of the vent gas pipe 61. Has been done. The other end of the gas pipe 61 for venting is branched into two, one of which is an air driven valve 62.
And a regulator 63 or the like to connect to a gas cylinder 64 that seals an inert gas such as nitrogen gas, and the other side, via a check valve 65 and an air drive valve 66, compresses air or air 67 such as open air. It is connected to the. That is, the present embodiment is a mode in which the gas in the gas cylinder 64 and the air 67 can be selected as the vent gas, but of course, it is sufficient if only one of them is provided. From the viewpoint of preventive safety, it is preferable to use an inert gas as the vent gas.

【0028】このような構成の乾燥装置の動作、及び、
その動作中の様子について、以下に説明する。図1に示
されるように、被乾燥物3を入れたバスケット4を真空
容器1内に収容して蓋2を閉じ、真空ポンプ53を作動
させるとともにエアー駆動弁51、52を開く。する
と、真空容器1内の空気が、真空排気口1aから真空排
気配管50を経て真空ポンプ53へ吸引されて真空引き
が開始され、加熱容器5の上室5b内の空気が、排気口
5dから真空排気配管50を経て真空ポンプ53へ吸引
されて減圧が開始される。また、加熱容器5の下室5c
のヒータ7を作動させて、上室5bに収容している溶液
6を加熱する。
The operation of the drying apparatus having such a structure, and
The state during the operation will be described below. As shown in FIG. 1, the basket 4 containing the material to be dried 3 is housed in the vacuum container 1, the lid 2 is closed, the vacuum pump 53 is operated, and the air drive valves 51, 52 are opened. Then, the air in the vacuum container 1 is sucked from the vacuum exhaust port 1a through the vacuum exhaust pipe 50 to the vacuum pump 53 to start vacuuming, and the air in the upper chamber 5b of the heating container 5 is exhausted from the exhaust port 5d. The vacuum pump 53 is sucked through the vacuum exhaust pipe 50 to start depressurization. Also, the lower chamber 5c of the heating container 5
The heater 7 is operated to heat the solution 6 contained in the upper chamber 5b.

【0029】その後、真空容器1内の圧力、加熱容器5
の上室5b内の圧力、及び、溶液6の温度が所定値にな
った時点で、連通配管9のエアー駆動弁10を開く。す
ると、図2に示されるように、溶液6は、連通配管9の
下端9bから上端9aに急激に吸い上げられ、沸騰状態
で上方に噴射され、真空容器1内の温度を急上昇させる
とともに、バスケット4内にある被乾燥物3に熱を与
え、被乾燥物3を急速に加熱する。ここで、被乾燥物3
に熱を与えた溶液6は、エンタルピを失って落下し、真
空容器1の底面に溜まっていくが、連通配管9の上端9
aから噴射される溶液6にとって、アクティブなバブリ
ング効果も有する噴射が維持され、実質的な障害とはな
らない。ただし、ある程度の量を超えると、悪影響が生
じるため、液位センサ33によりこの量を検知するよう
になっている。
Thereafter, the pressure in the vacuum container 1 and the heating container 5
When the pressure in the upper chamber 5b and the temperature of the solution 6 reach a predetermined value, the air drive valve 10 of the communication pipe 9 is opened. Then, as shown in FIG. 2, the solution 6 is rapidly sucked up from the lower end 9b to the upper end 9a of the communication pipe 9 and is jetted upward in the boiling state to rapidly raise the temperature in the vacuum container 1 and to cause the basket 4 to rise. The object 3 to be dried is heated to rapidly heat the object 3 to be dried. Here, the material to be dried 3
The solution 6 that has been heated to loses the enthalpy and drops, and accumulates on the bottom surface of the vacuum container 1, but the upper end 9 of the communication pipe 9
For the solution 6 injected from a, the injection having an active bubbling effect is maintained and does not become a substantial obstacle. However, when the amount exceeds a certain amount, an adverse effect occurs, so that the liquid level sensor 33 detects this amount.

【0030】次いで、被乾燥物3の品温が80〜100
℃程度になるような所定時間が経過した後、被乾燥物3
の加熱が完了し乾燥に移行する。ここで、真空容器1の
底面に溜まっている溶液6は乾燥にとって悪影響を及ぼ
すので、乾燥に移行する際に、真空容器1から排出して
おく必要がある。そこで、本実施形態では、真空排気配
管50に設けられたエアー駆動弁52を更に開き、加熱
容器5の上室5b内を減圧していく。すると、連通配管
9の上端9aからの溶液6の噴射は徐々に低下してい
き、加熱容器5の上室5b内の圧力が真空容器1内の圧
力と同等になると、真空容器1の底面に溜まっている溶
液6は、自重で加熱容器5の上室5b内に引き戻され、
真空容器1からの排出がなされる。なお、この排出時間
を短縮するためには、真空容器1の真空引きを停止させ
ることが有効であり、エアー駆動弁51を一時的に閉じ
てもよい。
Next, the temperature of the material to be dried 3 is 80 to 100.
After a predetermined time such that the temperature reaches about ℃, the dried material 3
After heating is completed, the process proceeds to drying. Here, since the solution 6 accumulated on the bottom surface of the vacuum container 1 has an adverse effect on the drying, it is necessary to discharge the solution 6 from the vacuum container 1 when shifting to the drying. Therefore, in the present embodiment, the air drive valve 52 provided in the vacuum exhaust pipe 50 is further opened to reduce the pressure in the upper chamber 5b of the heating container 5. Then, the injection of the solution 6 from the upper end 9a of the communication pipe 9 gradually decreases, and when the pressure in the upper chamber 5b of the heating container 5 becomes equal to the pressure in the vacuum container 1, the bottom surface of the vacuum container 1 The accumulated solution 6 is drawn back into the upper chamber 5b of the heating container 5 by its own weight,
The vacuum container 1 is discharged. In order to shorten the discharging time, it is effective to stop the evacuation of the vacuum container 1, and the air drive valve 51 may be temporarily closed.

【0031】そして、真空容器1の底面に溜まっている
溶液6の排出がなされた後、連通配管9のエアー駆動弁
10を閉じ、真空容器1の真空引きを継続すると、加温
された被乾燥物3に付着している洗浄液や溶液6は、被
乾燥物3から蒸発潜熱を奪いながら蒸発し、乾燥が行わ
れる。なお、加熱容器5の上室5bは常に負圧環境にお
かれていることはいうまでもない。
After the solution 6 accumulated on the bottom surface of the vacuum container 1 is discharged, the air driving valve 10 of the communication pipe 9 is closed and the vacuuming of the vacuum container 1 is continued. The cleaning liquid and the solution 6 attached to the object 3 are evaporated while removing latent heat of evaporation from the object to be dried 3 to be dried. Needless to say, the upper chamber 5b of the heating container 5 is always in a negative pressure environment.

【0032】乾燥が完了すると、真空排気配管50のエ
アー駆動弁51を閉じる。次いで、ベント用ガス配管6
1のエアー駆動弁62又は66を開き、ガスボンベ64
中のガス又は空気67を真空容器1の吸気口1bから導
入し、真空容器1内の圧力を常圧に戻す。そして、蓋2
を開き、乾燥した被乾燥物3を入れたバスケット4を真
空容器1から取り出して、終了する。
When the drying is completed, the air drive valve 51 of the vacuum exhaust pipe 50 is closed. Next, vent gas pipe 6
1. Open the air driven valve 62 or 66 of No. 1 and open the gas cylinder 64.
The gas or air 67 inside is introduced from the intake port 1b of the vacuum container 1, and the pressure in the vacuum container 1 is returned to normal pressure. And the lid 2
Is opened, the basket 4 containing the dried material 3 is taken out from the vacuum container 1, and the process is completed.

【0033】なお、被乾燥物3の加熱や乾燥中、真空容
器1内に存する気化した洗浄液や溶液6は、真空排気口
1aから真空排気配管50を経て真空ポンプ53へ吸引
され、セパレータ54や蒸留部を経由して浄化された
後、フィルタ56やエアー駆動弁57が経路に設けられ
た給液配管55を介して、供液口5eから加熱容器5の
上室5bに投入される。この投入は、真空ポンプ53に
よる負圧力を利用するので専用のポンプを設けなくとも
エアー駆動弁57の開閉動作のみで行え、また、このエ
アー駆動弁57は、液位センサ43からの出力により作
動するようになっている。
During heating or drying of the material 3 to be dried, the vaporized cleaning liquid or solution 6 present in the vacuum container 1 is sucked from the vacuum exhaust port 1a to the vacuum pump 53 via the vacuum exhaust pipe 50, and the separator 54 or After being purified through the distillation section, a filter 56 and an air drive valve 57 are introduced into the upper chamber 5b of the heating container 5 from the liquid supply port 5e through a liquid supply pipe 55 provided in the path. Since this injection uses the negative pressure of the vacuum pump 53, it can be performed only by opening and closing the air drive valve 57 without providing a dedicated pump. Further, the air drive valve 57 is operated by the output from the liquid level sensor 43. It is supposed to do.

【0034】ここで、真空ポンプ53としては、往復
式、液封式、回転式等の真空ポンプが挙げられるが、本
実施形態では、以下の理由から、液封式の真空ポンプを
採用している。真空容器1内で気化した洗浄液や溶液6
が吸入されても、液体を隔ててポンプ回転部と接触する
ようになっているので、通常のシール方式の真空ポンプ
とは異なり金属摺動面摩擦による火花や熱の発生が少な
く安全性に富み、支障もないからである。
Here, the vacuum pump 53 may be a reciprocating type, a liquid ring type, a rotary type vacuum pump or the like. In the present embodiment, a liquid ring type vacuum pump is adopted for the following reason. There is. Cleaning solution or solution 6 vaporized in the vacuum container 1
Even if inhaled, it separates the liquid and comes into contact with the rotating part of the pump, so unlike the normal seal type vacuum pump, there is little generation of sparks or heat due to friction on the metal sliding surface, and it is highly safe. , Because there is no problem.

【0035】また、真空容器1の底面に溜まっている溶
液6を再度被乾燥物3の加熱に利用する目的で、本実施
形態では、真空容器1の底面にヒータ21を設けてい
る。真空容器1の底面に溜まっている溶液6は、ヒータ
21によって加熱、蒸気化され、真空容器1内に向かっ
て拡散し、被乾燥物3に再度熱を与える。発明者らの実
験においては、20〜25%の乾燥時間の短縮が図れ、
この効果は極めて有効である。更に、真空容器1内の温
度をより急速に高めるために、真空容器1の内側面にヒ
ータ22が設けられている。一般に、真空容器1の側面
は熱容量が大きいため昇温し難く、真空容器1内に存す
る蒸気化した溶液6がこの側面に接触、凝縮して残存す
ると、乾燥を阻害してしまうおそれがあるが、このヒー
タ22の設置により改善が見込まれ、発明者らの実験に
おいては、5%程度の乾燥時間の短縮が図れた。
Further, in order to utilize the solution 6 accumulated on the bottom surface of the vacuum container 1 for heating the material 3 to be dried again, the heater 21 is provided on the bottom surface of the vacuum container 1 in this embodiment. The solution 6 accumulated on the bottom surface of the vacuum container 1 is heated and vaporized by the heater 21, diffuses toward the inside of the vacuum container 1, and heats the material to be dried 3 again. In the experiments by the inventors, the drying time can be shortened by 20 to 25%,
This effect is extremely effective. Further, in order to increase the temperature inside the vacuum container 1 more rapidly, a heater 22 is provided on the inner surface of the vacuum container 1. In general, the side surface of the vacuum container 1 has a large heat capacity, and thus it is difficult to raise the temperature, and if the vaporized solution 6 existing in the vacuum container 1 contacts with this side surface and condenses and remains, there is a possibility that drying may be hindered. The installation of the heater 22 is expected to improve, and in the experiments conducted by the inventors, the drying time was reduced by about 5%.

【0036】また、連通配管9に設けられているエアー
駆動弁10は、真空容器1の圧力センサ31と、加熱容
器5の圧力センサ41と温度センサ42から出力される
値に基づき、開閉度合いが自動的に調節されるようにな
っている。従って、被乾燥物3に向けて噴射された沸騰
状態の溶液6の状態、及び、被乾燥物3の品温状態を常
に適正状態に安定化させることができる。もちろん、こ
のような開閉度合いの調節機構を備えずに、エアー駆動
弁10を開いた状態に維持させて溶液6を常時噴射して
も構わないが、特に、複雑な形状の被乾燥物3の場合、
例えば、溶液6を間欠噴射させるような調節機構を備え
ると、噴射が急激に立ち上がったり立ち下がったりする
作用によって、溶液6が噴射される有効な領域が拡大
し、常時噴射では到達が困難な部位にも容易に到達でき
るので、この調節機構は極めて有効といえる。
Further, the air drive valve 10 provided in the communication pipe 9 has an opening / closing degree based on the values output from the pressure sensor 31 of the vacuum container 1, the pressure sensor 41 of the heating container 5 and the temperature sensor 42. It is adjusted automatically. Therefore, it is possible to always stabilize the state of the boiling solution 6 sprayed toward the article to be dried 3 and the product temperature state of the article to be dried 3 to an appropriate state. Of course, it is also possible to maintain the air-driven valve 10 in an open state and constantly inject the solution 6 without providing such an opening / closing degree adjusting mechanism. If
For example, if an adjusting mechanism for intermittently jetting the solution 6 is provided, the effective region where the solution 6 is jetted is expanded due to the action of the jetting rapidly rising or falling, and it is difficult to reach the area by constant jetting. It can be said that this adjusting mechanism is extremely effective because it can be easily reached.

【0037】次に、本発明の第2実施形態について、図
3を参照しながら説明する。図3は第2実施形態の乾燥
部の要部構成図が示されている。なお、図中で第1実施
形態と同じ名称で同じ機能を果たす部分には同一の符号
を付し、重複する説明は省略し、相違する点について述
べる。
Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 3 shows a configuration diagram of a main part of the drying unit of the second embodiment. In the drawings, parts having the same names and the same functions as those in the first embodiment are designated by the same reference numerals, duplicate description will be omitted, and different points will be described.

【0038】先ず、本実施形態の目的について触れてお
く。一般的に、洗浄が行われた被乾燥物は、汚れや付着
物である異物が完全に除去されている訳ではない。被乾
燥物である部品の形状や大きさ、或いは、汚染の程度に
もよるが、仮に、汚れや異物の付着重量を100とした
指標で表すと、洗浄によって70〜80程度の汚れや異
物を除去できればよいとされ、残りの20〜30程度の
汚れや異物は、被乾燥物に残存して乾燥装置に持ち込ま
れてしまうことになる。つまり、この持ち込まれる汚れ
や異物は、1つの被乾燥物に対しては微量であっても、
幾つもの被乾燥物に対しては決して無視できず、繰り返
し乾燥が行われるにつれ、特に、被乾燥物を加熱する溶
液に混入して蓄積され、最終的に乾燥後の被乾燥物の表
面に残存し外観品位の低下につながることになる。そこ
で、本実施形態では、このような問題の解決を図ってい
る。
First, the purpose of this embodiment will be described. In general, the dried material that has been washed does not mean that foreign matters such as dirt and adhered matter are completely removed. Depending on the shape and size of the part to be dried, or the degree of contamination, if we express it as an index with the adhered weight of dirt and foreign matter as 100, then about 70 to 80 dirt and foreign matter will be washed. It suffices if it can be removed, and the remaining dirt or foreign matter of about 20 to 30 remains on the material to be dried and is brought into the drying device. In other words, even if a small amount of dirt or foreign matter is brought in to one material to be dried,
It cannot be neglected for a number of materials to be dried, and as it is repeatedly dried, it is mixed especially in the solution that heats the material to be dried and accumulated, and finally remains on the surface of the material to be dried. However, this will lead to deterioration in appearance quality. Therefore, in this embodiment, such a problem is solved.

【0039】本実施形態では、真空容器1の内側面に凝
縮コイル71が設けられ、その凝縮コイル71の内側に
円筒状の隔壁72が備えられている。隔壁72の下部は
樋状部分72aが形成され、その樋状部分72aの近傍
に真空排気口1aが形成されている。また、加熱容器5
は、隔壁5gで右室5hと左室5iに分割されており、
右室5hには、ヒータ7が設けられ、このヒータ7によ
って直接的加熱される溶液6が収容されている。もちろ
ん、加熱媒体を介して間接的に加熱するようにしても構
わない。なお、右室5hには排気口5d、供液口5e、
及び、排出口5fが形成され、温度センサ42、過昇温
防止スイッチ46、及び、液位センサ43が設けられて
いる。真空容器1と加熱容器5の右室5hを連通する連
通配管9は、上端9aが真空容器1の底面を貫通して真
空容器1の内部に開口し、下端9bが溶液6に浸漬して
いる。
In this embodiment, a condenser coil 71 is provided on the inner surface of the vacuum container 1, and a cylindrical partition wall 72 is provided inside the condenser coil 71. A gutter-shaped portion 72a is formed in the lower portion of the partition wall 72, and a vacuum exhaust port 1a is formed in the vicinity of the gutter-shaped portion 72a. Also, the heating container 5
Is divided into a right chamber 5h and a left chamber 5i by a partition wall 5g,
A heater 7 is provided in the right chamber 5h, and the solution 6 directly heated by the heater 7 is stored in the right chamber 5h. Of course, you may make it heat indirectly via a heating medium. The right chamber 5h has an exhaust port 5d, a liquid supply port 5e,
Further, the discharge port 5f is formed, and the temperature sensor 42, the excessive temperature rise prevention switch 46, and the liquid level sensor 43 are provided. In the communication pipe 9 that connects the vacuum chamber 1 and the right chamber 5h of the heating container 5, the upper end 9a penetrates the bottom surface of the vacuum container 1 and opens inside the vacuum container 1, and the lower end 9b is immersed in the solution 6. .

【0040】一方、左室5iは、後述する真空容器1の
底面に溜まった溶液6が回収される回収タンクの役割を
果たし、回収配管11で真空容器1と連通しており、そ
の回収配管11の上端11aは真空容器1の底面に開口
し、下端11bは左室5iの上面に開口している。な
お、左室5iには排気口5j及び排出口5kが形成さ
れ、液位センサ47が設けられている。
On the other hand, the left chamber 5i plays a role of a recovery tank for recovering the solution 6 accumulated on the bottom surface of the vacuum container 1 which will be described later, and communicates with the vacuum container 1 through a recovery pipe 11, and the recovery pipe 11 The upper end 11a of the above is opened to the bottom surface of the vacuum container 1, and the lower end 11b is opened to the upper surface of the left chamber 5i. An exhaust port 5j and an exhaust port 5k are formed in the left chamber 5i, and a liquid level sensor 47 is provided.

【0041】このような構成における乾燥装置の特筆す
べき動作について以下に述べる。第1に、被乾燥物3の
加熱や乾燥中、真空容器1内に存する気化した洗浄液や
溶液6は、真空排気口1aからの吸引力により、真空容
器1の側壁と隔壁72との隙間を上方から通過し、凝縮
コイル71によって冷却されて液化する。その液化した
溶液6は、樋状部分72aに集まり、真空排気口1aか
ら真空排気配管50を経てエジェクタ57等を介し真空
ポンプ53へ吸引され、セパレータ54を経由して浄化
された後、フィルタ56やエアー駆動弁57が経路に設
けられた給液配管55を介して、供液口5eから加熱容
器5の右室5hに投入される。
The notable operation of the drying device having such a configuration will be described below. First, during heating or drying of the material 3 to be dried, the vaporized cleaning liquid or solution 6 present in the vacuum container 1 causes a gap between the side wall of the vacuum container 1 and the partition wall 72 due to the suction force from the vacuum exhaust port 1a. It passes from above and is cooled and liquefied by the condenser coil 71. The liquefied solution 6 collects in the gutter-shaped portion 72a, is sucked from the vacuum exhaust port 1a through the vacuum exhaust pipe 50 to the vacuum pump 53 through the ejector 57 and the like, is purified via the separator 54, and is then filtered by the filter 56. An air-driven valve 57 or an air-driven valve 57 is introduced into the right chamber 5h of the heating container 5 from the liquid supply port 5e through a liquid supply pipe 55 provided in the path.

【0042】第2に、真空容器1の底面に溜まった溶液
6は、第1実施形態のように、連通配管9を通じて引き
戻されるのではなく、回収配管11を通じて回収タンク
である左室5iに回収される。これは、排気口5jから
真空ポンプ53へ通じる真空排気配管50に設けられた
エアー駆動弁56、58を開き、左室5i内を減圧して
いくことにより達成できる。従って、真空容器1の底面
に溜まった溶液6は、洗浄後に被乾燥物3に残存してい
る汚れ、異物、油脂等が混入しているが、個別の回収タ
ンク(左室5i)に回収されることにより、右室5hに
ある溶液6は常に汚染されていない浄化された新液状態
に維持され、例え繰り返し乾燥が行われたとしても、乾
燥後の被乾燥物の外観品位を損なうことは全くない。
Secondly, the solution 6 accumulated on the bottom surface of the vacuum container 1 is not drawn back through the communication pipe 9 as in the first embodiment, but is collected in the left chamber 5i which is a collection tank through the collection pipe 11. To be done. This can be achieved by opening the air drive valves 56 and 58 provided in the vacuum exhaust pipe 50 leading from the exhaust port 5j to the vacuum pump 53, and reducing the pressure in the left chamber 5i. Therefore, the solution 6 accumulated on the bottom surface of the vacuum container 1 contains dirt, foreign matter, oil and fat remaining in the material to be dried 3 after cleaning, but is collected in a separate collection tank (left chamber 5i). As a result, the solution 6 in the right chamber 5h is always maintained in a purified new liquid state that is not contaminated, and even if it is repeatedly dried, it does not impair the appearance quality of the dried material. Not at all.

【0043】なお、本発明は上記第1、2実施形態に限
定される訳ではなく、本発明の趣旨を逸脱しない範囲
で、種々の変更が可能である。例えば、溶液6として、
炭化水素系の溶液の代わりに非燃性の水を適用しても構
わないが、乾燥性を考慮すると蒸発潜熱が水に対して1
/10程度と格段に低い炭化水素系の溶液を適用するの
が好ましい。また、乾燥装置には洗浄工程を含んでいて
も構わず、この際、乾燥前の洗浄に用いる洗浄液と乾燥
工程にもちいる溶液6とは、同種であることが望まし
い。更に、真空容器1の底面に設けられるヒータ21
は、その真空容器1の底面に溜まっている溶液6を加
熱、蒸気化することができる限り、真空容器の底面を覆
うジャケットタイプのヒータであってもよい。
The present invention is not limited to the first and second embodiments described above, and various modifications can be made without departing from the spirit of the present invention. For example, as the solution 6,
Although non-flammable water may be applied instead of the hydrocarbon-based solution, the latent heat of vaporization is 1 with respect to water considering the drying property.
It is preferable to apply a hydrocarbon-based solution having a remarkably low level of about / 10. Further, the drying device may include a cleaning step, and in this case, it is desirable that the cleaning liquid used for cleaning before drying and the solution 6 used in the drying step are of the same type. Further, the heater 21 provided on the bottom surface of the vacuum container 1
May be a jacket type heater that covers the bottom surface of the vacuum container 1 as long as the solution 6 accumulated on the bottom surface of the vacuum container 1 can be heated and vaporized.

【0044】[0044]

【発明の効果】以上説明した通り本発明の乾燥装置によ
れば、被乾燥物を収容し真空状態を取り得る真空容器
と、加熱された溶液を収容する加熱容器と、真空容器と
加熱容器を連通する配管と、を備え、配管の一端は被乾
燥物に向けて開口し、配管の他端は溶液に浸漬してお
り、真空容器が真空状態のときに配管が開放されて、溶
液が沸騰状態で配管の前記一端から被乾燥物に向けて噴
射されるようになっているので、被乾燥物である部品に
効率よく熱を与えることができ、乾燥時間を短くするこ
とが可能となる。しかも、溶液を噴射するための噴射用
のポンプ等を設ける必要がなく、構造がシンプルになる
ので、低コストで得ることができる。
As described above, according to the drying apparatus of the present invention, there are provided a vacuum container for containing a material to be dried and a vacuum state, a heating container for containing a heated solution, a vacuum container and a heating container. And a pipe that communicates with each other, one end of the pipe opens toward the material to be dried, and the other end of the pipe is immersed in the solution.When the vacuum container is in a vacuum state, the pipe is opened and the solution boils. In this state, since the one end of the pipe is sprayed toward the material to be dried, heat can be efficiently applied to the component that is the material to be dried, and the drying time can be shortened. Moreover, since it is not necessary to provide a pump or the like for injecting the solution, and the structure is simple, it can be obtained at low cost.

【0045】例えば、その溶液が炭化水素系の溶液であ
ると、その蒸発潜熱が低いことから、被乾燥物の品温が
それほど高くなくても蒸発でき、乾燥時間に悪影響を及
ぼさない。
For example, when the solution is a hydrocarbon type solution, since the latent heat of vaporization is low, the material to be dried can be vaporized even if the product temperature is not so high, and the drying time is not adversely affected.

【0046】また、加熱容器が隔壁で2室に分割されて
いて、一方に溶液を収容し、他方に熱源を設けており、
熱源からの熱が隔壁を通じて溶液に与えられ、溶液が加
熱されるようになっていると、溶液を加熱する際、ヒー
タ等の熱源が直接溶液に触れることがないので、火災や
爆発のおそれが極めて少ない。
Further, the heating container is divided into two chambers by a partition wall, one of which contains a solution and the other of which is provided with a heat source.
If the heat from the heat source is applied to the solution through the partition wall and the solution is heated, the heat source such as a heater does not touch the solution directly when heating the solution, which may cause a fire or explosion. Very few.

【0047】また、配管の経路に駆動弁が設けられてお
り、真空容器内の圧力と、溶液が収容されている加熱容
器内の圧力と、溶液の温度とに基づき、駆動弁の開閉度
合いが調節されるようになっていると、被乾燥物に向け
て噴射された沸騰状態の溶液の状態、及び、被乾燥物の
品温状態を安定化させることができるので、乾燥時間の
効率が増し、乾燥後の被乾燥物の外観品位も優れたもの
となる。
Further, a drive valve is provided in the path of the pipe, and the opening / closing degree of the drive valve is determined based on the pressure in the vacuum container, the pressure in the heating container containing the solution, and the temperature of the solution. If it is adjusted, it is possible to stabilize the state of the solution in a boiling state sprayed toward the material to be dried and the temperature state of the material to be dried, so that the efficiency of the drying time is increased. Also, the appearance quality of the dried object becomes excellent.

【0048】更に、真空容器の内側面と底面とのうち、
少なくとも1つに加熱手段を設けていると、被乾燥物に
熱を与えて凝縮した溶液が再度蒸気化して被乾燥物に熱
を与えたり、真空容器内の温度をより急速に高めるたり
することができるので、より効率が上がる。
Further, of the inner surface and the bottom surface of the vacuum container,
When at least one heating means is provided, heat is applied to the material to be dried and the condensed solution is vaporized again to heat the material to be dried, or the temperature in the vacuum container is raised more rapidly. It is possible to improve efficiency.

【0049】そして、被乾燥物に向けて噴射され真空容
器内に存する蒸気化した溶液を回収し凝縮させる溶液凝
縮手段と、溶液凝縮手段により凝縮した溶液を加熱容器
に供給する供給手段とを備えていると、溶液の性質を損
なわず再利用することが可能となり、ランニングコスト
を抑えることができる。
Then, the apparatus is provided with a solution condensing means for collecting and condensing the vaporized solution which is sprayed toward the material to be dried and is present in the vacuum vessel, and a supply means for supplying the solution condensed by the solution condensing means to the heating vessel. In this case, the solution can be reused without impairing the properties of the solution, and the running cost can be suppressed.

【0050】更に、被乾燥物に向けて噴射され真空容器
の底面に溜まった溶液を回収して排出する溶液排出手段
を備えているので、被乾燥物に向けて噴射される溶液は
常に浄化された新液状態に維持され、例え繰り返し乾燥
が行われたとしても、乾燥後の被乾燥物の外観品位を損
なうことはなくなる。
Further, since a solution discharging means for collecting and discharging the solution sprayed toward the material to be dried and accumulated on the bottom surface of the vacuum container is provided, the solution sprayed toward the material to be dried is always purified. Even if it is maintained in a new liquid state and is repeatedly dried, it does not impair the appearance quality of the dried material.

【図面の簡単な説明】[Brief description of drawings]

【図1】 第1実施形態の乾燥装置全体の構成を表す
構成図である。
FIG. 1 is a configuration diagram illustrating an overall configuration of a drying device according to a first embodiment.

【図2】 第1実施形態の乾燥部の構成を表す構成図
である。
FIG. 2 is a configuration diagram illustrating a configuration of a drying unit according to the first embodiment.

【図3】 第2実施形態の乾燥部の構成を表す構成図
である。
FIG. 3 is a configuration diagram illustrating a configuration of a drying unit according to a second embodiment.

【符号の説明】[Explanation of symbols]

1 真空容器 2 蓋 3 被乾燥物 4 バスケット 5 加熱容器 6 溶液 7 ヒータ 8 加熱媒体 9 連通配管 10 エアー駆動弁 50 真空排気配管 53 真空ポンプ 1 vacuum container 2 lid 3 Items to be dried 4 baskets 5 heating vessels 6 solution 7 heater 8 heating medium 9 communication piping 10 Air driven valve 50 Vacuum exhaust pipe 53 Vacuum pump

───────────────────────────────────────────────────── フロントページの続き (72)発明者 水戸 清 大阪府八尾市跡部本町4丁目1番33号 シ ャープマニファクチャリングシステム株式 会社内 (72)発明者 太田 勝久 大阪府八尾市跡部本町4丁目1番33号 シ ャープマニファクチャリングシステム株式 会社内 (72)発明者 増岡 真二 大阪府八尾市跡部本町4丁目1番33号 シ ャープマニファクチャリングシステム株式 会社内 (72)発明者 浅田 裕 大阪府八尾市跡部本町4丁目1番33号 シ ャープマニファクチャリングシステム株式 会社内 Fターム(参考) 3L113 AA01 AB01 AC08 AC21 AC24 AC48 AC57 AC63 AC67 BA01 BA34 CA08 CA10 CB05 CB13 CB16 CB28 CB34 DA06 DA10 DA13 DA21 DA24    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kiyoshi Mito             4-133, Atobe Honmachi, Yao City, Osaka Prefecture             Share Manufacturing Systems Co., Ltd.             In the company (72) Inventor Katsuhisa Ota             4-133, Atobe Honmachi, Yao City, Osaka Prefecture             Share Manufacturing Systems Co., Ltd.             In the company (72) Inventor Shinji Masuoka             4-133, Atobe Honmachi, Yao City, Osaka Prefecture             Share Manufacturing Systems Co., Ltd.             In the company (72) Inventor Yutaka Asada             4-133, Atobe Honmachi, Yao City, Osaka Prefecture             Share Manufacturing Systems Co., Ltd.             In the company F term (reference) 3L113 AA01 AB01 AC08 AC21 AC24                       AC48 AC57 AC63 AC67 BA01                       BA34 CA08 CA10 CB05 CB13                       CB16 CB28 CB34 DA06 DA10                       DA13 DA21 DA24

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 被乾燥物を収容し真空状態を取り得る真
空容器と、加熱された溶液を収容する加熱容器と、前記
真空容器と前記加熱容器を連通する配管と、を備え、 前記配管の一端は前記被乾燥物に向けて開口し、前記配
管の他端は前記溶液に浸漬しており、 前記真空容器が真空状態のときに前記配管が開放され
て、前記溶液が沸騰状態で前記配管の前記一端から前記
被乾燥物に向けて噴射されることを特徴とする乾燥装
置。
1. A vacuum container for accommodating a material to be dried and capable of being in a vacuum state, a heating container for accommodating a heated solution, and a pipe for connecting the vacuum container and the heating container to each other. One end opens toward the material to be dried, the other end of the pipe is immersed in the solution, the pipe is opened when the vacuum container is in a vacuum state, and the pipe is in a boiling state of the solution. The drying device is sprayed from the one end toward the object to be dried.
【請求項2】 前記溶液は炭化水素系の溶液であること
を特徴とする請求項1に記載の乾燥装置。
2. The drying device according to claim 1, wherein the solution is a hydrocarbon-based solution.
【請求項3】 前記加熱容器は隔壁で2室に分割されて
いて、一方に前記溶液を収容し、他方に熱源を設けてお
り、 前記熱源からの熱が前記隔壁を通じて前記溶液に与えら
れ、前記溶液が加熱されることを特徴とする請求項1又
は2に記載の乾燥装置。
3. The heating container is divided into two chambers by a partition wall, one of which contains the solution and the other of which is provided with a heat source, and heat from the heat source is applied to the solution through the partition wall. The drying apparatus according to claim 1, wherein the solution is heated.
【請求項4】 前記配管の経路に駆動弁が設けられてお
り、 前記真空容器内の圧力と、前記溶液が収容されている前
記加熱容器内の圧力と、前記溶液の温度とに基づき、前
記駆動弁の開閉度合いが調節されることを特徴とする請
求項1から3のいずれかに記載の乾燥装置。
4. A drive valve is provided in the path of the pipe, and based on the pressure in the vacuum container, the pressure in the heating container containing the solution, and the temperature of the solution, The drying device according to any one of claims 1 to 3, wherein the degree of opening and closing of the drive valve is adjusted.
【請求項5】 前記真空容器の内側面と底面とのうち、
少なくとも1つに加熱手段を設けたことを特徴とする請
求項1から4のいずれかに記載の乾燥装置。
5. Of the inner surface and the bottom surface of the vacuum container,
The drying device according to any one of claims 1 to 4, wherein at least one of them is provided with a heating means.
【請求項6】 前記被乾燥物に向けて噴射されて前記真
空容器内に存する蒸気化した前記溶液を回収し凝縮させ
る溶液凝縮手段と、前記溶液凝縮手段により凝縮した前
記溶液を前記加熱容器に供給する供給手段とを備えたこ
とを特徴とする請求項1から5のいずれかに記載の乾燥
装置。
6. A solution condensing means for collecting and condensing the vaporized solution present in the vacuum vessel by being jetted toward the object to be dried, and the solution condensed by the solution condensing means in the heating vessel. The supply device for supplying is provided, The drying apparatus in any one of Claim 1 to 5 characterized by the above-mentioned.
【請求項7】 更に、前記被乾燥物に向けて噴射されて
前記真空容器の底面に溜まった前記溶液を回収して排出
する溶液排出手段を備えたことを特徴とする請求項6に
記載の乾燥装置。
7. The solution discharge means for collecting and discharging the solution sprayed toward the object to be dried and accumulated on the bottom surface of the vacuum container, according to claim 6. Drying device.
JP2001213459A 2001-07-13 2001-07-13 Drying equipment Expired - Fee Related JP3818876B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001213459A JP3818876B2 (en) 2001-07-13 2001-07-13 Drying equipment
CNA028140990A CN1527749A (en) 2001-07-13 2002-07-12 Washing device and washing method
PCT/JP2002/007137 WO2003006184A1 (en) 2001-07-13 2002-07-12 Washing device and washing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001213459A JP3818876B2 (en) 2001-07-13 2001-07-13 Drying equipment

Publications (2)

Publication Number Publication Date
JP2003028570A true JP2003028570A (en) 2003-01-29
JP3818876B2 JP3818876B2 (en) 2006-09-06

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Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100370205C (en) * 2006-12-31 2008-02-20 山东东岳高分子材料有限公司 Drying method for teflon dispersed resin
JP2009222251A (en) * 2008-03-13 2009-10-01 Japan Field Kk Heating method of heating target liquid and its device
KR102098205B1 (en) * 2018-12-07 2020-05-26 주식회사대상기술 Apparatus and method for drying wet object

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100370205C (en) * 2006-12-31 2008-02-20 山东东岳高分子材料有限公司 Drying method for teflon dispersed resin
JP2009222251A (en) * 2008-03-13 2009-10-01 Japan Field Kk Heating method of heating target liquid and its device
KR102098205B1 (en) * 2018-12-07 2020-05-26 주식회사대상기술 Apparatus and method for drying wet object

Also Published As

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