JP6320969B2 - Cleaning liquid distillation regeneration device and parts cleaning device - Google Patents

Description

The present invention relates to a cleaning liquid distillation regenerating apparatus and a parts cleaning apparatus for distilling and regenerating a cleaning liquid used for cleaning mechanical parts and plated parts.

  Various types of dirt such as machining oil such as cutting oil, flux, dust, and the like adhere to various parts such as metal machine parts, plated parts, and electronic parts in the manufacturing process and assembly process. As a parts cleaning device that cleans workpieces such as machine parts and electronic components that are contaminated with such dirt, a cleaning agent containing dirt components is used so that the cleaning agent used to clean the workpiece can be used again. A device equipped with a regenerator consisting of a distillation kettle or the like for distilling water has been developed (for example, Patent Document 1). In recent years, a cleaning liquid that does not have flammability, that is, a non-flammable cleaning liquid, has been developed as a cleaning liquid that cleans machine oils and fluxes such as cutting oil (for example, Patent Document 2). When such a non-flammable cleaning liquid is used, measures such as explosion prevention and fire prevention are unnecessary, and management as stipulated in the Fire Service Law is also unnecessary.

JP 2006-5502 A JP2013-129815A

  By the way, said washing | cleaning liquid has nonflammability by containing fixed water | moisture content in a washing | cleaning liquid. However, in the above-described component cleaning apparatus, there is a possibility that the moisture concentration may decrease due to the volatilization of moisture in the component cleaning apparatus. As a result, when the cleaning liquid used for cleaning is used again, there is a possibility that non-flammability may disappear from the regenerated cleaning liquid. In other words, there is a risk that a flash point may appear in the cleaning liquid that is recycled and used.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a cleaning liquid distillation regenerating apparatus and a parts cleaning apparatus capable of adjusting the water concentration in the cleaning liquid.

The present invention has been proposed in order to achieve the above-mentioned object, and the one according to claim 1 is a distillation pot for vaporizing a cleaning liquid containing moisture;
An adjustment mechanism for condensing the vapor of the vaporized cleaning liquid and adjusting the moisture concentration of the cleaning liquid in a state where the pressure is reduced by the pressure reduction mechanism;
A moisture replenishment mechanism for replenishing moisture in the adjustment mechanism;
A controller for controlling the replenishment of water into the adjustment mechanism of the water replenishment mechanism,
The adjustment mechanism is
A condenser for condensing and liquefying the vapor of the cleaning liquid vaporized by the distillation kettle;
A tank for storing the liquefied cleaning liquid;
A pressure reducing mechanism for making the inside of the capacitor negative pressure,
The moisture replenishment mechanism is
A moisture channel through which moisture flows,
A water replenishment valve provided in the middle of the water flow path,
The decompression mechanism is
A circulation channel that exits the tank and returns to the tank;
An ejector provided in the middle of the circulation flow path;
A pump for circulating the cleaning liquid in the circulation flow path,
The capacitor is connected to the ejector;
The ejector is configured so that the cleaning liquid in the capacitor is sucked into the circulation flow path,
When the water concentration of the cleaning liquid introduced into the distillation kettle or the water concentration of the distilled cleaning liquid is lower than a predetermined value, the control device opens the water replenishing valve to adjust the adjusting mechanism from the water replenishing mechanism. The cleaning liquid distillation regenerator is characterized by executing control for replenishing water in the decompressed cleaning liquid.

The thing of Claim 2 is equipped with the moisture concentration detection mechanism which detects the moisture concentration of the distilled cleaning liquid,
The control device executes control for replenishing moisture from the moisture replenishing mechanism into the adjustment mechanism when the moisture concentration of the cleaning liquid detected by the moisture concentration detecting mechanism is lower than a predetermined value. The cleaning liquid distillation regenerating apparatus according to claim 1.

According to a third aspect of the present invention, the cleaning liquid has non-flammability when the concentration of contained water is at least a predetermined minimum moisture concentration,
The control device executes control for replenishing moisture from the moisture replenishing mechanism into the adjustment mechanism when the moisture concentration of the cleaning liquid detected by the moisture concentration detecting mechanism is lower than the minimum moisture concentration. The cleaning liquid distillation regenerating apparatus according to claim 1 or 2.

According to a fourth aspect of the present invention, there is provided a component cleaning apparatus including the cleaning liquid distillation regenerating apparatus according to any one of the first to third aspects.

According to the present invention, the following excellent effects can be obtained.
That is, the moisture concentration of the cleaning liquid can be adjusted, and the occurrence of a flash point in the cleaning liquid can be suppressed.

It is the schematic which shows the structure of a components washing | cleaning apparatus. It is the schematic which shows the structure of a distillation reproduction apparatus. It is a schematic block diagram of a control apparatus.

  Hereinafter, as an embodiment for carrying out the present invention, a component cleaning apparatus 1 including a cleaning liquid distillation regenerating apparatus 24 will be described as an example. FIG. 1 is a schematic diagram showing a configuration of a component cleaning apparatus 1 according to the present invention, and FIG. 2 is a schematic diagram showing a configuration of a cleaning liquid distillation regenerator 24 incorporated in the component cleaning apparatus 1. FIG. 3 is a schematic block diagram of a control device 50 that controls the component cleaning device 1 and the cleaning liquid distillation regenerating device 24. In addition, the white arrow in FIG. 2 represents the flow of the cleaning solvent, and the white arrow represented by a broken line represents the flow of the cooling water. In FIG. 2, the cooling system through which the cooling water flows is indicated by a broken line.

  As shown in FIG. 1, cleaning and drying of workpieces 2 such as machine parts and electronic components to which dirt such as machine oil and fat is attached are performed by cleaning a plurality of workpieces 2 placed in a basket 4 in a cleaning / drying tank 3. Accommodated. In the cleaning / drying tank 3, the workpiece 2 is cleaned using a non-flammable cleaning liquid (hereinafter referred to as a cleaning solvent or simply a solvent). In this embodiment, an immersion cleaning step is performed in which the substrate is immersed in a cleaning solvent and cleaned by applying ultrasonic vibration, and then a vapor cleaning step is performed in which the vapor of the cleaning solvent is introduced to clean the workpiece 2; Further, a vacuum drying process for drying the workpiece 2 after the steam cleaning is performed.

  The cleaning solvent in the present embodiment includes a non-flammable solvent by containing moisture. For example, it contains 10% to 20% water, 60% to 80% alcohol, and 10% to 20% water-soluble solvent, and is non-flammable (no flash point in the Cleveland release method) ) Is used. The cleaning solvent having such a composition eliminates the flash point by containing water. In other words, it has non-flammability when the concentration of contained moisture is a predetermined moisture concentration (for example, 10%) or more.

  The water may contain impurities as long as the flash point of the cleaning solvent can be eliminated. For example, tap water can be used in addition to distilled water and ion exchange water. Examples of alcohols include dimethyl ether, diethyl ether, dibutyl ether, ethylene glycol, diethylene glycol, triethylene glycol, and mixtures thereof. Further, as the water-soluble solvent, those having good oil solubility are desirable, such as 1- (2-methoxy-2-methylethoxy) -2-propanol, diethylene glycol monoethyl ether, propylene glycol, diethylene glycol monoethyl ether, Dipropylene glycol monomethyl ether, 3-methyl-3-methoxy-1-butanol, diethylene glycol methyl ethyl ether, and a mixture thereof are used.

  The washing / drying tank 3 is a pressure-resistant container having a hollow box shape whose upper part can be opened and closed, and is provided with an opening / closing lid 7 for sealing the opening via a sealing material 6 formed at the edge of the upper opening. The open / close lid 7 is provided so as to be openable and closable with respect to the upper opening of the cleaning / drying tank 3, and at least its ceiling surface (lower surface) 7 a is inclined. By tilting the ceiling surface 7a of the open / close lid 7 in this way, when solvent gas is condensed on the ceiling surface 7a, the solvent droplets are transferred to the bottom surface of the ceiling surface 7a and the side wall surface 3b of the cleaning / drying tank 3 through the bottom surface. It can flow down to 3a. Therefore, it is possible to prevent the condensed solvent droplets from adhering to the workpiece 2 and causing spots.

  Further, a drainage pipe 8 reaching a solvent tank 13 described later is connected to the bottom 3a of the washing / drying tank 3, and a drainage valve 9 for opening and closing the drainage pipe 8 is interposed in the drainage pipe 8. . For this reason, after completion of the pickling washing process, the washing solvent in the washing / drying tank 3 is connected to the lowermost part of the inclined bottom portion 3a of the washing / drying tank 3 by opening the drain valve 9 and communicating both. The liquid is discharged to the solvent tank 13 through the drain pipe 8. Furthermore, since the above-described immersion cleaning process, steam cleaning process, and vacuum drying process are performed by reducing the pressure in the cleaning / drying tank 3 that accommodates the workpiece 2, the cleaning / drying tank 3 includes a vacuum pump 10. The exhaust pipe 11 is connected. A cleaning / drying tank vacuum valve 12 is provided in the middle of the exhaust pipe 11 to open and close between the cleaning / drying tank 3 and the vacuum pump 10. A cleaning / drying tank air release valve 18 for adjusting the internal pressure of the cleaning / drying tank 3 to open to the atmosphere is branched upstream of the cleaning / drying tank vacuum valve 12 of the exhaust pipe 11 (the cleaning / drying tank side). It is installed.

  The washing / drying tank 3 is connected with a dipping / washing pipe 14 that reaches the solvent tank 13 in order to allow the washing solvent to flow into the washing / drying tank 3 to dip and wash the workpiece 2. The immersion cleaning pipe 14 is provided with an immersion cleaning valve 15 for opening and closing the tube. Further, the cleaning / drying tank 3 is provided with an ultrasonic generator 3c for cleaning the workpiece 2 immersed in the cleaning solvent by applying ultrasonic vibration in the immersion cleaning step. In addition, the cleaning / drying tank 3 includes a level switch 16 for detecting the level of the cleaning solvent flowing into the cleaning / drying tank 3, a cleaning / drying tank pressure sensor 51 (see FIG. 3) for detecting the internal pressure, and an internal pressure. A pressure gauge 17 for cleaning and drying tank to be displayed is provided.

  The solvent tank 13 is a hermetically sealed container with an upper part covered, and is connected to the cleaning / drying tank 3 via the drainage pipe 8. In the present embodiment, the inflow of the cleaning solvent from the solvent tank 13 to the cleaning / drying tank 3 and the drainage from the cleaning / drying tank 3 to the solvent tank 13 are performed by a pressure difference between the solvent tank 13 and the cleaning / drying tank 3. . For this reason, the solvent tank 13 is connected to the vacuum pump 10 via the branch exhaust pipe 19. Specifically, the downstream side (vacuum pump 10 side) of the exhaust pipe 11 from the cleaning / drying tank vacuum valve 12 is branched and connected to the branch exhaust pipe 19, and the branch exhaust pipe 19 is opposite to the exhaust pipe 11. Is connected to the solvent tank 13. The branch exhaust pipe 19 is provided with a solvent tank pressure reducing valve 20 for opening and closing the branch exhaust pipe 19. Thus, since the branch exhaust pipe 19 branched from the exhaust pipe 11 leading to the vacuum pump 10 is connected to the solvent tank 13, the internal pressure of the solvent tank 13 can be adjusted relative to the cleaning / drying tank 3. .

  Further, the solvent tank 13 detects the internal pressure of the solvent tank pressure sensor 52, displays the internal pressure of the solvent tank pressure gauge 21, and detects the temperature of the cleaning solvent in the solvent tank 13 to perform temperature management. A solvent tank temperature sensor 53 is provided. Further, a solvent tank heater 13a is provided inside the solvent tank 13, and when the cleaning solvent falls below a predetermined temperature by a signal from the solvent tank temperature sensor 53, the controller 50 energizes the solvent tank heater 13a. Then, the cleaning solvent is heated. The solvent tank 13 is provided with a solvent tank atmosphere release valve 22 for adjusting the internal pressure by opening the atmosphere.

  Here, after the immersion cleaning process is completed, the drainage valve 9 is opened to communicate the both, whereby the used cleaning solvent in the cleaning / drying tank 3 is drained to the solvent tank 13 through the drainage pipe 8. However, various kinds of dirt adhering to the workpiece 2 are mixed in the cleaning solvent used for cleaning. These dirt components cannot be removed by simply passing through a filter or the like provided in the cleaning / drying tank 3 or the drainage pipe 8, and the cleaning solvent is regenerated and used from the viewpoint of resource saving and environmental protection. For this reason, the parts washing | cleaning apparatus 1 in this embodiment is provided with the washing | cleaning liquid distillation reproduction | regeneration apparatus 24 which distills a used solvent and condenses. That is, a cleaning liquid distillation regenerator 24 is connected to the solvent tank 13.

  As shown in FIG. 2, the cleaning liquid distillation regenerator 24 includes a distillation pot 25 (a kind of distiller) for evaporating (vaporizing) the cleaning solvent, and an adjustment mechanism for condensing (liquefying) and adjusting the vapor of the evaporated cleaning solvent. 34, a moisture sensor 35 (corresponding to the moisture concentration detection mechanism in the present invention) for detecting the moisture concentration of the cleaning solvent in the adjustment mechanism 34 (in other words, the distilled cleaning solvent), and the adjustment mechanism 34 is replenished with moisture. And a moisture replenishing mechanism 36. The distillation pot 25 is, for example, a generally cylindrical bowl-shaped container having heat resistance and pressure resistance. In this embodiment, the heating mechanism 25a is provided in a state in which the lower part of the distillation pot 25 is accommodated. The heating mechanism 25a is an oil heating unit, for example, and includes an electric heater as a heat source. Heat resistance oil as a heating medium is heated by the electric heater, and the distillation pot 25 is heated through the heating oil. As a result, the cleaning solvent containing the dirt component flowing through the distillation pot 25 can be heated and evaporated (vaporized).

  Note that the inside of the distillation pot 25 is depressurized by a depressurization mechanism 37 described later. Thereby, the boiling point of the cleaning solvent can be lowered. A distillation regeneration valve 49 is provided between the solvent tank 13 and the distillation pot 25. The inflow of the solvent containing the dirt component from the solvent tank 13 to the distillation pot 25 is performed by a pressure difference between the solvent tank 13 and the distillation pot 25 with the distillation regeneration valve 49 opened. Then, the cleaning solvent distilled and separated in the distillation pot 25 is taken out from the upper part of the distillation pot 25 as solvent vapor and sent to the adjustment mechanism 34 side (capacitor 26 described later). On the other hand, the dirt component separated by distillation is taken out from the lower portion of the distillation pot 25.

  In this embodiment, the dirt component taken out from the distillation pot 25 is sent to the sludge tank 40 connected to the distillation pot 25 via the discharge pipe 38. The sludge tank 40 is provided with a cooling thin tube 40a through which cooling water passes, and cools dirt components including steam in the sludge tank 40. Then, the liquid dirt component cooled in the sludge tank 40 is discharged via a waste liquid pipe 41 to a waste liquid outlet for processing the waste liquid. A discharge valve 39 for opening / closing the discharge pipe 38 between the distillation pot 25 and the sludge tank 40 is interposed. In addition, a discharge mechanism (not shown) is provided between the sludge tank 40 and the distillation pot 25 to discharge dirt components from the distillation pot 25 to the sludge tank 40 with the discharge valve 39 opened. Further, a waste liquid pipe 42 between the sludge tank 40 and the waste liquid outlet is provided with a waste liquid valve 42 for opening and closing the same.

  The adjustment mechanism 34 to which the cleaning solvent is sent from the distillation pot 25 includes a condenser 26 that condenses and liquefies the vapor of the cleaning solvent vaporized by the distillation pot 25 and a circulation tank 27 that stores the liquefied cleaning solvent (in the present invention). Equivalent to a tank) and a pressure reducing mechanism 37 for making the inside of the capacitor 26 have a negative pressure. The condenser 26 is a heat exchanger connected to the distillation pot 25. The main body of the capacitor 26 is, for example, a substantially cylindrical vertical or horizontal container, and a cooling thin tube 26a through which cooling water passes is housed. The solvent vapor distilled and separated in the distillation pot 25 is first sent to the condenser 26, and when passing through the condenser 26, it contacts the cooling thin tube 26 a and is condensed (liquefied). The liquefied regenerated solvent is sent to the circulation tank 27 through a solvent supply pipe 43 connected to the downstream side of the condenser 26 and an ejector 28 described later.

  In the present embodiment, a moisture replenishing mechanism 36 is connected to the capacitor 26. The water replenishing mechanism 36 is a mechanism that is connected to a water supply port such as a faucet for discharging water such as distilled water or an outlet of a water supply tank, which is provided separately, and sends water from the water supply port to the condenser 26. The water replenishment mechanism 36 includes a water replenishment pipe 44 (corresponding to a water flow path in the present invention) through which water flows and a water replenishment valve 45 that opens and closes this. The water replenishment pipe 44 connects the water supply port and the condenser 26, and the water replenishment valve 45 provided in the middle of the water replenishment pipe 44 is opened to allow moisture from the water supply opening to enter the condenser 26. It is configured to be replenished. Here, like the distillation pot 25, the inside of the condenser 26 is decompressed by a decompression mechanism 37 described later. For this reason, the water from the water supply port can be taken into the condenser 26 only by opening the water replenishing valve 45, and the cleaning solvent after the condenser 26 can be replenished with water.

  Further, the decompression mechanism 37 in this embodiment includes a circulation channel 46 that returns from the circulation tank 27 and returns to the circulation tank 27, an ejector 28 provided in the middle of the circulation channel 46, and the circulation channel 46. And a circulation pump 29 (which corresponds to the pump in the present invention) for circulating the cleaning solvent. The circulation tank 27 accommodates a cooling thin tube 27a through which cooling water passes. Therefore, the circulating cleaning solvent is cooled in the circulation tank 27 and the liquid state is maintained. A solvent outlet for discharging the cleaning solvent toward the reserve tank 23 (see FIG. 1) is provided on the side of the circulation tank 27 opposite to the circulation flow path 46 side. The regenerated cleaning solvent is discharged from the circulation tank 27 according to the amount of the cleaning solvent stored in the reserve tank 23. A filter for removing impurities may be provided in the reserve tank 23.

  The circulation pump 29 is provided in the middle of the circulation flow path 46 that exits from the circulation tank 27 and faces the ejector 28. By driving the circulation pump 29, it is possible to generate a flow of the cleaning solvent that returns from the circulation tank 27 to the circulation tank 27 through the circulation pump 29 and the ejector 28 again. By this circulation, the regenerated solvent and the replenished water can be reliably stirred and mixed, and the regenerated solvent can be homogenized. The circulation pump 29 may be provided at any location in the circulation tank 27 and the circulation flow path 46 as long as the cleaning solvent can be circulated. Further, the moisture sensor 35 is provided in the circulation flow path 46 on the downstream side of the circulation pump 29 and upstream of the ejector 28. That is, the moisture sensor 35 is provided between the ejector 28 and the circulation channel 46 and measures the moisture concentration of the cleaning solvent discharged from the circulation pump 29 in the circulation channel 46. A capacitor 26 is connected to the ejector 28 via a solvent supply pipe 43. In a state where the circulation pump 29 is driven to circulate the cleaning solvent in the circulation flow path 46, the cleaning solvent from the condenser 26 is sucked into the circulation flow path 46 through the ejector 28. As described above, since the cleaning solvent is sucked by the ejector 28, the inside of the condenser 26 is decompressed, and the inside of the distillation pot 25 connected to the condenser 26 is decompressed.

  In the present embodiment, the cooling water flows through the cooling thin tubes 27a provided in the circulation tank 27, the cooling thin tubes 26a provided in the condenser 26, and the cooling thin tubes 40a provided in the sludge tank 40. They are connected by a cooling channel 47. That is, the cooling water flowing in from the cooling water inlet flows down in the cooling flow path 47, and the cooling thin tube 27a provided in the circulation tank 27, the cooling thin tube 26a provided in the condenser 26, and the sludge tank. It passes through the cooling thin tube 40a provided in 40 and is configured to flow out from the cooling water outlet. Thus, the cooling water can be easily supplied to the cooling thin tubes 26a, 27a, and 40a by connecting the cooling thin tubes 26a, 27a, and 40a with one flow path.

  The cleaning agent distilled and regenerated by the cleaning liquid distillation regenerator 24 is stored in the reserve tank 23 as shown in FIG. In the reserve tank 23, a reserve tank level switch 48 for detecting the level of the stored cleaning solvent is provided. In the present embodiment, the cleaning agent in the reserve tank 23 is used in a steam cleaning process in which the workpiece 2 accommodated in the clean / dry tank 3 is steam cleaned. For this reason, a heat exchanger 30 for vaporizing the regenerated solvent introduced from the reserve tank 23 as a solvent vapor is provided in the middle of the introduction pipe 33 extending from the reserve tank 23 to the purification tank 3. The main body of the heat exchanger 30 is, for example, a substantially cylindrical vertical or horizontal container, and a heating thin tube 30a through which a heating medium passes is housed. As a result, the regenerated solvent passing through the heat exchanger 30 is vaporized in contact with the heating thin tube 30a, and is introduced into the washing / drying tank 3 as solvent vapor. The heating medium that passes through the heating thin tube 30a of the heat exchanger 30 includes oil heated by heating means such as an electric heater. In this embodiment, the introduction of the regenerated solvent from the reserve tank 23 to the heat exchanger 30 and the introduction of the solvent vapor from the heat exchanger 30 to the washing / drying tank 3 are performed between the reserve tank 23 and the washing / drying tank 3. This is done by pressure difference. For this reason, the steam cleaning auxiliary valve 31 for opening and closing the inlet pipe 33 upstream of the heat exchanger 30 is interposed, and the inlet pipe 33 downstream of the heat exchanger 30 is opened and closed. A steam cleaning valve 32 is provided for this purpose.

  Each of the above-described devices, that is, various pumps, various valves, and various sensors are electrically connected to the control device 50, and operate according to preset procedures and conditions under the control of the control device 50. The control device 50 also functions as a control device that controls the cleaning liquid distillation regenerating device 24.

  As shown in FIG. 3, the control device 50 in the present embodiment is configured by a computer including a CPU, a ROM, a RAM, and the like, and includes a timer 54. On the input side of the control device 50, a power switch 56, a start switch 57, a reduced pressure cleaning time setting switch 58, a return pressure cleaning time setting switch 59, a low pressure vacuum drying time setting switch 60 provided on the operation panel 55, In addition to pressure vacuum drying time setting switch 61 and moisture concentration setting switch 64, cleaning / drying tank pressure sensor 51, cleaning / drying tank level switch 16, solvent tank temperature sensor 53, solvent tank pressure sensor 52, reserve tank level switch 48, moisture A sensor 35 or the like is connected. Further, on the output side of the control device 50, in addition to the indicator 62 provided on the operation panel 55, the vacuum pump 10, the cleaning / drying tank vacuum valve 12, the drainage valve 9, the immersion cleaning valve 15, the solvent tank heater 13a, Cleaning / drying tank air release valve 18, branch exhaust valve 19, solvent tank pressure reducing valve 20, solvent tank air release valve 22, steam cleaning auxiliary valve 31, steam cleaning valve 32, distillation regeneration valve 49, heating mechanism 25a, discharge valve 39, A waste liquid valve 42, a water replenishment valve 45, a circulation pump 29, and the like are connected.

  The return pressure cleaning time setting switch 59 and the return pressure vacuum drying time setting switch 61 are used to set the return pressure time to a timer according to characteristics such as the weight, surface area, presence / absence and number of fine holes and fine gaps of the workpiece 2. 54 functions as an input means. Further, the reduced pressure cleaning time setting switch 58 and the low pressure vacuum drying time setting switch 60 function as input means for setting a desired time in the timer 54 according to the workpiece 2. Further, the moisture concentration setting switch 64 functions as an input means for setting a minimum moisture concentration for replenishing moisture in the capacitor 26 according to the type of cleaning solvent. For example, in the case of a cleaning solvent that becomes flammable when the concentration of water contained is less than 10%, the minimum water concentration is set to 10% or about 11% to 15% with some margin. That is, the minimum water concentration is the value of the water concentration of the cleaning solvent managed in the cleaning liquid distillation regenerator 24. For this reason, a cleaning solvent comes to have non-flammability at least when it is above the minimum moisture concentration.

  In the immersion cleaning process, the control device 50 according to the present embodiment reduces the pressure in the cleaning / drying tank to 200 Pa or less and performs reduced-pressure cleaning. After performing the reduced-pressure cleaning, the control device 50 recovers to a predetermined pressure exceeding 200 Pa. And control to perform the return pressure cleaning in this return pressure state. This reduced pressure cleaning and return pressure cleaning are repeated. That is, the control device 50 performs a control for repeating the vacuum cleaning for a predetermined time, repeating the vacuum cleaning for a predetermined time, and then repeating the operation for performing the pressure recovery cleaning for a predetermined time a plurality of times during the cleaning process. The number of repetitions may be a fixed number set in advance, but may be set by operating an operation unit (external input means) (not shown) of the operation panel 55.

  Further, in the vacuum drying process, the control device 50 reduces the inside of the washing / drying tank 3 to the limit value of the vacuum pump 10 to perform low pressure vacuum drying, and after performing the low pressure vacuum drying, the limit of the vacuum pump 10 is reached. The control is performed to release the value, return the pressure to a predetermined pressure, and perform return pressure vacuum drying in this recovered pressure state. This low-pressure vacuum drying and reverse pressure vacuum drying are repeated. That is, the control device 50 performs control for performing low-pressure vacuum drying for a predetermined time, repeating the operation of performing vacuum decompression for a predetermined time several times during the drying process after performing the low-pressure vacuum drying. The number of repetitions may be a fixed number set in advance, but may be set by operating the operation unit (external input means) of the operation panel 55.

  Further, the control device 50 functions as a control device that controls the replenishment of moisture into the adjustment mechanism 34 of the moisture replenishment mechanism 36. That is, the control device 50 monitors the moisture concentration of the cleaning solvent in the adjustment mechanism 34 transmitted from the moisture sensor 35, and when the moisture concentration is lower than a predetermined value, the moisture replenishment mechanism 36 enters the adjustment mechanism 34. Execute control to replenish moisture. More specifically, when the moisture concentration of the cleaning solvent in the circulation flow path 46 measured by the moisture sensor 35 is lower than the minimum moisture concentration, the control device 50 opens the moisture replenishing valve 45 and starts from the water supply port. Control to introduce moisture into the capacitor 26 is executed. By doing in this way, the washing | cleaning solvent in the adjustment mechanism 34 of the washing | cleaning liquid distillation reproduction | regeneration apparatus 24 can hold | maintain more than the minimum moisture concentration which has nonflammability, and it can suppress that a flash point appears in a washing | cleaning solvent.

Next, the operation of the component cleaning apparatus 1 in this embodiment will be specifically described.
As a preparatory stage, after opening the cleaning / drying tank air release valve 18, the opening / closing lid 7 of the cleaning / drying tank 3 is opened, and a basket 4 containing a plurality of workpieces 2 such as machine parts is placed on the mounting portion. Place. If the workpiece 2 is accommodated in the cleaning / drying tank 3, the open / close lid 7 is closed in a sealed state via the seal member 6. When the start switch 57 is operated, the control device 50 closes the cleaning / drying tank atmosphere release valve 18.

  When such preparation is completed, first, the cleaning solvent is supplied to the cleaning / drying tank 3. In the liquid supply operation, the control device 50 opens the solvent tank atmospheric release valve 22 and returns the internal pressure of the solvent tank 13 to the atmospheric direction. When the solvent tank pressure sensor 52 detects that the internal pressure of the solvent tank 13 has reached a predetermined pressure (for example, 500 Pa), the control device 50 closes the solvent tank atmosphere release valve 22 and the immersion cleaning pipe. 14 the immersion cleaning valve 15 and the cleaning / drying tank vacuum valve 12 of the exhaust pipe 11 are opened and the vacuum pump 10 is driven. Then, the immersion cleaning valve 15 communicates between the cleaning / drying tank 3 and the solvent tank 13, and the cleaning solvent is transferred from the solvent tank 13 to the cleaning / drying tank 3 due to a pressure difference between the cleaning / drying tank 3 and the solvent tank 13. The liquid is supplied. At this time, the solvent tank pressure reducing valve 20, the steam cleaning valve 32, the steam cleaning auxiliary valve 31, the drainage valve 9, and the distillation regeneration valve 49 are closed under the control of the control device 50. Then, when the upper limit level switch of the level switch 16 of the cleaning / drying tank 3 detects the upper limit level and sends a signal to the control device 50, the control device 50 closes the immersion cleaning valve 15 and the cleaning / drying chamber vacuum valve 12. At the same time, the vacuum pump 10 is stopped.

  Then, an immersion cleaning process is performed. In this immersion cleaning process, immersion cleaning (ultrasonic cleaning) is performed by applying ultrasonic vibration by the ultrasonic generator 3c while the workpiece 2 is immersed in the heating solvent. Specifically, the inside of the washing / drying tank 3 is reduced in pressure by the vacuum pump 10 through the exhaust pipe 11 until the washing / drying tank pressure sensor 51 detects a predetermined value (for example, 200 Pa) or less to perform the reduced pressure washing. After performing this vacuum cleaning, the control device 50 opens the cleaning / drying tank atmosphere release valve 18 and moves toward the atmospheric pressure until the pressure detected by the cleaning / drying tank pressure sensor 51 indicates a predetermined pressure (for example, a pressure of 500 Pa or less). And return pressure cleaning is performed in this recovered pressure state. After the return pressure cleaning is performed for a predetermined time, the cleaning / drying tank air release valve 18 is closed, and the cleaning / drying tank 3 is again decompressed through the exhaust pipe 11 by the vacuum pump 10 to perform the vacuum cleaning. Thus, the reduced pressure cleaning and the return pressure cleaning are repeated.

  The reason why the return pressure cleaning is performed in this way is that, if the object to be processed 2 has a fine space, for example, a fine hole (especially a deep hole compared to the diameter), it can be immersed in the cleaning solvent. Air remains in the fine holes and is difficult to escape, that is, it is difficult for the cleaning solvent to enter the holes, and the cleaning solvent does not penetrate into the holes even if ultrasonic cleaning is performed. Further, once the pressure is reduced, the air in the hole expands, and the cleaning solvent does not penetrate into the hole even if the expanded air is removed. Therefore, the air in the hole is depressurized and expanded to dilute, and the expanded portion is discharged, and the remaining air is contracted by the subsequent return pressure operation to infiltrate the cleaning solvent for this contraction. By repeating the return pressure, the air can easily escape from the hole. Thereby, the cleaning solvent can be infiltrated into the hole, and the ultrasonic cleaning can be efficiently performed by propagating the ultrasonic wave to the inner peripheral surface of the hole through the permeated cleaning solvent. The adjustment of the reduced pressure cleaning time and the return pressure cleaning time can be set according to the workpiece 2 by operating the reduced pressure cleaning time setting switch 58 and the return pressure cleaning time setting switch 59 of the operation panel 55. .

  After completion of the immersion cleaning, the cleaning solvent containing the dirt component in the cleaning / drying tank 3 is drained. In the drain operation, the cleaning / drying tank atmosphere release valve 18 is opened by a signal from the control device 50, and the internal pressure of the cleaning / drying tank 3 is detected by the cleaning / drying tank pressure sensor 51 (for example, a pressure of 500 Pa or less). Return to the atmosphere until you do. Thereafter, the cleaning / drying tank atmosphere release valve 18 is closed, the drain valve 9 of the drain pipe 8 and the solvent tank pressure reducing valve 20 of the branch exhaust pipe 19 are opened, and the vacuum pump 10 is driven. Then, the cleaning / drying tank 3 and the solvent tank 13 are communicated with each other by opening the drain valve 9, and the cleaning solvent containing the dirt component is removed from the cleaning / drying tank 3 by the pressure difference between the cleaning / drying tank 3 and the solvent tank 13. The liquid is discharged to the tank 13. Then, the drain valve 9 and the solvent tank pressure reducing valve 20 are closed by detecting the lower limit level of the level switch 16 of the washing / drying tank 3.

  Here, the cleaning solvent drained to the solvent tank 13 and containing the dirt component is distilled and regenerated by the cleaning liquid distillation regenerator 24. In the distillation regeneration step, first, the solvent tank atmospheric release valve 22 is opened to return the internal pressure of the solvent tank 13 to the atmospheric direction. In addition, the circulation pump 29 is driven and the distillation regeneration valve 49 is opened. Then, the cleaning solvent is caused to flow into the distillation pot 25 due to the pressure difference between the solvent tank 13 and the distillation pot 25. Next, the cleaning solvent in the distillation pot 25 is heated and evaporated by the heating mechanism 25a. Thereafter, when a predetermined time has elapsed, the distillation regeneration valve 49 is closed to block the inflow of the solvent into the distillation pot 25, and the residual solvent in the distillation pot 25 is distilled. Then, the discharge valve 39 is opened, and the dirt component containing the vapor distilled and separated by a discharge mechanism (not shown) is discharged to the sludge tank 40. The dirt component including the vapor comes into contact with the cooling thin tube 40a in the sludge tank 40, and is cooled and liquefied. When a predetermined time has elapsed after the discharge valve 39 is opened, the discharge valve 39 is closed, the waste liquid valve 42 is opened, and the dirt component is discharged from the waste liquid outlet.

  On the other hand, the solvent vapor separated by distillation flows into the condenser 26 sequentially and is liquefied. Specifically, in the condenser 26, the solvent vapor comes into contact with the cooling thin tube 26a and is condensed (liquefied). Then, the regenerated solvent (cleaning solvent) in the condenser 26 is sucked into the ejector 28 while the circulation pump 29 is driven. The regenerated solvent sucked into the ejector 28 is sent to the circulation tank 27 side, and is circulated through the circulation flow path 46 to be stirred and homogenized. Here, the moisture concentration of the regenerated solvent circulating in the circulation channel 46 is measured by the moisture sensor 35 and transmitted to the control device 50 as an electrical signal. The control device 50 monitors the water concentration, and when the water concentration becomes lower than the minimum water concentration, the water replenishing valve 45 is opened to replenish the capacitor 26 with water. The water concentration is monitored at least while the cleaning solvent is distilled in the distillation pot 25. The minimum moisture concentration is set separately according to the type of cleaning solvent as described above.

  As described above, the cleaning liquid distillation regenerator 24 includes the moisture sensor 35 that detects the moisture concentration of the cleaning solvent (in other words, the distilled cleaning solvent) in the adjustment mechanism 34 (in this embodiment, the circulation flow path 46). A water replenishment mechanism 36 for replenishing water in the adjustment mechanism 34 (in the capacitor 26 in the present embodiment), and a control device 50 for controlling replenishment of water in the adjustment mechanism 34 of the water replenishment mechanism 36. When the moisture concentration of the cleaning solvent detected by the moisture sensor 35 is lower than a predetermined value, the control device 50 executes control for replenishing moisture from the moisture replenishing mechanism 36 into the adjustment mechanism 34. The water concentration can be adjusted. That is, in the component cleaning apparatus 1, even if the water concentration of the cleaning solvent decreases, the water can be supplemented. Thereby, the water concentration of the cleaning solvent can be maintained at a predetermined concentration or more. As a result, when the cleaning solvent that loses non-flammability is distilled and regenerated when the concentration of the contained water is lower than the predetermined moisture concentration, it is possible to suppress the flash point from appearing in the cleaning solvent. As a result, it is possible to simplify the configuration of the cleaning liquid distillation regenerator 24 and hence the configuration of the parts cleaning apparatus 1 without taking fire prevention and explosion protection measures on the cleaning liquid distillation regenerator 24.

  The adjusting mechanism 34 also condenses and liquefies the vapor of the cleaning solvent vaporized by the distillation pot 25, a circulation tank 27 that stores the liquefied cleaning solvent, and a decompression that makes the inside of the capacitor 26 a negative pressure. The water replenishment mechanism 36 includes a water flow path through which water flows, and a water replenishment valve 45 provided in the middle of the water flow path, and the control device 50 opens the water replenishment valve 45. Since the control for replenishing water to the cleaning solvent after the condenser 26 in the state is executed, the replenishment of water can be controlled only by controlling the opening and closing of the water replenishment valve 45. For this reason, it is not necessary to provide a separate pump or the like when supplying moisture, and the configuration of the cleaning liquid distillation regenerator 24 and thus the configuration of the parts cleaning apparatus 1 can be further simplified. In the present embodiment, since moisture is supplied into the capacitor 26, the cleaning solvent in the capacitor 26 can be cooled by the moisture, and the cooling efficiency of the capacitor 26 can be improved. Further, the decompression mechanism 37 includes a circulation channel 46 that returns from the tank to the tank, an ejector 28 provided in the middle of the circulation channel 46, and a circulation pump 29 that circulates the cleaning solvent in the circulation channel 46. The condenser 26 is connected to the ejector 28, and the cleaning solvent in the condenser 26 is sucked into the circulation flow path 46 by the ejector 28, so that the cleaning solvent is discharged from the condenser 26 in addition to the circulation pump 29. There is no need to provide a separate pump, and the configuration of the cleaning liquid distillation regenerator 24 and thus the configuration of the parts cleaning apparatus 1 can be further simplified. Further, by circulating the cleaning solvent in the circulation channel 46, it is possible to eliminate unevenness in the concentration of components such as moisture and alcohol contained in the cleaning solvent and uneven temperature in the cleaning solvent. Furthermore, this circulation ensures that the cleaning solvent and the replenished moisture are stirred and mixed. As a result, the cleaning solvent can be homogenized.

  Then, after a predetermined time has elapsed since the start of distillation by the distillation pot 25, the circulating regenerated solvent is discharged from the circulation tank 27 toward the reserve tank 23. The discharge from the circulation tank 27 to the reserve tank 23 is performed by a regenerative solvent discharge mechanism (not shown). The regeneration solvent discharge mechanism is configured by, for example, a valve or a pump that opens and closes between the circulation tank 27 and the reserve tank 23. The regenerated solvent stored in the reserve tank 23 is used for a steam cleaning process performed after the immersion cleaning process.

  In the steam cleaning step, the cleaning / drying tank vacuum valve 12 of the exhaust pipe 11 is opened while the vacuum pump 10 is driven, and then the steam cleaning valve 32 and the steam cleaning auxiliary valve 31 of the introduction pipe 33 are opened. The opening timing of the steam cleaning valve 32 and the steam cleaning auxiliary valve 31 is when the cleaning / drying tank pressure sensor 51 of the cleaning / drying tank 3 detects a predetermined pressure (for example, a pressure of 100 Pa or less). Thereby, due to the pressure difference between the washing / drying tank 3 and the reserve tank 23, the regenerated solvent is introduced from the reserve tank 23 into the heat exchanger 30, and the regenerated solvent is sprayed from a spray nozzle (not shown) provided at the inlet. Is erupted. This atomized solvent is gasified by heat exchange with the heating capillary 30a through which the solution heating medium passes, and is introduced into the washing and drying tank 3 as a solvent gas. Thereby, without enlarging the heat exchanger 30, the mixing of solvent droplets into the solvent vapor introduced into the washing / drying tank 3 can be prevented, and the adhesion of stains to the object to be treated 2 can be suppressed.

  After performing the steam cleaning for a predetermined time, the control device 50 closes the steam cleaning valve 32 and the steam cleaning auxiliary valve 31 to complete the steam cleaning process, and proceeds to the vacuum drying process. At the time of transition, the vacuum pump 10 is continuously driven, and the cleaning / drying tank vacuum valve 12 of the exhaust pipe 11 remains open. Then, the pressure is reduced to the limit value of the vacuum pump 10. The vacuum pump 10 has a capability of reducing the pressure to about 7 Pa or less, which is an ideal pressure for vacuum drying. When the limit value is reached, this state is maintained for a predetermined time and low-pressure vacuum drying is performed. Thereafter, after a predetermined time has elapsed, the control device 50 opens the cleaning / drying tank atmosphere release valve 18, that is, opens the limit value of the vacuum pump 10, and the cleaning / drying tank pressure sensor 51 detects a predetermined pressure (for example, 500 Pa). Return to the atmosphere until you do. That is, the pressure is restored. Then, the pressure-reducing state is maintained for a predetermined time to perform pressure-reducing vacuum drying, and then the cleaning / drying tank air release valve 18 is closed again to reduce the pressure to the vacuum pump limit value again. Thus, the low pressure vacuum drying and the reverse pressure vacuum drying are repeated. Thus, by performing the return pressure every predetermined time, it is possible to suppress the evaporation of the solvent and temporarily suppress the cooling due to the evaporation heat. And the core heat (internal heat) which the to-be-processed object 2 hold | maintains in the meantime can be recalled to the surface, and surface temperature can be raised, and after this surface temperature rises, the to-be-processed object 2 is decompressed again to a vacuum direction. Evaporation from the surface can be promoted. As a result, the drying efficiency can be improved.

  When the vacuum drying process is completed, the control device 50 opens the cleaning / drying tank atmosphere release valve 18 to release the internal pressure of the cleaning / drying tank 3 to the atmosphere and notifies the end of all processes. When the opening / closing lid 7 of the cleaning / drying tank 3 is opened, a plurality of objects to be processed 2 cleaned and dried together with the basket 4 can be taken out.

  In the above, the cleaning liquid distillation regenerator 24 incorporated in the parts cleaning apparatus 1 has been described. However, the present invention is not limited to this, and the present invention is also applied to the cleaning liquid distillation regenerator 24 incorporated in other than the parts cleaning apparatus 1. Applicable. Further, the present invention can also be applied to a cleaning liquid distillation regenerator that is used alone as a device for distilling and regenerating a solvent without being incorporated in another device. Furthermore, in the said embodiment, although the reproduction | regeneration solvent distilled and regenerated with the washing | cleaning liquid distillation reproduction | regeneration apparatus was used at the vapor | steam washing process, it is not restricted to this, You may use it at another process.

  In the cleaning liquid distillation regenerator 24, the moisture sensor 35 is provided on the downstream side of the circulation pump 29 in the circulation channel 46. However, the moisture sensor 35 is not limited to this, and any position within the adjustment mechanism 34 can be used. It may be provided. Furthermore, in the above embodiment, the moisture sensor 35 is provided in the cleaning liquid distillation regenerator 24. However, the present invention is not limited to this, and a configuration in which a moisture sensor is provided in addition to the cleaning liquid distillation regenerator can be employed. For example, a configuration in which a moisture sensor is provided in the cleaning / drying tank or the solvent tank of the component cleaning apparatus may be employed. In this case, the moisture sensor detects in advance the moisture concentration of the cleaning solvent introduced into the distillation kettle, and transmits the detected value to the control device. Then, the control device monitors this value, and when the water concentration is lower than the predetermined value, executes a control for replenishing the water from the water replenishing mechanism into the adjusting mechanism.

  Further, in the cleaning liquid distillation regenerator 24 described above, the moisture replenishing mechanism 36 is connected to the condenser 26. However, the present invention is not limited to this, and any position as long as it is downstream of the condenser 26 in the adjusting mechanism 34 is connected. May be. In the water replenishment mechanism 36 described above, only the water replenishment valve 45 is provided in the middle of the water replenishment pipe 44. However, the present invention is not limited to this. In addition, a liquid feeding mechanism such as a pump may be provided. Furthermore, in the above-described component cleaning apparatus 1, the reserve tank 23 is provided. However, the reserve tank 23 is not limited to this, and the circulation tank 27 and the heat exchanger 30 are directly connected without providing the reserve tank 23. Also good.

  The decompression cleaning time setting switch 58, the return pressure cleaning time setting switch 59, the low pressure vacuum drying time setting switch 60, the return pressure vacuum drying setting switch 61, and the moisture concentration setting switch 64 are appropriately selected from known switches. A touch panel switch integrated with the numeric keypad or the display 62 may be used.

DESCRIPTION OF SYMBOLS 1 Parts washing apparatus 2 To-be-processed object 3 Washing and drying tank 3a Bottom part 3b Side wall surface 3c Ultrasonic generator 4 Basket 6 Sealing material 7 Opening lid 7a Ceiling surface 8 Drain pipe 9 Drain valve 10 Vacuum pump 11 Exhaust pipe 12 Wash and dry Tank vacuum valve 13 Solvent tank 13a Solvent tank heater 14 Immersion washing pipe 15 Immersion washing valve 16 Level switch 17 Washing / drying tank pressure gauge 18 Washing / drying tank air release valve 19 Branch exhaust pipe 20 Solvent tank pressure reducing valve 21 Solvent tank pressure gauge 22 Solvent tank air release valve 23 Reserve tank 24 Cleaning liquid distillation regenerator 25 Distilling pot 25a Heating mechanism 26 Capacitor 26a Cooling thin tube 27 Circulating tank 27a Cooling thin tube 28 Ejector 29 Circulating pump 30 Heat exchanger 30a Heating thin tube 31 Steam cleaning auxiliary valve 32 Steam Cleaning valve 33 Introduction pipe 34 Adjustment mechanism 35 Moisture sensor 36 Moisture supplement Mechanism 37 Decompression mechanism 38 Discharge pipe 39 Discharge valve 40 Sludge tank 40a Cooling thin tube 41 Waste liquid pipe 42 Waste liquid valve 43 Solvent supply pipe 44 Water replenishment pipe 45 Water replenishment valve 46 Circulation flow path 47 Cooling flow path 48 Reserve tank level switch 49 Distillation regeneration Valve 50 Control device 51 Washing and drying tank pressure sensor 52 Solvent tank pressure sensor 53 Solvent tank temperature sensor 54 Timer 55 Operation panel 56 Power switch 57 Start switch 58 Depressurization washing time setting switch 59 Reset pressure washing time setting switch 60 Low pressure vacuum drying time setting Switch 61 Reverse pressure vacuum drying time setting switch 62 Display

Claims (4)

A distillation pot for vaporizing a cleaning solution containing moisture;
An adjustment mechanism for condensing the vapor of the vaporized cleaning liquid and adjusting the moisture concentration of the cleaning liquid in a state where the pressure is reduced by the pressure reduction mechanism;
A moisture replenishment mechanism for replenishing moisture in the adjustment mechanism;
A controller for controlling the replenishment of water into the adjustment mechanism of the water replenishment mechanism,
The adjustment mechanism is
A condenser for condensing and liquefying the vapor of the cleaning liquid vaporized by the distillation kettle;
A tank for storing the liquefied cleaning liquid;
A pressure reducing mechanism for making the inside of the capacitor negative pressure,
The moisture replenishment mechanism is
A moisture channel through which moisture flows,
A water replenishment valve provided in the middle of the water flow path,
The decompression mechanism is
A circulation channel that exits the tank and returns to the tank;
An ejector provided in the middle of the circulation flow path;
A pump for circulating the cleaning liquid in the circulation flow path,
The capacitor is connected to the ejector;
The ejector is configured so that the cleaning liquid in the capacitor is sucked into the circulation flow path,
When the water concentration of the cleaning liquid introduced into the distillation kettle or the water concentration of the distilled cleaning liquid is lower than a predetermined value, the control device opens the water replenishing valve to adjust the adjusting mechanism from the water replenishing mechanism. A cleaning liquid distillation regenerator that performs control for replenishing water in a vacuumed cleaning liquid. Equipped with a moisture concentration detection mechanism that detects the moisture concentration of the distilled cleaning liquid,
The control device executes control for replenishing moisture from the moisture replenishing mechanism into the adjustment mechanism when the moisture concentration of the cleaning liquid detected by the moisture concentration detecting mechanism is lower than a predetermined value. The cleaning liquid distillation regenerating apparatus according to claim 1. The cleaning liquid has non-flammability when the concentration of water contained is at least a predetermined minimum water concentration,
The control device executes control for replenishing moisture from the moisture replenishing mechanism into the adjustment mechanism when the moisture concentration of the cleaning liquid detected by the moisture concentration detecting mechanism is lower than the minimum moisture concentration. The cleaning liquid distillation regenerating apparatus according to claim 1 or 2. A parts cleaning apparatus comprising the cleaning liquid distillation regenerating apparatus according to any one of claims 1 to 3.

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