JPH0326383A - Cleaning device using organic solvent - Google Patents

Cleaning device using organic solvent

Info

Publication number
JPH0326383A
JPH0326383A JP16062889A JP16062889A JPH0326383A JP H0326383 A JPH0326383 A JP H0326383A JP 16062889 A JP16062889 A JP 16062889A JP 16062889 A JP16062889 A JP 16062889A JP H0326383 A JPH0326383 A JP H0326383A
Authority
JP
Japan
Prior art keywords
organic solvent
cleaning
cleaning tank
auxiliary
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16062889A
Other languages
Japanese (ja)
Other versions
JP2721704B2 (en
Inventor
Masato Tanaka
正人 田中
Tadayoshi Ichikawa
忠義 市川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chiyoda Manufacturing Corp
Original Assignee
Chiyoda Manufacturing Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chiyoda Manufacturing Corp filed Critical Chiyoda Manufacturing Corp
Priority to JP1160628A priority Critical patent/JP2721704B2/en
Priority to CA 2019578 priority patent/CA2019578C/en
Priority to SU4830467 priority patent/RU2008989C1/en
Priority to AU57837/90A priority patent/AU635540B2/en
Publication of JPH0326383A publication Critical patent/JPH0326383A/en
Application granted granted Critical
Publication of JP2721704B2 publication Critical patent/JP2721704B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

PURPOSE:To rapidly lower the pressure in a cleaning tank and to enhance the degree of vacuum in the cleaning tank without using a high-capacity and high-performance vacuum pump by providing a stop valve to the outlet and inlet connection pipes of a closed vessel having a cooling means and provided between the cleaning tank and a regenerating and recovering means. CONSTITUTION:The closed vessel 26 provided with a cooling pipe 27 and the cleaning tank 2 are connected by a first connection pipe 29 having a first stop valve 28, and a still 12 and the vessel 26 are connected by a second connection pipe 31 provided with a second stop valve 30. The bottom of the vessel 26 and the lower side surface of the still 12 are connected by a third connection pipe 33 provided with a third stop valve 32. The vapor of an org. solvent is condensed in the vessel 26, and the liquefied org. solvent is supplied into the still 12. Consequently, the performance of the vacuum pump 13 for discharging the gas in the tank 2 need not be enhanced, the org. solvent used in cleaning a material is rapidly discharged from the tank 2, and the degree of vacuum in the tank 2 is enhanced.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明に係る有機溶剤を使用する洗浄装置は、フロン
等の有機溶剤を用いて各種物品の表面に付着した油等の
汚れを落とす為に利用するものである。
Detailed Description of the Invention (Field of Industrial Application) A cleaning device using an organic solvent according to the present invention is used to remove dirt such as oil attached to the surface of various articles using an organic solvent such as Freon. It is something to be used.

(従来の技術) 金型、空気軸受用の多孔質焼結金属、或はIC基板等、
各種物品の表面に付着した油等の汚れを、フロン、トリ
クロルエチレン等の有機溶剤を洗浄液として使用する事
で洗浄する事が、一般的に行なわれている。
(Prior art) Molds, porous sintered metal for air bearings, IC boards, etc.
BACKGROUND OF THE INVENTION It is common practice to clean oil and other stains adhering to the surfaces of various articles by using organic solvents such as fluorocarbons and trichlorethylene as a cleaning liquid.

この様な有機溶剤を洗浄液として使用する事により、洗
浄作業を行なう洗浄装置の1例に就いて、実願昭63−
54595号に示された装置を例にして説明する。
An example of a cleaning device that performs cleaning work by using such an organic solvent as a cleaning liquid is disclosed in Utility Application No. 1983-
This will be explained using the device shown in No. 54595 as an example.

この洗浄装置は、第3図に示す様に、上方が開口した有
底円筒状で、上端開口を気密に塞ぐ事の出来るM1を有
する洗浄槽2と、有機溶剤を加熱蒸発させる為のヒータ
3を内蔵し、管5を通じて洗浄m2の内部に比較的温度
の高い有機溶剤の蒸気を送り込む蒸気供給手段4と、洗
浄a2の内部に送り込む為の洗浄用有機溶剤を貯溜した
貯溜槽6と、この貯溜槽6と洗浄槽2とを結ぶ管7と、
液状の有機溶剤を加熱蒸発させる為のヒータ10と有機
溶剤の蒸気を凝縮させる為の冷却器11とを組み合わせ
る事で構成され、凝縮した有機溶剤を上記貯溜槽6に送
る蒸留器12と、この蒸留器12と上記貯溜416とを
結ぶ管8と、この管8の途中に設けた送液ポンプ9を上
記両管7、8に組み合わせ、洗浄槽2と貯溜槽6或は蒸
留器12との間で液状の有機溶剤の給排を行なう給排手
段20と、洗浄槽2内に空気を送り込む吸気管16と、
途中に真空ポンプl3を設けた排出管19の端部にそれ
ぞれ接続され、洗浄槽2から排出した有機溶剤蒸気を、
上記蒸留器12に送り込む排蒸管14及び洗浄槽2から
空気を排出する排気管15とから構成されている。
As shown in FIG. 3, this cleaning device includes a cleaning tank 2, which has a cylindrical shape with an open top and a bottom, and has an M1 that can airtightly close the top opening, and a heater 3 for heating and evaporating the organic solvent. a steam supply means 4 which has a built-in system and sends relatively high-temperature organic solvent vapor into the inside of the washing m2 through a pipe 5; A pipe 7 connecting the storage tank 6 and the cleaning tank 2;
A distiller 12 is constructed by combining a heater 10 for heating and evaporating a liquid organic solvent and a cooler 11 for condensing organic solvent vapor, and a distiller 12 sends the condensed organic solvent to the storage tank 6. A pipe 8 connecting the distiller 12 and the storage tank 416 and a liquid feeding pump 9 installed in the middle of the pipe 8 are combined with the pipes 7 and 8 to connect the washing tank 2 and the storage tank 6 or the distiller 12. A supply/discharge means 20 for supplying and discharging a liquid organic solvent between them, and an intake pipe 16 for supplying air into the cleaning tank 2;
The organic solvent vapor discharged from the cleaning tank 2 is connected to each end of a discharge pipe 19 with a vacuum pump l3 installed in the middle.
It is comprised of an exhaust pipe 14 that sends air into the distiller 12 and an exhaust pipe 15 that exhausts air from the cleaning tank 2.

上述の様に構成される先発明の洗浄装置により、被洗浄
物17の洗浄を行なう場合、蓋1を開いてこの被洗浄物
17を洗浄槽2の内部に収納した後、上記蓋1を閉じて
から真空ポンプ13を運転し、排気管15を通じて、こ
の洗浄槽2内の空気を排出する。
When cleaning the object 17 to be cleaned using the cleaning apparatus of the earlier invention configured as described above, the lid 1 is opened and the object 17 is stored in the cleaning tank 2, and then the lid 1 is closed. Then, the vacuum pump 13 is operated to exhaust the air in the cleaning tank 2 through the exhaust pipe 15.

洗浄槽2内の空気を排出した後、給排手段2oを構威す
る管7を通じて、貯溜槽6内の有機溶剤を洗浄槽2内に
送り込み、被洗浄物17の洗浄を行なう。この際、洗浄
槽2の底面に固定した超音波振動子18、18に通電す
る事により、洗浄槽2内の有機溶剤に超音波振動を加え
、被洗浄物17の洗浄が効率良く行なわれる様にする。
After the air in the cleaning tank 2 is discharged, the organic solvent in the storage tank 6 is sent into the cleaning tank 2 through the pipe 7 that constitutes the supply/discharge means 2o, and the object 17 to be cleaned is cleaned. At this time, by energizing the ultrasonic vibrators 18, 18 fixed to the bottom of the cleaning tank 2, ultrasonic vibrations are applied to the organic solvent in the cleaning tank 2, so that the object to be cleaned 17 can be efficiently cleaned. Make it.

液状の有機溶剤による洗浄作業が完了したならば、給排
手段20を構成する送液ポンプ9を運転する事により、
管8を通じて洗浄4ffz中の液状有機溶剤を、徐々に
蒸留器12に送り込みつつ、蒸気供給手段4から洗浄槽
2中に有機溶剤の蒸気を供給する。
After the cleaning work with the liquid organic solvent is completed, by operating the liquid feeding pump 9 constituting the supply/discharge means 20,
While the liquid organic solvent in the cleaning 4ffz is gradually fed into the distiller 12 through the pipe 8, organic solvent vapor is supplied from the vapor supply means 4 into the cleaning tank 2.

この結果、洗浄槽2中の被洗浄物17は、その一部が液
状有機溶剤の液面上に露出し、この露出部分で有機溶剤
の蒸気が凝縮し、この凝縮分で被洗浄物17の表面が洗
浄される、所謂蒸気洗浄が行なわれる。又、蒸留器12
内に送り込まれた使用済みの汚れた有機溶剤は、この蒸
留器12に設けたヒータ10により加熱され、蒸発して
から、再び冷却器11により凝縮液化される事によって
再生され、前記貯溜槽6に戻される。
As a result, a part of the object 17 to be cleaned in the cleaning tank 2 is exposed above the surface of the liquid organic solvent, and the vapor of the organic solvent condenses in this exposed portion, and the condensed amount is used to clean the object 17. The surface is cleaned, so-called steam cleaning. Also, distiller 12
The used dirty organic solvent sent into the distiller 12 is heated by the heater 10 provided in the distiller 12, evaporated, and then regenerated by being condensed and liquefied by the cooler 11. will be returned to.

蒸気洗浄を行ないつつ、洗浄Paz中の液状有機溶剤を
総て蒸留器12に送り込んだならば、排出管19の途中
に設けた真空ポンプ13を運転し、洗浄槽2内に残留し
ている有機溶剤蒸気を、排蒸管14を通じて、蒸留器1
2内に排出する。この様に、排出管19と排蒸管14と
を通じて蒸留器12内に排出された有機溶剤の蒸気は、
この蒸留器12に設けた冷却器11により凝縮液化され
て回収される。冷却器11により回収し切れなかった有
機溶剤の蒸気は、二次冷却器21により回収され、更に
この二次冷却器21によっても回収出来なかった、微量
の有機溶剤蒸気は、活性炭フィルタ22により捕集され
る。
After all the liquid organic solvent in the cleaning Paz is sent to the distiller 12 while performing steam cleaning, the vacuum pump 13 installed in the middle of the discharge pipe 19 is operated to remove the organic solvent remaining in the cleaning tank 2. The solvent vapor is passed through the exhaust pipe 14 to the distiller 1.
Discharge within 2 hours. In this way, the organic solvent vapor discharged into the distiller 12 through the discharge pipe 19 and the exhaust pipe 14 is
It is condensed and liquefied by a cooler 11 provided in this distiller 12 and recovered. The organic solvent vapor that was not completely recovered by the cooler 11 is recovered by the secondary cooler 21, and the trace amount of organic solvent vapor that could not be recovered by the secondary cooler 21 is captured by the activated carbon filter 22. collected.

真空ポンブ13の運転に伴なって、洗浄槽2内が所定の
真空度に達したならば、上記真空ポンプ13を停止し、
吸気管16を通じて洗浄槽2内に空気を送り込む。
When the inside of the cleaning tank 2 reaches a predetermined degree of vacuum with the operation of the vacuum pump 13, the vacuum pump 13 is stopped;
Air is sent into the cleaning tank 2 through the intake pipe 16.

この結果、洗浄槽2内の圧力が大気圧程度に迄上昇した
ならば、この洗浄槽2の蓋1を開き、洗浄作業が完了し
た被洗浄物17の取り出しを行なう。
As a result, when the pressure inside the cleaning tank 2 rises to about atmospheric pressure, the lid 1 of the cleaning tank 2 is opened and the object 17 to be cleaned which has been cleaned is taken out.

(発明が解決しようとする課題) ところが、上述の様に構成され作用する、先発明に係る
洗浄装置に於いては、次に述べる様な不都合を生じる。
(Problems to be Solved by the Invention) However, the cleaning device according to the previous invention, which is constructed and operates as described above, has the following disadvantages.

即ち、洗浄作業を開始する際、更には洗浄4t12内に
有機溶剤を送り込む事で、被洗浄物17の洗浄作業を行
ない、洗浄槽2から液状の有機溶剤を排出した後には、
洗浄槽2内に存在する空気、或は有機溶剤蒸気を、真空
ボンプ13により排出するが、この真空ポンプ13によ
る空気、或は有機溶剤蒸気の排出速度と到達可能な真空
度とは、真空ポンプ13の能力により決定される。
That is, when starting the cleaning operation, the object to be cleaned 17 is cleaned by feeding the organic solvent into the cleaning tank 2, and after the liquid organic solvent is discharged from the cleaning tank 2,
The air or organic solvent vapor present in the cleaning tank 2 is discharged by the vacuum pump 13. Determined by 13 abilities.

洗浄効果を上げる為には、被洗浄物17に付着した液滴
を突沸させる事で、被洗浄物17の表面に付着した汚れ
を吹き飛ばす事が効果があるが、この様に液滴を突沸さ
せる為には、洗浄槽2からの気体の排出速度を速くする
必要がある。
In order to increase the cleaning effect, it is effective to blow off the dirt attached to the surface of the object to be cleaned 17 by causing the droplets attached to the object to be cleaned 17 to bump, but by causing the droplets to bump in this way. For this purpose, it is necessary to increase the rate of gas discharge from the cleaning tank 2.

又、洗浄作業終了後、M1を開いた場合に、周囲に拡散
する有機溶剤蒸気の量を少なくする為には、到達可能な
真空度を高める必要がある。
Furthermore, in order to reduce the amount of organic solvent vapor that diffuses into the surroundings when M1 is opened after the cleaning operation is completed, it is necessary to increase the degree of vacuum that can be achieved.

上述の様な問題に対処する為には、真空ポンプ13とし
て、大型のもの、或は高性能のものを使用する必要があ
るが、真空ポンプ13を大型化したり、高性能化したり
する場合、設置スペースが嵩むだけでなく、真空ポンプ
のコストが極端に高くなる(特に真空度を高める場合)
為、好ましくない。
In order to deal with the above-mentioned problems, it is necessary to use a large or high-performance vacuum pump 13. However, if the vacuum pump 13 is made larger or has higher performance, Not only does the installation space increase, but the cost of the vacuum pump becomes extremely high (especially when increasing the degree of vacuum)
Therefore, it is not desirable.

本発明の有機溶剤を使用する洗浄装置は、上述の様な不
都合を解消するものである。
A cleaning device using an organic solvent according to the present invention solves the above-mentioned disadvantages.

(課題を解決する為の手段) 本発明の有機溶剤を使用する洗浄装置は、前述した従来
の洗浄装置と同様に、被洗浄物を収納した状態で密閉自
在な洗浄槽と、この洗浄槽内に洗浄用の有機溶剤を送り
込み自在な供給手段と、上記洗浄槽から排出された使用
済みの有機溶剤を送り込み再生すると共に、上記真空ポ
ンプから吐出される気体を送り込む事により、この気体
中に存在する有機溶剤の蒸気を回収する溶剤の再生回収
手段とから構成されている。
(Means for Solving the Problems) The cleaning device using an organic solvent of the present invention, like the conventional cleaning device described above, includes a cleaning tank that can be sealed while storing the object to be cleaned, and an interior of the cleaning tank. A supply means that can freely feed an organic solvent for cleaning into the tank, a used organic solvent discharged from the cleaning tank to regenerate it, and a gas discharged from the vacuum pump to remove the gas present in the gas. and a solvent regeneration and recovery means for recovering organic solvent vapor.

更に、゛木発明の有機溶剤を使用する洗浄装置に於いて
は、上記洗浄槽と上記再生回収手段との間に、内部に冷
却手段を有する密閉容器を設けると共に、この密閉容器
と上記洗浄槽とを、途中に第一の開閉弁を有する第一の
接続管により、密閉容器と上記再生回収手段の内部とを
、途中に第二の開閉弁を有する第二の接続管により、そ
れぞれ接続している。
Furthermore, in the cleaning device using the organic solvent of the invention, a closed container having a cooling means inside is provided between the cleaning tank and the regeneration recovery means, and the closed container and the cleaning tank and a first connection pipe having a first on-off valve in the middle, and a closed container and the inside of the regeneration recovery means, respectively, by a second connection pipe having a second on-off valve in the middle. ing.

(作 用) 上述の様に構威される、本発明の有機溶剤を使用する洗
浄装置により、被洗浄物を洗浄する場合の作用自体は、
前述した先発明の洗浄装置と同様である。
(Function) The function itself when cleaning an object to be cleaned with the cleaning device using the organic solvent of the present invention configured as described above is as follows.
This is similar to the cleaning device of the previous invention described above.

但し、本発明の有機溶剤を使用する洗浄装置の場合、洗
浄槽内からの気体の排出を迅速に行ない、しかも必要と
すれば、洗浄槽内の真空度を高める事が出来る。
However, in the case of the cleaning apparatus using the organic solvent of the present invention, gas can be quickly discharged from the cleaning tank, and if necessary, the degree of vacuum in the cleaning tank can be increased.

即ち、本発明の洗浄装置に於いて、洗浄槽内の気体を排
出する場合には、先ず、第一の開閉弁を閉じ、洗浄槽と
密閉容器との連通を断った状態のまま、第二の開閉弁を
開き、再生回収手段の内部に存在する有機溶剤蒸気を、
上記密閉容器内に導入する。
That is, in the cleaning device of the present invention, when discharging the gas in the cleaning tank, first close the first on-off valve, and while the communication between the cleaning tank and the closed container is cut off, open the second valve. Open the on-off valve to remove the organic solvent vapor present inside the regeneration and recovery means.
Introduce into the above airtight container.

密閉容器内に有機溶剤蒸気を導入したならば、第一、第
二の開閉弁を何れも閉じ、上記密閉容器内に設けた冷却
手段を運転する事により、密閉容器内の有機溶剤蒸気を
凝縮液化する。
Once the organic solvent vapor is introduced into the sealed container, both the first and second on-off valves are closed and the cooling means provided in the sealed container is operated to condense the organic solvent vapor in the sealed container. liquefy.

この結果、密閉容器内の圧力が低下する為、第二の開閉
弁を閉じたまま、それ迄閉じ゜Cいた第一の開閉弁を開
けば、洗浄槽内に存在する気体が密閉容器内に吸引され
、洗浄槽内の圧力が急激に低下する。
As a result, the pressure inside the sealed container decreases, so if you open the first on-off valve that was previously closed while keeping the second on-off valve closed, the gas present in the cleaning tank will flow into the airtight container. It is sucked in, and the pressure inside the cleaning tank drops rapidly.

密閉容器内に吸引されk気体の内に有機溶剤蒸気が含ま
れる場合、この有機溶剤蒸気は、この密閉容器内の冷却
手段により次々に凝縮液化され、密閉容器内の圧力が低
下する為、洗浄槽から密閉容器への有機溶剤蒸気を含む
気体の吸引は、その後も継続して行なわれる。
If organic solvent vapor is included in the gas that is sucked into the sealed container, this organic solvent vapor is condensed and liquefied one after another by the cooling means inside the sealed container, and the pressure inside the sealed container is reduced, so cleaning is not possible. The suction of the gas containing the organic solvent vapor from the tank to the closed container continues thereafter.

(実施例) 次に、図示の実施例を説明しつつ、本発明を更に詳しく
説明する。
(Example) Next, the present invention will be explained in more detail while explaining the illustrated embodiment.

第1図は本発明の有機溶剤を使用する洗浄装置の第一実
施例の要部を示す略縦断面図である。
FIG. 1 is a schematic vertical cross-sectional view showing the main parts of a first embodiment of a cleaning device using an organic solvent according to the present invention.

上端開口部に蓋1を設け、内部に被洗浄物を収納した状
態で密閉自在な洗浄槽2と、再生回収手段である蒸留器
12との間には、密閉容器26を設けている。
A closed container 26 is provided between the cleaning tank 2, which is provided with a lid 1 at the upper end opening and can be closed tightly with the object to be cleaned stored therein, and the distiller 12, which is a regeneration and recovery means.

この密閉容器26の内部には、冷却手段である冷却バイ
ブ27を配設して、密閉容器26内に送り込まれた気体
を冷却自在としている。
A cooling vibrator 27 serving as a cooling means is disposed inside the closed container 26 so that the gas sent into the closed container 26 can be freely cooled.

この様な密閉容器26と上記洗浄槽2とは、途中に第一
の開閉弁28を有する第一の接続管29により接続する
事で、洗浄槽2内に存在する気体を、第一の接続管29
を通じて、密閉容器26内に吸引自在としている。
The airtight container 26 and the cleaning tank 2 are connected by a first connection pipe 29 having a first on-off valve 28 in the middle, so that the gas present in the cleaning tank 2 can be transferred to the first connection pipe 29. tube 29
Through this, suction can be freely drawn into the closed container 26.

又、密閉容器26の側面を貫通して設け、途中に第二の
開閉弁30を設けた第二の接続管31の他端を、上記蒸
留器12の中間部側面を貫通させ、この蒸留器12内に
開口させて、蒸留器12内に存在する有機溶剤蒸気を、
密閉容器26内に導入自在としている。
Further, the other end of the second connecting pipe 31, which is provided through the side surface of the closed container 26 and has a second on-off valve 30 in the middle, is passed through the side surface of the middle part of the distiller 12, and the distiller 12 to drain the organic solvent vapor present in the distiller 12.
It can be freely introduced into the closed container 26.

又、密閉容器26の底部に一端を接続し、途中に第三の
開閉弁32を設けた第三の接続管33の他端は、上記蒸
留器12の下部側面を貫通して、この蒸留器12内に開
口させ、密閉容器26内で有機溶剤蒸気が凝縮する事で
生じた液状の有m溶剤を、蒸留器12内に送り込み自在
としている。
Further, the other end of a third connecting pipe 33, which has one end connected to the bottom of the closed container 26 and a third on-off valve 32 provided in the middle, penetrates the lower side surface of the distiller 12 and is connected to the distiller. An opening is opened into the distiller 12 so that the liquid organic solvent produced by condensing the organic solvent vapor in the closed container 26 can be freely fed into the distiller 12 .

更に、前記第一の接続管29の途中で、第一の開閉弁2
8と密閉容器26との間部分には、三方弁34を設けて
いる。三つのボートの内の二つのボートを、上記第一の
接続管29に接続した三方弁34の、残り一つのボート
には、吸入管35の一端を接続しており、この吸入管3
5の他端を、真空ボンプ13の吸入口に接続している。
Furthermore, in the middle of the first connection pipe 29, the first on-off valve 2
A three-way valve 34 is provided between the container 8 and the closed container 26. Two of the three boats are connected to the first connection pipe 29 of the three-way valve 34, and one end of the suction pipe 35 is connected to the remaining one boat.
The other end of 5 is connected to the suction port of vacuum pump 13.

そして、この真空ポンプ13の吐出口に一端を接続した
吐出管36の他端は、上記密閉容器26を気密に貫通さ
せ、この密閉容器26内に開口させている。
The other end of the discharge pipe 36, one end of which is connected to the discharge port of the vacuum pump 13, passes through the hermetic container 26 in an airtight manner and opens into the hermetic container 26.

上述の様に構成される、本発明の有機溶剤を使用する洗
浄装置の他の構成部分、及び洗浄槽2内に収納した被洗
浄物を洗浄する際の作用自体は、前述した先発明の洗浄
装置と同様である。
The other components of the cleaning device using an organic solvent of the present invention configured as described above and the operation itself when cleaning the object to be cleaned stored in the cleaning tank 2 are similar to those of the earlier invention described above. It is similar to the device.

但し、本発明の有機溶剤を使用する洗浄装置の11 12 場合、洗浄糟2内の気体を排出する為の真空ポンプ13
の性能を特に向上させなくても、液状の有機溶剤を使用
して被洗浄物を洗浄した後、この液状の有機溶剤を洗浄
槽2から排出する作業を迅速に行ない、しかも洗浄a!
2内の真空度を高める事が出来る。
However, in the case of a cleaning device using the organic solvent of the present invention, a vacuum pump 13 for discharging the gas in the cleaning chamber 2 is provided.
Even if the performance of the cleaning a! is not particularly improved, after cleaning the object using a liquid organic solvent, the liquid organic solvent can be quickly discharged from the cleaning tank 2, and the cleaning a!
The degree of vacuum inside 2 can be increased.

即ち、本発明の洗浄装置に於いて、洗浄後に洗浄4iy
2内に残留する有機溶剤蒸気を排出する場合には、先ず
、第一の接続管29の途中に設けた第の開閉弁28を閉
じ、洗浄槽2と密閉容器26との連通を断った状態のま
ま、第二の開閉弁3oを開き、再生回収手段である蒸留
器12内に存在する有機溶剤蒸気を、第二の接続管31
を通じて、上記密閉容器26内に導入する。この際、第
の接続管29の途中の三方弁34は、第一の接続管29
をそのまま連通する状態に(第一の接続管29と吸入管
35とは連通させない状態に)、切り換えておく。
That is, in the cleaning apparatus of the present invention, cleaning 4iy is performed after cleaning.
When discharging the organic solvent vapor remaining in the cleaning tank 2, first close the second on-off valve 28 provided in the middle of the first connecting pipe 29, cutting off communication between the cleaning tank 2 and the closed container 26. Then, the second on-off valve 3o is opened, and the organic solvent vapor present in the distiller 12, which is a regeneration and recovery means, is transferred to the second connection pipe 31.
The liquid is introduced into the closed container 26 through the airtight container 26. At this time, the three-way valve 34 in the middle of the first connecting pipe 29
(the first connecting pipe 29 and the suction pipe 35 are not in communication with each other).

この様にして、密閉容器26内に有機溶剤蒸気を導入し
たならば、第一、第二、第三の開閉弁28、30、32
を何れも閉じ、上記密閉容器26内に設けた、冷却手段
である冷却バイブ27内に冷媒を流通させる事により、
密閉容器26内の有機溶剤蒸気を凝縮液化する。
After introducing the organic solvent vapor into the closed container 26 in this way, the first, second, and third on-off valves 28, 30, 32
By closing both of them and circulating the refrigerant into the cooling vibe 27, which is a cooling means, provided in the airtight container 26,
The organic solvent vapor in the closed container 26 is condensed and liquefied.

密閉容器26内で有機溶剤蒸気が凝縮液化する結果、密
閉容器26内の圧力が低下する。
As a result of condensation and liquefaction of the organic solvent vapor within the closed container 26, the pressure within the closed container 26 decreases.

そこで、第二、第三の、開閉弁30、32を閉じたまま
、それ迄閉じていた第一の開閉弁28を開き、前記洗浄
槽2内に残留していた有機溶剤蒸気を上記密閉容器26
内に吸引する。
Therefore, while keeping the second and third on-off valves 30 and 32 closed, the first on-off valve 28, which had been closed until then, was opened, and the organic solvent vapor remaining in the cleaning tank 2 was discharged into the airtight container. 26
suction inside.

第一の接続管29を通じ、洗浄槽2内の有機溶剤蒸気が
密閉容器26内に吸引されるのは、拓く短時間の間に行
なわれる為、洗浄槽2′内の圧力が急激に低下し、この
洗浄槽2内に収納された被洗浄物に付着した有機溶剤の
液滴が突沸し、この被洗浄物の表面に付着した汚れを吹
き飛ばして、続いて行なわれる洗浄作業による洗浄効果
を向上させる。
Since the organic solvent vapor in the cleaning tank 2 is sucked into the closed container 26 through the first connecting pipe 29 within a short period of time, the pressure in the cleaning tank 2' drops rapidly. The organic solvent droplets adhering to the object to be cleaned stored in the cleaning tank 2 bump and blow away the dirt adhering to the surface of the object to be cleaned, thereby improving the cleaning effect of the subsequent cleaning operation. let

第一の接続管29を通じて密閉容器26内に吸引された
有機溶剤蒸気は、この密閉容器26内に設けられた冷却
バイブ27により冷却されて、次々に凝縮液化される為
、洗浄槽2から密閉容器26に有機溶剤蒸気が吸引され
ても、密閉容器26内の圧力は殆ど上昇せず、洗浄槽2
から密閉容器26への有機溶剤の吸引は、その後も継続
して行なわれ、洗浄Paz内の圧力が低下する。
The organic solvent vapor sucked into the sealed container 26 through the first connecting pipe 29 is cooled by the cooling vibe 27 provided in the sealed container 26, and is condensed and liquefied one after another. Even if organic solvent vapor is sucked into the container 26, the pressure inside the closed container 26 hardly increases, and the cleaning tank 2
The suction of the organic solvent from the cleaning container 26 to the closed container 26 continues thereafter, and the pressure inside the cleaning Paz decreases.

上述の様に、密閉容器26内で有機溶剤蒸気を凝縮液化
する事で、洗浄槽2内の圧力を相当に低下させる事が出
来るが、この凝縮液化による圧力低下のみでは、洗浄a
!セ内の真空度が不十分である場合は、第一の棲続管2
9の途中の三方弁34を、第一の接続管29と真空ポン
プ13の吸入管35とを通じさせる状態に切り換え、こ
の真空ポンプ13を運転する。
As mentioned above, by condensing and liquefying the organic solvent vapor in the closed container 26, the pressure inside the cleaning tank 2 can be considerably reduced.
! If the vacuum inside the cell is insufficient, use the first incubation pipe 2.
The three-way valve 34 in the middle of the vacuum pump 13 is switched to a state where the first connecting pipe 29 and the suction pipe 35 of the vacuum pump 13 are connected to each other, and the vacuum pump 13 is operated.

この様にして真空ポンプ13を運転した場合、洗浄槽2
内の有機溶剤蒸気が、第一の接続管29、吸入管35、
真空ポンプ13、吐出管36を通じて、密閉容器26内
に送り込まれ、この密閉容器26内で凝縮液化する。
When the vacuum pump 13 is operated in this way, the cleaning tank 2
The organic solvent vapor in the first connecting pipe 29, the suction pipe 35,
The liquid is fed into the closed container 26 through the vacuum pump 13 and the discharge pipe 36, and is condensed and liquefied in the closed container 26.

この様にして真空ポンプ26による蒸気排出を行なう際
、真空ボンプ13の吐出口は密閉容器26内に、吸入口
は洗浄槽2内に、それぞれ連通するが、この際には密閉
容器26内の圧力も相当に低くなっている為、真空ポン
プの吸入側と吐出側との圧力差を小さくする事が出来、
真空ポンプ13として格別高性能のもの(高真空型のも
の)を使用しなくても、洗浄N2内の真空度を十分に高
める事が出来る。
When discharging steam by the vacuum pump 26 in this way, the discharge port of the vacuum pump 13 communicates with the inside of the closed container 26, and the suction port communicates with the inside of the cleaning tank 2. Since the pressure is considerably low, the pressure difference between the suction side and the discharge side of the vacuum pump can be reduced.
Even without using a particularly high-performance vacuum pump 13 (high vacuum type), the degree of vacuum in the cleaning N2 can be sufficiently increased.

次に、第2図に示した本発明の第二実施例に就いて説明
する。
Next, a second embodiment of the present invention shown in FIG. 2 will be described.

本実施例は、密閉容器26の底部に溜った液状の有機溶
剤を蒸留器12内に排出する際に、この蒸留器12内に
存在する有機溶剤蒸気が一度に消費されない様にして、
この蒸留器12から渭れ出す有機溶剤の量を、より少な
く抑える様にしたものである。
In this embodiment, when the liquid organic solvent accumulated at the bottom of the closed container 26 is discharged into the distiller 12, the organic solvent vapor present in the distiller 12 is not consumed all at once.
The amount of organic solvent flowing out from the distiller 12 is suppressed to a lower level.

即ち、上記第一実施例の場合、洗浄a12から排出され
た有機溶剤蒸気を密閉容器26内で凝縮させる事で生じ
た液状の有機溶剤は、第三の接続管33を通じて、蒸留
器12内に送り込むが、この15 1 6 際、蒸留器12内に存在する有機溶剤蒸気が、真空に近
い低圧となった密閉容器26内に吸引される。
That is, in the case of the first embodiment, the liquid organic solvent produced by condensing the organic solvent vapor discharged from the cleaning a12 in the closed container 26 is fed into the distiller 12 through the third connecting pipe 33. At this time, the organic solvent vapor present in the distiller 12 is sucked into the closed container 26, which has a low pressure close to vacuum.

密閉容器26の容積は、洗浄槽2内の圧力を急激に低下
させられる様な程度に、十分に大きな容積を有する為、
上述の様に、密閉容器26の底部に溜った液状の有機溶
剤を蒸留器12に送り込む際に、蒸留器12から密閉容
器26に吸引される有機溶剤蒸気の量も多くなってしま
う。
Since the volume of the closed container 26 is large enough to rapidly reduce the pressure inside the cleaning tank 2,
As described above, when the liquid organic solvent accumulated at the bottom of the closed container 26 is sent to the distiller 12, the amount of organic solvent vapor sucked from the distiller 12 into the closed container 26 also increases.

この結果、蒸留器12内に存在する有機溶剤蒸気が、短
時間の間に多量に消費され、蒸留器12内の圧力が低下
し、この低下分を補う為、管25(第3図参照)を通し
て比較的多量の外気が、蒸留器12内に吸引されてしま
う。
As a result, a large amount of the organic solvent vapor present in the distiller 12 is consumed in a short period of time, and the pressure in the distiller 12 decreases. A relatively large amount of outside air is drawn into the distiller 12 through the distillation device 12 .

この様にして蒸留器12内に吸引された外気は、ヒータ
10の加熱に伴なって発生ずる有機溶剤蒸気に押される
様にして、上記管25を通じ外部に押し出されるが、こ
の際、空気と共に少量の有機溶剤蒸気が、管25を通じ
て排出される事が避けられない。この様に、空気と共に
排出される有機溶剤は、管25の端部に設けた活性炭フ
ィルタ22により捕集されるが、空気に混入した有機溶
剤蒸気の量が多い場合、活性炭フィルタ22により捕集
し切れない有機溶剤蒸気が生じたり、或は活性炭フィル
タ22が早期に劣化したりする原因となる。
The outside air sucked into the distiller 12 in this way is pushed out through the pipe 25 by the organic solvent vapor generated as the heater 10 heats it, but at this time, it is pushed out together with the air. It is inevitable that a small amount of organic solvent vapor will be discharged through pipe 25. In this way, the organic solvent discharged together with the air is collected by the activated carbon filter 22 provided at the end of the pipe 25, but if the amount of organic solvent vapor mixed in the air is large, it is collected by the activated carbon filter 22. This may cause generation of organic solvent vapor that cannot be completely drained off, or premature deterioration of the activated carbon filter 22.

そこで、本実施例の場合、密閉容器26の底部に溜った
液状有機溶剤の排出を、小容量の補助密閉容器37を通
じて行なう様に構成する事で、上述の様な問題に対処す
る様に構成している。
Therefore, in the case of this embodiment, the liquid organic solvent accumulated at the bottom of the sealed container 26 is discharged through the auxiliary sealed container 37 having a small capacity, so that the above-mentioned problems can be solved. are doing.

即ち、本実施例の場合、第2図に示す様に、第の接続管
29を通じて洗浄槽2(第1図)に、第二の接続管31
を通じて蒸留器12に、それぞれ通じる密閉容器26の
底部と、この密閉容器26よりも十分に小容量で、上記
密閉容器26の下方に設けた、補助密閉容器37の上部
とを、途中に第一の補助開閉弁38を設けた第一の補助
接続管39により、接続している。
That is, in the case of this embodiment, as shown in FIG. 2, the second connecting pipe 31 is connected to the cleaning tank 2 (FIG. 1) through the second connecting pipe 29.
The bottom part of the closed container 26, which communicates with the distiller 12 through the distiller 12, and the upper part of the auxiliary closed container 37, which has a sufficiently smaller capacity than the closed container 26 and is provided below the closed container 26, are connected to the distiller 12 in the middle. The connection is made through a first auxiliary connecting pipe 39 provided with an auxiliary on-off valve 38.

又、上記補助密閉容器37の底部と、再生回収手段であ
る蒸留器12の一部で、有機溶剤蒸気が存在する部分と
を、途中に第二の補助開閉弁40を有する第二の補助接
続管41により接続し、上記補助密閉容器37の上部と
上記蒸留器12とを、途中に第三の補助開閉弁42を有
する第三の補助接続管43により接続している。
In addition, a second auxiliary connection having a second auxiliary on-off valve 40 is connected between the bottom of the auxiliary sealed container 37 and a part of the distiller 12 serving as a regeneration recovery means where organic solvent vapor is present. The upper part of the auxiliary sealed container 37 and the distiller 12 are connected by a third auxiliary connection pipe 43 having a third auxiliary on-off valve 42 in the middle.

この様に構成される本実施例の場合、密閉容器26内に
溜った液状の有機溶剤を、蒸留器12に送り込む場合、
補助密閉客器37を通じて行なう。
In the case of this embodiment configured in this way, when the liquid organic solvent accumulated in the closed container 26 is sent to the distiller 12,
This is done through the auxiliary sealed container 37.

即ち、密閉容器密閉容器26内に液状の有機溶剤が溜っ
たならば、第一、第二の開閉弁28、30と、第二、第
三の補助開閉弁40、42とを閉じた状態で、第一の補
助開閉弁38を開き、密閉容器26の底部に溜った液状
の有機溶剤を、第一の補助接続管39を通じて、重力に
より、補助密閉容器37に流下させる。これと同時に、
補助密閉容器37内に存在していた有機溶剤蒸気が、密
閉容器26内に吸引される。
That is, if the liquid organic solvent accumulates in the closed container 26, the first and second on-off valves 28 and 30 and the second and third auxiliary on-off valves 40 and 42 are closed. , the first auxiliary on-off valve 38 is opened, and the liquid organic solvent accumulated at the bottom of the closed container 26 is caused to flow down by gravity into the auxiliary closed container 37 through the first auxiliary connecting pipe 39 . At the same time,
The organic solvent vapor present in the auxiliary closed container 37 is sucked into the closed container 26.

この結果、密閉容器26から補助密閉客器37に液状の
有機溶剤を移したならば、第一の補助開閉弁38を閉じ
、代りに第二の補助開閉弁40を開いて、補助密閉容器
37から蒸留器12に液状の有機溶剤を移す。この際、
蒸留器12内に存在する有1M溶剤蒸気が、補助密閉容
器37に吸引されるが この補助密閉容器37の容積は
小さい為、蒸留器12内に存在する有機溶剤蒸気が一度
に多量に消費される事はなく、蒸留器12内に多量の空
気が吸引される事もない為、有機溶剤蒸気が蒸留器12
外に漏れ出す事も、少なく抑える事が出来る。
As a result, once the liquid organic solvent has been transferred from the airtight container 26 to the auxiliary airtight container 37, the first auxiliary on-off valve 38 is closed, and the second auxiliary on-off valve 40 is opened instead, and the auxiliary airtight container 37 is opened. The liquid organic solvent is transferred from the distiller 12 to the distiller 12. On this occasion,
The 1M solvent vapor present in the distiller 12 is sucked into the auxiliary sealed container 37, but since the volume of this auxiliary sealed container 37 is small, a large amount of the organic solvent vapor present in the distiller 12 is consumed at once. Since the organic solvent vapor is not absorbed into the distiller 12 and a large amount of air is not sucked into the distiller 12,
It is also possible to suppress leakage to the outside.

尚、有機溶剤を使用する洗浄装置の運転を開始する際に
は、第一の開閉弁28と第三の補助開閉弁42とを閉じ
、第二の開閉弁30と第一、第二の補助開閉弁38、4
0とを開いた状態で、密閉容器26と補助密閉客器37
とに有機溶剤蒸気を充満させる。
Note that when starting the operation of the cleaning equipment that uses an organic solvent, the first on-off valve 28 and the third auxiliary on-off valve 42 are closed, and the second on-off valve 30 and the first and second auxiliary on-off valves are closed. Opening/closing valve 38, 4
0, the airtight container 26 and the auxiliary airtight container 37 are opened.
and fill it with organic solvent vapor.

有機溶剤蒸気は空気よりも重い為、第二の開閉弁30と
第一、第二の補助開閉弁38、40とを開くと、蒸留器
12内に存在する有機溶剤蒸気が下から補助密閉容器3
7と密閉容器26とに進入1 9 2 0 し、それ迄補助密閉容器37と密閉容器26との内部に
存在していた空気が、第二の接続管31を通じて、蒸留
器12の上部空間に排出される。
Since organic solvent vapor is heavier than air, when the second on-off valve 30 and the first and second auxiliary on-off valves 38 and 40 are opened, the organic solvent vapor present in the distiller 12 flows from below into the auxiliary closed container. 3
7 and the closed container 26, and the air that had been present inside the auxiliary closed container 37 and the closed container 26 until then enters the upper space of the distiller 12 through the second connecting pipe 31. be discharged.

但し、この際に於ける有機格剤蒸気と空気との置換は、
両気体の比重差に基づいて、緩徐に行なわれ、消費され
る有機溶剤蒸気の量が、ヒータ10の加熱により発生す
る有機溶剤蒸気の量を大きく上回る事がない為、蒸留器
12内で、有機溶剤蒸気と空気との境界層位置が大きく
変動する事はなく、蒸留器12から外に漏れ出す有機溶
剤の量を掻く少なく抑える事が出来る。
However, in this case, the replacement of organic reagent vapor with air is
Based on the difference in specific gravity between the two gases, the process is carried out slowly, and the amount of organic solvent vapor consumed does not greatly exceed the amount of organic solvent vapor generated by heating the heater 10, so in the distiller 12, The position of the boundary layer between the organic solvent vapor and air does not change greatly, and the amount of organic solvent leaking out from the distiller 12 can be suppressed to a very small amount.

(発明の効果) 本発明の有機溶剤を使用する洗浄装置は、以上に述べた
通り構成され作用するが、真空ポンプを大型化したり、
高性能化したりする事なく、洗浄槽の圧力を低下させる
速度を速くしたり、更には洗浄槽内の真空度を高める事
が可能となり、高性能の洗浄装置を構威する場合にも、
真空ポンプの設置スペースが嵩んだり、或は真空ポンプ
のコストが極端に高くなる事がなくなる。
(Effects of the Invention) The cleaning device using the organic solvent of the present invention is configured and operates as described above, but the vacuum pump may be enlarged,
It is possible to increase the speed at which the pressure in the cleaning tank is reduced, and even increase the degree of vacuum in the cleaning tank, without increasing the performance, and even when using high-performance cleaning equipment.
This eliminates the need for the installation space of the vacuum pump to become bulky or the cost of the vacuum pump to become extremely high.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の有機溶剤を使用する洗浄装置の第一実
施例の要部を示す略縦断面図、第2図は同第二実施例を
示す、要部略縦断面図、第3図は洗浄装置の1例を示す
略縦断面図である。 1;蓋、2;洗浄槽、3:ヒータ、4:蒸気供給手段、
5:管、6:貯溜槽、7、8:管、9:送液ポンプ、1
0:ヒータ、11:冷却器、12:蒸留器、13,真空
ポンプ、14:排蒸管、15:排気管、16:吸ケ管、
17:被洗浄物、18:超音波振動子、19:排出管、
20:給排手段、21:二次冷却器、22;活性炭フィ
ルタ、23、24:弁、25:管、26:密閉容器、2
7:冷却パイプ、28:第一の開閉弁、29:pfJの
接続管、30:第二の開閉弁、31:第二の接続管、3
2:第三の開閉弁、33:第三の接続管、34:三方弁
、35:吸入管、36:吐出管、37:補助密閉容器、
38:第一の補助開閉弁、39;第一の補助接続管、4
0:第二の補助開閉弁、41:第二の補助接続管、42
:第三の補助開閉弁、 43:第三の補助接続管。 特 許 出 願 人 株式会社千代田製作所 代 理 人 小 山 欽 造(ばか1名) 2 3 手続補正書(方式) 平成1年10月 2
FIG. 1 is a schematic vertical cross-sectional view showing the main parts of a first embodiment of the cleaning device using an organic solvent of the present invention, FIG. 2 is a schematic vertical cross-sectional view of the main parts showing the second embodiment, and FIG. The figure is a schematic longitudinal sectional view showing one example of a cleaning device. 1: Lid, 2: Cleaning tank, 3: Heater, 4: Steam supply means,
5: Pipe, 6: Storage tank, 7, 8: Pipe, 9: Liquid pump, 1
0: heater, 11: cooler, 12: distiller, 13, vacuum pump, 14: exhaust pipe, 15: exhaust pipe, 16: suction pipe,
17: Object to be cleaned, 18: Ultrasonic vibrator, 19: Discharge pipe,
20: Supply/discharge means, 21: Secondary cooler, 22; Activated carbon filter, 23, 24: Valve, 25: Pipe, 26: Closed container, 2
7: Cooling pipe, 28: First on-off valve, 29: pfJ connection pipe, 30: Second on-off valve, 31: Second connection pipe, 3
2: Third on-off valve, 33: Third connecting pipe, 34: Three-way valve, 35: Suction pipe, 36: Discharge pipe, 37: Auxiliary sealed container,
38: First auxiliary on-off valve, 39; First auxiliary connection pipe, 4
0: Second auxiliary on-off valve, 41: Second auxiliary connection pipe, 42
: Third auxiliary on-off valve, 43: Third auxiliary connection pipe. Patent applicant Chiyoda Seisakusho Co., Ltd. Agent Kinzo Koyama (one idiot) 2 3 Procedural amendment (method) October 1999 2

Claims (3)

【特許請求の範囲】[Claims] (1)被洗浄物を収納した状態で密閉自在な洗浄槽と、
この洗浄槽内に洗浄用の有機溶剤を送り込み自在な供給
手段と、洗浄槽から排出された使用済みの有機溶剤を送
り込み再生すると共に、上記洗浄槽から排出される気体
を送り込む事により、この気体中に存在する有機溶剤の
蒸気を回収する溶剤の再生回収手段とから成る有機溶剤
を使用する洗浄装置に於いて、上記洗浄槽と上記再生回
収手段との間に、内部に冷却手段を有する密閉容器を設
けると共に、この密閉容器と上記洗浄槽とを、途中に第
一の開閉弁を有する第一の接続管により、密閉容器と上
記再生回収手段の内部とを、途中に第二の開閉弁を有す
る第二の接続管により、それぞれ接続した事を特徴とす
る、有機溶剤を使用する洗浄装置。
(1) A cleaning tank that can be sealed while storing the items to be cleaned,
A supply means that can freely feed an organic solvent for cleaning into this cleaning tank, a used organic solvent discharged from the cleaning tank, and the gas discharged from the cleaning tank are supplied to regenerate the gas. In a cleaning device using an organic solvent, which comprises a solvent regeneration and recovery means for recovering the vapor of the organic solvent present in the cleaning tank, the cleaning device has an internal cooling means between the cleaning tank and the regeneration and recovery means. A container is provided, and the sealed container and the cleaning tank are connected by a first connecting pipe having a first on-off valve in the middle, and the sealed container and the inside of the regeneration and recovery means are connected with a second on-off valve in the middle. A cleaning device using an organic solvent, characterized in that each is connected by a second connecting pipe having a
(2)吸入口を上記洗浄槽内に連通自在とした真空ポン
プの吐出口を、密閉容器内に通じさせた、請求項1に記
載の有機溶剤を使用する洗浄装置。
(2) A cleaning device using an organic solvent according to claim 1, wherein a discharge port of a vacuum pump whose suction port is freely connected to the inside of the cleaning tank is connected to the inside of the closed container.
(3)密閉容器の底部と、この密閉容器よりも小容量で
、上記密閉容器の下方に設けた、補助密閉容器の上部と
を、途中に第一の補助開閉弁を設けた、第一の補助接続
管により接続し、上記補助密閉容器の底部と、再生回収
手段の一部で、有機溶剤蒸気が存在する部分とを、途中
に第二の補助開閉弁を有する第二の補助接続管により接
続した、請求項1又は請求項2に記載の有機溶剤を使用
する洗浄装置。
(3) Connect the bottom of the airtight container and the upper part of the auxiliary airtight container, which has a smaller capacity than this airtight container and is provided below the airtight container, into a first auxiliary on-off valve with a first auxiliary on-off valve in the middle. The bottom of the auxiliary sealed container is connected to the part of the regeneration and recovery means where organic solvent vapor is present by a second auxiliary connecting pipe having a second auxiliary on-off valve in the middle. A cleaning device using the organic solvent according to claim 1 or 2, which is connected to the cleaning device.
JP1160628A 1989-06-26 1989-06-26 Cleaning equipment using organic solvents Expired - Fee Related JP2721704B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1160628A JP2721704B2 (en) 1989-06-26 1989-06-26 Cleaning equipment using organic solvents
CA 2019578 CA2019578C (en) 1989-06-26 1990-06-21 Cleaning method and system using a solvent
SU4830467 RU2008989C1 (en) 1989-06-26 1990-06-25 Method of cleaning parts with solvent and device for its realization
AU57837/90A AU635540B2 (en) 1989-06-26 1990-06-26 Cleaning method and system using a solvent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1160628A JP2721704B2 (en) 1989-06-26 1989-06-26 Cleaning equipment using organic solvents

Publications (2)

Publication Number Publication Date
JPH0326383A true JPH0326383A (en) 1991-02-04
JP2721704B2 JP2721704B2 (en) 1998-03-04

Family

ID=15719043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1160628A Expired - Fee Related JP2721704B2 (en) 1989-06-26 1989-06-26 Cleaning equipment using organic solvents

Country Status (1)

Country Link
JP (1) JP2721704B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0639658A2 (en) * 1991-11-11 1995-02-22 Leybold Aktiengesellschaft Process for degreasing and cleaning material covered with greasy and/or oily substances
WO1995006762A3 (en) * 1993-08-30 1995-04-06 Emo Oberflaechentech Gmbh Vapour phase cleaning
KR100436685B1 (en) * 2001-04-07 2004-06-22 구세모 A powder coating method by using a jig for powder coating use for cooling fan motor housing of an auto mobile
JP2015096264A (en) * 2011-11-25 2015-05-21 株式会社Ihi Vacuum cleaning device and vacuum cleaning method
JP2015147213A (en) * 2015-04-22 2015-08-20 株式会社Ihi Vacuum washing machine

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0639658A2 (en) * 1991-11-11 1995-02-22 Leybold Aktiengesellschaft Process for degreasing and cleaning material covered with greasy and/or oily substances
EP0639658A3 (en) * 1991-11-11 1995-04-19 Leybold Ag Process for degreasing and cleaning material covered with greasy and/or oily substances.
WO1995006762A3 (en) * 1993-08-30 1995-04-06 Emo Oberflaechentech Gmbh Vapour phase cleaning
US5690751A (en) * 1993-08-30 1997-11-25 The Dow Chemical Company Vapor phase cleaning
KR100436685B1 (en) * 2001-04-07 2004-06-22 구세모 A powder coating method by using a jig for powder coating use for cooling fan motor housing of an auto mobile
JP2015096264A (en) * 2011-11-25 2015-05-21 株式会社Ihi Vacuum cleaning device and vacuum cleaning method
US9555450B2 (en) 2011-11-25 2017-01-31 Ihi Corporation Vacuum cleaning apparatus and vacuum cleaning method
JP2015147213A (en) * 2015-04-22 2015-08-20 株式会社Ihi Vacuum washing machine

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