JP2024076247A - Work-piece washing drying method using one-bath type hermetic type vacuum cleaning drier - Google Patents
Work-piece washing drying method using one-bath type hermetic type vacuum cleaning drier Download PDFInfo
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- 238000010407 vacuum cleaning Methods 0.000 title claims abstract description 75
- 238000001035 drying Methods 0.000 title claims abstract description 13
- 238000005406 washing Methods 0.000 title claims abstract description 13
- 239000002904 solvent Substances 0.000 claims abstract description 112
- 238000001291 vacuum drying Methods 0.000 claims abstract description 84
- 238000010521 absorption reaction Methods 0.000 claims abstract description 43
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 11
- 239000011737 fluorine Substances 0.000 claims abstract description 11
- 239000012459 cleaning agent Substances 0.000 claims description 28
- 238000004140 cleaning Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 20
- 238000004821 distillation Methods 0.000 claims description 15
- 230000008929 regeneration Effects 0.000 claims description 15
- 238000011069 regeneration method Methods 0.000 claims description 15
- 238000007654 immersion Methods 0.000 claims description 8
- 238000013020 steam cleaning Methods 0.000 claims description 7
- 230000001172 regenerating effect Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 238000011084 recovery Methods 0.000 description 12
- 238000010992 reflux Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010981 drying operation Methods 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 238000011068 loading method Methods 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
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Abstract
Description
本発明は、大気側から密閉された状態で、洗浄剤としてフッ素系溶剤を用いてワークの洗浄および乾燥を行うワンバス式の密閉型真空洗浄乾燥機を用いたワーク洗浄乾燥方法に関し、更に詳しくは、溶剤蒸発ロスが実質的に零となるようにした完全密閉型のワーク洗浄乾燥方法に関する。 The present invention relates to a method for washing and drying workpieces using a one-bath sealed vacuum washer-dryer that uses a fluorine-based solvent as a cleaning agent to wash and dry workpieces in a state sealed from the atmosphere, and more specifically, to a completely sealed workpiece washing and drying method that reduces solvent evaporation loss to essentially zero.
フッ素系溶剤を洗浄剤として用いて各種の電子部品等を洗浄する洗浄装置が知られており、例えば、本願人はワンバス式真空洗浄機（商品名：ＦＬＯＶＡ）を製造販売している(非特許文献１)。このワンバス式真空洗浄機は、従来の３槽式洗浄機によって行われているワークの粗超音波洗浄、仕上げ超音波洗浄、蒸気洗浄および真空乾燥を、ワンバスの中で、溶剤を出し入れしながら全自動で行うものである。洗浄から乾燥まで密閉された同一の洗浄槽の中で行われ、また、ワークの投入、取出しのために洗浄槽を開放した際もフッ素系溶剤が大気に暴露しないので、溶剤蒸気ロスを大幅に削減できる。 Cleaning equipment that uses fluorine-based solvents as cleaning agents to clean various electronic components and the like is known; for example, the applicant manufactures and sells a one-bath vacuum cleaning machine (product name: FLOVA) (Non-Patent Document 1). This one-bath vacuum cleaning machine fully automatically performs rough ultrasonic cleaning, finish ultrasonic cleaning, steam cleaning, and vacuum drying of workpieces, which are performed by conventional three-bath cleaning machines, in a single bath while adding and removing the solvent. Since the processes from cleaning to drying are all performed in the same sealed cleaning tank, and the fluorine-based solvent is not exposed to the atmosphere even when the cleaning tank is opened to insert or remove workpieces, solvent vapor loss can be significantly reduced.
このような密閉型のワンバス式真空洗浄乾燥機においては、機外への溶剤蒸気の流出ロスの更なる低減が要求される。このためには、大気側から遮断されている真空洗浄乾燥槽を含む機内配管系の内圧を大気圧未満の状態に維持して溶剤蒸気を大気側に流出させないことが重要である。 In such sealed single-bath vacuum washer/dryer, there is a demand for further reduction in the loss of solvent vapor leaking out of the machine. To achieve this, it is important to keep the internal pressure of the machine's piping system, including the vacuum washer/dryer tank that is isolated from the atmosphere, below atmospheric pressure to prevent solvent vapor from leaking out into the atmosphere.
本発明の目的は、この点に鑑みて、大気側から密閉した状態で、フッ素系溶剤を用いてワークの洗浄および乾燥を行うワンバス式の密閉型真空洗浄乾燥機を用いたワーク洗浄乾燥方法において、大気側への溶剤流出ロスを実質的に零にできるようにすることにある。 In view of this, the object of the present invention is to reduce the loss of solvent flowing into the atmosphere to essentially zero in a workpiece washing and drying method using a one-bath sealed vacuum washer-dryer that uses a fluorine-based solvent to wash and dry workpieces in a state sealed from the atmosphere.
上記の課題を解決するために、本発明は、洗浄剤としてフッ素系溶剤を用いてワークの洗浄および乾燥を行うワンバス式の密閉型真空洗浄乾燥機を用いたワーク洗浄乾燥方法であって、
前記密閉型真空洗浄乾燥機は、
前記洗浄剤を貯留した貯留槽と、
前記洗浄剤の蒸気を発生する蒸気発生器と、
前記貯留槽から供給される前記洗浄剤を用いたワークの浸漬洗浄、前記蒸気発生器から供給される前記洗浄剤の蒸気を用いたワークの蒸気洗浄、および、洗浄後の前記ワークの真空乾燥を行う真空洗浄乾燥槽と、
前記真空洗浄乾燥槽の真空引きを行う真空ドライポンプと、
前記真空洗浄乾燥槽から前記洗浄剤を前記貯留槽に戻す洗浄剤還流手段と、
前記洗浄剤を蒸留再生する蒸留再生器と、
圧力吸収タンクと、
を備えており、
前記ワークが投入されて密閉された前記真空洗浄乾燥槽の内圧が、大気圧の状態から所定の真空度となるまで前記真空ドライポンプによって真空引きし、当該真空ドライポンプの排気を大気側に放出し、
真空引き後の前記真空洗浄乾燥槽に前記圧力吸収タンクを連通させ、前記真空洗浄乾燥槽および前記圧力吸収タンクを前記真空度よりも低い真空度の減圧状態にし、前記圧力吸収タンクを閉じ、
前記真空洗浄乾燥槽を前記真空ドライポンプによって真空引きすることで行われる前記真空乾燥時に、前記圧力吸収タンクを開き、前記真空洗浄乾燥槽から排出される排気を、大気側に放出せずに、前記圧力吸収タンクに回収し、
前記排気回収後の前記圧力吸収タンクの内圧が、大気圧未満の減圧状態に維持されるように、当該圧力吸収タンクの内容積および前記真空度を設定することを特徴としている。
In order to solve the above problems, the present invention provides a method for washing and drying a workpiece using a one-bath type sealed vacuum washer-dryer for washing and drying a workpiece using a fluorine-based solvent as a cleaning agent, comprising the steps of:
The closed type vacuum cleaning and drying machine is
A storage tank in which the cleaning agent is stored;
a steam generator for generating steam of the cleaning agent;
a vacuum cleaning and drying tank for performing immersion cleaning of the workpiece using the cleaning agent supplied from the storage tank, steam cleaning of the workpiece using the vapor of the cleaning agent supplied from the steam generator, and vacuum drying of the workpiece after cleaning;
a vacuum dry pump for evacuating the vacuum cleaning and drying tank;
a cleaning agent circulation means for returning the cleaning agent from the vacuum cleaning and drying tank to the storage tank;
A distillation and regeneration device for distilling and regenerating the cleaning agent;
A pressure absorption tank;
Equipped with
The vacuum dry pump is used to evacuate the vacuum cleaning and drying tank in which the workpieces have been put and sealed until the internal pressure of the tank reaches a predetermined vacuum level from atmospheric pressure, and the exhaust gas from the vacuum dry pump is released to the atmosphere.
The pressure absorption tank is connected to the vacuum cleaning and drying tank after evacuation, the vacuum cleaning and drying tank and the pressure absorption tank are brought into a reduced pressure state with a vacuum degree lower than the vacuum degree, and the pressure absorption tank is closed.
During the vacuum drying, which is performed by evacuating the vacuum cleaning and drying tank with the vacuum dry pump, the pressure absorption tank is opened, and exhaust gas discharged from the vacuum cleaning and drying tank is collected in the pressure absorption tank without being released to the atmosphere;
The internal volume of the pressure absorption tank and the degree of vacuum are set so that the internal pressure of the pressure absorption tank after the exhaust gas recovery is maintained in a reduced pressure state below atmospheric pressure.
本発明では、一定の内容積の圧力吸収タンクを機内洗浄剤流通系に付設し、ワークの真空乾燥時に真空洗浄乾燥槽から排出される排気を圧力吸収タンクに回収し、回収した排気を、次のワーク洗浄乾燥サイクルにおいて、ワーク投入後に真空引きされて所定の真空度に減圧された真空洗浄乾燥槽に戻し、タンク内圧を当該真空洗浄乾燥槽と同等の減圧状態にしている。また、排気回収後のタンク内圧が大気圧以上にならないように、その内容積およびワーク投入後の真空引きによる真空洗浄乾燥槽の真空度を設定している。これにより、機内から大気側に排気が放出されるのは、洗浄乾燥後のワークを取り出して新たな洗浄対象のワークを投入するために真空洗浄乾燥槽を開けて大気開放する場合のみとなり、溶剤蒸気ロスを可能な限り低減できる。 In the present invention, a pressure absorption tank with a certain internal volume is attached to the in-machine cleaning agent circulation system, and the exhaust gas discharged from the vacuum cleaning and drying tank during vacuum drying of the workpieces is collected in the pressure absorption tank. In the next workpiece cleaning and drying cycle, the collected exhaust gas is returned to the vacuum cleaning and drying tank, which has been evacuated to a specified vacuum level after the workpieces are loaded, and the tank internal pressure is kept at the same reduced pressure as the vacuum cleaning and drying tank. In addition, the internal volume and the vacuum level of the vacuum cleaning and drying tank, which is evacuated after the workpieces are loaded, are set so that the tank internal pressure after exhaust gas recovery does not exceed atmospheric pressure. As a result, exhaust gas is released from inside the machine to the atmosphere only when the vacuum cleaning and drying tank is opened to the atmosphere in order to remove the workpieces after cleaning and drying and load new workpieces to be cleaned, and solvent vapor loss can be reduced as much as possible.
以下に、図面を参照して、本発明の方法を適用したフッ素系溶剤を用いてワークの洗浄および乾燥を行うワンバス式の密閉型真空洗浄乾燥機、および当該密閉型真空洗浄乾燥機のワーク洗浄乾燥動作を説明する。 Below, with reference to the drawings, we will explain a one-bath type closed vacuum washer/dryer that uses a fluorine-based solvent to wash and dry workpieces and the workpiece washing and drying operation of the closed vacuum washer/dryer.
図１を参照してワンバス式の密閉型真空洗浄乾燥機の構成を説明する。密閉型真空洗浄乾燥機１は、洗浄剤としてフッ素系溶剤（以下、単に「溶剤」という。）を貯留した貯留槽である真空バッファタンク２、溶剤蒸気の生成および溶剤の蒸留再生を行う蒸留再生・蒸気発生器３、ワークに溶剤を用いた浸漬洗浄および溶剤蒸気を用いた蒸気洗浄を施し、洗浄後のワークを真空乾燥させるための真空洗浄乾燥槽４、真空洗浄乾燥槽４を真空引きする真空ドライポンプ５、真空洗浄乾燥槽４から溶剤を真空バッファタンク２に戻す溶剤還流手段６、溶剤蒸気を回収する溶剤蒸気回収タンク７、および、機内各部の内圧を大気圧未満の状態に維持するために付設した圧力吸収タンク８を備えている。また、図示を省略してあるが、これらの各部の駆動を制御して、予め設定された手順によりワークの洗浄乾燥動作（図２参照）を実行する制御装置が備わっている。 The configuration of a one-bath closed vacuum washer/dryer will be described with reference to FIG. 1. The closed vacuum washer/dryer 1 includes a vacuum buffer tank 2, which is a storage tank that stores a fluorine-based solvent (hereinafter simply referred to as "solvent") as a cleaning agent, a distillation/regeneration/steam generator 3 that generates solvent vapor and distills and regenerates the solvent, a vacuum washer/dryer tank 4 for subjecting the workpiece to immersion cleaning using a solvent and steam cleaning using solvent vapor, and vacuum drying the workpiece after cleaning, a vacuum dry pump 5 that draws a vacuum in the vacuum washer/dryer tank 4, a solvent reflux means 6 that returns the solvent from the vacuum washer/dryer tank 4 to the vacuum buffer tank 2, a solvent vapor recovery tank 7 that recovers the solvent vapor, and a pressure absorption tank 8 that is attached to maintain the internal pressure of each part of the machine at a level lower than atmospheric pressure. In addition, although not shown in the figure, a control device is provided that controls the drive of each of these parts and performs the workpiece washing/drying operation (see FIG. 2) according to a preset procedure.
溶剤の貯留槽である真空バッファタンク２は、内部に、仕上洗浄用溶剤を貯留する仕上溶剤槽２１と、粗洗浄用溶剤を貯留する粗溶剤槽２２とを備え、仕上溶剤槽２１の溶剤がオーバーフローして隣接の粗溶剤槽２２に流れ込むようになっている。蒸留再生・蒸気発生器３は、縦置きの筒状容器３１の内部において、その底側はヒーター３２が配置された溶剤貯留部３３となっており、貯留部上側は溶剤蒸気発生部３４となっており、上端側は溶剤蒸気凝縮用の冷却コイル３５が配置された溶剤凝縮部３６となっている。発生する溶剤蒸気は真空洗浄乾燥槽４に供給され、溶剤凝縮部３６において得られる溶剤の凝縮液は、熱交換器９、水分分離器１０を介して、真空バッファタンク２の仕上溶剤槽２１に回収されるようになっている。 The vacuum buffer tank 2, which is a solvent storage tank, is equipped with a finishing solvent tank 21 for storing a finishing cleaning solvent and a crude solvent tank 22 for storing a crude cleaning solvent, and the solvent in the finishing solvent tank 21 overflows and flows into the adjacent crude solvent tank 22. The distillation regeneration/steam generator 3 is a vertically placed cylindrical container 31, with the bottom side being a solvent storage section 33 with a heater 32 arranged therein, the upper side of the storage section being a solvent vapor generation section 34, and the upper end side being a solvent condensation section 36 with a cooling coil 35 for condensing the solvent vapor arranged therein. The generated solvent vapor is supplied to the vacuum cleaning/drying tank 4, and the solvent condensate obtained in the solvent condensation section 36 is collected in the finishing solvent tank 21 of the vacuum buffer tank 2 via a heat exchanger 9 and a moisture separator 10.
真空洗浄乾燥槽４は、真空バッファタンク２の下方の位置に配置されており、上端に開閉蓋４１が取り付けられており、開閉蓋４１を開けて、洗浄対象のワーク（図示せず）を入れたバスケット４２を出し入れ可能である。真空洗浄乾燥槽４の内部の底には超音波発生器４３が配置されている。真空洗浄乾燥槽４には、真空バッファタンク２の仕上溶剤槽２１および粗溶剤槽２２のそれぞれから溶剤が供給される。真空洗浄乾燥槽４においてワーク洗浄を行った後の溶剤は、溶剤還流手段６によって、真空バッファタンク２に戻される。溶剤還流手段６は、真空洗浄乾燥槽４に供給された粗溶剤を、粗溶剤バッファタンク６１、粗溶剤ポンプ６２および粗溶剤フィルタ６３を介して粗溶剤槽２２に戻し、真空洗浄乾燥槽４に供給された仕上溶剤を、仕上溶剤バッファタンク６４、仕上溶剤ポンプ６５および仕上溶剤フィルタ６６を介して仕上溶剤槽２１に戻す。 The vacuum cleaning and drying tank 4 is located below the vacuum buffer tank 2, and has an openable lid 41 attached to the upper end. The openable lid 41 can be opened to insert and remove a basket 42 containing a workpiece to be cleaned (not shown). An ultrasonic generator 43 is located at the bottom inside the vacuum cleaning and drying tank 4. Solvent is supplied to the vacuum cleaning and drying tank 4 from each of the finishing solvent tank 21 and the crude solvent tank 22 of the vacuum buffer tank 2. The solvent after the workpiece is cleaned in the vacuum cleaning and drying tank 4 is returned to the vacuum buffer tank 2 by the solvent reflux means 6. The solvent reflux means 6 returns the crude solvent supplied to the vacuum cleaning and drying tank 4 to the crude solvent tank 22 via the crude solvent buffer tank 61, the crude solvent pump 62, and the crude solvent filter 63, and returns the finishing solvent supplied to the vacuum cleaning and drying tank 4 to the finishing solvent tank 21 via the finishing solvent buffer tank 64, the finishing solvent pump 65, and the finishing solvent filter 66.
真空ドライポンプ５は、その吸入口５１がバルブを介して真空洗浄乾燥槽４に連通可能である。真空ドライポンプ５の吐出口５２は、大気側および蒸留再生・蒸気発生器３に、それぞれバルブを介して連通可能である。 The vacuum dry pump 5 has an intake port 51 that can be connected to the vacuum cleaning and drying tank 4 via a valve. The exhaust port 52 of the vacuum dry pump 5 can be connected to the atmosphere and the distillation regeneration/steam generator 3 via valves.
溶剤蒸気回収タンク７は内部に冷却コイル７１が配置されている。溶剤蒸気回収タンク７の排気入口７２は、蒸留再生・蒸気発生器３の溶剤蒸気発生部３４に連通しており、その排気出口７３はバルブを介して圧力吸収タンク８に連通可能である。圧力吸収タンク８はバルブを介して真空洗浄乾燥槽４に連通可能である。 The solvent vapor recovery tank 7 has a cooling coil 71 disposed inside. The exhaust inlet 72 of the solvent vapor recovery tank 7 is connected to the solvent vapor generation section 34 of the distillation regeneration/steam generator 3, and the exhaust outlet 73 can be connected to the pressure absorption tank 8 via a valve. The pressure absorption tank 8 can be connected to the vacuum cleaning/drying tank 4 via a valve.
図２は、密閉型真空洗浄乾燥機１のワーク洗浄乾燥動作および機内各部の圧力変化を示す説明図である。この図に従ってワークの洗浄乾燥動作を説明する。真空洗浄乾燥槽４における動作サイクルは、ワーク投入、真空引き、粗溶剤の給液、粗洗浄である粗真空超音波浸漬洗浄、粗溶剤の排液、仕上溶剤の給液、仕上洗浄である仕上真空超音波浸漬洗浄、仕上溶剤の排液、減圧蒸気洗浄、液抜き、真空乾燥、および、真空解除・ワーク取出しの各工程を含む。 Figure 2 is an explanatory diagram showing the workpiece washing and drying operation of the closed vacuum washer/dryer 1 and the pressure changes in various parts of the machine. The workpiece washing and drying operation will be explained with reference to this diagram. The operating cycle in the vacuum washer/dryer tank 4 includes the steps of putting the workpiece in, vacuuming, supplying crude solvent, crude vacuum ultrasonic immersion cleaning (rough cleaning), draining the crude solvent, supplying finishing solvent, finishing vacuum ultrasonic immersion cleaning (finish cleaning), draining the finishing solvent, reduced pressure steam cleaning, draining the liquid, vacuum drying, and releasing the vacuum and removing the workpiece.
ワーク投入工程では、洗浄対象のワークを入れたバスケット４２を、大気開放した真空洗浄乾燥槽４に投入する。次の真空引き工程では、ワークが投入されて密閉された真空洗浄乾燥槽４を真空ドライポンプ５で真空引きし、第１真空度、例えば５ｋＰａの減圧状態にする（時点Ｔ１～Ｔ２）。この後（時点Ｔ２において）、真空洗浄乾燥槽４を圧力吸収タンク８に連通させて、真空洗浄乾燥槽４から圧力吸収タンク８に負圧を供給して、双方を第１真空度よりも低い第２真空度、例えば５０ｋＰａの減圧状態にし、双方の間を遮断する。換言すると、前回の動作サイクルにおいて圧力吸収タンク８に回収されている排気を真空洗浄乾燥槽４に戻す。この後は、圧力吸収タンク８の封鎖状態を真空乾燥工程の開始時点（時点Ｔ１０）まで維持する。 In the workpiece loading process, the basket 42 containing the workpieces to be cleaned is loaded into the vacuum cleaning and drying tank 4, which is open to the atmosphere. In the next vacuum drawing process, the vacuum cleaning and drying tank 4, which has been sealed after the workpieces have been loaded, is evacuated by the vacuum dry pump 5 to create a first vacuum level, for example, a reduced pressure state of 5 kPa (times T1 to T2). After this (at time T2), the vacuum cleaning and drying tank 4 is connected to the pressure absorption tank 8, and negative pressure is supplied from the vacuum cleaning and drying tank 4 to the pressure absorption tank 8, creating a reduced pressure state of a second vacuum level, for example, 50 kPa, which is lower than the first vacuum level, and isolating the two from each other. In other words, the exhaust gas collected in the pressure absorption tank 8 during the previous operation cycle is returned to the vacuum cleaning and drying tank 4. After this, the sealed state of the pressure absorption tank 8 is maintained until the start of the vacuum drying process (time T10).
真空引き工程の次の粗溶剤の給液工程では、第２真空度の真空洗浄乾燥槽４と、大気圧状態よりも僅かに低い減圧状態、例えば１００ｋＰａの内圧状態の真空バッファタンク２との間の圧力差と高低差を利用して、粗溶剤槽２２に貯留されている粗溶剤を真空洗浄乾燥槽４に供給する（時点Ｔ２～Ｔ３）。閉鎖状態の圧力吸収タンク８を除き、真空洗浄乾燥槽４、真空バッファタンク２を含む各部は同一の減圧状態、例えば８０ｋＰａになる。この状態で、超音波発生器４３が駆動されて、粗真空超音波浸漬洗浄工程が行われる（時点Ｔ３～Ｔ４）。この後の粗溶剤の排液工程では、溶剤還流手段６の粗溶剤ポンプ６２を駆動して真空洗浄乾燥槽４から粗溶剤を真空バッファタンク２の粗溶剤槽２２に戻す（時点Ｔ４～Ｔ５）。 In the crude solvent supply process following the evacuation process, the crude solvent stored in the crude solvent tank 22 is supplied to the vacuum cleaning and drying tank 4 by utilizing the pressure difference and height difference between the vacuum cleaning and drying tank 4 at the second vacuum level and the vacuum buffer tank 2 at an internal pressure of 100 kPa, which is slightly lower than atmospheric pressure (times T2 to T3). Except for the pressure absorption tank 8 in the closed state, all parts including the vacuum cleaning and drying tank 4 and the vacuum buffer tank 2 are in the same reduced pressure state, for example, 80 kPa. In this state, the ultrasonic generator 43 is driven to perform the crude vacuum ultrasonic immersion cleaning process (times T3 to T4). In the subsequent crude solvent drainage process, the crude solvent pump 62 of the solvent reflux means 6 is driven to return the crude solvent from the vacuum cleaning and drying tank 4 to the crude solvent tank 22 of the vacuum buffer tank 2 (times T4 to T5).
同様に、次の仕上溶剤の給液工程では、真空ドライポンプ５を駆動して真空洗浄乾燥槽４を真空引きして第２真空度の減圧状態に戻し、真空ドライポンプ５の排気を、蒸留再生・蒸気発生器３および、ここを介して真空バッファタンク２に送り込み、真空洗浄乾燥槽４と真空バッファタンク２との間に圧力差を形成して、仕上溶剤槽２１から真空洗浄乾燥槽４に仕上溶剤を供給する（時点Ｔ５～Ｔ６）。この状態で、超音波発生器４３が駆動されて、仕上真空超音波浸漬洗浄工程が行われる（時点Ｔ６～Ｔ７）。この後の仕上溶剤の排液工程では、溶剤還流手段６の仕上溶剤ポンプ６５を駆動して、真空洗浄乾燥槽４から仕上げ溶剤を真空バッファタンク２の仕上溶剤槽２１に戻す（時点Ｔ７～Ｔ８）。 Similarly, in the next finishing solvent supply process, the vacuum dry pump 5 is driven to evacuate the vacuum cleaning and drying tank 4 to return it to a reduced pressure state of the second vacuum degree, and the exhaust gas from the vacuum dry pump 5 is sent to the distillation regeneration/steam generator 3 and through it to the vacuum buffer tank 2, creating a pressure difference between the vacuum cleaning and drying tank 4 and the vacuum buffer tank 2, supplying the finishing solvent from the finishing solvent tank 21 to the vacuum cleaning and drying tank 4 (times T5 to T6). In this state, the ultrasonic generator 43 is driven to perform the finishing vacuum ultrasonic immersion cleaning process (times T6 to T7). In the subsequent finishing solvent drainage process, the finishing solvent pump 65 of the solvent reflux means 6 is driven to return the finishing solvent from the vacuum cleaning and drying tank 4 to the finishing solvent tank 21 of the vacuum buffer tank 2 (times T7 to T8).
次の減圧蒸気洗浄工程では、真空ドライポンプ５を間欠駆動して、真空洗浄乾燥槽４を減圧し、蒸留再生・蒸気発生器３において生成される溶剤蒸気を真空洗浄乾燥槽４に供給してワークを減圧蒸気洗浄する（時点Ｔ８～Ｔ９）。真空ドライポンプ５の排気は蒸留再生・蒸気発生器３に排出される。真空洗浄乾燥槽４、真空バッファタンク２等の内圧は、例えば、８０ｋＰａから９０ｋＰａに上がる。真空洗浄乾燥槽４において、溶剤蒸気は、ワークに凝縮して底に溜まる。次の液抜き工程では、真空洗浄乾燥槽４に溜まった溶剤蒸気の凝縮液を、仕上溶剤ポンプ６５を駆動して、真空バッファタンク２の仕上溶剤槽２１に回収する（時点Ｔ９～Ｔ１０）。 In the next reduced pressure steam cleaning process, the vacuum dry pump 5 is driven intermittently to reduce the pressure in the vacuum cleaning and drying tank 4, and the solvent vapor generated in the distillation regeneration and steam generator 3 is supplied to the vacuum cleaning and drying tank 4 to clean the workpieces with reduced pressure steam (times T8 to T9). The exhaust gas from the vacuum dry pump 5 is discharged to the distillation regeneration and steam generator 3. The internal pressure of the vacuum cleaning and drying tank 4, vacuum buffer tank 2, etc. increases to, for example, 80 kPa to 90 kPa. In the vacuum cleaning and drying tank 4, the solvent vapor condenses on the workpieces and accumulates at the bottom. In the next liquid removal process, the finishing solvent pump 65 is driven to recover the condensed liquid of the solvent vapor accumulated in the vacuum cleaning and drying tank 4 into the finishing solvent tank 21 of the vacuum buffer tank 2 (times T9 to T10).
次の真空乾燥工程では、真空洗浄乾燥槽４を、真空ドライポンプ５、蒸留再生・蒸気発生器３、溶剤蒸気回収タンク７を経由して、圧力吸収タンク８に連通させ、真空ドライポンプ５を駆動して、真空洗浄乾燥槽４を真空引きして、ワークの真空乾燥を行う（時点Ｔ１０～Ｔ１１）。真空ドライポンプ５の排気は、蒸留再生・蒸気発生器３および溶剤蒸気回収タンク７を介して、圧力吸収タンク８に回収される。排気に含まれる溶剤蒸気は、蒸留再生・蒸気発生器３の溶剤凝縮部３６の冷却コイル３５で凝縮し、真空バッファタンク２の仕上溶剤槽２１に回収される。また、蒸留再生・蒸気発生器３を通過して溶剤蒸気回収タンク７に流入した排気に含まれる残存溶剤蒸気は、溶剤蒸気回収タンク７において回収され、溶剤蒸気が除去された排気が圧力吸収タンク８に回収される。圧力吸収タンク８は、排気を回収することで、第２真空度の減圧状態から大気圧に近い減圧状態になるが、大気圧以上にはならないように、内容積、第１真空度等が設定されている。 In the next vacuum drying process, the vacuum cleaning and drying tank 4 is connected to the pressure absorption tank 8 via the vacuum dry pump 5, the distillation regeneration/steam generator 3, and the solvent vapor recovery tank 7, and the vacuum dry pump 5 is driven to evacuate the vacuum cleaning and drying tank 4 and perform vacuum drying of the workpieces (times T10 to T11). The exhaust gas from the vacuum dry pump 5 is collected in the pressure absorption tank 8 via the distillation regeneration/steam generator 3 and the solvent vapor recovery tank 7. The solvent vapor contained in the exhaust gas is condensed by the cooling coil 35 of the solvent condenser 36 of the distillation regeneration/steam generator 3 and collected in the finishing solvent tank 21 of the vacuum buffer tank 2. In addition, the remaining solvent vapor contained in the exhaust gas that has passed through the distillation regeneration/steam generator 3 and flowed into the solvent vapor recovery tank 7 is collected in the solvent vapor recovery tank 7, and the exhaust gas from which the solvent vapor has been removed is collected in the pressure absorption tank 8. The pressure absorption tank 8 is set so that the pressure is reduced from the second vacuum level to a pressure close to atmospheric pressure by collecting the exhaust gas, but does not exceed atmospheric pressure, and the internal volume, first vacuum level, etc. are set.
真空乾燥後の真空解除・ワーク取出し工程では、真空洗浄乾燥槽４を他の部位から遮断して、当該真空洗浄乾燥槽を大気開放して大気圧状態に戻す（時点Ｔ１１）。この後は、真空洗浄乾燥槽４を開き、ワークの取り出しが行われる。真空洗浄乾燥槽４以外の部位の内圧は、大気圧よりも僅かに低い減圧状態に維持される。 In the process of releasing the vacuum and removing the workpieces after vacuum drying, the vacuum cleaning and drying tank 4 is isolated from other parts and the vacuum cleaning and drying tank is opened to the atmosphere and returned to atmospheric pressure (time T11). After this, the vacuum cleaning and drying tank 4 is opened and the workpieces are removed. The internal pressure of parts other than the vacuum cleaning and drying tank 4 is maintained in a reduced pressure state slightly lower than atmospheric pressure.
（その他の実施の形態）
上記の真空洗浄乾燥機１では、溶剤蒸気回収タンク７と圧力吸収タンク８とを別個に配置し、これらの間を配管によって接続している。これらを一つにまとめて、必要とされる内容積を確保可能なサイズの溶剤蒸気回収機能を備えた圧力吸収タンクを配置することも可能である。
(Other embodiments)
In the above vacuum cleaning and drying machine 1, the solvent vapor recovery tank 7 and the pressure absorption tank 8 are disposed separately and connected by piping. It is also possible to combine these into one and dispose a pressure absorption tank having a size capable of securing the required internal volume and equipped with a solvent vapor recovery function.
１ 真空洗浄乾燥機
２ 真空バッファタンク
３ 蒸留再生・蒸気発生器
４ 真空洗浄乾燥槽
５ 真空ドライポンプ
６ 溶剤還流手段
７ 溶剤蒸気回収タンク
８ 圧力吸収タンク
９ 熱交換器
１０ 水分分離器
２１ 仕上溶剤槽
２２ 粗溶剤槽
３１ 筒状容器
３２ ヒーター
３３ 溶剤貯留部
３４ 溶剤蒸気発生部
３５ 冷却コイル
３６ 溶剤凝縮部
４１ 開閉蓋
４２ バスケット
４３ 超音波発生器
５１ 吸入口
５２ 吐出口
６１ 粗溶剤バッファタンク
６２ 粗溶剤ポンプ
６３ 粗溶剤フィルタ
６４ 仕上溶剤バッファタンク
６５ 仕上溶剤ポンプ
６６ 仕上溶剤フィルタ
７１ 冷却コイル
７２ 排気入口
７３ 排気出口
1 Vacuum cleaning and drying machine 2 Vacuum buffer tank 3 Distillation regeneration/steam generator 4 Vacuum cleaning and drying tank 5 Vacuum dry pump 6 Solvent reflux means 7 Solvent vapor recovery tank 8 Pressure absorption tank 9 Heat exchanger 10 Moisture separator 21 Finishing solvent tank 22 Crude solvent tank 31 Cylindrical container 32 Heater 33 Solvent storage section 34 Solvent vapor generation section 35 Cooling coil 36 Solvent condensation section 41 Opening and closing lid 42 Basket 43 Ultrasonic generator 51 Intake port 52 Discharge port 61 Crude solvent buffer tank 62 Crude solvent pump 63 Crude solvent filter 64 Finishing solvent buffer tank 65 Finishing solvent pump 66 Finishing solvent filter 71 Cooling coil 72 Exhaust inlet 73 Exhaust outlet
Claims (2)
前記密閉型真空洗浄乾燥機は、
前記洗浄剤を貯留した貯留槽と、
前記洗浄剤の蒸気を発生する蒸気発生器と、
前記貯留槽から供給される前記洗浄剤を用いたワークの浸漬洗浄、前記蒸気発生器から供給される前記洗浄剤の蒸気を用いたワークの蒸気洗浄、および、洗浄後の前記ワークの真空乾燥を行う真空洗浄乾燥槽と、
前記真空洗浄乾燥槽の真空引きを行う真空ドライポンプと、
前記真空洗浄乾燥槽に供給された前記洗浄剤を前記貯留槽に戻す洗浄剤還流手段と、
前記洗浄剤を蒸留再生する蒸留再生器と、
圧力吸収タンクと、
を備えており、
前記ワークが投入されて密閉された前記真空洗浄乾燥槽の内圧が、大気圧の状態から所定の真空度となるまで前記真空ドライポンプによって真空引きし、当該真空ドライポンプの排気を大気側に放出し、
真空引き後の前記真空洗浄乾燥槽に前記圧力吸収タンクを連通させ、前記真空洗浄乾燥槽および前記圧力吸収タンクを前記真空度よりも低い真空度の減圧状態にし、前記圧力吸収タンクを閉じ、
前記真空洗浄乾燥槽を前記真空ドライポンプによって真空引きすることで行われる前記真空乾燥時に、前記圧力吸収タンクを開き、前記真空洗浄乾燥槽から排出される排気を、大気側に放出せずに、前記圧力吸収タンクに回収し、
前記排気を回収した後の前記圧力吸収タンクの内圧が、大気圧未満の減圧状態に維持されるように、当該圧力吸収タンクの内容積および前記真空度を設定することを特徴とするワンバス式の密閉型真空洗浄乾燥機を用いたワーク洗浄乾燥方法。 A method for washing and drying a workpiece using a one-bath type sealed vacuum washer-dryer that uses a fluorine-based solvent as a cleaning agent to wash and dry the workpiece in a state sealed from the atmosphere, comprising:
The closed type vacuum cleaning and drying machine is
A storage tank in which the cleaning agent is stored;
a steam generator for generating steam of the cleaning agent;
a vacuum cleaning and drying tank for performing immersion cleaning of the workpiece using the cleaning agent supplied from the storage tank, steam cleaning of the workpiece using the vapor of the cleaning agent supplied from the steam generator, and vacuum drying of the workpiece after cleaning;
a vacuum dry pump for evacuating the vacuum cleaning and drying tank;
a cleaning agent circulation means for returning the cleaning agent supplied to the vacuum cleaning and drying tank to the storage tank;
A distillation and regeneration device for distilling and regenerating the cleaning agent;
A pressure absorption tank;
Equipped with
The vacuum dry pump is used to evacuate the vacuum cleaning and drying tank in which the workpieces have been put and sealed until the internal pressure of the tank reaches a predetermined vacuum level from atmospheric pressure, and the exhaust gas from the vacuum dry pump is released to the atmosphere.
The pressure absorption tank is connected to the vacuum cleaning and drying tank after evacuation, the vacuum cleaning and drying tank and the pressure absorption tank are brought into a reduced pressure state with a vacuum degree lower than the vacuum degree, and the pressure absorption tank is closed.
During the vacuum drying, which is performed by evacuating the vacuum cleaning and drying tank with the vacuum dry pump, the pressure absorption tank is opened, and exhaust gas discharged from the vacuum cleaning and drying tank is collected in the pressure absorption tank without being released to the atmosphere;
a pressure absorption tank that is adapted to absorb exhaust gas from the workpiece and that is adapted to absorb air from the workpiece; a pressure absorption tank that is adapted to absorb exhaust gas from the workpiece and that is adapted to absorb air from the workpiece;
前記洗浄剤を貯留した貯留槽と、
前記洗浄剤の蒸気を発生する蒸気発生器と、
前記貯留槽から供給される前記洗浄剤を用いたワークの浸漬洗浄、前記蒸気発生器から供給される前記洗浄剤の蒸気を用いたワークの蒸気洗浄、および、洗浄後の前記ワークの真空乾燥を行う真空洗浄乾燥槽と、
前記真空洗浄乾燥槽の真空引きを行う真空ドライポンプと、
前記真空洗浄乾燥槽に供給された前記洗浄剤を前記貯留槽に戻す洗浄剤還流手段と、
前記洗浄剤を蒸留再生する蒸留再生器と、
圧力吸収タンクと、
前記の各部の駆動を制御する制御装置と、
を備えており、
前記制御装置は、
前記ワークが投入されて密閉された前記真空洗浄乾燥槽の内圧が、大気圧の状態から所定の真空度となるまで前記真空ドライポンプによって真空引きし、当該真空ドライポンプの排気を大気側に放出する制御動作機能と、
真空引き後の前記真空洗浄乾燥槽に前記圧力吸収タンクを連通させ、前記真空洗浄乾燥槽および前記圧力吸収タンクを前記真空度よりも低い真空度の減圧状態にし、前記圧力吸収タンクを閉じる制御動作機能と、
前記真空洗浄乾燥槽を前記真空ドライポンプによって真空引きすることで行われる前記真空乾燥時に、前記圧力吸収タンクを開き、前記真空洗浄乾燥槽から排出される排気を、大気側に放出せずに、前記圧力吸収タンクに回収する制御動作機能と、
を備えており、
前記排気を回収した後の前記圧力吸収タンクの内圧が、大気圧未満の減圧状態に維持されるように、当該圧力吸収タンクの内容積および前記真空度が設定されていることを特徴とするワンバス式の密閉型真空洗浄乾燥機。 A one-bath sealed vacuum washer/dryer that uses a fluorine-based solvent as a cleaning agent to clean and dry workpieces in a sealed state from the atmosphere,
A storage tank in which the cleaning agent is stored;
a steam generator for generating steam of the cleaning agent;
a vacuum cleaning and drying tank for performing immersion cleaning of the workpiece using the cleaning agent supplied from the storage tank, steam cleaning of the workpiece using the vapor of the cleaning agent supplied from the steam generator, and vacuum drying of the workpiece after cleaning;
a vacuum dry pump for evacuating the vacuum cleaning and drying tank;
a cleaning agent circulation means for returning the cleaning agent supplied to the vacuum cleaning and drying tank to the storage tank;
A distillation and regeneration device for distilling and regenerating the cleaning agent;
A pressure absorption tank;
A control device for controlling the driving of each of the above-mentioned parts;
Equipped with
The control device includes:
a control operation function of using the vacuum dry pump to evacuate the internal pressure of the vacuum cleaning and drying tank in which the workpieces have been put and sealed until the internal pressure reaches a predetermined vacuum level from atmospheric pressure, and releasing the exhaust gas of the vacuum dry pump to the atmosphere;
a control operation function of communicating the pressure absorption tank with the vacuum cleaning and drying tank after evacuation, bringing the vacuum cleaning and drying tank and the pressure absorption tank into a reduced pressure state with a vacuum degree lower than the vacuum degree, and closing the pressure absorption tank;
a control operation function of opening the pressure absorption tank during the vacuum drying performed by evacuating the vacuum cleaning and drying tank with the vacuum dry pump, and recovering the exhaust gas discharged from the vacuum cleaning and drying tank in the pressure absorption tank without discharging the exhaust gas into the atmosphere;
Equipped with
a pressure absorption tank having a volume and a degree of vacuum set so that the internal pressure of the pressure absorption tank after the exhaust gas is collected is maintained in a reduced pressure state below atmospheric pressure.
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