JPH02280880A - Method for operating washing apparatus using organic solvent - Google Patents
Method for operating washing apparatus using organic solventInfo
- Publication number
- JPH02280880A JPH02280880A JP1098911A JP9891189A JPH02280880A JP H02280880 A JPH02280880 A JP H02280880A JP 1098911 A JP1098911 A JP 1098911A JP 9891189 A JP9891189 A JP 9891189A JP H02280880 A JPH02280880 A JP H02280880A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning tank
- organic solvent
- cleaning
- vacuum pump
- solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003960 organic solvent Substances 0.000 title claims description 61
- 238000000034 method Methods 0.000 title claims description 17
- 238000005406 washing Methods 0.000 title abstract 4
- 239000002904 solvent Substances 0.000 claims abstract description 18
- 238000011084 recovery Methods 0.000 claims abstract description 7
- 238000007599 discharging Methods 0.000 claims abstract description 6
- 238000004140 cleaning Methods 0.000 claims description 105
- 238000007789 sealing Methods 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 10
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 description 14
- 238000001704 evaporation Methods 0.000 description 4
- 230000006378 damage Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000013020 steam cleaning Methods 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明に係る有機溶剤を使用する洗浄装置の運転方法
は、フロン等の有機溶剤を用いて各種物品の表面に付着
した油等の汚れを落とす洗浄装置を運転する場合に利用
するもので、洗浄槽内に空気が残留するのを防止する事
により、洗浄槽の内部空間の有効利用を図り、洗浄装置
の小型化を図れる様にするものである。Detailed Description of the Invention (Industrial Application Field) A method of operating a cleaning device using an organic solvent according to the present invention is a method for cleaning dirt such as oil adhering to the surfaces of various articles using an organic solvent such as Freon. This is used when operating a cleaning device that cleans the tank.By preventing air from remaining in the cleaning tank, the internal space of the cleaning tank can be used effectively and the cleaning device can be made more compact. It is.
（従来の技術）
金型、空気軸受用の多孔質焼結金属、或はＩＣ基板等、
各種物品の表面に付着した油等の汚れを、フロン、トリ
クロルエチレン等の有機溶剤を洗浄液として使用する事
により洗浄する事が、般的に行なわれている。(Prior art) Molds, porous sintered metal for air bearings, IC boards, etc.
BACKGROUND OF THE INVENTION It is common practice to clean oil and other stains adhering to the surfaces of various articles by using organic solvents such as fluorocarbons and trichlorethylene as a cleaning liquid.
この様な有機溶剤を洗浄液として使用する事により、洗
浄作業を行なう洗浄装置の１例に就いて、実願昭６３−
５４５９５号に示された装置を例にして説明する。An example of a cleaning device that performs cleaning work by using such an organic solvent as a cleaning liquid is disclosed in Utility Application No. 1983-
This will be explained using the device shown in No. 54595 as an example.
この洗浄装置は、図面に示す様に、上方が開口した有底
円筒状で、上端開口を気密に塞ぐ事の出来る蓋１を有す
る洗浄槽２と、有機溶剤を加熱蒸発させる為のヒータ３
を内蔵し、管５を通じて洗浄槽２の内部に有機溶剤の蒸
気を送り込む蒸気供給手段４と、洗浄４！２の内部に送
り込む為の洗浄用有機溶剤を貯溜した貯溜槽６と、この
貯溜槽６と洗浄槽２とを結ぶ２本の管７．８及び一方の
管８の途中に設けた送液ポンプ９から成り、両槽６．２
の間で液状の有機溶剤の給排を行なう給排手段２０と、
液状の有機溶剤を加熱蒸発させる為のヒータ１０と有機
溶剤の蒸気を凝縮させる為の冷却器１１とを組み合わせ
、凝縮した有機溶剤を上記貯溜槽６に送る蒸留器１２と
、洗浄槽２内に空気を送り込む吸気管１６と、途中に真
空ポンプ１３を設けた排出管１９の端部にそれぞれ接続
され、洗浄槽２から排出した有機溶剤蒸気を、上記蒸留
器１２に送り込む排蒸管１４と、洗浄槽２から空気を排
出する排気管１５とから構成されている。As shown in the drawing, this cleaning device includes a cleaning tank 2, which has a cylindrical shape with an open top and a lid 1 that can airtightly close the top opening, and a heater 3 for heating and evaporating the organic solvent.
a steam supply means 4 which has a built-in organic solvent vapor and sends organic solvent vapor into the inside of the cleaning tank 2 through a pipe 5, a storage tank 6 which stores a cleaning organic solvent to be sent into the inside of the cleaning tank 2, and this storage tank. It consists of two pipes 7.8 connecting the cleaning tank 6 and the cleaning tank 2, and a liquid feeding pump 9 installed in the middle of one of the pipes 8.
supply and discharge means 20 for supplying and discharging a liquid organic solvent between;
A distiller 12 that combines a heater 10 for heating and evaporating a liquid organic solvent and a cooler 11 for condensing organic solvent vapor, and a distiller 12 that sends the condensed organic solvent to the storage tank 6 and a cleaning tank 2. An exhaust pipe 14 that is connected to the ends of an intake pipe 16 that sends air and an exhaust pipe 19 that is provided with a vacuum pump 13 in the middle, and that sends the organic solvent vapor discharged from the cleaning tank 2 to the distiller 12; It is composed of an exhaust pipe 15 for discharging air from the cleaning tank 2.
上述の様に構成される先発明の洗浄装置により、被洗浄
物１７の洗浄を行なう場合、蓋１を開いて、この被洗浄
物１７を洗浄槽２の内部に収納した後、上記蓋１を閉じ
てから真空ポンプ１３を運転し、排気管１５を通じて、
この洗浄槽２内の空気を排出する。When cleaning the object 17 to be cleaned using the cleaning apparatus of the earlier invention configured as described above, the lid 1 is opened and the object 17 is stored inside the cleaning tank 2, and then the lid 1 is closed. After closing, operate the vacuum pump 13, and through the exhaust pipe 15,
The air in this cleaning tank 2 is exhausted.
洗浄槽２内の空気を排出した後、給排手段２０を構成す
る管７を通じて、貯溜槽６内の有機溶剤を洗浄槽２内に
送り込み、被洗浄物１７の洗浄を行なう、この際、洗浄
槽２の底面に固定した超音波振動子１８．１８に通電す
る事により、洗浄槽２内の有機溶剤に超音波振動を加え
、被洗浄物１７の洗浄が効率良く行なわれる様にする。After discharging the air in the cleaning tank 2, the organic solvent in the storage tank 6 is sent into the cleaning tank 2 through the pipe 7 constituting the supply/discharge means 20, and the object to be cleaned 17 is cleaned. By energizing the ultrasonic vibrator 18.18 fixed to the bottom of the tank 2, ultrasonic vibration is applied to the organic solvent in the cleaning tank 2, so that the object 17 to be cleaned can be efficiently cleaned.
液状の有機溶剤による洗浄作業が完了したならば、給排
手段２０を構成する送液ポンプ９を運転する事により、
管８を通じて洗浄槽２中の液状有機溶剤を、徐々に貯溜
槽６に戻しつつ、蒸気供給手段４から洗浄槽２中に有機
溶剤の蒸気を供給する。After the cleaning work with the liquid organic solvent is completed, by operating the liquid feeding pump 9 constituting the supply/discharge means 20,
While the liquid organic solvent in the cleaning tank 2 is gradually returned to the storage tank 6 through the pipe 8, organic solvent vapor is supplied into the cleaning tank 2 from the steam supply means 4.
この結果、洗浄槽２中の被洗浄物１フは、その一部が液
状有機溶剤の液面上に露出し、この露出部分で有機溶剤
の蒸気が凝縮し、この凝縮分で被洗浄物１７の表面が洗
浄される、所謂蒸気洗浄が行なわれる。As a result, a part of the object 1 to be cleaned in the cleaning tank 2 is exposed above the surface of the liquid organic solvent, and the vapor of the organic solvent is condensed in this exposed part, and this condensation is used to remove the object 1 to be cleaned. A so-called steam cleaning process is performed in which the surface of the substrate is cleaned.
蒸気洗浄を行ないつつ、洗浄槽２中の液状有機溶剤を総
て貯溜槽６に戻したならば、排出管１９の途中に設けた
真空ポンプ１３を運転し、洗浄槽２内に残留している有
機溶剤蒸気を、排蒸管１４を通じて、蒸留器１２内に排
出する。この様に、排出管１９と排蒸管１４とを通じて
蒸留器１２に排出された有機溶剤の蒸気は、この蒸留器
１２に設けた冷却器１１により凝縮液化されて回収され
る。冷却器１１により回収し切れなかった有機溶剤の蒸
気は、二次冷却器２１により回収され、更にこの二次冷
却器２１も通過した微量の有機溶剤蒸気は、活性炭フィ
ルタ２２により捕集される。After all the liquid organic solvent in the cleaning tank 2 is returned to the storage tank 6 while performing steam cleaning, the vacuum pump 13 installed in the middle of the discharge pipe 19 is operated to remove the remaining liquid in the cleaning tank 2. The organic solvent vapor is discharged into the distiller 12 through the exhaust pipe 14 . In this way, the organic solvent vapor discharged into the distiller 12 through the discharge pipe 19 and the exhaust pipe 14 is condensed and liquefied by the cooler 11 provided in the distiller 12 and recovered. The organic solvent vapor that has not been completely recovered by the cooler 11 is recovered by the secondary cooler 21, and the trace amount of organic solvent vapor that has also passed through the secondary cooler 21 is collected by the activated carbon filter 22.
真空ポンプ１３の運転に伴なって、洗浄槽２内が所定の
真空度に達したならば、上記真空ポンプ１３を停止し、
吸気管１６を通じて洗浄槽２内に空気を送り込む。When the inside of the cleaning tank 2 reaches a predetermined degree of vacuum with the operation of the vacuum pump 13, the vacuum pump 13 is stopped,
Air is sent into the cleaning tank 2 through the intake pipe 16.
この結果、洗浄槽２内の圧力が大気圧程度に迄上昇した
ならば、この洗浄槽２のＮ１を開き、洗浄作業が完了し
た被洗浄物１７の取り出しを行なう。As a result, when the pressure inside the cleaning tank 2 rises to approximately atmospheric pressure, N1 of the cleaning tank 2 is opened and the object 17 to be cleaned which has been cleaned is taken out.
（発明が解決しようとする課題）
ところが、上述の様に構成され作用する、従来からの、
或は先発明に係る洗浄装置を運転する場合に於いては、
次に述べる様な不都合を生じる。(Problem to be solved by the invention) However, the conventional method configured and operated as described above,
Or when operating the cleaning device according to the earlier invention,
This causes the following inconvenience.
即ち、洗浄作業を開始するに当たり、被洗浄物１７を洗
浄槽２の内部に収納した後、上記蓋１を閉じてから真空
ポンプ１３を運転して、この洗浄槽２内の空気を排出し
、被洗浄物１７の隅々に迄有機溶剤が行き亙る様にする
が、真空ポンプ１３の能力上の問題から、洗浄槽２内に
若干の空気が残留する事が避けられない。That is, to start the cleaning work, after storing the object 17 to be cleaned inside the cleaning tank 2, the lid 1 is closed, and the vacuum pump 13 is operated to exhaust the air inside the cleaning tank 2. Although the organic solvent is made to spread to every corner of the object 17 to be cleaned, it is unavoidable that some air remains in the cleaning tank 2 due to problems with the capacity of the vacuum pump 13.
この様に、洗浄槽２内に若干の空気が残留したままの状
態で、管７を通じて洗浄槽２内に洗浄液を送り込んだ場
合、洗浄槽２の上部空間２５内に空気が存在する様にな
ってしまい、残留空気の分圧と有機溶剤蒸気の分圧との
和によって定まる、この上部空間２５内の圧力が、残留
空気の分だけ高くなってしまう。In this way, if the cleaning liquid is sent into the cleaning tank 2 through the pipe 7 while some air remains in the cleaning tank 2, air will be present in the upper space 25 of the cleaning tank 2. As a result, the pressure in the upper space 25, which is determined by the sum of the partial pressure of the residual air and the partial pressure of the organic solvent vapor, increases by the amount of the residual air.
一方、フロン等の有機溶剤を入れた洗浄槽２内が陽圧に
なった場合、この有機溶剤蒸気の漏洩を防止する為には
、洗浄槽２の上端開口部に設けるＭｌを、この洗浄槽２
の上縁部に設けたバッキングに向けて押し付ける為の締
め付は機構を設ける必要があり、洗浄装置の構造が複雑
化する事が避けられない。On the other hand, when the inside of the cleaning tank 2 containing an organic solvent such as fluorocarbon becomes positive pressure, in order to prevent the organic solvent vapor from leaking, Ml installed at the upper end opening of the cleaning tank 2 must be 2
It is necessary to provide a mechanism for tightening to press against the backing provided on the upper edge of the cleaning device, which inevitably complicates the structure of the cleaning device.
又、締め付は不良やバッキングに傷が生じる事等により
、蓋部分の気密が不良になった場合、洗浄槽２内に存在
する有機溶剤の蒸気が大気中に漏洩し、オゾン層破壊等
、環境破壊の原因となってしまう。In addition, if the airtightness of the lid becomes poor due to poor tightening or damage to the backing, the vapor of the organic solvent present in the cleaning tank 2 may leak into the atmosphere, resulting in damage to the ozone layer, etc. It causes environmental destruction.
この為、本発明者は先に、洗浄作業の間中洗浄槽２内を
負圧に保つ事で、有機溶剤蒸気の漏洩を防止する洗浄方
法を発明した（特願平１−１７５１６号）が、前述の様
に、上部空間２５内の圧力が、残留空気の分だけ高くな
ると、洗浄作業の進行に伴なって洗浄槽２内の圧力が大
気圧よりも高くなる（洗浄槽２内が陽圧になる）可能性
が大きくなり、有機溶剤の漏洩防止が不確実になってし
まう。For this reason, the present inventor previously invented a cleaning method that prevents the leakage of organic solvent vapor by maintaining the inside of the cleaning tank 2 at negative pressure during the cleaning operation (Japanese Patent Application No. 1-17516). As mentioned above, when the pressure in the upper space 25 increases by the amount of residual air, the pressure in the cleaning tank 2 becomes higher than the atmospheric pressure as the cleaning process progresses (the inside of the cleaning tank 2 becomes positive). This increases the possibility that the organic solvent will leak, making it difficult to prevent organic solvent leakage.
残留空気の存在に拘らず、洗浄槽２の上部空間２５内の
圧力が低く保たれる様にする為には、洗浄槽２の全内容
積に対する上部空間２５の容積の割合を多くすれば良い
が、その分だけ洗浄用の有機溶剤を溜められる部分の容
積（洗浄槽２の全内容積から、上部空間２５の容積を引
いた容積）が少なくなり、大きな被洗浄物１７を洗浄し
難くなる。又、大きな被洗浄物１７を洗浄出来る様にす
ると、洗浄槽２が大型化してしまう。In order to keep the pressure in the upper space 25 of the cleaning tank 2 low regardless of the presence of residual air, the ratio of the volume of the upper space 25 to the total internal volume of the cleaning tank 2 may be increased. However, the volume of the part that can store the organic solvent for cleaning (the volume obtained by subtracting the volume of the upper space 25 from the total internal volume of the cleaning tank 2) decreases accordingly, making it difficult to clean the large objects 17 to be cleaned. . Furthermore, if a large object to be cleaned 17 is to be cleaned, the size of the cleaning tank 2 will increase.
本発明の有機溶剤を使用する洗浄装置の運転方法は、上
述の様な不都合を解消するものである。The method of operating a cleaning device using an organic solvent according to the present invention solves the above-mentioned disadvantages.
（課題を解決する為の手段）
本発明の方法により運転される、有機溶剤を使用する洗
浄装置は、従来、或は先発明に係る洗浄装置と同様、図
面に示す様に、被洗浄物を収納した状態で密閉自在な洗
浄槽２と、貯留槽６及び管７等から構成され、上記洗浄
槽２内にフロン等、洗浄用の有機溶剤を送り込み自在な
供給手段と、上記洗浄槽２の上部空間２５に存在する気
体を排出する真空ポンプ１３と、冷却器１１等を内蔵す
る事で構成され、この真空ポンプ１３から吐出される気
体を送り込み自在で、この気体中に存在する有機溶剤の
蒸気を回収する溶剤回収手段とから構成されている。(Means for Solving the Problems) As shown in the drawings, the cleaning equipment using an organic solvent operated by the method of the present invention, as shown in the drawings, It is composed of a cleaning tank 2 that can be sealed tightly when stored, a storage tank 6, a pipe 7, etc., and a supply means that can freely feed an organic solvent for cleaning such as fluorocarbon into the cleaning tank 2, and a It is constructed by incorporating a vacuum pump 13 for discharging the gas present in the upper space 25, a cooler 11, etc., and the gas discharged from this vacuum pump 13 can be fed freely, and the organic solvent present in this gas can be removed. and a solvent recovery means for recovering vapor.
そしてこの洗浄装置は、洗浄作業の間中、上記真空ポン
プ１３の運転を継続する事により、洗浄槽２内を負圧に
維持したままの状態で洗浄作業を行なう。This cleaning device performs the cleaning operation while maintaining the inside of the cleaning tank 2 at negative pressure by continuing to operate the vacuum pump 13 throughout the cleaning operation.
この様な有機溶剤を使用する洗浄装置を運転する為の、
本発明の方法の内、請求項１の方法に於いては、蓋１を
開けた状態で洗浄槽２内に被洗浄物１７を収納し、上記
Ｍ１によりこの洗浄槽２を密閉した後、貯留槽６及び管
７等から成る上記供給手段を通じて、洗浄槽２内にフロ
ン等の有機溶剤を送り込んだ状態で、上記真空ポンプ１
３を運転する事により、上記洗浄槽２の上部空間に残留
している空気の排出を行なう。For operating cleaning equipment that uses such organic solvents,
In the method of claim 1 of the method of the present invention, the object to be cleaned 17 is stored in the cleaning tank 2 with the lid 1 open, and after the cleaning tank 2 is sealed by the M1, the storage While an organic solvent such as fluorocarbon is being fed into the cleaning tank 2 through the supply means consisting of the tank 6, the pipe 7, etc., the vacuum pump 1
3, the air remaining in the upper space of the cleaning tank 2 is discharged.
又、請求項２の方法の場合、供給手段により洗浄槽２内
に有機溶剤を送り込む以前に真空ポンプ１３を運転する
。そして、この運転により排出される空気は、溶剤回収
手段である蒸留器１２を通さずに、そのまま大気中に排
出する。真空ポンプ１３の運転により洗浄槽２内の空気
が成る程度排出されたならば、洗浄４′Ｉ２内に有機溶
剤を送り込み、この溶剤が蒸発する事で生じた蒸気と空
気とを、溶剤回収手段である蒸留器１２に送り込む。In the method of claim 2, the vacuum pump 13 is operated before the organic solvent is fed into the cleaning tank 2 by the supply means. The air discharged by this operation is directly discharged into the atmosphere without passing through the distiller 12, which is a solvent recovery means. When the air in the cleaning tank 2 has been exhausted to a certain extent by operating the vacuum pump 13, an organic solvent is sent into the cleaning tank 4'I2, and the vapor and air generated by the evaporation of this solvent are collected by a solvent recovery means. It is sent to the distiller 12 which is
（作 用）
上述の様に構成される本発明の運転方法の内、請求項１
に記載の方法による場合、真空ポンプ１３の運転に伴な
って、洗浄槽２の上部空間２５内に存在する気体が、空
気と有機溶剤の蒸気との混合気体となる。(Function) Claim 1 of the operating method of the present invention configured as described above
In the case of the method described in , the gas present in the upper space 25 of the cleaning tank 2 becomes a mixed gas of air and organic solvent vapor as the vacuum pump 13 operates.
この混合気体を真空ポンプ１３により更に連続して排出
した場合、混合気体中に占める空気の割合が次第に少な
くなる。When this mixed gas is further continuously discharged by the vacuum pump 13, the proportion of air in the mixed gas gradually decreases.
即ち、有機溶剤蒸気は、洗浄槽２内に供給された液状の
有機溶剤が蒸発する事により、次々に補給されるが、空
気は全く補給される事がない為、上記混合気体中に占め
る空気の割合は、次第に少なくなり、遂には、洗浄槽２
の上部空間２５内が、有機溶剤蒸気のみで溝なされる。That is, the organic solvent vapor is replenished one after another by the evaporation of the liquid organic solvent supplied into the cleaning tank 2, but since air is not replenished at all, the air occupied in the above-mentioned mixed gas is The ratio gradually decreases until finally, cleaning tank 2
The inside of the upper space 25 is filled with only organic solvent vapor.
上部空間２５内の有機溶剤蒸気の圧力は、洗浄、１１２
内の温度を成る程度以下に保つ限り、１気圧を越える事
がない為、上部空間２５内の圧力を１気圧未満（陽圧）
に保つ事は容易である。The pressure of the organic solvent vapor in the head space 25 is
As long as the temperature inside the upper space 25 is kept below a certain level, it will not exceed 1 atm, so the pressure inside the upper space 25 should be less than 1 atm (positive pressure).
It is easy to keep it.
真空ポンプ１３により排出され、排出管１９、排蒸管１
４を通じて、溶剤回収手段である蒸留器１２内に送り込
まれた混合気体中の溶剤蒸気は、この蒸留器１２の上部
に設けた冷却器１１によって凝縮液化され、前記貯留槽
６に回収される。Exhausted by vacuum pump 13, discharge pipe 19, exhaust pipe 1
4, the solvent vapor in the mixed gas is sent into the distiller 12, which is a solvent recovery means, and is condensed and liquefied by the cooler 11 provided at the upper part of the distiller 12, and is recovered into the storage tank 6.
又、冷却器１１で回収し切れなかった溶剤蒸気は、二次
冷却器２１により凝縮されて回収され、更にこの二次冷
却器２１によっても回収出来なかった微量の溶剤蒸気は
、活性炭フィルタ２２により捕集される。但し、冷却器
１１の能力が十分であれば、二次冷却器２１と活性炭フ
ィルタ２２とは省略する事も出来る。Further, the solvent vapor that was not completely recovered by the cooler 11 is condensed and recovered by the secondary cooler 21, and the trace amount of solvent vapor that could not be recovered by the secondary cooler 21 is further collected by the activated carbon filter 22. be captured. However, if the capacity of the cooler 11 is sufficient, the secondary cooler 21 and activated carbon filter 22 can be omitted.
従って、洗浄槽２内に有機溶剤を送り込みつつ、真空ポ
ンプ１３を運転しても、有機溶剤の蒸気が空気よりも重
い事もあり、有機溶剤の蒸気が外部に漏れ出す事はない
。Therefore, even if the vacuum pump 13 is operated while feeding the organic solvent into the cleaning tank 2, the organic solvent vapor will not leak outside because the organic solvent vapor is heavier than air.
又、請求項２に記載された方法の場合、溶剤回収手段で
ある蒸留器１２内に送り込まれる空気の量を少なく抑え
る事が出来る為、空気に連られて蒸留器１２外に逃げる
有機溶剤蒸気の量を、より少なく出来る。Furthermore, in the case of the method described in claim 2, since the amount of air sent into the distiller 12, which is the solvent recovery means, can be suppressed to a small level, the organic solvent vapor that escapes to the outside of the distiller 12 along with the air can be suppressed. The amount of can be reduced.
（発明の効果）
本発明の有機溶剤を使用する洗浄装置の運転方法は、以
上に述べた通り構成され作用する為、洗浄槽の上部空間
を大きくしなくても、この洗浄槽内部の圧力を陽圧に保
つ事が容易に行なえる様になり、洗浄槽を特に大型化し
なくても、有機溶剤蒸気の漏洩を確実に防止しつつ、十
分に大きな被洗浄物の洗浄を行なう事が出来る。(Effects of the Invention) The method of operating a cleaning device using an organic solvent of the present invention is configured and operates as described above, so that the pressure inside the cleaning tank can be reduced without increasing the upper space of the cleaning tank. Positive pressure can now be easily maintained, and sufficiently large objects can be cleaned while reliably preventing leakage of organic solvent vapor without making the cleaning tank particularly large.
図面は本発明の対象となる洗浄装置の１例を示す略縦断
面図である。
１：蓋、２：洗浄槽、３：ヒータ、４：蒸気供給手段、
５：管、６：貯溜槽、７．８：管、９：送液ポンプ、１
０：ヒータ、１１：冷却器、１２：蒸留器、１３：真空
ポンプ、１４：排蒸管、１５：排気管、１６：吸気管、
１７：被洗浄物、１８：超音波振動子、１９：排出管、
２０：給排手段、２１：二次冷却器、２２：活性炭フィ
ルタ、２３．２４：弁、２５：上部空間。
特許出願人 株式会社千代田製作所
代 理 人 小 山 欽造（ほか１名）（−ｉτカ
１瞥）
２鵞
ｒ５（（ＩＦ’ｆｔ’ｉζ〕The drawing is a schematic vertical sectional view showing an example of a cleaning device to which the present invention is applied. 1: Lid, 2: Cleaning tank, 3: Heater, 4: Steam supply means,
5: Pipe, 6: Storage tank, 7.8: Pipe, 9: Liquid pump, 1
0: heater, 11: cooler, 12: distiller, 13: vacuum pump, 14: exhaust pipe, 15: exhaust pipe, 16: intake pipe,
17: Object to be cleaned, 18: Ultrasonic vibrator, 19: Discharge pipe,
20: supply/discharge means, 21: secondary cooler, 22: activated carbon filter, 23.24: valve, 25: upper space. Patent applicant: Chiyoda Seisakusho Co., Ltd. Representative: Kinzo Koyama (and 1 other person)
Claims (2)
この洗浄槽内に洗浄用の有機溶剤を送り込み自在な供給
手段と、上記洗浄槽の上部空間に存在する気体を排出す
る真空ポンプと、この真空ポンプから吐出される気体を
送り込み自在で、この気体中に存在する有機溶剤の蒸気
を回収する溶剤回収手段とから成り、上記洗浄槽内を負
圧に維持したままの状態で洗浄作業を行なう、有機溶剤
を使用する洗浄装置の運転方法であって、洗浄槽内に被
洗浄物を収納し、この洗浄槽を密閉した後、上記供給手
段により洗浄槽内に有機溶剤を送り込んだ状態で、上記
真空ポンプを運転する事により、上記洗浄槽の上部空間
に残留している空気の排出を行なう、有機溶剤を使用す
る洗浄装置の運転方法。(1) A cleaning tank that can be sealed while storing the items to be cleaned,
A supply means capable of freely feeding an organic solvent for cleaning into the cleaning tank, a vacuum pump discharging the gas present in the upper space of the cleaning tank, and a supply means capable of freely feeding the gas discharged from the vacuum pump. A method of operating a cleaning device using an organic solvent, comprising a solvent recovery means for recovering organic solvent vapor present in the cleaning tank, and cleaning work is performed while maintaining the inside of the cleaning tank at negative pressure. After storing the object to be cleaned in the cleaning tank and sealing the cleaning tank, the organic solvent is fed into the cleaning tank by the supply means, and the vacuum pump is operated to remove the upper part of the cleaning tank. A method of operating cleaning equipment that uses organic solvents to exhaust air remaining in the space.
前に、真空ポンプにより洗浄槽内の空気を大気中に排出
しておく、請求項１に記載の有機溶剤を使用する洗浄装
置の運転方法。(2) The method for operating a cleaning device using an organic solvent according to claim 1, wherein the air in the cleaning tank is discharged into the atmosphere by a vacuum pump before the organic solvent is sent into the cleaning tank by the supply means. .
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9891189A JP2721701B2 (en) | 1989-04-20 | 1989-04-20 | Operating method of cleaning device using organic solvent |
| US07/412,271 US5051135A (en) | 1989-01-30 | 1989-09-25 | Cleaning method using a solvent while preventing discharge of solvent vapors to the environment |
| EP89309821A EP0381887A1 (en) | 1989-01-30 | 1989-09-27 | Cleaning method and system using a solvent |
| KR1019890014527A KR970007621B1 (en) | 1989-01-30 | 1989-10-10 | Method & apparatus for quantitative determination of trihalomethanes |
| US07/719,776 US5193560A (en) | 1989-01-30 | 1991-06-24 | Cleaning system using a solvent |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9891189A JP2721701B2 (en) | 1989-04-20 | 1989-04-20 | Operating method of cleaning device using organic solvent |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02280880A true JPH02280880A (en) | 1990-11-16 |
| JP2721701B2 JP2721701B2 (en) | 1998-03-04 |
Family
ID=14232314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9891189A Expired - Fee Related JP2721701B2 (en) | 1989-01-30 | 1989-04-20 | Operating method of cleaning device using organic solvent |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2721701B2 (en) |
-
1989
- 1989-04-20 JP JP9891189A patent/JP2721701B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2721701B2 (en) | 1998-03-04 |
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