JP2017170424A - Work washing device and work washing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide work washing device capable of suppressing a loss of solvent steam.SOLUTION: A work washing device 1 is equipped with a carrying in/out chamber 8; and a processing chamber 9 arranged under that. A carrying in/out port 4 of the carrying in/out chamber 8 is blocked by an outer door 6, and a communication port 50 between the carrying in/out chamber 8 and the processing chamber 9 is blocked by an inner door 11 which is an inner door. On a bottom side in the processing chamber 9, a washing tank 12 is disposed, a steam washing area 14 is formed on an upper side thereof, and a cooling drying area 16 equipped with a cooling coil is formed on an upper side thereof. The outer door 5 and the inner door 11 which is the inner door are independently controlled so as to open/close, thereby preventing the formation of a state in which the processing chamber 9 is communicated with the outside through the carrying in/out chamber 8 during washing action.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a workpiece cleaning apparatus and a workpiece cleaning method used for cleaning various workpieces such as electronic components and metal components.

  As a workpiece cleaning device, a one-tank type workpiece cleaning device disclosed in Patent Document 1 is known. In the workpiece cleaning apparatus disclosed in Patent Document 1, a cleaning tank for storing a solvent is disposed in the lower part of the tank body, a vapor cleaning region is formed above the liquid level of the solvent in the cleaning tank, and a cooling coil is formed above the cleaning tank. Is formed, and the upper side of the cooling region is a dry region. A work entrance is formed in the drying region.

  In the workpiece cleaning apparatus having this configuration, the solvent consumption can be suppressed compared to the case where the solvent vapor is constantly supplied by supplying the vapor solvent from the vapor generation tank side to the vapor cleaning region only when performing the vapor cleaning. ing. Further, by sucking and collecting the vapor solvent from the portion on the cooling region side in the vapor cleaning region, loss of the vapor solvent that is taken out to the upper side of the cooling region is suppressed.

JP 2005-74319 A

  However, since the steam cleaning region communicates with the drying chamber or workpiece entry / exit chamber above the cooling region, even if the amount of solvent vapor in the steam cleaning region is controlled and the solvent vapor is suction controlled, the workpiece still remains. There is a risk of solvent vapor leaking to the side where the doorway is formed. Further, since it is necessary to provide a control mechanism for performing supply control of the solvent vapor and a suction mechanism for sucking the solvent vapor, the manufacturing cost increases.

  For example, a fluorinated solvent is used as a solvent used as a cleaning agent for a workpiece cleaning apparatus. Since the fluorinated solvent has high volatility and good drying properties, it easily leaks into the atmosphere through the work entrance. Since the fluorinated solvent is expensive, it is desired that the loss caused by the generation of steam can be suppressed as much as possible.

  In view of such a point, an object of the present invention is to propose a one-tank type or multi-tank type work cleaning apparatus and a cleaning method capable of suppressing loss of solvent vapor.

The workpiece cleaning apparatus of the present invention is
A loading / unloading chamber equipped with a workpiece loading / unloading outlet;
An outer door that opens and closes the loading / unloading port;
A processing chamber communicating with the loading / unloading chamber via a communication port;
An inner door that opens and closes the communication port;
A cleaning tank for storing a solvent disposed inside the processing chamber;
A steam cleaning region provided on the upper side of the cleaning tank in the processing chamber;
A cooling and drying region provided above the steam cleaning region in the processing chamber and facing the communication port;
A transport mechanism for transporting the work to the loading / unloading chamber and the processing chamber via the communication port;
A vapor generation tank is provided for supplying solvent vapor to the vapor cleaning region.

Further, the present invention is a workpiece cleaning method using the workpiece cleaning apparatus having the above-described configuration,
With the communication port between the processing chamber and the loading / unloading chamber closed, the workpiece to be cleaned is loaded into the loading / unloading chamber from the loading / unloading port,
Open the communication port after closing the loading / unloading port, lower the workpiece from the loading / unloading chamber to a position immersed in the solvent stored in the cleaning tank in the processing chamber, and perform a cleaning process on the workpiece,
After lifting the workpiece to the loading / unloading chamber via the steam cleaning region and the cooling drying region after cleaning, the communication port is closed,
The gas in the carry-in / out chamber is circulated through a heat exchanger, and the solvent contained in the gas is cooled and liquefied and collected,
Thereafter, the loading / unloading opening is opened, and the processed workpiece is unloaded.

  In the present invention, in the state where the loading / unloading opening is open, the processing chamber and the loading / unloading chamber thereon are always blocked. The steam cleaning area and the cooling and drying area in the processing chamber where the solvent vapor exists are prevented from communicating with the outside through the loading / unloading chamber. Therefore, leakage of the solvent vapor to the outside can be surely prevented, and the loss of the solvent vapor can be reduced as much as possible.

  By simply opening and closing the loading / unloading port of the loading / unloading chamber and opening / closing the communication port between the loading / unloading chamber and the processing chamber, the loss of solvent vapor can be reduced, and the opening / closing mechanism can be configured at a low cost. The rise can also be suppressed.

  Further, since the loading / unloading port only needs to be opened at the time of loading / unloading the workpiece, the amount of air entering from the outside through the loading / unloading port can be reduced. If moisture contained in the air entering from the outside enters the processing chamber via the loading / unloading chamber, it is cooled in the cooling / drying region, causing condensation on the surface of the cooling coil and the like, resulting in a decrease in cooling efficiency. Arise. Such harmful effects can be eliminated or suppressed.

  Here, the loading / unloading port is divided into a workpiece loading port and a workpiece loading / unloading port, and a loading side outer door that opens and closes the loading port and a loading side outer door that opens and closes the loading port can be arranged as outer doors. . The communication port is divided into a loading-side communication port for transporting the workpiece to the processing chamber and a loading-side communication port for unloading the workpiece from the processing chamber. As the inner door, the loading-side inner door and the unloading-side communication for opening and closing the loading-side communication port. An unloading side door that opens and closes the mouth can also be arranged. The loading / unloading port is divided into a workpiece loading port and a workpiece loading / unloading port, and a loading-side outer door that opens and closes the loading / unloading port and a loading-side outer door that opens and closes the loading / unloading port are arranged, and the communication port is connected to the loading side. It is also possible to dispose a carry-out side door and a carry-out side door, and a carry-out side door that opens and closes a carry-out port.

  In the case of a multi-tank type work cleaning device or the like in which two or more processing tanks such as cleaning tanks are arranged in the processing chamber, the loading / unloading chamber is divided into a loading chamber and a loading chamber. Loading / unloading side door that opens and closes the loading / unloading port, and loading / unloading side door that opens and closes the loading / unloading port formed in the loading / unloading chamber. It is desirable to arrange a side inner door and a carry-out side door that opens and closes a carry-out side communication port that communicates the carry-out port and the processing chamber.

In the present invention, a two-tank configuration in which a cleaning tank and a steam generation tank are arranged in the processing chamber can be employed. For example, the steam generation tank is disposed in a position adjacent to the cleaning tank in the lateral direction inside the processing chamber. In this case, as the transport mechanism, the first elevating mechanism that elevates and lowers the work through the carry-in side communication port, the second elevating mechanism that elevates and lowers the work through the carry-out side communication port, and the work in the steam cleaning region A horizontal transport mechanism that transports in the lateral direction and passes from the first lift mechanism to the second lift mechanism can be disposed.

  In the present invention, it is possible to adopt a multi-tank configuration in which a plurality of cleaning tanks are arranged in the processing chamber. For example, as a cleaning tank, at least a first cleaning tank and a second cleaning tank are disposed adjacent to each other in the lateral direction, and the steam generation tank is a first cleaning tank with respect to the second cleaning tank inside the processing chamber. A three-tank configuration arranged adjacent to the opposite side can be employed.

  In this case, for example, the position directly above the first cleaning tank is set as a loading position where the work is loaded via the loading-side communication port, and the position directly above the steam generation tank is set via the unloading-side communication port. The unloading position where the workpiece is unloaded. In addition, for example, as a transport mechanism, a carry-in mechanism for carrying a work from the carry-in chamber to the carry-in position via a carry-in side communication port, and a work carried into the carry-in position, a cooling drying region, a steam cleaning region, and a first A first lifting mechanism for transporting the workpiece to the cleaning tank, a second lifting mechanism for transporting the workpiece to the steam cleaning area and the second cleaning tank, a third lifting mechanism for transporting the workpiece to the steam cleaning area, the cooling drying area, and the unloading position; An unloading mechanism for unloading the workpiece from the unloading position to the unloading chamber via the unloading-side communication port, and the workpiece in the steam cleaning region in the lateral direction to sequentially move from the first lifting mechanism to the second and third lifting mechanisms. A horizontal transfer mechanism can be arranged.

  Here, a work loading / unloading area can be provided above the cooling / drying area inside the processing chamber. In this case, in the workpiece loading / unloading area, the position directly above the first cleaning tank is set as a loading position where the workpiece is loaded via the loading-side communication port, and the position directly above the steam generation tank is defined as the loading-side communication port. It can be set as the unloading position where the workpiece is unloaded via

  In this case, a drying region is provided between the unloading position and the unloading side communication port in the loading / unloading region, and the workpiece is transported from the unloading position to the drying region by the unloading mechanism and dried, and then unloaded. Also good.

  Next, in the present invention, the gas in the carry-in / carry-out chamber may be circulated while cooling through a heat exchanger. In this way, the solvent vapor that has entered the loading / unloading chamber (unloading chamber) together with the workpiece pulled up from the cooling / drying region to the loading / unloading chamber (unloading chamber) is cooled and liquefied in the heat exchanger, thereby reliably collecting. can do.

  In the present invention, a fluorine-based solvent can be used as the solvent. Although the fluorine-based solvent is more expensive than other solvents, according to the method of the present invention, loss of the solvent to the outside can be reduced, so that the running cost can be reduced as compared with the conventional case.

  Further, when a plurality of cleaning tanks are arranged in the processing chamber, for example, the first cleaning tank is used as a cleaning tank that performs cleaning using a hydrocarbon-based cleaning agent, and the second cleaning tank is used as a fluorine-based cleaning agent. It can be set as the washing tank which wash | cleans using.

  Here, in order to clean the workpieces before being carried into the processing chamber via the loading / unloading outlet, at least one preceding-stage washing tank can be arranged to constitute a multi-tank type work washing apparatus. . In this case, for example, the front-side cleaning tank is a cleaning tank that cleans the workpiece using a hydrocarbon-based solvent, and the cleaning tank in the processing chamber is a cleaning tank that cleans the workpiece using a fluorine-based solvent. Can do.

Next, in the apparatus of the present invention, as an inner door opening / closing mechanism for opening and closing the inner door, a communication port (loading side communication port, unloading side communication port) between the unloading / loading chamber (loading chamber, unloading chamber) and the processing chamber. It is possible to use an inner door that is slidable between a shut-off position that shuts off and an open position that opens the communication port. In this case, the edge portions on both sides of the inner door are inclined edge portions that are inclined at an acute angle with respect to the forward direction from the open position to the blocking position, and both sides of the communication port where the inclined edge portions of the inner door at the blocking position face each other. It is desirable that the opening edge portion of the above has a complementary inclined surface shape that can be ridden while the inclined edge portion is in contact.

  When the inner door is closed, the rider rides with the inclined edge portions on both sides of the inner door in contact with the opening edge portions on both sides of the communication port. By the engagement between the inclined surfaces of these edge portions, the outer peripheral edge portion of the inner door is reliably pressed against the opening edge portion of the communication port. There is no backlash, and the communication port is reliably cut off.

  The workpiece cleaning device is equipped with a solvent tank that replenishes the solvent in the cleaning chamber, a water separator that recovers the condensed and liquefied solvent in the cooling and drying area, and separates and regenerates moisture from the recovered solvent. The

It is the front block diagram, the side block diagram, and the plane block diagram which show the internal structure of the 1 tank type workpiece | work washing apparatus to which this invention is applied. It is a piping system diagram of a work washing device. It is a schematic block diagram of a workpiece | work washing | cleaning apparatus, explanatory drawing which shows an example of cleaning operation | movement, and explanatory drawing which shows another example of arrangement | positioning of a carrying in / out chamber and a communicating port. It is the front view, side view, and top view which show the raising / lowering mechanism of a workpiece | work washing apparatus. It is the front view which shows another example of an raising / lowering mechanism, explanatory drawing when it sees from the direction of arrow b, description when it sees from the direction of arrow c, and explanatory drawing when it sees from the direction of arrow d. It is the top view, front view, and side view which show the outer door opening-and-closing mechanism of the carrying in / out port of a workpiece | work washing apparatus. It is explanatory drawing which shows another example of an outer door opening / closing mechanism. It is the top view, front view, and side view which show the inner door opening / closing mechanism of a workpiece | work washing apparatus. It is the block diagram and operation | movement explanatory drawing which show the 2 tank type workpiece | work washing apparatus to which this invention is applied. It is the block diagram and operation | movement explanatory drawing which show the 3 tank type workpiece | work washing apparatus to which this invention is applied. It is the block diagram and operation | movement explanatory drawing which show the 4 tank type workpiece | work washing apparatus to which this invention is applied. It is a block diagram which shows the workpiece | work washing apparatus to which this invention is applied.

  DESCRIPTION OF EMBODIMENTS Embodiments of a single tank type and a multi-tank type work cleaning apparatus to which the present invention is applied will be described below with reference to the drawings. These embodiments show application examples of the present invention, and are not intended to limit the present invention to these embodiments. Further, in each of the following embodiments, a fluorinated solvent is used as the solvent, but the usable solvent may be a solvent other than the fluorinated solvent, such as a hydrocarbon solvent, an alcohol solvent, and the like. The following volatile non-aqueous solvents can be used.

[Embodiment 1]
FIG. 1A, FIG. 1B, and FIG. 1C are a front configuration diagram, a side configuration diagram, and a plan configuration diagram showing the internal configuration of the workpiece cleaning apparatus according to the first embodiment. FIG. 2 is a piping system diagram of the workpiece cleaning apparatus. First, referring to FIG. 1, the workpiece cleaning device 1 includes a device housing 2 having a rectangular parallelepiped shape as a whole. An operation display panel 3 is attached to one end portion of the front surface of the apparatus housing 2, and a work loading / unloading port 4 having a rectangular outline is opened at a central upper end portion of the front surface. The carry-in / out port 4 can be opened and closed by an outer door 6 operated by an outer door opening / closing mechanism.

  A work loading / unloading chamber 8 is disposed inside the apparatus housing 2 at the front portion of the upper portion thereof. A processing chamber 9 extending in the vertical direction is disposed below the loading / unloading chamber 8. The carry-in / out port 4 is open to the carry-in / out chamber 8. The loading / unloading chamber 8 and the processing chamber 9 communicate with each other via a communication port 50. The communication port 50 can be opened and closed by an inner door operated by an inner door opening / closing mechanism. In this example, the inner door opening / closing mechanism 10 is disposed as the inner door opening / closing mechanism, and the inner door opening / closing mechanism 10 opens and closes the communication port 50 by sliding the inner door 11 disposed as the inner door.

  Inside the lower processing chamber 9, as can be seen from FIG. 2, a cleaning tank 12 for storing the solvent is disposed on the lowermost side. An upper side of the solvent liquid surface 13 of the cleaning tank 12 is a steam cleaning region 14. Above the steam cleaning region 14 is a cooling and drying region 16 defined by a cooling coil 15 wound in a rectangular frame shape. In this example, a fluorine-based cleaning liquid is used as a solvent.

  On one side of the processing chamber 9 in the apparatus width direction, a steam generation tank 17 also serving as a distillation apparatus is disposed. The steam generation tank 17 is externally attached to the processing chamber 9, and an upper end portion thereof communicates with the steam cleaning region 14 in the processing chamber through a communication port formed on the side surface of the processing chamber 9. On the opposite side of the processing chamber 9 from the steam generation tank 17, an overflow tank 63 for collecting the solvent overflowed from the cleaning tank 12 is attached. A water separator 18 is disposed on the side of the overflow tank 63.

  As shown in FIG. 1, a fluorine-based tank 21 storing a fluorine-based cleaning liquid as a solvent is disposed on one side in the apparatus width direction on the back side in the apparatus housing 2, and a refrigerator is provided below the tank. 22 is arranged. On the other side in the apparatus width direction, a heat exchanger 23 for circulating the gas in the carry-in / out chamber 8 while cooling is disposed.

  A lifting mechanism 25 (work transfer mechanism) is attached to the top surface of the apparatus housing 2. The lifting mechanism 25 includes a power cylinder 26 that is vertically attached to the top surface of the device housing 2 in a downward state. A telescopic rod 27 extending downward from the power cylinder 26 extends through the processing container 7 into the loading / unloading chamber 8. A cradle 29 for hanging a rectangular parallelepiped work conveyance basket 28 is suspended from the lower end of the telescopic rod 27. Instead of the lifting mechanism 25, various lifting mechanisms can be used. For example, as will be described later (see FIG. 4B), an elevating mechanism composed of a rack and pinion can be used.

  Further description will be made with reference to FIG. 2. A workpiece to be cleaned is put into a workpiece carrying basket 28 (basket), carried into a carry-in / out chamber 8 from a carry-in / out port 4, and passed to an elevating mechanism 25. By the elevating mechanism 25, the work transport basket 28 can be lowered from a position in the carry-in / out chamber 8 to a position in the cleaning tank 12 through the communication port 50. A certain amount of solvent is stored in the cleaning tank 12. When the solvent liquid level 13 falls below the set level, the solvent is replenished from the fluorine-based tank 21 through the replenishment line 31, and the level of the solvent liquid level 13 is kept constant. The upper space in the fluorine-based tank 21 and the internal space above the cleaning tank 12 in the processing chamber 9 communicate with each other via a communication line 68a so that an internal pressure difference does not occur.

An ultrasonic transducer 32 is disposed at the bottom of the cleaning tank 12. Ultrasonic cleaning can be performed on the workpiece (not shown) of the workpiece transport basket 28 at a position immersed in the storage solvent of the cleaning tank 12. The solvent overflowing from the cleaning tank 12 is collected in the overflow tank 63. In the overflow tank 63, the solvent overflowed from the washing tank 12 is cooled and sucked into the reflux line 34 by the pump 33 from the communication port opened on the bottom surface of the overflow tank 63, and foreign matter (dirt) is removed through the filter 35. Then, it returns to the washing tank 12. A recovery port 63 a is formed at a predetermined height position of the overflow tank 63. A part of the solvent that flows from the washing tank 12 to the overflow tank 63 is supplied to the steam generation tank 17 through the recovery port 63a.

  Solvent vapor generated by heater heating in the steam generation tank 17 is supplied to the steam cleaning region 14 on the upper side of the cleaning tank 12. After the ultrasonic cleaning, the workpiece is lifted to the steam cleaning region above the solvent liquid level 13 of the cleaning tank 12 and subjected to steam cleaning. A part of the vapor solvent flows into the recovery section 19a disposed on the side of the steam cleaning region 14, and is cooled and condensed by the cooling coil 19b disposed in the recovery section 19a. The liquefied solvent is recovered by the water separator 18 via a recovery line 19c opened at the bottom of the recovery section 19a.

  The workpiece after the steam cleaning is subjected to a drying process in the cooling drying region 16 thereon. In the cooling and drying region 16, the solvent pulled up together with the work adheres to the cooling coil 15 that surrounds the outer periphery of the cooling and drying region 16 and is cooled and aggregates and liquefies. The solvent adhering to the workpiece is removed and the workpiece is dried. The liquefied solvent flows down to the recovery section 19a and is recovered by the water separator 18 through the recovery line 19c opened at the bottom.

  The water separator 18 is partitioned into first, second, and third tanks 18a, 18b, and 18c. The solvent (hydrogen fluoride solvent) recovered from the recovery line 19c to the water separator 18 flows down to the first tank 18a. The water contained in the solvent that has flowed down to the first tank 18a is separated by the difference in specific gravity and floats on the liquid surface. The solvent from which the water has been separated enters the second tank 18b through the communication port formed on the bottom side of the first tank 18a, overflows from the second tank 18b, and flows down to the third tank 18c. The solvent separated from the water and collected in the third tank 18c is returned to the overflow tank 63 through the communication line 18d opened at the bottom thereof.

  When the inner door 11 is closed after the work transfer basket 28 is pulled up from the cooling / drying region 16 to the upper loading / unloading chamber 8, the loading / unloading chamber 8 is shut off from the lower processing chamber 9. In this sealed state, the gas in the carry-in / out chamber 8 is circulated through the circulation line 37 while being cooled by the blower fan 36 via the heat exchanger 23. Even if there is a vapor solvent pulled up to the carry-in / carry-out chamber 8 together with the workpiece by this circulating flow, such vapor solvent is cooled and condensed and liquefied in the heat exchanger 23, and passes through the recovery line 23a and the recovery line 19c. And recovered in the water separator 18. Therefore, the vapor solvent is reliably removed and does not leak outside. After that, when the outer door 6 is opened, the work transport basket 28 on which the work after washing and drying is mounted can be carried out to the outside through the carry-in / out opening 4.

  A refrigerant circulation line 38 from the refrigerator 22 is drawn through the heat exchanger 23, the cooling coil 15 in the cooling and drying region 16, the cooling coil 19b, the cooling coil in the water separator 18, and the fluorine tank 21. These parts are cooled.

(Example of cleaning operation)
FIGS. 3A and 3B are a configuration diagram and an operation explanatory diagram for illustrating an example of a cleaning operation of the workpiece cleaning apparatus 1 having the above-described configuration. Referring to these drawings, first, the outer door 6 is opened with the inner door 11 blocking the communication port 50 between the loading / unloading chamber 8 and the processing chamber 9, and the loading / unloading port 4 is used. Then, the work transport basket 28 loaded with the work to be cleaned is carried in, and the work transport basket 28 is placed on the work cradle 29 of the elevating mechanism 25 waiting in the carry-in / out chamber 8 (FIG. 3B). ): Basket input).

Next, the outer door 6 is closed (FIG. 3B: outer door closed), and then the inner door 11 is slid to release the communication port 50 and the communication port 50 is opened (FIG. 3B). ): Open the inner door). And the work conveyance basket 28 in which the work carried in the carry-in / out chamber 8 is mounted is moved by the elevating mechanism 25 through the communication port 50 of the cleaning tank 12 disposed on the bottom side of the processing chamber 9. It is lowered to a position where it is immersed in the solvent (FIG. 3 (b): descending).

  In this state, the workpiece is subjected to ultrasonic cleaning for a predetermined time (FIG. 3B: ultrasonic cleaning). After the ultrasonic cleaning, the lifting / lowering mechanism 25 lifts the workpiece transport basket 28 on which the workpiece is mounted to a position above the solvent liquid level 13 (FIG. 3B: rising). The workpiece is held in the steam cleaning region 14 for a predetermined time, and the workpiece is subjected to steam cleaning (FIG. 3B: vapor cleaning).

  After the steam cleaning, the lifting mechanism 25 lifts the workpiece carrying basket 28 on which the workpiece is mounted from the steam cleaning region 14 to the cooling and drying region 16 provided on the upper side (FIG. 3B: ascent). By holding the work in the cooling and drying region 16 for a predetermined time, the work is dried after the solvent is removed (FIG. 3B: drying).

  Thereafter, the workpiece is pulled up into the loading / unloading chamber 8 through the communication port 50 (FIG. 3B: ascent). Thereafter, the inner door 11 is moved, the communication port 50 is closed, and the loading / unloading chamber 8 is shut off from inside and outside (FIG. 3B: the inner door is closed). In this state, the gas in the carry-in / carry-out chamber 8 is circulated through the heat exchanger 23 by the blower fan 36 for a predetermined time. Thereby, the solvent contained in the gas is cooled and liquefied and recovered in the heat exchanger 23 (FIG. 3B: recovery).

  Thereafter, the outer door 6 is slid by the outer door opening / closing mechanism 5 to open the carry-in / out port 4 (FIG. 3B: outer door open). Thereafter, the workpiece transporting basket 28 on which the workpiece after the cleaning and drying process is mounted is pulled forward from the receiving table 29 and is carried out of the apparatus from the loading / unloading outlet 4 (FIG. 3B: basket removal).

  In this example, the work is carried in / out from the same position, and the carry-in / out chamber and the processing chamber are connected by a single communication port. Instead, as shown in FIG. 3 (c1), the carry-in / out port is divided into a work carry-in port and a work carry-out port, and a carry-in side outer door and a carry-out port that opens and closes the carry-in port as outer doors. An unloading-side outer door that opens and closes can be arranged. In addition, as shown in FIG. 3 (c2), the communication port is divided into two: a carry-in communication port for transporting the work to the processing chamber and a carry-out communication port for unloading the work from the processing chamber. A carry-in side door that opens and closes the side communication port and a carry-out side door that opens and closes the carry-out side communication port may be arranged. Further, as shown in FIG. 3 (c3), the carry-in / out port is divided into a work carry-in port and a work carry-out port, and a carry-in side outer door that opens and closes the carry-in port and a carry-out side outside that opens and closes the carry-out port. While arranging a door, it is also possible to divide the communication port into two, a loading side communication port and a loading side communication port, and to arrange a loading side outer door that opens and closes the loading port and a loading side outer door that opens and closes the loading port. .

(Elevating mechanism)
4A (a) is a front view showing an example of the elevating mechanism 25 (work transfer mechanism), FIG. 4A (b) is a side view thereof, and FIG. 4A (c) is a plan view showing the cradle 29 thereof. is there. As described above, the lifting mechanism 25 includes the power cylinder 26, the telescopic rod 27, and the cradle 29 attached to the lower end of the telescopic rod 27.

The cradle 29 has an L shape in a side view, opens forward and upward, and triangular side plates are attached to both sides. The bottom surface of the cradle 29 is defined by rollers 29a attached in parallel in the width direction at regular intervals in the front-rear direction. By placing the workpiece conveyance basket 28 on the roller 29a and pushing it backward from the front, the workpiece conveyance basket 28 is set on the cradle 29, and the workpiece conveyance basket 28 can be taken out from the cradle 29 by pulling it forward.

  Guide rollers 29b are arranged at regular intervals on the left and right rear edges of the cradle 29 in the vertical direction. Within the processing container 7, roller guide rails 29 c are arranged on the left and right in the cooling / drying region 16 and the carry-in / carry-out chamber 8 in parallel in the vertical direction. The cradle 29 is moved up and down by being guided by the roller guide rail 29c.

(Another example of lifting mechanism)
4B (a) is a front view showing another configuration example of the lifting mechanism 25, and FIGS. 4B (b) to 4B (d) are explanatory diagrams when viewed from the positions indicated by arrows b to d, respectively. It is. The elevating mechanism 25A of this example is a rack and pinion type elevating mechanism, and includes a rack 101 having a predetermined length vertically attached to the back surface of the cradle 29 and a pinion 102 engaged with the rack 101. . The pinion 102 meshes with the rack 101 at a height position in the middle of the rack 101 in the vertical direction. The pinion 102 is coaxially fixed to the output shaft of the rotary actuator 104 composed of a lifting motor 103 and a speed reducer attached to the apparatus base.

  When the pinion 102 is rotated by the rotary actuator 104, the rack 101 moves up and down, and the cradle 29 attached to the rack 101 moves up and down along the guide. A cylindrical cover 105 is vertically attached to the top surface of the apparatus base, and a rack 101 that protrudes upward from the top surface of the apparatus base ascends and descends inside the cover 105 when raised.

  The lifting mechanism shown in FIGS. 4A and 4B can be used as a lifting mechanism for the workpiece transport basket in the workpiece cleaning apparatus according to Embodiments 2 to 5 described later.

(Cage rotation mechanism)
A basket rotation mechanism 110 is attached to the cradle 29 shown in FIG. 4B. The basket rotation mechanism 110 is a mechanism that rotates a cylindrical rotary basket 28A used as a work conveyance basket around its central axis. In the figure, a rectangular parallelepiped workpiece transporting basket 28 is also indicated by an imaginary line. The basket rotation mechanism 110 includes a spline shaft 112 that is vertically attached to one side surface of the cradle 29 so as to be rotatable by a bearing 111. The lower end of the spline shaft 112 is connected to a rotary shaft 114 disposed horizontally on the bottom surface of the cradle 29 via a pair of bevel gears 113. On the bottom surface of the cradle 29, a rotating shaft 114 is disposed on the rear side, and on the front side, a horizontal shaft 115 is disposed in parallel with the rotating shaft 114.

  Sprockets 116 are coaxially attached to both ends of the rear rotation shaft 114, and support rollers 117 are attached to both ends of the front horizontal shaft 115 in a rotatable state. Engagement rings 118 in which engagement holes (grooves) that can be engaged with the sprocket 116 are formed in the circumferential direction are attached to both ends of the work conveying basket 28A.

  When the workpiece conveying basket 28A is placed on the cradle 29, the sprocket 116 is engaged with each of the engagement rings 118, and each of the engagement rings 118 is placed on each of the support rollers 117.

  The upper end portion of the spline shaft 112 is connected to the output shaft of the rotary actuator 119 composed of a motor and a speed reducer via spline coupling. The rotary actuator 119 is mounted on the top surface of the apparatus base. Further, a cylindrical elongated cover 120 is vertically attached to the top surface of the apparatus base, and the spline shaft 112 moves up and down inside the cover 120.

  When the rotary actuator 119 is driven to rotate, the rotation is transmitted to the spline shaft 112 and the spline shaft 112 rotates. The rotation of the spline shaft 112 is transmitted to the rotation shaft 114 of the cradle 29 via a pair of bevel gears 113. When the rotating shaft 114 rotates, the sprocket 116 also rotates together, and the workpiece conveying basket 28A to which the engagement ring 118 engaged with the sprocket 116 is attached rotates. Cleaning can be performed while rotating the work transport basket 28A in a state where the work mounted on the work transport basket is immersed in the cleaning liquid stored in the cleaning tank.

(Horizontal transport mechanism)
Here, in Embodiments 2 to 5 described later, the workpiece transfer basket is transferred in the lateral direction in the processing chamber of the workpiece cleaning apparatus. As the horizontal conveyance mechanism used for this purpose, a mechanism similar to the above-described cage rotation mechanism can be used.

  If it demonstrates with reference to FIG. 4B, in the case of a horizontal conveyance mechanism, a chain conveyor is used as the receiving stand 29, for example. A chain drive sprocket of the chain conveyor is connected to a vertically extending spline shaft 112 via a transmission mechanism such as a pair of bevel gears. By rotating the spline shaft 112 by means of the rotary actuator 119, the workpiece transfer basket placed on the chain conveyor can be transferred in the lateral direction. Further, since the spline shaft 112 can be lifted and lowered together with the chain conveyor, the chain conveyor that is lifted and lowered by the lifting mechanism can be driven.

(Outer door opening / closing mechanism)
5A (a), (b), and (c) are a plan view, a front view, and a side view showing an example of the outer door opening / closing mechanism 5 of the carry-in / out port 4. FIG. The opening / closing mechanism 5 slides the outer door 6 having a rectangular outline by the power cylinder 41 along the guide rail 42 fixed to the top surface of the apparatus housing 2 in the apparatus width direction. In this example, sliding is performed from an open position 6A where the carry-in / out port 4 shown in the figure is opened to a closed position 6B where the carry-in / out port 4 is closed. On both sides of the outer door 6, a pair of upper and lower engaging plates 43 and 44 extending in the width direction are attached. A pair of upper and lower locking plungers 45 and 46 (locking cylinders) are attached to the outer side surfaces on both sides of the loading / unloading chamber 8, and their telescopic rods protrude horizontally forward.

  Engagement grooves 43a, 44a are formed at the front ends of the left and right engagement plates 43, 44 on the outer door 6 side. When the outer door 6 moves from the open position 6A to the closed position 6B, each engagement groove 43a, The distal end portions 45a and 46a of the telescopic rods of the locking plungers 45 and 46 are fitted into 44a from the side. After sliding the outer door 6 to the closed position 6B, the elastic members 47 for sealing are attached to the four circumferences of the carry-in / out port 4 by pulling the telescopic rods of the locking plungers 45 and 46. Pressed against. Thereby, the loading / unloading exit 4 is sealed in an airtight state. To open the outer door 6, the locking plungers 45 and 46 are pushed out to release the lock, and then the outer door 6 is returned to the opening position 6 </ b> A along the guide rail 42 by the power cylinder 41.

(Another example of an outer door opening / closing mechanism)
FIG. 5B is an explanatory diagram showing an example of a double-acting air cylinder that can be used in place of the locking plungers 45 and 46 arranged in pairs on the left and right sides for locking the outer door 6. .

In this figure, as an example, a pair of double-acting air cylinders 130 used instead of the pair of locking plungers 46 are shown. The double-acting air cylinder 130 includes a cylinder body 131 and a rod 132 that extends through the cylinder body 131. An air pipe 135 for supplying compressed air in the direction 133 for moving the rod 132 forward and an air pipe 136 for supplying compressed air in the direction 134 for moving the rod 132 backward are connected to the cylinder body 131.

  An engaging portion 137 that can be engaged from the side with respect to the engaging groove 44a at the tip of one engaging plate 44 of the outer door 6 is provided at the tip of the rod 132 protruding forward from the cylinder body 131. ing. A spring receiver 139 is attached to the rear end portion of the rod 132 protruding rearward from the cylinder body 131 by a rod nut 138. A spring receiver 140 is also attached to the end face on the rear side of the cylinder body 131. Between these spring receivers 139 and 140, a compression coil spring 142 is mounted in a compressed state so as to surround the rod 132 coaxially. Therefore, the rod 132 of the air cylinder 130 is always urged in the backward direction by the compression coil spring 142.

  For example, the air cylinder 130 operates as follows. In a state where the outer door 6 is in the open position 6A, the rod 132 is in the most retracted state by the compression coil spring 142. When closing the outer door 6, the rod 132 of the air cylinder 130 is pushed out to the compression coil spring 142 against the spring force to the forward position. When the outer door 6 slides and closes, the engaging portion 137 at the tip end of the rod 132 at the protruding position engages with the engaging groove 44a of the engaging plate 44 from the lateral direction.

  After the outer door 6 slides to the closed position 6B, the air cylinder 130 is driven to retract the rod 132 backward. As a result, the four peripheral portions of the outer door 6 are pressed against the elastic member 47 for sealing attached to the four periphery of the carry-in / out port 4, and the carry-in / out port 4 is sealed in an airtight state. Conversely, the operation of opening the outer door 6 may be performed by pushing the rod 132 forward and then returning the outer door 6 along the guide rail 42 to the opening position 6A by the power cylinder 41.

  The lock mechanism using the air cylinder 130 holds the outer door 6 in a locked state by the spring force of the compression coil spring 142 when an emergency such as a power failure or failure occurs and the air cylinder 130 becomes inoperable. it can. That is, in a state where the outer door 6 is closed and locked, a power failure, failure, etc. occurs, the air cylinder 130 becomes inoperable, and the supply of compressed air for urging the rod 132 in the retracting direction stops. is there. In the locked state, the spring force of the compression coil spring 142 acts on the rod 132 as the urging force for locking the outer door 6 in addition to the urging force by the compressed air. Therefore, in an emergency, the locked state (sealed state) of the outer door 6 can be maintained by the urging force of the spring force, and solvent leakage to the outside can be prevented.

  The outer door opening / closing mechanism shown in FIGS. 5A and 5B can be used as the outer door opening / closing mechanism in the workpiece cleaning apparatus according to Embodiments 2 to 5 described later.

(Inner door opening / closing mechanism)
6A, 6 </ b> B, and 6 </ b> C are a plan view, a front view, and an example of an inner door opening / closing mechanism 10 that blocks the communication port 50 between the processing chamber 9 and the upper loading / unloading chamber 8. It is a side view. The inner door opening / closing mechanism 10 includes an inner door 11 having a size capable of sealing the rectangular communication port 50 as an inner door. The inner door 11 is attached to the inner door mounting frame 51.

  A pair of guide rails 52 extending in parallel to the apparatus width direction are attached to both sides of the communication port 50 (front and rear edges in the apparatus front-rear direction). A guide roller 56 is attached to the inner door attachment frame 51, and the guide roller 56 can roll along the guide rail 52. A rack 53 extending in the inner door moving direction (device width direction) is attached to the inner door mounting frame 51. A pinion 54 is engaged with the rack 53, and the pinion 54 is rotated by a motor 55 for opening and closing an inner door attached to the device housing 2 side in a downward posture.

  When the pinion 54 is rotated by the motor 55, the inner door mounting frame 51 slides along the guide rail 52. Thereby, the inner door 11 attached to the inner door attachment frame 51 can be moved from the open position 11A to the blocking position 11B where the communication port 50 is blocked.

  The inner door 11 includes an inner door main body plate portion 11a having a rectangular outline, and an edge plate portion 11b in which the edges on both sides of the inner door main body plate portion 11a are bent upward at a right angle. The inner door main body plate portion 11a is an inclined plate that is inclined upward at an acute angle in the forward direction, which is the direction in which the inner door 11 closes. On the other hand, on both sides of the communication port 50, there are formed opening edge portions 50a having complementary inclined surface shapes that run in a state where the inclined edge portions on both sides of the inner door main body plate portion 11a are in contact with each other from above. Yes.

  The vertical width of the guide rail 52 is set to be slightly larger than the outer diameter of the guide roller 56. As a result, when the inner door 11 reaches the blocking position 11B and rides on the opening edge portions 50a on both sides, the entire inner door 11 can be lifted slightly upward.

  In the inner door opening / closing mechanism 10 having this configuration, when the inner door 11 is slid from the opening position 11A toward the blocking position 11B, the inclined edge portions on both sides thereof hit the opening edge portions 50a on both sides of the communication port 50, and the opening It will be in the state which got on the edge part 50a. As a result, the inclined edge portions on both sides of the inner door 11 are pressed against the opening edge portions 50a on both sides of the communication port 50 so as to make sure contact. By the inner door 11, the inside of the processing container 7 can be reliably blocked up and down. Further, between the inner door 11 and the communication port 50, for example, even if there is an assembling error in the vertical direction, the backlash caused by such assembling error can be removed by the engagement of both inclined surfaces, The communication port 50 can be reliably shut off.

[Embodiment 2]
FIG. 7A is a schematic configuration diagram showing a workpiece cleaning apparatus according to Embodiment 2 of the present invention, and FIG. 7B is an explanatory diagram showing an example of the operation thereof. The workpiece cleaning apparatus shown in these drawings is a two-tank type workpiece cleaning apparatus in which a first tank having a cleaning tank and a second tank having a steam generation tank are arranged in a processing chamber.

(overall structure)
The configuration of the workpiece cleaning apparatus 200 will be described with reference to FIG. The workpiece cleaning apparatus 200 includes a carry-in chamber 201 for carrying in a workpiece to be cleaned and a carry-out chamber 202 for carrying out the workpiece after washing and drying. The carry-in chamber 201 and the carry-out chamber 202 are adjacently arranged in the apparatus width direction, for example.

  The carry-in chamber 201 includes a carry-in entrance 204. The carry-in entrance 204 is formed on the side surface of the carry-in chamber 201 opposite to the carry-out chamber 202. A work transfer basket 203 (basket) loaded with a work can be carried into the carry-in chamber 201 from the horizontal direction via the carry-in entrance 204. The carry-in entrance 204 is blocked by a carry-in side outer door 205. The carry-in side outer door 205 can be opened and closed by an unillustrated outer door opening / closing mechanism.

  On the side of the carry-out chamber 202 opposite to the carry-in chamber 201, a carry-out port 206 is formed through which a work carrying basket 203 loaded with a work can be carried out in the horizontal direction. The carry-out port 206 is blocked by the carry-out side outer door 207. The carry-out side outer door 207 can be opened and closed by an unillustrated outer door opening / closing mechanism. As the outer door opening / closing mechanism of the carry-in side outer door 205 and the carry-out side outer door 207, for example, the outer door opening / closing mechanism shown in FIG. 5A can be used.

  A processing chamber 208 is disposed below the carry-in chamber 201 and the carry-out chamber 202. The carry-in chamber 201 and the processing chamber 208 communicate with each other via a carry-in side communication port 209 that can transport the workpiece transport basket 203 in the vertical direction. The carry-in side communication port 209 is blocked by the carry-in side inner door 210. The carry-in side inner door 210 can be opened and closed by an inner door opening / closing mechanism (not shown).

  Similarly, the unloading chamber 202 and the processing chamber 208 communicate with each other via an unloading side communication port 211 that can transfer the workpiece transfer basket 203 in the vertical direction. The carry-out side communication port 211 is blocked by the carry-out side inner door 212. The unloading-side inner door 212 can be opened and closed by an unillustrated inner door opening / closing mechanism. As the inner door opening / closing mechanism, for example, the inner door opening / closing mechanism shown in FIG. 6 can be used.

  A cleaning tank 213 for storing a solvent is disposed at a position below the carry-in side communication port 209 in a portion on the bottom side inside the processing chamber 208. Next to the cleaning tank 213, a steam generation tank 214 is disposed at a position below the carry-out side communication port 211. The solvent overflowed from the cleaning tank 213 flows down to the steam generation tank 214. In the steam generation tank 214, the solvent is heated by an internal heater 215 to generate a steam solvent.

  Inside the processing chamber 208, there is a cooling coil 217 wound in a cylindrical shape in the vertical direction along the peripheral surface of the processing chamber at a predetermined height from the solvent level of the cleaning tank 213 and the steam generation tank 214. Has been placed. Inside the processing chamber 208, a region between the solvent liquid level and a position near the lower end of the cooling coil 217 is a steam cleaning region 218. A steam solvent generated in the lower steam generation tank 214 is supplied to the steam cleaning area 218, and the workpiece is subjected to steam cleaning.

  On the upper side of the steam cleaning region 218, the region between the position near the lower end of the cooling coil 217 and the top surface of the processing chamber 208 where the carry-in side communication port 209 and the carry-out side communication port 211 are formed is a cooling and drying region 219. It has become. The vapor solvent rising from the lower steam cleaning region 218 to the upper cooling drying region 219 adheres to the cooling coil 217 and is cooled and liquefied. Since the vapor solvent adhering to the workpiece moves to the cooling coil 217 side and is cooled, the workpiece is dried in the cooling and drying region. The liquefied solvent is recovered by the water separator 220 and regenerated as in the case of the first embodiment. The regenerated solvent is returned to the cleaning tank 213.

  The carry-out chamber 202 is provided with a solvent recovery unit 221 that circulates while cooling the internal gas and recovers the solvent vapor contained in the gas. As in the case of Embodiment 1, the solvent recovery unit 221 can be configured to include a heat exchanger and a blower fan. The solvent recovered here is recovered by the water separator 220 and regenerated.

  On the other hand, the workpiece cleaning apparatus 200 includes a receiving table 223 for transferring a workpiece transfer basket 203 on which a workpiece is mounted, and a transfer mechanism that transfers the workpiece along a transfer path in which the receiving table 223 is set. The transport mechanism can be configured to include, for example, a carry-in lifting mechanism, a lateral transport mechanism, and a carry-out lifting mechanism.

  For example, the carry-in lifting mechanism lifts and lowers a cradle 223 formed of a chain conveyor along a path indicated by arrows 232 and 233. In the steam cleaning region 218, the horizontal transfer mechanism moves the workpiece transfer basket 203 horizontally along the path indicated by the arrow 234, and from the cradle 223 on the carry-in lift mechanism side to the carry-out lift mechanism side. For example, it is handed over to a cradle 224 composed of a chain conveyor. The carry-out lifting / lowering mechanism raises / lowers the cradle 224 from the position of the steam cleaning region 218 directly above the steam generation tank 214 to the carry-out chamber 202 as indicated by an arrow 235.

  In this example, the workpiece transfer basket 203 is moved horizontally as indicated by an arrow 231 in FIG. 7A and delivered to the receiving platform 223 that is waiting in the carry-in chamber 201 via the carry-in entrance 204. Is done manually. A carry-in operation may be performed by arranging a carry-in mechanism such as a chain conveyor. Similarly, in this example, the operation of manually transporting the work transport basket 203 placed on the cradle 224 in the transport chamber 202 and transporting it from the transport outlet 206 as indicated by an arrow 236 is performed manually. . A carry-out operation may be performed by arranging a carry-out mechanism such as a chain conveyor.

(Example of operation)
FIG. 7B is an explanatory diagram showing an example of a cleaning operation procedure of the workpiece cleaning apparatus 200 having the above configuration. When the workpiece transfer basket is delivered from the first tank side to the second tank side so that the processing chamber 208 is not connected to the outside through the carry-in chamber 201 and the carry-out chamber 202. The tact time is appropriately set so that no time loss occurs, and processing is performed in parallel on each side of the first and second tanks. The following operation procedure is an example, and is not limited to this operation procedure.

  First, in the state where the loading side inner door 210 is closed, the loading side outer door 205 is opened, and the workpiece transfer basket 203 loaded with the workpiece to be cleaned is loaded via the loading port 204. Then, it is placed on the cradle 223 waiting in the carry-in chamber 201 (first tank: basket supply material).

  Next, the loading side outer door 205 is closed (first tank: outer door closed), and then the loading side inner door 210 is opened (first tank: inner door opened). Then, the work transport basket 203 carried into the carry-in chamber 201 is lowered to a position where it is immersed in the solvent in the cleaning tank 213 disposed on the bottom side of the processing chamber 208 via the carry-in side communication port 209 (first). 1 tank: descent). In this state, the workpiece is subjected to ultrasonic cleaning for a predetermined time (first tank: ultrasonic cleaning).

  After the ultrasonic cleaning, the workpiece transfer basket 203 is pulled up to the vapor cleaning region 218 above the solvent liquid level 216 (first tank: rising) and held in the vapor cleaning region 218 for a predetermined time to perform the vapor cleaning on the workpiece (first 1 tank: vapor cleaning). Next, the workpiece transport basket 203 is transported laterally from the first tank side to the second tank side and delivered to the cradle 224 waiting at a position directly above the steam generation tank 214 (first tank). : Lower horizontal conveyance, second tank: lower horizontal conveyance). At this position, the workpiece transfer basket 203 is held for a predetermined time, and the workpiece is continuously subjected to steam cleaning (second tank: vapor cleaning).

  The cradle 223 emptied in the steam cleaning region 218 is pulled up to the upper cooling and drying region 219 (first tank: rising), and held here for a predetermined time to dry (first tank: cradle drying). Next, the cradle is lifted from the processing chamber 208 to the upper loading chamber 201 (first tank: raised), the loading side inner door 210 is closed (first tank: inner door closed), and the loading side outer door 205 is opened ( First tank: outer door open), the next workpiece transfer basket is returned to the standby state.

  On the second tank side, the workpiece transfer basket 203 after the steam cleaning is performed in the steam cleaning area 218 is pulled up from the steam cleaning area 218 to the cooling drying area 219 on the upper side (second tank: rising). By holding the work in the cooling and drying region 219 for a predetermined time, the work is dried with the solvent removed (second tank: drying).

After the workpiece is dried, the workpiece transfer basket 203 is pulled up from the processing chamber 208 to the unloading chamber 202 (second tank: raised). Thereafter, the unloading side inner door 212 is closed to block the unloading chamber 202 from the inside and outside (second tank: inner door closed). In this state, the solvent recovery device 221 is driven for a predetermined time to circulate the gas in the carry-out chamber 202 and recover the solvent contained therein (second tank: recovery).
.

  After that, the unloading side outer door 207 is opened, and the work transfer basket 203 on which the work after the cleaning and drying process is mounted is unloaded through the unloading port 206 (second tank: basket removal material). After this, the unloading side outer door 207 is closed (second tank: outer door closed), the unloading side inner door 212 is opened (second tank: inner door open), and the empty cradle 224 is removed from the unloading chamber 202. The steam is lowered to the steam cleaning region 218 in the processing chamber 208 (second tank: lowered), and returns to a state of waiting for receiving the workpiece transfer basket from the first tank side.

[Embodiment 3]
FIG. 8A is a schematic configuration diagram illustrating a workpiece cleaning apparatus according to Embodiment 3 of the present invention, and FIG. 8B is an explanatory diagram illustrating an example of the operation thereof. The workpiece cleaning apparatus 300 shown in these drawings includes, in the processing chamber, a first tank provided with a first cleaning tank, a second tank provided with a second cleaning tank, and a third tank provided with a steam generation tank. This is a three-tank type work cleaning device.

(overall structure)
The configuration of the workpiece cleaning apparatus 300 will be described with reference to FIG. The workpiece cleaning apparatus 300 includes a loading chamber 301 for loading a workpiece to be cleaned and a carry-out chamber 302 for unloading the workpiece after cleaning and drying on both sides of the upper portion of the processing chamber 308.

  The carry-in chamber 301 includes a carry-in entrance 304. The carry-in entrance 304 is formed on the side surface of the carry-in chamber 301 opposite to the processing chamber 308. A work transfer basket 303 loaded with a work can be carried into the carry-in chamber 301 from the horizontal direction via the carry-in entrance 304. The carry-in entrance 304 is blocked by the carry-in side outer door 305. The carry-in side outer door 305 can be opened and closed by an unillustrated outer door opening / closing mechanism. The carry-in chamber 301 and the processing chamber 308 communicate with each other via a carry-in side communication port 309 capable of transporting the work transport basket 303 in the horizontal direction. The carry-in side communication port 309 is blocked by the carry-in side inner door 310. The carry-in side inner door 310 can be opened and closed by an inner door opening / closing mechanism (not shown).

  The side of the carry-out chamber 302 is similarly configured. On the side surface of the unloading chamber 302 opposite to the processing chamber 308, a unloading port 306 that can unload the workpiece transfer basket 303 loaded with the workpiece in the horizontal direction is formed. The carry-out port 306 is blocked by the carry-out side outer door 307. The carry-out side outer door 307 can be opened and closed by an unillustrated outer door opening / closing mechanism. The unloading chamber 302 and the processing chamber 308 communicate with each other via an unloading side communication port 311 that can transfer the workpiece transfer basket 303 in the horizontal direction. The carry-out side communication port 311 is blocked by the carry-out side inner door 312. The unloading side inner door 312 can be opened and closed by an unillustrated inner door opening / closing mechanism.

  As the outer door opening / closing mechanism of the carry-in side outer door 305 and the carry-out side outer door 307, for example, the outer door opening / closing mechanism shown in FIG. 5A can be used. For example, an inner door opening / closing mechanism shown in FIG. 6 can be used as the inner door opening / closing mechanism of the carry-in side inner door 310 and the carry-out side inner door 312.

  The internal structure of the processing chamber 308 will be described. A first cleaning tank 313 for storing a solvent is disposed in a portion on the bottom surface inside the processing chamber 308. Next to the first cleaning tank 313, a second cleaning tank 314 for storing a solvent is also arranged. A steam generation tank 315 is disposed adjacent to the second cleaning tank 314 on the side opposite to the first cleaning tank 313. In this example, the first and second cleaning tanks 313 and 314 are both ultrasonic cleaning tanks, the first cleaning tank 313 is a rough cleaning tank, the second cleaning tank 314 is a finish cleaning tank, and the second The solvent overflowed from the cleaning tank 314 flows into the first cleaning tank 313. In addition, the solvent is supplied to the steam generation tank 315 through a communication port provided at a height position of the prescribed solvent liquid level 316 of the first cleaning tank 313.

  A cooling coil 317 wound in a cylindrical shape in the vertical direction is disposed along the peripheral surface of the processing chamber at a position in the middle of the vertical direction inside the processing chamber 308. Inside the processing chamber 308, a region between the liquid surface of the first and second cleaning tanks 313 and 314 and a position near the lower end of the cooling coil 317 is a steam cleaning region 318. A steam solvent generated in the lower steam generation tank 315 is supplied to the steam cleaning region 318 to perform steam cleaning on the workpiece.

  On the upper side of the steam cleaning region 318, a region between the position near the lower side of the cooling coil 317 and the position near the upper side of the cooling coil 317 is a cooling drying region 319. The vapor solvent rising from the lower steam cleaning region 318 to the upper cooling drying region 319 adheres to the cooling coil 317 and is cooled and liquefied. Since the vapor solvent adhering to the workpiece moves to the cooling coil 317 side and is cooled, the workpiece is dried in the cooling and drying region. The liquefied solvent is recovered by the water separator 320 and regenerated as in the case of the first embodiment. The regenerated solvent is returned to the second cleaning tank 314.

  Inside the processing chamber 308, a region above the cooling and drying region 319 where the cooling coil 317 is disposed is a carry-in / out region 321. In the carry-in / out region 321, a carry-in side communication port 309 is located on the side surface portion on the carry-in chamber 301 side, and a carry-out side communication port 311 is located on the opposite side surface portion.

  Next, in this example, the carry-in chamber 301 and the carry-out chamber 302 are respectively provided with solvent collectors 322 and 323 that circulate while cooling the internal gas and collect the solvent vapor contained in the gas. ing. Similarly to the case of the first embodiment, the solvent recovery units 322 and 323 can be configured to include a heat exchanger and a blower fan. The solvent recovered here is recovered in the water separator 320 and regenerated.

On the other hand, the workpiece cleaning apparatus 300 includes a conveyance mechanism that conveys a workpiece conveyance basket 303 on which a workpiece is mounted along a set conveyance path. A conveyance mechanism is comprised from the following conveyance mechanisms, for example.
Carry-in mechanism: As shown by an arrow 341 in FIG. 8A, the work-carrying mechanism 303 defines a bottom surface of the carry-in chamber 301 from a receiving base 361 formed of a chain conveyor outside the apparatus via a carry-in entrance 304. It is fed into a cradle 362 composed of a chain conveyor or the like. Further, as shown by an arrow 342, the loading chamber 301 waits at a loading position that is an upper position of the first cleaning tank 313 in the loading / unloading area 321 in the processing chamber 308 through the loading-side communication port 309. It is handed over to a cradle 331 composed of a chain conveyor or the like.
First raising / lowering mechanism: In the portion of the first tank in the processing chamber 308, the cradle 331 is raised and lowered as indicated by arrows 343 and 344.
Horizontal transfer mechanism: In the steam cleaning region 318, the workpiece transfer basket 303 is sequentially transferred from the first lifting mechanism to the second lifting mechanism and the third lifting mechanism as indicated by arrows 345 and 346.
Second elevating mechanism: In the portion of the second tank in the processing chamber 308, the cradle 332 made of a chain conveyor or the like is raised and lowered as indicated by arrows 347 and 348.
Third elevating mechanism: At the portion of the third tank in the processing chamber 308, the receiving base 333 made of a chain conveyor or the like is carried in from the position of the steam cleaning region 318 directly above the steam generating tank 315 as indicated by an arrow 349. It is raised and lowered between the carry-out position in the carry-out area 321.
Unloading mechanism: From the cradle 333 at the unloading position in the processing chamber 308 to the cradle 363 formed of a chain conveyor or the like defining the bottom surface of the unloading chamber 302 via the unloading side communication port 311. Is sent out as indicated by arrow 350. Further, the work transporting basket 303 is horizontally unloaded through a carry-out side outer door 307 to a cradle 364 including a chain conveyor, a free roller conveyor and the like outside the apparatus as indicated by an arrow 351.

(Example of operation)
FIG. 8B is an explanatory diagram showing an example of a cleaning operation procedure of the workpiece cleaning apparatus 300 having the above configuration. In order not to form a state in which the processing chamber 308 communicates with the outside through the carry-in chamber 301 and the carry-out chamber 302, the second tank from the first tank side and the third tank from the second tank side. The tact time is set appropriately so that no time loss or the like occurs when the workpiece transport basket is delivered to the side, and the processes are performed in parallel in each unit. The following operation procedure is an example, and is not limited to this operation procedure.

  On the side of the carry-in chamber 301, first, with the carry-in side inner door 310 closed, the carry-in side outer door 305 is opened and a work carrying basket 303 on which a work to be cleaned is mounted is loaded (carry-in chamber: basket). Supply) and close the carry-in side outer door 305 (loading chamber: outer door closed). Next, the loading-side inner door 310 is opened (loading chamber: inner door opened), the workpiece transfer basket 303 is horizontally transferred, and the stand 331 waiting at the loading position of the loading / unloading area 321 in the processing chamber 308 is placed. Delivery (carrying-in chamber: lateral conveyance, first tank: upper-lateral conveyance) and closing the loading-side inner door 310 (carrying-in chamber: inner door closed). In the subsequent carry-in chamber 301, the solvent in the sealed carry-in chamber 301 is circulated while being cooled by the solvent recovery device 322, and the solvent contained in the gas is collected (load-in chamber: recovery). Thereafter, the carry-in side outer door 305 is opened to return to a standby state for accepting the next workpiece (loading chamber: outer door open).

  On the first tank side, after receiving the workpiece transfer basket 303 (first tank: upper horizontal transfer), the workpiece transfer basket 303 is lowered to a position where it is immersed in the solvent of the first cleaning tank 313 (first tank). Tank: descend). In this state, rough ultrasonic cleaning of the workpiece is performed for a predetermined time (first tank: rough ultrasonic cleaning). After the rough ultrasonic cleaning, the workpiece transfer basket 303 is lifted up to the vapor cleaning region 318 above the solvent liquid level 316 (first tank: ascending), and the cradle 332 waiting for the workpiece transfer basket 303 on the second tank side. (First tank: lower horizontal conveyance, second tank: lower horizontal conveyance). The empty cradle 331 is raised to the carry-in position of the upper carry-in / out region 321, the carry-in side inner door 310 is opened, and the next work transfer basket is waiting to be received (first tank: lift / inner door) Open).

  On the second tank side, after receiving the workpiece transfer basket 303 from the first tank side in the steam cleaning region 318 (second tank: lower horizontal transfer), the workpiece transfer basket 303 is transferred to the second cleaning tank 314. (2nd tank: descent | fall). In this state, finish ultrasonic cleaning is performed on the workpiece for a predetermined time (second tank: finish ultrasonic cleaning). After finishing ultrasonic cleaning, the workpiece transfer basket 303 is pulled up to the upper steam cleaning region 318 (second tank: ascending), and the workpiece transfer basket 303 is held in the steam cleaning region 318 for a predetermined time to perform steam cleaning on the workpiece. (Second tank: vapor cleaning). Next, the workpiece transfer basket 303 is transferred in the lateral direction from the third tank side to the third tank side, and delivered to the cradle 333 waiting at a position directly above the steam generation tank 315 (second tank). : Lower horizontal conveyance, third tank: lower horizontal conveyance). The empty cradle 332 waits for the next workpiece transport basket to be delivered at this position.

  On the side of the third tank, the work transfer basket 303 received in the cradle 333 is pulled up from the steam cleaning area 318 to the cooling drying area 319 on the upper side (third tank: rising). By holding the work in the cooling and drying region 319 for a predetermined time, the work is dried after the solvent is removed (third tank: drying). After the workpiece is dried, after the workpiece transport basket 303 is pulled up to the unloading position of the upper loading / unloading area 321, the unloading-side inner door 312 is opened (third tank: rising / inner door opening). After this, the work transport basket 303 is laterally transported and transported to the transport chamber 302. The empty cradle 333 is lowered to the steam cleaning region 318 to return to the standby state of the next work transfer basket 303, and the unloading side inner door 312 is closed (third tank: lowering / inner door closing).

  On the side of the unloading chamber 302, after receiving the work transfer basket 303 and closing the unloading side inner door 312, the solvent is recovered from the unloading chamber 302 by the solvent recovery device 322 (unloading chamber: recovery). Thereafter, the unloading-side outer door 307 is opened (unloading chamber: outer door open), the workpiece transfer basket 303 after washing and drying is unloaded (unloading chamber: basket removal material), and the unloading-side outer door 307 is closed after unloading. (Unloading room: outer door closed).

  In this example, rough ultrasonic cleaning and finishing ultrasonic cleaning are performed. Of course, a cleaning method other than ultrasonic cleaning may be employed. In this example, there are two cleaning tanks, but three or more tanks may be used. For example, three cleaning tanks are arranged, boiling cleaning is performed in the first cleaning tank, ultrasonic cleaning is performed in the second cleaning tank, immersion cleaning is performed in the third cleaning tank, and then steam cleaning and drying are performed. You may make it perform.

[Embodiment 4]
FIG. 9A is a schematic configuration diagram illustrating a workpiece cleaning apparatus according to Embodiment 4 of the present invention, and FIG. 9B is an explanatory diagram illustrating an example of the operation thereof. The workpiece cleaning apparatus shown in these drawings includes a first tank having a first cleaning tank, a second tank having a second cleaning tank, a third tank having a steam generation tank, and a drying chamber. It is a 4 tank type workpiece | work washing apparatus with which the 4th tank part provided with the area | region is arrange | positioned.

(overall structure)
The configuration of the workpiece cleaning device 400 will be described with reference to FIG. The basic configuration of the workpiece cleaning apparatus 400 is the same as that of the third embodiment shown in FIG. Accordingly, corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

  In the workpiece cleaning apparatus 400, one workpiece conveyance basket 303 is retained between the unloading position just above the steam generation tank 315 and the unloading chamber 302 in the loading / unloading region 321 in the upper part of the processing chamber 308 and dried. An area of the drying tank 401 where processing can be performed is provided.

(Example of operation)
As shown in FIG. 9B, the operation procedures in the first tank and the second tank in the workpiece cleaning apparatus 400 having the above-described configuration are the same as those in the third embodiment, and thus the description thereof is omitted. On the side of the third tank, the workpiece transfer basket 303 received in the cradle 333 is held in the steam cleaning region 318 for a predetermined time, and the workpiece is steam cleaned (third tank: vapor cleaning). Next, the workpiece conveyance basket 303 is pulled up to the carry-out position of the upper carry-in / out region 321 via the upper cooling / drying region 319 (third tank: ascending). Thereafter, the work transport basket 303 is handed over to a receiving table 402 formed of a chain conveyor or the like that is transported horizontally and is waiting in the area of the drying tank 401 (third tank: upper horizontal transport). The empty cradle 333 descends to the steam cleaning region 318 and returns to the standby state of the next workpiece transfer basket 303 (third tank: descending).

  The work transport basket 303 moved to the area of the drying tank 401 is held at that position for a predetermined time and subjected to a drying process (drying tank: drying). After drying, the unloading-side inner door 312 is opened (drying tank: inner door opened), and the work transfer basket 303 is horizontally transferred and transferred to the unloading chamber 302.

  On the unloading chamber 302 side, after receiving the workpiece transfer basket 303, the solvent is recovered from the unloading chamber 302 by the solvent recovery device 322 (unloading chamber: recovery). Thereafter, the unloading-side outer door 307 is opened (unloading chamber: outer door open), the workpiece transfer basket 303 after washing and drying is unloaded (unloading chamber: basket removal material), and the unloading-side outer door 307 is closed after unloading. (Unloading room: outer door closed).

[Embodiment 5]
FIG. 10 is a schematic configuration diagram showing a workpiece cleaning system according to a fifth embodiment to which the present invention is applied. The workpiece cleaning system 500 shown in this figure includes a workpiece cleaning apparatus 501 having basically the same configuration as the workpiece cleaning apparatus of the first embodiment, and a two-tank type front-stage cleaning apparatus 502 arranged in the preceding stage. .

  In this example, the pre-stage cleaning apparatus 502 includes a first cleaning tank 503 that performs rough cleaning of a workpiece by ultrasonic cleaning using a hydrocarbon solvent that has a high ability to decompose and remove oil, and a super-cleaner that also uses a hydrocarbon solvent. And a second cleaning tank 504 that performs final cleaning of the workpiece by sonic cleaning. The work cleaning device 501 on the rear stage side performs finish cleaning using a fluorine-based solvent on the work to which the cleaned hydrocarbon-based solvent is attached.

  Since the basic configuration of the workpiece cleaning apparatus 501 is the same as that of the workpiece cleaning apparatus 1 according to the first embodiment, the corresponding parts are denoted by the same reference numerals and description thereof is omitted. The workpiece cleaning apparatus 501 is provided with a hydrocarbon separation unit 505 for separating and removing the hydrocarbon solvent mixed in the fluorinated solvent by the cleaning.

  In the upstream side cleaning apparatus 502, the hydrocarbon-based solvent that has overflowed from the second cleaning tank 504, which is a finishing cleaning tank, flows into the overflow tank 506, and the first cleaning, which is a rough cleaning tank, through a communication port on the bottom side. It is supplied to the tank 503. The hydrocarbon solvent overflowed from the first cleaning tank 503 flows into the overflow tank 507. The hydrocarbon-based solvent recovered in the overflow tank 507 is removed from the recovery port on the bottom by the circulation pump 508 via the circulation line 510 provided with the filter 509 and returned to the first cleaning tank 503 again. It is. A circulation line 513 provided with a circulation pump 511 and a filter 512 is also attached to the second washing tank 504 which is a finishing washing tank.

  In addition, the hydrocarbon-based solvent recovered in the overflow tank 507 is periodically recovered to the vacuum distillation machine 515 via the circulation line 510 and the recovery line 514, for example, and regenerated through this to be a regenerated liquid tank 516. It is stored in. The regenerated hydrocarbon solvent is supplied from the regenerated liquid tank 516 to the second cleaning tank 504 which is a finishing tank.

DESCRIPTION OF SYMBOLS 1 Work washing | cleaning apparatus 2 Apparatus housing 3 Operation display board 4 Loading / unloading exit 5 Opening / closing mechanism 6 Outer door 6A Open position 6B Closed position 7 Processing container 8 Loading / unloading chamber 9 Processing chamber 10 Inner door opening / closing mechanism 11 Inner door 11a Inner door main body board Part 11b Edge plate part 11A Retraction position 11B Blocking position 12 Cleaning tank 13 Solvent liquid level 14 Steam cleaning area 15 Cooling coil 16 Cooling and drying area 17 Steam generating tank 18 Water separator 19 Cooling coil 21 Fluorine tank 22 Refrigerator 23 Heat exchanger 25 Lifting mechanism 26 Power cylinder 27 Telescopic rod 28 Work transport basket 29 Receiving base 31 Replenishment line 33 Pump 34 Recirculation line 35 Filter 36 Blower fan 37 Circulation line 38 Refrigerant circulation line 41 Power cylinder 42 Guide rails 43 and 44 Engagement plates 45 and 46 Plunger 47 for lock Elastic member 50 Communication port 50a Door opening edge portion 51 mounting frame 52 guide rail 53 rack 54 pinion 55 motor 56 guide rollers

Claims (18)

A loading / unloading chamber equipped with a workpiece loading / unloading outlet;
An outer door that opens and closes the loading / unloading port;
A processing chamber communicating with the loading / unloading chamber via a communication port;
An inner door that opens and closes the communication port;
A cleaning tank for storing a solvent disposed inside the processing chamber;
A steam cleaning region provided on the upper side of the cleaning tank in the processing chamber;
A cooling and drying region provided above the steam cleaning region in the processing chamber and facing the communication port;
A transport mechanism for transporting the work to the loading / unloading chamber and the processing chamber via the communication port;
A workpiece cleaning apparatus having a steam generation tank for supplying solvent vapor to the steam cleaning region. In claim 1,
The loading / unloading port is divided into a workpiece loading port and a workpiece loading / unloading port,
A workpiece cleaning apparatus comprising a carry-in side outer door that opens and closes the carry-in port and a carry-out side outer door that opens and closes the carry-out port as the outer door. In claim 1,
The communication port is divided into a loading-side communication port for conveying a workpiece to the processing chamber and a carrying-out side communication port for unloading the workpiece from the processing chamber,
A workpiece cleaning apparatus comprising a loading-side inner door that opens and closes the loading-side communication port and a unloading-side inner door that opens and closes the unloading-side communication port as the inner door. In claim 1,
The loading / unloading port is divided into a workpiece loading port and a workpiece loading / unloading port,
The outer door includes a loading-side outer door that opens and closes the carry-in port and a carry-out side outer door that opens and closes the carry-out port.
The communication port is divided into a loading-side communication port for conveying a workpiece to the processing chamber and a carrying-out side communication port for unloading the workpiece from the processing chamber,
The outer door includes a loading-side outer door that opens and closes the carry-in port and a carry-out side outer door that opens and closes the carry-out port.
A workpiece cleaning apparatus comprising a loading-side inner door that opens and closes the loading-side communication port and a unloading-side inner door that opens and closes the unloading-side communication port as the inner door. In claim 1,
The carry-in / out chamber is divided into a carry-in chamber and a carry-out chamber,
The carry-in / out port is divided into a work entrance formed in the carry-in chamber and a work exit formed in the carry-out chamber,
The outer door includes a loading-side outer door that opens and closes the carry-in port and a carry-out side outer door that opens and closes the carry-out port.
The communication port is divided into a carry-in side communication port that communicates the carry-in chamber and the processing chamber and a carry-out side communication port that communicates the carry-out port and the processing chamber,
A workpiece cleaning apparatus comprising a loading-side inner door that opens and closes the loading-side communication port and a unloading-side inner door that opens and closes the unloading-side communication port as the inner door. In claim 5,
The steam generation tank is disposed in a position adjacent to the cleaning tank in the lateral direction inside the processing chamber,
The transfer mechanism includes a first elevating mechanism that elevates and lowers the work via the carry-in side communication port, a second elevating mechanism that elevates and lowers the work via the carry-out side communication port, and a horizontal movement of the work in the steam cleaning region. A workpiece cleaning apparatus comprising a lateral conveyance mechanism that conveys in a direction and delivers the first elevating mechanism to the second elevating mechanism. In claim 5,
The cleaning tank includes at least a first cleaning tank and a second cleaning tank that are arranged adjacent to each other in the lateral direction,
The steam generation tank is disposed adjacent to the second cleaning tank on the opposite side to the first cleaning tank inside the processing chamber,
The position directly above the first cleaning tank is a carry-in position where the work is carried in via the carry-in side communication port, and the position right above the steam generation tank is carried out via the carry-out side communication port. The unloading position,
The transport mechanism is
A loading mechanism for loading a workpiece from the loading chamber to the loading position via the loading-side communication port;
A first lifting mechanism for transporting the work carried into the carry-in position to the cooling and drying region, the steam cleaning region, and the first cleaning tank;
A second lifting mechanism for transporting a workpiece to the steam cleaning region and the second cleaning tank;
A third elevating mechanism that conveys the workpiece to the steam cleaning region, the cooling and drying region, and the carry-out position;
An unloading mechanism for unloading the workpiece from the unloading position to the unloading chamber via the unloading side communication port;
A workpiece cleaning apparatus comprising: a lateral conveyance mechanism that conveys a workpiece in a lateral direction in the steam cleaning region and sequentially delivers the workpiece from the first lifting mechanism to the second and third lifting mechanisms. In claim 5, further:
It has a work loading / unloading area formed on the upper side of the cooling / drying area inside the processing chamber,
The cleaning tank includes at least a first cleaning tank and a second cleaning tank that are arranged adjacent to each other in the lateral direction,
The steam generation tank is disposed adjacent to the second cleaning tank on the opposite side to the first cleaning tank inside the processing chamber,
In the work loading / unloading region, a position directly above the first cleaning tank is a loading position where a work is loaded via the loading side communication port, and a position directly above the steam generation tank is the loading side communication. It is an unloading position where the work is unloaded through the mouth,
The transport mechanism is
A loading mechanism for loading a workpiece from the loading chamber to the loading position via the loading-side communication port;
A first lifting mechanism for transporting the work carried into the carry-in position to the cooling and drying region, the steam cleaning region, and the first cleaning tank;
A second lifting mechanism for transporting a workpiece to the steam cleaning region and the second cleaning tank;
A third elevating mechanism that conveys the workpiece to the steam cleaning region, the cooling and drying region, and the carry-out position;
An unloading mechanism for unloading the workpiece from the unloading position to the unloading chamber via the unloading side communication port;
A workpiece cleaning apparatus comprising: a lateral conveyance mechanism that conveys a workpiece in a lateral direction in the steam cleaning region and sequentially delivers the workpiece from the first lifting mechanism to the second and third lifting mechanisms. In claim 8,
A drying region is disposed between the unloading position and the unloading side communication port in the work loading / unloading region,
The unloading mechanism is a workpiece cleaning apparatus configured to unload a workpiece from the unloading position via the drying region. 10. The method according to claim 1, further comprising:
A work cleaning apparatus having a solvent recovery mechanism that cools and liquefies and recovers a solvent contained in the gas by circulating the gas in the carry-in / out chamber through a heat exchanger. In claim 7, 8 or 9,
The first cleaning tank is a cleaning tank for storing a hydrocarbon-based cleaning agent,
The work cleaning apparatus, wherein the second cleaning tank is a cleaning tank for storing a fluorine-based cleaning agent. 5. In any one of claims 1 to 4, further
A workpiece cleaning apparatus having at least one previous-stage cleaning tank in order to clean a workpiece before being transferred into the processing chamber via the loading / unloading exit. In claim 12,
The preceding-stage cleaning tank is a cleaning tank that cleans a workpiece using a hydrocarbon solvent,
The work cleaning apparatus, wherein the cleaning tank in the processing chamber is a cleaning tank for cleaning a work using a fluorine-based solvent. In any one of claims 1 to 13,
The inner door is an inner door that is slidable between a blocking position that blocks the communication port between the processing chamber and the loading / unloading chamber and an open position that opens the communication port.
The inner door has an inclined surface whose edge portions on both sides thereof are inclined at an acute angle with respect to a forward direction from the open position toward the blocking position,
The workpiece cleaning in which the opening edge portions on both sides of the communication port facing the edge portion of the inner door at the blocking position have complementary inclined surface shapes that can be ridden with the edge portion in contact with each other. apparatus. A workpiece cleaning method using the workpiece cleaning apparatus according to claim 1,
With the communication port between the processing chamber and the loading / unloading chamber closed, the workpiece to be cleaned is loaded into the loading / unloading chamber from the loading / unloading port,
Open the communication port after closing the loading / unloading port, lower the workpiece from the loading / unloading chamber to a position immersed in the solvent stored in the cleaning tank in the processing chamber, and perform a cleaning process on the workpiece,
After lifting the workpiece to the loading / unloading chamber via the steam cleaning region and the cooling drying region after cleaning, the communication port is closed,
The gas in the carry-in / out chamber is circulated through a heat exchanger, and the solvent contained in the gas is cooled and liquefied and collected,
A workpiece cleaning method of opening the loading / unloading port and unloading the workpiece after processing. A workpiece cleaning method using the workpiece cleaning apparatus according to claim 6,
With the loading side communication port closed, the workpiece to be cleaned is loaded into the loading / unloading chamber from the loading port,
After closing the carry-in port, the carry-in side communication port is opened, the work is lowered from the carry-in chamber to a position immersed in the solvent stored in the cleaning tank in the processing chamber, and the work is subjected to a cleaning process. Giving,
The workpiece after cleaning is pulled up to the steam cleaning region, and the inside of the steam cleaning region is transported in a lateral direction until the position is directly above the steam generation tank, and the workpiece is steam cleaned in the steam cleaning region,
The work after steam cleaning is pulled up to the cooling and drying area, and a drying process is performed.
After unloading the dried workpiece to the unloading chamber, close the unloading side communication port,
By circulating the gas in the unloading chamber through a heat exchanger, the solvent is liquefied and recovered from the gas,
After that, the work cleaning method of opening the carry-out port and carrying out the work. A workpiece cleaning method using the workpiece cleaning apparatus according to claim 9,
With the loading side communication port closed, the workpiece to be cleaned is loaded into the loading / unloading chamber from the loading port,
After closing the loading port, the loading side communication port is opened, the workpiece is lowered from the loading chamber to a position where it is immersed in the solvent stored in the first cleaning tank in the processing chamber, and the workpiece is roughened. Apply the cleaning process,
The workpiece after cleaning is pulled up to the steam cleaning region, and the inside of the steam cleaning region is transported in a lateral direction until the position is just above the second cleaning tank,
Lowering the workpiece from the steam cleaning region to a position immersed in the solvent stored in the second cleaning tank, and performing a final cleaning process on the workpiece;
The workpiece after cleaning is pulled up to the steam cleaning region, transported in the lateral direction until it is located directly above the steam generation tank, and the workpiece is steam cleaned in the steam cleaning region,
After lifting the workpiece after steam cleaning to the unloading position of the workpiece loading / unloading region, the workpiece is transported laterally to the drying region,
The workpiece is dried in the drying area,
After unloading the dried workpiece to the unloading chamber, close the unloading side communication port,
By circulating the gas in the unloading chamber through a heat exchanger, the solvent is liquefied and recovered from the gas,
After that, the work cleaning method of opening the carry-out port and carrying out the work. In claim 15, 16 or 17,
The work cleaning method, wherein the solvent is a fluorine-based cleaning agent.

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