JPS6319443B2 - - Google Patents

Info

Publication number
JPS6319443B2
JPS6319443B2 JP58036611A JP3661183A JPS6319443B2 JP S6319443 B2 JPS6319443 B2 JP S6319443B2 JP 58036611 A JP58036611 A JP 58036611A JP 3661183 A JP3661183 A JP 3661183A JP S6319443 B2 JPS6319443 B2 JP S6319443B2
Authority
JP
Japan
Prior art keywords
silicon tetrafluoride
activated alumina
siloxane
temperature
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58036611A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59162122A (ja
Inventor
Yukihiro Yoda
Kensaku Maruyama
Isao Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP3661183A priority Critical patent/JPS59162122A/ja
Publication of JPS59162122A publication Critical patent/JPS59162122A/ja
Publication of JPS6319443B2 publication Critical patent/JPS6319443B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP3661183A 1983-03-08 1983-03-08 四弗化ケイ素の精製法 Granted JPS59162122A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3661183A JPS59162122A (ja) 1983-03-08 1983-03-08 四弗化ケイ素の精製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3661183A JPS59162122A (ja) 1983-03-08 1983-03-08 四弗化ケイ素の精製法

Publications (2)

Publication Number Publication Date
JPS59162122A JPS59162122A (ja) 1984-09-13
JPS6319443B2 true JPS6319443B2 (en:Method) 1988-04-22

Family

ID=12474592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3661183A Granted JPS59162122A (ja) 1983-03-08 1983-03-08 四弗化ケイ素の精製法

Country Status (1)

Country Link
JP (1) JPS59162122A (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7666379B2 (en) 2001-07-16 2010-02-23 Voltaix, Inc. Process and apparatus for removing Bronsted acid impurities in binary halides
FR2907348B1 (fr) * 2006-10-18 2008-12-12 Inst Francais Du Petrole Utilisation d'alumines comme masse de captation de complexes organometalliques du silicium
KR101447310B1 (ko) * 2007-09-04 2014-10-06 엠이엠씨 일렉트로닉 머티리얼즈, 인크. 사불화규소 및 염화수소를 함유하는 기체 스트림의 처리 방법
CN101918311B (zh) * 2007-09-21 2014-12-03 Memc电子材料有限公司 用于纯化四氟化硅的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5715631A (en) * 1980-06-25 1982-01-27 Inoue Japax Res Inc Electric discharge machining device
JPS604126B2 (ja) * 1981-03-18 1985-02-01 セントラル硝子株式会社 四弗化珪素の精製法

Also Published As

Publication number Publication date
JPS59162122A (ja) 1984-09-13

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