JPS63193831U - - Google Patents

Info

Publication number
JPS63193831U
JPS63193831U JP8497187U JP8497187U JPS63193831U JP S63193831 U JPS63193831 U JP S63193831U JP 8497187 U JP8497187 U JP 8497187U JP 8497187 U JP8497187 U JP 8497187U JP S63193831 U JPS63193831 U JP S63193831U
Authority
JP
Japan
Prior art keywords
reaction chamber
shielding cover
atmosphere shielding
epitaxial growth
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8497187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539629Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8497187U priority Critical patent/JPH0539629Y2/ja
Publication of JPS63193831U publication Critical patent/JPS63193831U/ja
Application granted granted Critical
Publication of JPH0539629Y2 publication Critical patent/JPH0539629Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP8497187U 1987-05-29 1987-05-29 Expired - Lifetime JPH0539629Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8497187U JPH0539629Y2 (enExample) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8497187U JPH0539629Y2 (enExample) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63193831U true JPS63193831U (enExample) 1988-12-14
JPH0539629Y2 JPH0539629Y2 (enExample) 1993-10-07

Family

ID=30939948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8497187U Expired - Lifetime JPH0539629Y2 (enExample) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0539629Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9415568B2 (en) 2010-02-15 2016-08-16 Productive Research Llc Formable light weight composite material systems and methods

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9415568B2 (en) 2010-02-15 2016-08-16 Productive Research Llc Formable light weight composite material systems and methods

Also Published As

Publication number Publication date
JPH0539629Y2 (enExample) 1993-10-07

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