JPS63193588U - - Google Patents

Info

Publication number
JPS63193588U
JPS63193588U JP8092987U JP8092987U JPS63193588U JP S63193588 U JPS63193588 U JP S63193588U JP 8092987 U JP8092987 U JP 8092987U JP 8092987 U JP8092987 U JP 8092987U JP S63193588 U JPS63193588 U JP S63193588U
Authority
JP
Japan
Prior art keywords
solvent
tank
cleaning
device characterized
evaporation tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8092987U
Other languages
English (en)
Other versions
JPH0529113Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8092987U priority Critical patent/JPH0529113Y2/ja
Publication of JPS63193588U publication Critical patent/JPS63193588U/ja
Application granted granted Critical
Publication of JPH0529113Y2 publication Critical patent/JPH0529113Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Description

【図面の簡単な説明】
第１図は実施例の系統図である。 各部分は、１…気密洗浄槽、２…真空ポンプ、
３…蒸発槽（オイルバス加熱付）、４…循環ポン
プ、５…エゼクター受槽、６…作動ポンプ、７…
エゼクター、８…吹込管。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 洗浄槽に被洗物を入れて、槽内の空気を真
    空ポンプで排除した後、洗浄部品の蒸気洗浄を行
    い、液化した溶剤を蒸発槽に移送するために、エ
    ゼクター又は真空ポンプで蒸発槽を減圧して、溶
    剤の流下排出を容易にする事を特徴とする溶剤気
    密洗浄装置。 (2) 蒸発槽は洗浄用溶剤蒸気の発生に使用する
    と共に、エゼクター又は真空ポンプを使用して、
    溶剤の真空蒸留を行ない得るようにしたことを特
    徴とする溶剤気密洗浄装置。 (3) 蒸発槽の底部に循環ポンプによつて槽内の
    溶剤を循環させ、吹込む事を特徴とした溶剤気密
    洗浄装置。
JP8092987U 1987-05-29 1987-05-29 Expired - Lifetime JPH0529113Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8092987U JPH0529113Y2 (ja) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8092987U JPH0529113Y2 (ja) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63193588U true JPS63193588U (ja) 1988-12-13
JPH0529113Y2 JPH0529113Y2 (ja) 1993-07-26

Family

ID=30932191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8092987U Expired - Lifetime JPH0529113Y2 (ja) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0529113Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05123658A (ja) * 1991-10-17 1993-05-21 Japan Field Kk 被洗浄物の洗浄方法およびその装置
DE19515566A1 (de) * 1995-03-16 1996-10-31 Chugai Ro Kogyo Kaisha Ltd Reinigungsgerät

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108687016A (zh) * 2018-03-28 2018-10-23 安徽尼古拉电子科技有限公司 一种微电子机械清洗装置
CN108325915A (zh) * 2018-03-28 2018-07-27 安徽尼古拉电子科技有限公司 一种电子元器件表面氧化膜清洗装置及方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05123658A (ja) * 1991-10-17 1993-05-21 Japan Field Kk 被洗浄物の洗浄方法およびその装置
DE19515566A1 (de) * 1995-03-16 1996-10-31 Chugai Ro Kogyo Kaisha Ltd Reinigungsgerät
DE19515566C2 (de) * 1995-03-16 1998-10-08 Chugai Ro Kogyo Kaisha Ltd Reinigungsgerät

Also Published As

Publication number Publication date
JPH0529113Y2 (ja) 1993-07-26

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