JPH01114090U - - Google Patents
Info
- Publication number
- JPH01114090U JPH01114090U JP697288U JP697288U JPH01114090U JP H01114090 U JPH01114090 U JP H01114090U JP 697288 U JP697288 U JP 697288U JP 697288 U JP697288 U JP 697288U JP H01114090 U JPH01114090 U JP H01114090U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- container
- cleans
- cleaning device
- objects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000013020 steam cleaning Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Description
第１図は本考案に係る蒸気洗浄装置の実施例を
示す全体図、第２図、第３図、第４図は各々本考
案に係る蒸気洗浄装置の洗浄工程を示す状態図、
第５図は従来の蒸気洗浄装置を示す全体図である
。 ５０…蒸気洗浄装置、５２…洗浄槽、６０…受
皿、６６…角状筒、６８…ウエハ。
示す全体図、第２図、第３図、第４図は各々本考
案に係る蒸気洗浄装置の洗浄工程を示す状態図、
第５図は従来の蒸気洗浄装置を示す全体図である
。 ５０…蒸気洗浄装置、５２…洗浄槽、６０…受
皿、６６…角状筒、６８…ウエハ。
Claims (1)
- 【実用新案登録請求の範囲】 洗浄槽内に搬入された被洗浄物を溶剤蒸気で洗
浄する蒸気洗浄装置において、 洗浄槽内に上面が開口した容器を配置し、この
容器内に被洗浄物を収納して溶剤蒸気で被洗浄物
の表面を洗浄することを特徴とする蒸気洗浄装置
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP697288U JPH01114090U (ja) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP697288U JPH01114090U (ja) | 1988-01-22 | 1988-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01114090U true JPH01114090U (ja) | 1989-08-01 |
Family
ID=31211588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP697288U Pending JPH01114090U (ja) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01114090U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014168748A (ja) * | 2013-03-04 | 2014-09-18 | Denso Corp | 洗浄装置 |
-
1988
- 1988-01-22 JP JP697288U patent/JPH01114090U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014168748A (ja) * | 2013-03-04 | 2014-09-18 | Denso Corp | 洗浄装置 |