JPS63192246A - プロ−ブ針の組立て方法 - Google Patents

プロ−ブ針の組立て方法

Info

Publication number
JPS63192246A
JPS63192246A JP2322687A JP2322687A JPS63192246A JP S63192246 A JPS63192246 A JP S63192246A JP 2322687 A JP2322687 A JP 2322687A JP 2322687 A JP2322687 A JP 2322687A JP S63192246 A JPS63192246 A JP S63192246A
Authority
JP
Japan
Prior art keywords
probe
probes
sections
positions
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2322687A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0583181B2 (enExample
Inventor
Kazunari Imahashi
今橋　一成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2322687A priority Critical patent/JPS63192246A/ja
Publication of JPS63192246A publication Critical patent/JPS63192246A/ja
Publication of JPH0583181B2 publication Critical patent/JPH0583181B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2322687A 1987-02-03 1987-02-03 プロ−ブ針の組立て方法 Granted JPS63192246A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2322687A JPS63192246A (ja) 1987-02-03 1987-02-03 プロ−ブ針の組立て方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2322687A JPS63192246A (ja) 1987-02-03 1987-02-03 プロ−ブ針の組立て方法

Publications (2)

Publication Number Publication Date
JPS63192246A true JPS63192246A (ja) 1988-08-09
JPH0583181B2 JPH0583181B2 (enExample) 1993-11-25

Family

ID=12104717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2322687A Granted JPS63192246A (ja) 1987-02-03 1987-02-03 プロ−ブ針の組立て方法

Country Status (1)

Country Link
JP (1) JPS63192246A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002243761A (ja) * 2000-12-04 2002-08-28 Cascade Microtech Inc ウェハープローブ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002243761A (ja) * 2000-12-04 2002-08-28 Cascade Microtech Inc ウェハープローブ
JP2008122403A (ja) * 2000-12-04 2008-05-29 Cascade Microtech Inc ウェハープローブの組み立て方法

Also Published As

Publication number Publication date
JPH0583181B2 (enExample) 1993-11-25

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