JPS6319001B2 - - Google Patents
Info
- Publication number
- JPS6319001B2 JPS6319001B2 JP7171981A JP7171981A JPS6319001B2 JP S6319001 B2 JPS6319001 B2 JP S6319001B2 JP 7171981 A JP7171981 A JP 7171981A JP 7171981 A JP7171981 A JP 7171981A JP S6319001 B2 JPS6319001 B2 JP S6319001B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- subject
- receiving surface
- lens
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 21
- 238000007689 inspection Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
- G01N2021/889—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a bare video image, i.e. without visual measurement aids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7171981A JPS57186106A (en) | 1981-05-13 | 1981-05-13 | Inspection device for surface |
US06/348,086 US4547073A (en) | 1981-02-17 | 1982-02-11 | Surface examining apparatus and method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7171981A JPS57186106A (en) | 1981-05-13 | 1981-05-13 | Inspection device for surface |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57186106A JPS57186106A (en) | 1982-11-16 |
JPS6319001B2 true JPS6319001B2 (ru) | 1988-04-21 |
Family
ID=13468605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7171981A Granted JPS57186106A (en) | 1981-02-17 | 1981-05-13 | Inspection device for surface |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57186106A (ru) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006226804A (ja) * | 2005-02-17 | 2006-08-31 | Matsushita Electric Ind Co Ltd | フラットディスプレイパネルの検査方法 |
JP2006266934A (ja) * | 2005-03-24 | 2006-10-05 | Sumitomo Electric Ind Ltd | フィルムの欠陥検出方法および欠陥検出装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02151802A (ja) * | 1988-12-05 | 1990-06-11 | Matsushita Electric Ind Co Ltd | 潜像を投影する鏡面状体、その製造方法、及びその認識方法 |
JP5348765B2 (ja) * | 2009-07-21 | 2013-11-20 | 株式会社リューズ | 平板状透明体の微小凹凸欠陥検査方法及び装置 |
-
1981
- 1981-05-13 JP JP7171981A patent/JPS57186106A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006226804A (ja) * | 2005-02-17 | 2006-08-31 | Matsushita Electric Ind Co Ltd | フラットディスプレイパネルの検査方法 |
JP2006266934A (ja) * | 2005-03-24 | 2006-10-05 | Sumitomo Electric Ind Ltd | フィルムの欠陥検出方法および欠陥検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS57186106A (en) | 1982-11-16 |
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