JPS63182071A - Preparation of monomolecular built-up film - Google Patents

Abstract

PURPOSE:To conserve manufacturing time, to lower material cost and labor to a large extent, by a method wherein the surfaces of the water having the first and second monomolecular films are formed in a separated state within a water tank and a rotary body is interposed between both surfaces of the water to successively build up the monomolecular films on a plurality of the substrates mounted on said rotary body. CONSTITUTION:A plurality of substrates 11 such as semiconductive wafers are mounted on the rotary surface of a rotary body 3. The surface of the water in a water tank 1 is divided into two surface-of water parts 14, 15 by a support rod 5 and monomolecular films of long chain fatty acids respectively different in a chemical formula are formed. In the first and second surface-of-water parts 14, 15, the rotary body 3 is rotated from the air to the water or from the water to the air in a predetermined direction to transfer the monomolecular films to the substrates 11. By this method, by changing the rotary direction of the rotary body 3, the number of rotations thereof or the kinds of the materials to be used for the monomolecular films, the kinds of the built-up films or the built-up number thereof can be easily controlled and the monomolecular built-up films are formed on a large number of the substrates within a short time.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for forming a monomolecular film or a cumulative film thereof on any substrate having a hydrophobic or hydrophilic surface.

BACKGROUND OF THE INVENTION Conventionally, the Langmuir-Prodgett method has been studied as a method for forming thin films at the molecular level in research in the semiconductor field, biotechnology field, etc. as a method for producing monomolecular cumulative films.

For example, in the semiconductor field, research on the use of monomolecular cumulative films of unsaturated fat films as ultra-high resolution resist materials in wafer manufacturing processes has been avoided. The monomolecular cumulative film production equipment used in these fields spreads a developing solution containing film-forming molecules on the surface of water in a water tank called a trough, compresses it in the plane direction, and then applies surface pressure. Most of the methods are based on the principle of forming a monomolecular film and lowering and raising the substrate from a direction perpendicular to the water surface to produce a cumulative film on the substrate. Therefore, an apparatus and method for producing a monomolecular cumulative film that is optimal for easily changing the configuration of the cumulative film and for efficiently laminating the cumulative film on a plurality of substrates in a short period of time has not yet been put into practical use.

Problems to be Solved by the Invention However, the types of the monomolecular cumulative film that are actually required include a Y film in which hydrophilic groups and hydrophobic groups face each other between the films; There are X and Z films in which the hydrophobic groups face each other, and there are also composite films in which a monomolecular film is made of two or more types of materials, and films in which each monomolecular film forming the cumulative film is made of different materials. There are also hetero membranes. Furthermore, the number of layers required varies from a few layers to several hundreds depending on the field of use.

However, in the currently commonly used monomolecular cumulative film manufacturing equipment, there is only one type of water surface area where the monomolecular film is formed, so when manufacturing a hetero membrane, the membrane material is frequently added to the water surface area. It had to be replaced, which required a great deal of labor and materials.

In addition, the number of substrates that can be used for manufacturing is one for every - number of operations, resulting in extremely low manufacturing efficiency.

Means for Solving the Problems The present invention has been made in view of the conventional problems as described above. That is, in the present invention, the first monolayer was formed. The water surface and the water surface on which the second monomolecular film was formed,
A rotating body formed separately in the aquarium and having a rotating surface that moves from the air to the water or from the water to the air on the first water surface and the second water surface is provided in the aquarium, and a plurality of substrates are attached to the rotating surface. This is a method in which the monomolecular film is transferred by rotating a rotating body.

Effect: By using the manufacturing method described above, monomolecular cumulative films of the required type and cumulative number can be easily manufactured on multiple substrate surfaces in a short period of time and with the minimum necessary materials by rotating a rotating body. This significantly reduces the time, material costs, and labor required for cumulative membrane manufacturing.

Embodiment FIG. 1 shows a monomolecular cumulative film manufacturing apparatus used in an embodiment of the present invention, and FIG. 2 shows a plane and a cross section of the apparatus shown in FIG. 1 is a water tank (trough), 2 is a barrier 3 is a rotating body, 4 is a rotating shaft, 5 is a support rod, 6 is a fixed plate, 7 is a rotating motor,
8 is a barrier motor, 9 is a barrier rail, 10 is a cooling monthly supply/drainage pipe, 11 is a substrate on which a monomolecular film is formed, 12 is a water supply vibrator, 13 is a drainage pipe, 14 is a first
The water surface portion 15 is the second water surface portion. Note that FIGS. 2(b) and 2(C) are cross-sectional views taken along line XX' and Y-Y' in FIG. 2(a), respectively. The substrate 11 is, for example, a semiconductor substrate wafer, and the substrate 11 is mounted by pressing the end of the substrate 11 with, for example, a spring provided on the rotating surface of the rotating body 3 .

A water supply vibrator 12 and a drainage pipe 13 are attached to the side of the water tank (trough) 1, and a cooling monthly supply/drainage pipe 10 is attached to the bottom of the tank. Further, above the cooling monthly supply/drainage pipe 10, there is a rotary body 3 having a plurality of arbitrary substrates 11 on both sides of which the monomolecular film is transferred, and four support rods 5 having barriers 2 on the sides. is supported by

Note that this rotating body 3 is connected to a rotating shaft 4, and its operation is controlled by an external rotating body motor 7.

Furthermore, two fixing plates 6 are attached to the support rod 5 to further increase stability.

On the other hand, the surface of the water in the aquarium 1 supplied from the water supply vibrator 12 is divided into a first water surface portion 14 and a second water surface portion 15 by the support rod 5, and the two barriers 2 are
This is to pressurize (compress) these two monomolecular films on the water surface in the direction of the surface as shown by the arrows in Figure 2, and at each end there are rotating bodies from the position shown in Figure 2 (a). 3, a barrier rail 9 connected to a barrier motor 8 is attached.

Next, a method using the apparatus of this first embodiment will be explained. One substrate 11s of the substrates 11 (llsl to 1134)
The formation of a film on the surface of No. 1 will be explained. As shown in FIG. 3(a), the surface of the water in the aquarium is divided into a first water surface portion 14 and a second water surface portion 15 by the support rod 5. Water surface part 14.
Monomolecular films 17 and 18 of long-chain fatty acids having different chemical formulas (for example, CHs (CH2), -COOH, n is an integer) are formed on 15, respectively. Therefore, by rotation of the rotating body 3 in the direction of arrow A, a hydrophilic substrate 111 such as a semiconductor substrate (wafer) whose surface is attached perpendicularly to the water surface is attached to both main surfaces of the rotating surface, and the second surface portion 15 7, it moves in the direction of exiting from the water into the air, and the monomolecular film 18 is transferred to its surface. Furthermore, as shown in FIG. 3(b), due to the rotation of the rotating body 3 (in the direction of arrow B), the substrate 111 moves in the direction from the air into the water at the first water surface portion 14. Monomolecular film 17 on the surface
is transferred. Next, as shown in FIG. 3(C), as the rotating body 3 rotates in the direction of the arrow C, the substrate 111 moves from the water to the air at the first water surface portion 14, so that the surface of the substrate 111 is Monolayer 17 is transferred. Then, as shown in FIG. 3(d), due to the rotation of the rotating body 3 in the direction of arrow D, the substrate 11-1 is moved to the second water surface portion 15.
By moving from the air into the water, single molecules 18 are transferred to the surface, resulting in substrate 11.
1, a Y-shaped and hetero-type monomolecular cumulative film 20 is formed.

In the above embodiment, the type of cumulative film (i.e., X, Y, Z type) and number of cumulative films can be easily controlled by changing the direction and speed of rotation of the rotating plate or the type of monomolecular layer material used. can do. Furthermore, the larger the number of substrates installed on both main surfaces of the rotating surface of the rotating body, the more monomolecular cumulative films can be formed on a larger number of substrates in a shorter time. Also,
The method of the present invention is also applicable to the case where the same monomolecular film is formed on the two water surfaces 14 and 15.

By the way, the rotating body 3 that holds the substrate does not necessarily have to be disc-shaped as in the first embodiment, and may have a water wheel-like structure. The operation in this case will be described below as a second embodiment.

As shown in FIG. 4(a), the surface of the water in the aquarium is separated by a support 5 between the first water surface portion 14 and the second water surface, as in the case of FIG. 3(a) in the first embodiment. It is divided into a water surface portion 15, and monomolecular films 17 and 18 are formed thereon, respectively. Therefore, by rotating the waterwheel-shaped rotating body 3 in the direction of arrow A, the hydrophobic substrate 11, which is attached perpendicularly to the rotating body 3 and whose surface is parallel to the water surface, moves from the air to the water at the second water surface portion 15. The monomolecular film 18 is transferred and attached to the surface of the substrate 11.The substrate 11 is attached by forming a groove or the like in the rotating body 3 and inserting the end thereof into the groove. . Further, as shown in FIG. 4(b), as the rotating body 3 rotates in the direction of arrow B, the substrate 11 moves from the water to the air at the first water surface portion 14, and the surface The monomolecular film 17 is transferred to. Next, as shown in FIG. 4(e), as the rotating body 3 rotates in the direction of arrow C, the substrate 11 is moved from the air to the water at the second water surface portion 15, and the substrate 11 is moved from the air to the water. A monomolecular film 18 is transferred to 11. Then, as shown in FIG. 4(d), the substrate 1 is rotated by the rotation of the rotating body 3 in the direction of arrow D.
1, the monomolecular film 17 is transferred to the 5 substrate 11 by moving from the water to the air at the first water surface portion 14, and as a result, a Y-shaped and hetero-type monolayer is deposited on the substrate. A molecular accumulation film 21 is formed. In addition, when comparing the film production efficiency between the method using the conventional monomolecular cumulative film production equipment and the method using the same equipment (based on the present invention), when the film lamination method is the vertical immersion method as shown in Figure 3, The result will be as shown in Table 1, and in the case of the horizontal attachment method as shown in Figure 4, it will be as shown in Table 2. (However,
Regarding the lamination time, both Table 1.2 assumes that the number of laminated layers is 3, and the division is into sample A for the first and third layers, and sample A for the second layer.
It is converted into a hetero-type cumulative film with sample B as the layer.

(Margin below) Table 1 Table 2 Effects of the Invention According to the present invention, when a monomolecular cumulative film is formed on a semiconductor substrate as a resist material used in a semiconductor process,
A large amount of hetero-cumulative films of the required type and cumulative number can be formed in a short time. Furthermore, when manufacturing a hetero membrane, there is no need to replace the monomolecular membrane, so labor is also reduced. Therefore, monomolecular cumulative film production can be performed more efficiently than conventional methods. Furthermore, by changing the method of attaching the substrate to the rotating body, it is possible to produce monomolecular cumulative films that can be used in both vertical and horizontal deposition methods, which greatly contributes to the production of monomolecular cumulative films. It is something.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of the main parts of the monomolecular cumulative film manufacturing apparatus used in the first embodiment of the present invention, FIG. 2(a) is a plan view of the apparatus of FIG. 1, and FIG. 2(b), C) is XX' in (a)
, YY' sectional view, FIGS. 3(a) to 3(d) are conceptual diagrams of the rotating part showing the steps of the vertically attached monomolecular cumulative film forming method of the first embodiment of the present invention, and FIG. a) to (d) are conceptual diagrams of a rotating part showing steps of a method for forming a horizontally deposited monomolecular cumulative film according to a second embodiment of the present invention. 1... Water tank (trough), 2... Barrier, 3... Rotating body, 4... Rotating shaft, 5... Support rod, 6... Fixed plate, 7... Rotating body motor , 8... Barrier motor, 9... Barrier rail, 10... Cooling supply/drainage pipe, 11.1181-s4... Board, 12... Water supply pipe, 13... Drainage pipe, 14 ...First water surface portion, 15...Second water surface portion, 17.18...
Monomolecular film, 20.21... Monomolecular cumulative film. Name of agent: Patent attorney Toshio Nakao and one other person Figure 2/Z 17 Figure 2 Figure 3 11s Chiha Figure 4

Claims (5)

[Claims] (1) A first water surface on which a first monomolecular film is formed, and a second water surface on which a first monomolecular film is formed.
A second water surface on which a monomolecular film is formed is formed separately in the aquarium, and a rotating body having a rotating surface that moves from the air to the water or from the water to the air on the first and second water surfaces is provided in the aquarium. and a plurality of substrates are mounted on the rotating surface,
A method for producing a monomolecular cumulative film, characterized in that the monomolecular film is transferred onto the plurality of substrates by rotating the rotating body. (2) The method for producing a monomolecular cumulative film according to claim 1, wherein the first water surface and the second water surface are formed in the same water tank. (3) A method for producing a monomolecular cumulative film according to claim 1, characterized in that a substrate is mounted on both rotating surfaces of the rotating body. (4) Claim 1, characterized in that the first and second monomolecular films are compressed in the surface direction at the water surface.
A method for producing a monomolecular cumulative film as described in Section 1. (5) The method for producing a monomolecular cumulative film according to claim 1, wherein the substrate surface is mounted on a rotating body so as to be substantially perpendicular or horizontal to the water surface.