JPH02180663A - Manufacture of laminate and its device - Google Patents
Manufacture of laminate and its deviceInfo
- Publication number
- JPH02180663A JPH02180663A JP15721988A JP15721988A JPH02180663A JP H02180663 A JPH02180663 A JP H02180663A JP 15721988 A JP15721988 A JP 15721988A JP 15721988 A JP15721988 A JP 15721988A JP H02180663 A JPH02180663 A JP H02180663A
- Authority
- JP
- Japan
- Prior art keywords
- monomolecular film
- substrate
- monomolecular
- laminate
- substrate surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 74
- 238000005192 partition Methods 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 18
- 239000000126 substance Substances 0.000 claims description 9
- 239000002120 nanofilm Substances 0.000 claims description 2
- 239000012530 fluid Substances 0.000 abstract description 2
- 230000000717 retained effect Effects 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- 230000001186 cumulative effect Effects 0.000 description 7
- VKOBVWXKNCXXDE-UHFFFAOYSA-N icosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCC(O)=O VKOBVWXKNCXXDE-UHFFFAOYSA-N 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 125000001165 hydrophobic group Chemical group 0.000 description 4
- 238000007654 immersion Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- -1 polytetrafluoroethylene Polymers 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229920001222 biopolymer Polymers 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229920001002 functional polymer Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 150000004668 long chain fatty acids Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野〕
この発明は、積層体の製造に関し、さらに詳細には、累
積多層膜(ラングミュア・プロジェット膜、LB膜)が
固体基板に積層された積層体に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to the production of a laminate, and more particularly, to a laminate in which a cumulative multilayer film (Langmuir-Prodgett film, LB film) is laminated on a solid substrate. Regarding the body.
[従来の技術]
一つの分子内に親木基と疎水基を持つ両親媒性有機物質
をクロロホルムなどの折機溶媒に溶かし水面上に展開す
ると、その溶媒が蒸発し、有機物質の膜ができる。有機
膜が形成されている水面の面積を枠(バリアー)で狭め
ると、ある面積で両親媒性分子が水面上で親水基部分を
水側に、疎水基部分を空気側に向けて、規則的配列配向
した一分子の厚さの膜、すなわち、単分子膜を形成する
。[Prior technology] When an amphipathic organic substance that has a parent group and a hydrophobic group in one molecule is dissolved in a folding solvent such as chloroform and spread on the water surface, the solvent evaporates and a film of the organic substance is formed. . When the area of the water surface where the organic film is formed is narrowed with a frame (barrier), the amphipathic molecules will form regular structures on the water surface, with their hydrophilic groups facing the water side and their hydrophobic groups facing the air side. A film with a thickness of one molecule, that is, a monomolecular film, is formed.
単分子膜を水面から固体基板に繰返して転移させて得た
ものを、累積多層膜(ラングミュア・プロジェット膜、
LB膜)と呼ぶ。この累積多層膜が固体基板に積層され
た積層体は、各種センサ、機能素子、表示素子、記憶、
記録媒体、コーティング材料、液晶配向膜、非線形光学
素子、超微細パターン用レジストスイッチング素子用絶
縁膜、選択的透過膜などの用途に適用させる。A cumulative multilayer film (Langmuir-Prodgett film,
It is called LB film). A laminate in which this cumulative multilayer film is laminated on a solid substrate can be used for various sensors, functional elements, display elements, memory, etc.
It can be applied to recording media, coating materials, liquid crystal alignment films, nonlinear optical elements, insulating films for resist switching elements for ultra-fine patterns, selective transmission films, etc.
従来、累積多層膜が固体基板に積層された積層体は、一
般的に、垂直浸漬法と水平付着法との2通りの方法によ
り製造されている。垂直浸漬法は、第3図に概略的に示
すように、親水基と疎水基を持つ両親媒性分子の単分子
膜状態を水面で保持しながら、浸漬した親水性の固体基
板1を垂直に引上げて基板表面に単分子膜2を転移させ
〔第3図(a)〕、次いで、基板を垂直に引下げて基板
上の両親媒性分子の疎水基面に、単分子膜を更に転移さ
せ〔第3図(b)) 、これを繰返して累積多層膜3を
有する積層体4〔第3図(C)〕を得る。Conventionally, a laminate in which a cumulative multilayer film is laminated on a solid substrate is generally manufactured by two methods: a vertical dipping method and a horizontal deposition method. In the vertical immersion method, as schematically shown in Figure 3, the immersed hydrophilic solid substrate 1 is vertically maintained while maintaining a monomolecular film of amphiphilic molecules having hydrophilic and hydrophobic groups on the water surface. The monomolecular film 2 is transferred to the surface of the substrate by pulling it up [FIG. 3(a)], and then the monomolecular film 2 is further transferred to the hydrophobic base surface of the amphiphilic molecules on the substrate by pulling the substrate vertically down [FIG. 3(a)]. FIG. 3(b)), and this process is repeated to obtain a laminate 4 having a cumulative multilayer film 3 [FIG. 3(C)].
基板が疎水性の場合はこの逆の工程をとる。他方、水平
付着法は、第4図に概略的に示すように、単分子膜状態
を水面で保持し、固体基板1を水平に保持しながら、水
面上の単分子膜2に基板面1を接触させ次いで引上げて
基板表面に単分子膜2を転移させ〔第4図(a)) 、
これを繰返して累積多層膜3を有する積層体4〔第4図
(b)〕を得る。If the substrate is hydrophobic, the process is reversed. On the other hand, in the horizontal adhesion method, as schematically shown in FIG. 4, the monomolecular film state is maintained on the water surface, and while the solid substrate 1 is held horizontally, the substrate surface 1 is attached to the monomolecular film 2 on the water surface. The monomolecular film 2 is transferred to the substrate surface by bringing it into contact with the substrate and then pulling it up [Fig. 4(a)].
This process is repeated to obtain a laminate 4 (FIG. 4(b)) having a cumulative multilayer film 3.
[発明が解決しようとする課題]
しかしながら、垂直浸漬法では、作業効率が必ずしも良
好でなく、しかも浸漬するために基板の材質に制限が多
い。水平付着法による累積の場合、基板が水面に触れた
ときおよび離れたときに、水面に目視できるほど波が生
じている。この乱れた状態で基板上に累積をするので、
単分子膜が乱れ構造をとり、得られれLB膜も乱れ構造
を示す。[Problems to be Solved by the Invention] However, the vertical immersion method does not necessarily have good working efficiency, and furthermore, there are many restrictions on the material of the substrate due to immersion. In the case of horizontal deposition, there are visible waves on the water surface when the substrate touches and leaves the water surface. This disordered state accumulates on the board, so
The monomolecular film has a disordered structure, and the obtained LB film also exhibits a disordered structure.
しかも、流動性の高い単分子膜の場合、基板を水面から
離すときに、完全に基板が水平でないと表面圧が加わっ
ているので、第5図に示すように、単分子膜の一部が回
り込んでしまい、基板面に不均一な累積膜が形成される
。Furthermore, in the case of highly fluid monolayers, when the substrate is removed from the water surface, surface pressure is applied if the substrate is not completely horizontal, so as shown in Figure 5, part of the monolayer may As a result, a non-uniform accumulated film is formed on the substrate surface.
この発明は、上記の背景に基づきなされたものであり、
その目的とするところは、均一かつ良好な累積膜を有す
る積層体を、大量にかつ効率的に製造する方法およびそ
の装置を提供することである。This invention was made based on the above background,
The objective is to provide a method and an apparatus for manufacturing a laminate having a uniform and good cumulative film in large quantities and efficiently.
[課題を解決するための手段]
本発明者は、上記課題の解決のために種々の検討を加え
た結果、水平付着法において、単分子膜を基板面に転移
させる前に、液面上の単分子膜を予め所望の寸法に区画
すれば、この発明の目的達成に有効であることを見出し
てこの発明を完成するに至った。[Means for Solving the Problems] As a result of various studies to solve the above problems, the inventors of the present invention discovered that, in the horizontal deposition method, before transferring a monomolecular film to a substrate surface, The present invention was completed based on the discovery that it is effective to achieve the object of the present invention if the monomolecular film is divided into desired dimensions in advance.
すなわち、この発明の積層体の製造方法は、基板上に複
数の単分子膜が累積された積層体を製造する方法であっ
て、
(イ) 液面に、累積すべき物質の単分子膜を形成し、
(ロ) 基板面を容易に出入れすることができる透し孔
の横断寸法を有する格子状区画板を、上方より該単分子
膜面に当てて、単分子膜部分を該区画板の各透し孔内に
区画し、
(ハ) 区画された単分子膜部分面に、基板面を水平に
保持しながら上方より接触しかつ引離し、単分子膜部分
を基板面に転移させ、
(ニ) 単分子膜部分の基板面への前記転移を繰り返し
て、基板上に複数の単分子膜を累積させることを特徴と
するものである。That is, the method for producing a laminate of the present invention is a method for producing a laminate in which a plurality of monomolecular films are accumulated on a substrate, and includes: (a) depositing a monomolecular film of a substance to be accumulated on the liquid surface; (b) Apply a lattice-like partition plate having transverse dimensions of through-holes that allow easy entry and exit from the substrate surface to the monomolecular film surface from above, and place the monomolecular film portion into the partition plate. (c) contact the divided monomolecular film portion surface from above while holding the substrate surface horizontally, and pull it away to transfer the monomolecular film portion to the substrate surface; (d) The method is characterized in that the transfer of the monomolecular film portion onto the substrate surface is repeated to accumulate a plurality of monomolecular films on the substrate.
この発明による方法の好ましい態様において、基板を、
区画板の各透し孔内に順次移動させて、(ハ)工程の転
移を繰り返すことができる。In a preferred embodiment of the method according to the invention, the substrate is
By sequentially moving it into each of the through holes of the partition plate, the transfer of step (c) can be repeated.
この発明による方法の好ましい別の態様において、複数
の基板各々を、同時に各透し孔内に挿入し、次いで、区
画板を移動させて単分子膜部分を区画板の各透し孔内に
区画する様に、(イ)工程、(C7)工程および(ハ)
工程を繰り返すことができる。In another preferred embodiment of the method according to the invention, each of the plurality of substrates is simultaneously inserted into each through-hole, and then the partition plate is moved to partition the monolayer portion into each through-hole of the partition plate. (A) Step, (C7) Step and (C)
The process can be repeated.
この発明による一態様の積層体の製造装置は、基板上に
複数の単分子膜が累積された積層体を製造する装置であ
って、
透し孔に基板面を容易に出入れすることができる格子を
有し、その格子の枠が液面上の単分子膜を、基板面寸法
に失質的に等しい複数の単分子膜部分に区画することを
特徴とするものである。An apparatus for manufacturing a laminate according to one embodiment of the present invention is an apparatus for manufacturing a laminate in which a plurality of monomolecular films are accumulated on a substrate, and the substrate surface can be easily taken in and out of a through hole. It is characterized in that it has a lattice, and the frame of the lattice divides the monomolecular film on the liquid surface into a plurality of monomolecular film portions whose dimensions are essentially equal to the substrate surface dimensions.
この発明による積層体の別の態様の製造装置は、前記態
様の装置の透し孔に区画された単分子膜部分面に、基板
面を水平に保持しながら上方より接触しかつ引離し、単
分子膜部分を基板面に転移させる自動制御装置を備える
ことを特徴とするものである。Another aspect of the apparatus for manufacturing a laminate according to the present invention is to contact the monomolecular film partial surface defined by the through hole of the apparatus of the above aspect from above while holding the substrate surface horizontally, and then pull it away. This method is characterized by being equipped with an automatic control device that transfers the molecular film portion onto the substrate surface.
以下、この発明をより具体的に説明する。This invention will be explained in more detail below.
製造装置
この発明における区画板は、基板上に複数の単分子膜が
累積された積層体を製造する装置であって、透し孔の横
断寸法が基板面を容易に出入れできる寸法である格子を
有し、この格子の枠が、液面上の単分子膜を基板面寸法
と実質的に等しい複数の単分子膜部分に区画する。Manufacturing Apparatus The partition plate in this invention is an apparatus for manufacturing a laminate in which a plurality of monomolecular films are accumulated on a substrate, and is a lattice in which the transverse dimension of the through holes is such that it can be easily taken in and out of the substrate surface. The lattice frame divides the monomolecular film on the liquid surface into a plurality of monomolecular film portions that are substantially equal in size to the substrate surface.
区画板の透し孔の横断形状は、出入れする基板の形状に
応じて適宜選択変更される。その様な形状として、長方
形、正方形、平行四辺形、円形、楕円形、三角形、さら
にこれらを繰み合わせた形状などの形状がある。The cross-sectional shape of the through-hole in the partition plate is selected and changed as appropriate depending on the shape of the substrate to be taken in and taken out. Such shapes include rectangles, squares, parallelograms, circles, ellipses, triangles, and combinations of these shapes.
透し孔の横断形状および横断面積を含めた横断寸法は、
基板を水平に容易に出入れすることができるように決め
られる。The cross-sectional dimensions including the cross-sectional shape and cross-sectional area of the throughhole are:
It is designed so that boards can be easily taken in and out horizontally.
区画板の枠は、液面に接触するときや引離されるときな
どに生じる液面の乱れを低減するためにできるだけ細い
ことが望ましい。この枠の材質は、耐溶剤性、耐食性、
洗浄性および、機械的強度を考慮して選択される。その
様な材質として、ポリテトラフルオロエチレン、ポリフ
ッ化ビニリデン、共重合フッ素樹脂などのフッ素樹脂、
その他、ポリプロピレンなどの樹脂、およびこれらの樹
脂に金属などで補強した複合材、機械的強度がある材料
に上記の樹脂を塗布したものなどがある。It is desirable that the frame of the partition plate be as thin as possible in order to reduce disturbances in the liquid surface that occur when it comes into contact with the liquid surface or when it is separated. The material of this frame is solvent resistant, corrosion resistant,
Selected in consideration of cleanability and mechanical strength. Examples of such materials include fluororesins such as polytetrafluoroethylene, polyvinylidene fluoride, and copolymerized fluororesins;
Other examples include resins such as polypropylene, composites made of these resins reinforced with metal, and materials with mechanical strength coated with the above resins.
この発明における区画板として用いることができる一具
体例の区画板10を、第1図に示す。この例では、幅3
龍厚さ5關の枠11により骨組みが形成され、その枠で
15mmX40m+*の長方形の透し孔12を複数個形
成される。FIG. 1 shows a specific example of a partition plate 10 that can be used as a partition plate in the present invention. In this example, width 3
A framework is formed by a frame 11 with a thickness of 5 mm, and a plurality of rectangular through holes 12 of 15 mm x 40 m+* are formed in the frame.
この発明のおいては、上記の例に限定されず種々の変形
が可能である。The present invention is not limited to the above example, and various modifications are possible.
例えば、この発明による別の態様の製造装置では、前記
の区画板の透し孔に区画された単分子膜部分面に、基板
面を水平に保持しながら上方より接触しかつ引離し、単
分子膜部分を基板面に転移させる自動制御装置を備える
ことができる。For example, in another aspect of the manufacturing apparatus according to the present invention, the monolayer portion surface divided into the through holes of the partition plate is brought into contact with and separated from above while holding the substrate surface horizontally. An automatic control device may be provided to transfer the membrane portion to the substrate surface.
この変形例による製造装置を第2図に示す。A manufacturing apparatus according to this modification is shown in FIG.
この例では、基板1を、自動制御装置(アーム13を介
して制御)で、区画板10の各々の透し孔12内に順次
移動させ、出入れして(ハ)工程の転移を繰り返す。In this example, the substrate 1 is sequentially moved into and out of each of the through holes 12 of the partition plate 10 by an automatic control device (controlled via the arm 13), and the transfer of the step (c) is repeated.
製造方法
この発明の積層体の製造方法では、先ず液面に、累積す
べき物質の単分子膜が形成される(イ)。Manufacturing method In the method for manufacturing a laminate of the present invention, first, a monomolecular film of the substance to be accumulated is formed on the liquid surface (a).
この発明において累堵すべき物質は、積層体の用途に応
じて適宜選択されるが、少なくとも単分子膜形成能を有
するものである。例えば、アラキン酸などの長鎖脂肪酸
、機能性分子の長鎖アルキル誘導体、ある種の機能高分
子、生体高分子などの一つの分子内に親水基と疎水基を
持つ両親媒性有機物質などがある。The substance to be deposited in this invention is appropriately selected depending on the use of the laminate, but it must have at least the ability to form a monomolecular film. For example, long-chain fatty acids such as arachidic acid, long-chain alkyl derivatives of functional molecules, certain functional polymers, and amphiphilic organic substances that have a hydrophilic group and a hydrophobic group in one molecule, such as biopolymers, etc. be.
サブフェーズである液は、少なくとも累積すべき物質に
対して不溶性ないし、難溶性であり、化学的に悪影響し
ないものである。そのような液として、水、グリセリン
、重金属含有緩衝液などがある。The liquid that is the subphase is at least insoluble or poorly soluble with respect to the substance to be accumulated, and has no adverse chemical effect. Such liquids include water, glycerin, and heavy metal-containing buffers.
液面に単分子膜を形成する方法は、従来の方法を適用す
ることができる。例えば、槽に水を満たして液面を形成
し、次いで、累積すべき物質を液面に膜状に広げ、液面
に添ってバリアーを動かし、その膜を狭めて形成するこ
とができる。A conventional method can be applied to form a monomolecular film on the liquid surface. For example, a tank can be filled with water to form a liquid level, and then the substance to be accumulated can be spread over the liquid surface in a film, and a barrier can be moved along the liquid level to narrow the film.
次いで、この発明の方法において、格子状区画板を上方
より単分子膜面に当てて単分子膜部分を区画板の各透し
孔内に区画する(口)。Next, in the method of the present invention, a lattice-like partition plate is applied to the monomolecular membrane surface from above to partition the monomolecular film portion into each through hole of the partition plate (opening).
更に、区画された単分子膜部分面に、基板面を水平に保
持しながら上方より接触しかつ引離し、単分子膜部分を
基板面に転移させる(ハ)。Furthermore, while holding the substrate surface horizontally, it is brought into contact with the divided monomolecular film portion surface from above and pulled away, thereby transferring the monomolecular film portion onto the substrate surface (c).
単分子膜部分の基板面への前記転移を繰り返して、基板
上に複数の単分子膜を累積させる(二)。The transfer of the monomolecular film portion onto the substrate surface is repeated to accumulate a plurality of monomolecular films on the substrate (2).
(ニ)行程は、種々の態様により実施することができる
。(d) The process can be carried out in various ways.
例えば、基板を、区画板の各透し孔内に順次移動させて
、(ハ)工程の転移を繰り返すことができる。この態様
では、1またはそれ以上の一部の基板を同時に各透し孔
に順次出入れして複数の単分子膜を累積させる。For example, the transfer of step (c) can be repeated by sequentially moving the substrate into each of the through holes of the partition plate. In this embodiment, one or more portions of the substrate are sequentially moved in and out of each through-hole at the same time to accumulate a plurality of monolayers.
別の態様において、透し孔の数に相当する個数の基板各
々を、同時に各透し孔内に出入れし、次いで、区画板を
新たな単分子膜面に移動し、基板を同時に各透し孔に出
入れして複数の単分子膜を累積させる。この態様では、
(イ)工程、(ロ)工程および(ハ)工程が繰り返えさ
れる。In another embodiment, a number of substrates corresponding to the number of through-holes are moved in and out of each through-hole at the same time, and then the partition plate is moved to the new monolayer surface and the substrates are moved into and out of each through-hole at the same time. It moves in and out of the pores and accumulates multiple monolayers. In this aspect,
Steps (a), (b) and (c) are repeated.
[作 用]
上記の様な構成からなるこの発明では、は次の様に作用
する。[Function] The present invention having the above configuration operates as follows.
この発明の積層体の製造方法においては、格子状区画板
が単分子膜面に当てられると、区画板の枠部分が単分子
膜と直接に接触してその単分子膜部分を切断もしくは破
壊し、またはこれに付着させると共に、透し孔部分は単
分子膜と接触せずに膜をそのまま良好に維持する。従っ
て、透し孔の横断寸法に相当する面積の単分子膜部分が
透し孔に囲まれて区画される。この区画された単分子膜
部分を上方から基板面と接触させ液面から引離すと、単
分子膜部分が基板面に付着し、転移される。In the method for producing a laminate of the present invention, when the grid-like partition plate is applied to the monomolecular film surface, the frame portion of the partition plate directly contacts the monomolecular film and cuts or destroys the monomolecular film portion. , or attached thereto, the through-hole portion does not come into contact with the monomolecular membrane and maintains the membrane as it is. Therefore, a monomolecular membrane portion having an area corresponding to the cross-sectional dimension of the through-hole is defined and surrounded by the through-hole. When this divided monomolecular film portion is brought into contact with the substrate surface from above and pulled away from the liquid surface, the monomolecular film portion adheres to the substrate surface and is transferred.
この接触および引離しの際に、液面に波が生じる恐れが
あるが、区画板の枠部分はそのまま液面に保持されるの
で、波の発生を抑え、生じた波を鎮める働きをする。During this contact and separation, waves may be generated on the liquid surface, but since the frame portion of the partition plate remains on the liquid surface, it works to suppress the generation of waves and calm the waves that occur.
また、透し孔の横断寸法は、基板が水平に出入れできる
ように基板面より多少大きくされるが、基板面と同様の
寸法にされるので、基板の引離しに際して、余分な単分
子膜が付着するのを防止する。In addition, the transverse dimension of the through-hole is made slightly larger than the substrate surface so that the substrate can be taken in and out horizontally, but it is made to be the same dimension as the substrate surface, so when the substrate is separated, the excess monomolecular film Prevent from adhesion.
[発明の効果] この発明により次の効果を得ることができる。[Effect of the invention] The following effects can be obtained by this invention.
請求項1による製造方法では、単分子膜部分が透し孔内
に固定されるので、基板面を単分子膜面に接触させたと
きに、また、引離すときに生じる恐れがある液面の波を
抑制して、乱れた単分子膜の累積を防止することができ
、良好な膜構造を有するLB膜が得られる。さらに、基
板寸法と同じ単分子膜部分が転移するので、従来の問題
点である余分な単分子膜の回り込みを防止して良質のL
B膜が形成される。In the manufacturing method according to claim 1, since the monomolecular film portion is fixed in the through hole, the liquid level that may occur when the substrate surface is brought into contact with the monomolecular film surface and when it is separated is avoided. It is possible to suppress the waves and prevent the accumulation of a disordered monolayer, resulting in an LB film having a good film structure. Furthermore, since the portion of the monomolecular film that is the same as the substrate size is transferred, it is possible to prevent excess monomolecular film from wrapping around, which is a problem with conventional methods, and to achieve high-quality L.
A B film is formed.
請求項3では、多数の基板が同時に操作されるので、能
率よ<LB膜を有する積層体が製造される。In claim 3, since a large number of substrates are operated simultaneously, a stack with <LB films can be manufactured with greater efficiency.
請求項4による製造装置では、良好なLB膜を有する積
層体を製造することができると共に、構造が簡素である
ために、廉価に得られ、故障などの支障を容易に排除で
きる。With the manufacturing apparatus according to the fourth aspect, it is possible to manufacture a laminate having a good LB film, and since the structure is simple, it can be obtained at a low cost, and troubles such as failure can be easily eliminated.
請求項5による製造装置では、ロボットなどの自動制御
装置を用いるので、再現性を高め、作業効率を著しく向
上されることができる。In the manufacturing apparatus according to the fifth aspect, since an automatic control device such as a robot is used, reproducibility can be improved and work efficiency can be significantly improved.
[実施例] 以下、この発明を実施例により具体的に説明する。[Example] Hereinafter, the present invention will be specifically explained with reference to Examples.
実施例
下記に示す条件で、アルキルアンモニウム−Ni (
dmi t)2とアラキン酸とを1=1の割合で混合単
分子膜を形成した。Example Under the conditions shown below, alkylammonium-Ni (
A mixed monomolecular film was formed by mixing dmit)2 and arachidic acid in a ratio of 1=1.
装置: Lauda PIImvaa
ge気温: 22℃
湿度: 40%
展開溶媒:ベンゼン/アセトニトリル−1/1溶液濃度
: 5X10−4 Mサブフェーズ:
純粋水
サブフェーズ温度: 25℃
バリアー圧縮速度: 2cm/分
表面圧; 20 dyne/ cm得ら
れた単分子膜上に、第1図に示す区画板を載せて単分子
膜を区画し、区画された単分子膜部分を、アラキン酸L
B膜を5層累積し疎水処理されたガラス基板上に水平付
着させて累積した。Equipment: Lauda PIImvaa
ge Temperature: 22°C Humidity: 40% Developing solvent: Benzene/acetonitrile-1/1 solution concentration: 5X10-4 M subphase:
Pure water subphase temperature: 25°C Barrier compression speed: 2 cm/min Surface pressure: 20 dyne/cm The monomolecular film was partitioned by placing the partition plate shown in Figure 1 on the obtained monomolecular film. Arachic acid L
Five layers of the B film were deposited horizontally on a hydrophobically treated glass substrate.
その結果、基板の接触離脱時の波紋発生がなく、余分の
単分子膜の回込みがなく、良好なLB膜を得た。更に、
単に区画板を液面に置くだけで区画された単分子膜を2
1枚形成することができた。As a result, a good LB film was obtained, with no ripples occurring when the substrate came into contact with each other and no excess monomolecular film spreading. Furthermore,
By simply placing the partition plate on the liquid surface, the partitioned monomolecular film can be divided into 2 parts.
I was able to form one sheet.
また、基板の移動すべき場所が明確になり、作業能率も
改善させる。In addition, the location to which the board should be moved becomes clear, improving work efficiency.
比較例
実施例を同じ組成の単分子膜を、垂直浸漬法でLB膜の
累積を行った。しかし、単分子膜が流動せず、基板が突
き抜けて累積できなっかた。COMPARATIVE EXAMPLE A monomolecular film having the same composition as the example was used to accumulate an LB film using the vertical dipping method. However, the monomolecular film did not flow and the substrate penetrated, making it impossible to accumulate.
第1図はこの発明による製造方法に用いることができる
区画板の平面図、第2図はこの発明による製造方法に用
いることができる装置を示す概略図、第3図は垂直浸漬
法を説明する説明図、第4図は水平付着法を説明する説
明図、第5図は従来の水平付着法の問題点を説明する説
明図である。
1・・・基板、2・・・単分子膜、3・・・LB膜、4
・・・積層体、10・・・区画板、11・・・透し孔、
12・・・枠、13・・・アーム。Fig. 1 is a plan view of a partition plate that can be used in the manufacturing method according to the present invention, Fig. 2 is a schematic diagram showing an apparatus that can be used in the manufacturing method according to the invention, and Fig. 3 explains the vertical immersion method. FIG. 4 is an explanatory diagram for explaining the horizontal adhesion method, and FIG. 5 is an explanatory diagram for explaining the problems of the conventional horizontal adhesion method. 1... Substrate, 2... Monomolecular film, 3... LB film, 4
... Laminate, 10... Partition plate, 11... Through hole,
12...Frame, 13...Arm.
Claims (1)
する方法であって、 液面に、累積すべき物質の単分子膜を形成し、基板面を
透し孔に容易に出入れすることができる透し孔の横断寸
法を有する格子状区画板を、上方より該単分子膜面に当
てて、基板面寸法と実質的に等しい単分子膜部分を該区
画板の各透し孔内に区画し、 区画された単分子膜部分面に、基板面を水平に保持しな
がら上方より接触しかつ引離し、単分子膜部分を基板面
に転移させ、 単分子膜部分の基板面への前記転移を繰り返して、基板
上に複数の単分子膜を累積させる ことを特徴とする積層体の製造方法。 2、基板を、区画板の各透し孔内に順次移動させて、単
分子膜部分の基板面への転移を繰り返す、請求項1記載
の積層体の製造方法。 3、複数の基板各々を、同時に各透し孔内に挿入し、次
いで、区画板を移動させて単分子膜部分を区画板の各透
し孔内に区画することを繰り返す、請求項1記載の積層
体の製造方法。 4、基板上に複数の単分子膜が累積された積層体を製造
する装置であって、 基板面を透し孔に容易に出入れすることができる格子を
有し、該格子の枠が液面上の単分子膜を、基板面寸法と
実質的に等しい複数の単分子膜部分に区画することを特
徴とする装置。 5、請求項4記載の装置の透し孔に区画された単分子膜
部分面に、基板面を水平に保持しながら上方より接触し
かつ引離し、単分子膜部分を基板面に転移させる自動制
御装置を備えることを特徴とする積層体を製造する装置
。[Claims] 1. A method for manufacturing a laminate in which a plurality of monomolecular films are accumulated on a substrate, the method comprising forming a monomolecular film of a substance to be accumulated on a liquid surface and transmitting the material through the substrate surface. A lattice-like partition plate having a transverse dimension of the through-hole that can be easily inserted into and out of the through-hole is applied from above to the monomolecular film surface to cover a portion of the monomolecular film that is substantially equal to the surface dimension of the substrate. It is partitioned into each through-hole of the partition plate, and the partitioned monomolecular film portion is brought into contact with and separated from above while holding the substrate surface horizontally, and the monomolecular film portion is transferred to the substrate surface. A method for producing a laminate, comprising repeating the transfer of the molecular film portion onto the substrate surface to accumulate a plurality of monomolecular films on the substrate. 2. The method for manufacturing a laminate according to claim 1, wherein the substrate is sequentially moved into each of the through holes of the partition plate, and the monomolecular film portion is repeatedly transferred to the substrate surface. 3. The step of repeatedly inserting each of the plurality of substrates into each of the through holes at the same time, and then moving the partition plate to partition the monomolecular film portion into each of the through holes of the partition plate is repeated. A method for manufacturing a laminate. 4. An apparatus for manufacturing a laminate in which a plurality of monomolecular films are accumulated on a substrate, which has a lattice that allows the substrate surface to be easily taken in and out of through holes, and the frame of the lattice is An apparatus characterized in that a monomolecular film on a surface is divided into a plurality of monomolecular film portions having substantially the same dimensions as the substrate surface. 5. Automatically transferring the monomolecular film portion to the substrate surface by contacting and separating the monomolecular film portion defined by the through hole from above while holding the substrate surface horizontally in the apparatus according to claim 4. An apparatus for manufacturing a laminate, comprising a control device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15721988A JPH02180663A (en) | 1988-06-25 | 1988-06-25 | Manufacture of laminate and its device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15721988A JPH02180663A (en) | 1988-06-25 | 1988-06-25 | Manufacture of laminate and its device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02180663A true JPH02180663A (en) | 1990-07-13 |
Family
ID=15644824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15721988A Pending JPH02180663A (en) | 1988-06-25 | 1988-06-25 | Manufacture of laminate and its device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02180663A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014190575A1 (en) * | 2013-05-29 | 2014-12-04 | 深圳市华星光电技术有限公司 | Manufacturing apparatus and manufacturing method for alignment film |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291058A (en) * | 1985-06-15 | 1986-12-20 | Canon Inc | Membrane forming apparatus |
JPS63151373A (en) * | 1986-12-16 | 1988-06-23 | Toshiba Corp | Organic membrane manufacturing device |
-
1988
- 1988-06-25 JP JP15721988A patent/JPH02180663A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291058A (en) * | 1985-06-15 | 1986-12-20 | Canon Inc | Membrane forming apparatus |
JPS63151373A (en) * | 1986-12-16 | 1988-06-23 | Toshiba Corp | Organic membrane manufacturing device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014190575A1 (en) * | 2013-05-29 | 2014-12-04 | 深圳市华星光电技术有限公司 | Manufacturing apparatus and manufacturing method for alignment film |
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