JPS61291059A - Membrane forming apparatus - Google Patents

Abstract

PURPOSE:To perform continuous and efficient work, by providing a plurality of a developing liquid surfaces to a membrane forming apparatus and forming a membrane to at least one liquid surface and supplying a membrane forming molecular group to at least the other one liquid surface. CONSTITUTION:A partition 14 is rotated to the direction opposite to an arrow to widen a developing liquid surface and a membrane forming molecular group is dripped on the liquid surface A from a dripping nozzle 17. Next, the partition 14 is rotated to the direction shown by the arrow to reduce the area of the developing liquid surface A and pressure is applied to the membrane forming molecular group. When the membrane forming molecular group shows set sur face pressure and a monomolecular membrane is formed, the monomolecular membrane is built up on a substrate 7. Because the area of the developing liquid surface A is reduced as the transfer of the monomolecular membrane advances, a membrane forming molecule tank 16 is rotated to the side of a developing liquid surface B and the membrane forming group is dripped on the liquid surface B from the dripping nozzle 17. Hereinafter, the same operation as that in the developing liquid surface A is performed to enable the continuous formation of the membrane.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an apparatus for forming an organic thin film, which is a main component of devices in the semiconductor and optical technology fields, and in particular, by a single molecule accumulation method. The present invention relates to a film forming apparatus for forming the above organic thin film on a substrate.

[Summary of the Disclosure] This specification and drawings provide a film forming apparatus using a single molecule accumulation method, which is provided with a plurality of film forming liquid levels, and at least one liquid level is coated with a film while at least one other liquid level is formed. This invention discloses a technique that enables efficient film formation by having a structure in which a group of molecules for film formation are supplied to the liquid surface.

[Prior Art] Conventionally, the use of materials in the semiconductor technology field and the optical technology field has mainly focused on inorganic materials that are relatively easy to handle. One reason for this is that technological progress in the field of organic chemistry has lagged significantly behind that in the field of inorganic materials.

However, recent technological advances in the field of organic chemistry have been remarkable, and it is said that the development of materials for inorganic substances has almost reached its limit. Therefore, there is a demand for the development of functional organic materials as new functional materials that surpass inorganic materials. Advantages of organic materials include being inexpensive, easy to manufacture, and highly functional. On the other hand, organic materials that have overcome heat resistance and mechanical strength, which have been considered inferior until now, have been produced one after another. Against this technical background, we are developing the functional parts (mainly thin film parts) of integrated circuit devices such as logic elements, memory elements, and photoelectric conversion elements, and optical devices such as microlens arrays and optical waveguides. The proposal to replace part or all of conventional inorganic thin films with organic thin films led to the development of molecular electronic devices and biological materials in which a single organic molecule has functions such as logic elements and memory elements. Several research institutes have recently announced proposals to create logic devices (e.g., biochips) consisting of

Organic films, which are the main components of such devices, are fabricated using single-molecule deposition methods. The single-molecule accumulation method (also known as the Langmuir-Prodgett method, LB method) is a method that utilizes the hydrophilicity and hydrophobicity of molecules with parent wood groups and hydrophobic groups to spread them out on water in an orderly manner to form a monomolecular film. A monomolecular film or a monomolecular cumulative film in which monomolecules are laminated on a substrate (these are called LB films) is created by forming a monolayer and then transferring it to the substrate surface.
It is possible to form

Conventionally, this type of apparatus is arranged such that a partition 2 horizontally partitions a water surface 3 inside a shallow and wide rectangular aquarium 1, as shown in FIG. The partition 2 functions as a two-dimensional cylinder, and a rectangular float 4 is floated inside the partition 2.
The width of the piston is made slightly narrower than the inner dimension of the partition 2, so that it can move smoothly from side to side as a two-dimensional piston.

In order to move the float 4 from side to side, the float 4 is connected to a winding device 6 using a motor or the like via a wire 5.

When forming a monomolecular film, the constituent substances of the film are dissolved in a volatile solvent such as benzene or chloroform, and the solution is dropped onto the water surface. After the solvent evaporates, a monomolecular film exhibiting the behavior of a two-dimensional system is left on the water surface. When the areal density of molecules is low, it is called a gas film of secondary gas. By moving the float 4 to the right, the expanse of the water surface 3 on which single molecules develop is reduced and the surface density is increased. As a result, the interaction between molecules becomes stronger, and the two-dimensional Transforms into a solid film. When this solid film is formed, the molecules are arranged and oriented neatly, resulting in the high degree of order and uniform ultra-thin film properties required of materials that make up semiconductors.

As a method of transferring the monomolecular film from the water surface 3 to the substrate 7 surface, the substrate 7 attached to the substrate holder 8 is vertically moved while applying a constant surface pressure suitable for cumulative operation to the monomolecular film on the water surface 3. There is a vertical immersion method in which the monomolecular film is transferred by moving it up and down. This method uses an
There are three types: Y-type, in which the monomolecular film 10 adheres both during immersion and during lifting, as shown in FIG. 3(C), and Z-type, in which monomolecular film 10 adheres only during lifting, as shown in FIG. In the molecule shown in FIG. 3, 11 is a hydrophilic portion and 12 is a hydrophobic portion.

[Problems to be solved by the invention] Conventional devices are made with emphasis on their function as experimental machines, and when producing a multilayer cumulative film, the developing liquid level is only in one place. After transferring the monomolecular film in this area, it is necessary to repeat the steps of cleaning the liquid surface, dropping the film-forming molecules, pressurizing the liquid surface, forming a monomolecular film again, and attaching the film. there were.

Cleaning the surface of the liquid takes time and effort, and it is not possible to apply a film efficiently.

The object of the present invention is to eliminate the drawbacks of the conventional method mentioned above and to perform continuous film formation with high efficiency.

[Means for Solving the Problems] The present invention is an apparatus for transferring a group of film-forming molecules developed on a liquid surface onto a substrate as a monomolecular film or a cumulative film thereof,
A film forming apparatus characterized by having a structure in which a plurality of liquid surfaces are provided, and the film forming molecules are supplied to at least one other liquid surface while forming a film on at least one liquid surface. be.

FIG. 4 shows an example of a method for manufacturing a cumulative film according to the present invention. (a) Turn the partition 14 counterclockwise to widen the developing liquid level A. The film-forming molecule group is dropped onto the liquid surface A.

(b) Turn the partition 14 clockwise to reduce the area of the developing liquid surface A and apply pressure to the film-forming molecule group. (C) After the film-forming molecular group exhibits the set surface pressure and forms a monomolecular film,
The monomolecular film is deposited on the substrate 7 under a constant set surface pressure. (d) Transfer of monomolecular film progresses and development liquid level A
The area of will continue to decrease. At this time, a group of the film formation amount f is dropped onto the developing liquid surface B. (e) Pull the board 7 -1-. (f)
The partition 14 is turned counterclockwise to apply pressure to the film-forming molecule group on the developing liquid surface B. (g) After the film-forming molecule group exhibits a set surface pressure and a monomolecular film is formed, the monomolecular film is accumulated on the substrate 7 under a constant surface pressure. (h) Drop the film-forming molecule group onto the open liquid surface A of K. Further, by returning to (a) and performing the same operation, continuous film formation can be performed. In this way, a film forming apparatus that drops a group of film-forming molecules on the other side while forming a film on one side can easily form a film continuously.

Note that the shape of the liquid tank or developing liquid surface is not limited to semicircle or fan-shaped.
The present invention can be applied to any shape that can be provided with a movable partition 14 to keep the surface pressure constant.

[Function] The developing liquid levels A and B have a structure in which a constant surface pressure is applied to the film-forming molecule group on the liquid level 2 by adjusting the area by rotating the partition 14. That is, the area of the liquid surface on the side where the film is formed on the substrate 7 becomes smaller as the film formation progresses.

[Example] An example of the present invention is shown in FIG. 3 is a liquid tank for forming a monomolecular film, 3 is a liquid surface for forming a monomolecular film, 7 is a substrate to which the monomolecular film is transferred, and 8 is a substrate holder for supporting the substrate 7. 13 is a surface pressure gauge that detects surface pressure; 14
is a partition that applies pressure to the unfolded molecular group. 15 is a guide for moving the substrate 7. Reference numeral 16 indicates a tank for containing a group of molecules to be formed into a film, 17 indicates a dropping nozzle section, and 18 indicates a table for rotating the tank. The partition 14 is configured to move smoothly on the inner wall of the liquid tank 1 with no gaps around the rotating shaft 19. The tank 16 containing the film-forming molecules is mounted on the rotary table 1.
8, and the dripping nozzle 17 can be moved to any position on the liquid tank. The partition 14 is rotated to widen the surface of the developing liquid, and the nozzle 17 is moved onto this liquid surface to drop a group of molecules for film formation. Partition 1 while measuring the surface pressure with a surface pressure gauge
4 to apply pressure, and when the surface pressure reaches the set value, stop the partition 14. Here, the monomolecular film is transferred onto the substrate 7 by moving the substrate 7 above this liquid level and moving it up and down in the vertical direction. At this time, the partition 14 is moved so that a constant surface pressure is applied to the monomolecular film.

In the above embodiment, the same substance was accumulated as the film-forming molecule group, but the film may be formed by developing different film-forming molecule groups on the developing liquid levels A and B. In this way, a hetero film can also be formed efficiently.

[Effects of the Invention] As explained above, the film forming apparatus has a structure in which a plurality of developing liquid surfaces are provided, a film is formed on at least one liquid surface, and a group of film-forming molecules is supplied to at least one other developing liquid surface. This makes it possible to perform continuous and efficient film formation. Furthermore, it has become possible to form a heterolayer film.

[Brief explanation of the drawing]

Fig. 1(a) is a perspective view of an embodiment of the film forming apparatus of the present invention, Fig. 1(b) is a plan view thereof, Fig. 2 is a perspective view of a conventional film forming apparatus, and Fig. 3 is a single molecule FIG. 4, which is a classification diagram of the structure of a film or a cumulative film viewed from the molecular orientation, is an explanatory diagram of the procedure for film deposition using the apparatus of the present invention. 1: Liquid tank, 2: Frame, 3: Liquid surface, 4: Float, 5: Wire, 6: Winding device, 7: Substrate, 8: Substrate holter 11
0: Monomolecular film, 11: Hydrophilic part, 12: Hydrophobic part, 13: Surface pressure gauge, 14: Partition, 15 Ni guide, 16: Tank for film-forming molecules, 17: Dripping nozzle, 18: Rotating table, 18 :Axis of rotation.

Claims (1)

[Claims] This is a device that transfers a group of molecules for film formation developed on a liquid surface onto a substrate as a monomolecular film or a cumulative film thereof, and has a plurality of such liquid surfaces, and at least one liquid surface is used to transfer a group of molecules for film formation onto a substrate. A film forming apparatus characterized by having a structure in which the film forming molecule group is supplied to at least one liquid surface of the liquid surface.