JPS61291058A - Membrane forming apparatus - Google Patents

Abstract

PURPOSE:To form an org. membrane having no monomolecular membrane folded back to the end of a substrate, in a film forming apparatus according to a horizontal adhesion method for taking the monomolecular membrane on the surface of water while transferring the same, by providing a frame dividing a molecular group. CONSTITUTION:A monomolecular membrane 10 set to arbitrary surface pressure has been formed on the surface of water in a water tank 1. An upper plate 15 is pushed down to the direction shown by an arrow A to lower a frame 13 and the monomolecular membrane 10 on the surface of water is partitioned by said frame 13. Next, a substrate holder 8b is pushed down to the direction shown by an arrow B to lower a substrate 7 and the monomolecular membrane partitioned by the frame 13 is transferred to the substrate 7. Thereafter, the substrate 7 and the frame 13 are raised from the surface of water to finish one process for transferring the monomolecular membrane onto the substrate 7. Further, when surface pressure is applied to the monomolecular film to per form the same operation, a built-up membrane can be formed.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an apparatus for forming organic thin films, which are the main components of devices in the semiconductor technology field, optical technology field, etc. The present invention relates to a film forming apparatus for forming the above organic thin film on a substrate.

[Summary of the Disclosure] This specification and drawings describe a method in which a group of molecules for film formation is spread on a water surface,
In a film forming apparatus using the horizontal adhesion method, in which a monomolecular film on the water surface is transferred by vertically moving a substrate held horizontally to the water surface, the molecules are separated by a frame, and the monomolecular film is transferred to the edge of the substrate. The present invention discloses a technique for forming an organic thin film without folding back.

BACKGROUND OF THE INVENTION Conventionally, the use of materials in the semiconductor technology field and optical technology field has mainly focused on inorganic materials that are relatively easy to handle. One reason for this is that technological progress in the field of organic chemistry has lagged significantly behind that in the field of inorganic materials.

However, recent technological advances in the field of organic chemistry have been remarkable, and it is said that the development of materials for inorganic substances has almost reached its limit. Therefore, there is a demand for the development of functional organic materials as new functional materials that surpass inorganic materials. Advantages of organic materials include being inexpensive, easy to manufacture, and highly functional. On the other hand, organic materials that have overcome heat resistance and mechanical strength, which have been considered inferior until now, have been produced one after another. Against this technical background, we are developing the functional parts (mainly thin film parts) of integrated circuit devices such as logic elements, memory elements, and photoelectric conversion elements, and optical devices such as microlens arrays and optical waveguides. The proposal to replace part or all of conventional inorganic thin films with organic thin films has led to the creation of molecular electronic devices and biological materials in which a single organic molecule has functions such as logic elements and memory elements. Several research institutes have recently announced proposals to create logic devices (e.g., biochips) consisting of

Organic thin films, which are the main components of such devices, are fabricated using single-molecule accumulation methods. The middle molecule accumulation method (also known as the Langmuir-Prodgett method, LB method) uses the existing hydrophobicity and hydrophobicity of molecules with parent wood groups and hydrophobic groups to form a single molecule by expanding water in an orderly manner. By forming a film and then transferring it to the substrate surface, it is possible to form a monomolecular film or a medium-molecular cumulative film (these are referred to as LB films) on a substrate, in which monolayers are laminated.

Conventionally, this type of apparatus is arranged such that a partition 2 horizontally partitions a water surface 3 inside a shallow and wide rectangular aquarium 1, as shown in FIG. The partition 2 functions as a -dimensional cylinder, and a rectangular float 4 is floated inside the partition 2.
The width of the piston is made slightly narrower than the inner dimension of the partition 2, so that it can move smoothly from side to side as a two-dimensional piston.

In order to move the float 4 from side to side, the float 4 is connected to a winding device 6 using a motor or the like via a wire 5.

When forming a monomolecular film, the material constituting the crotch is dissolved in a volatile solvent such as benzene or chloroform, and the solution is dropped onto the water surface. After the solvent evaporates, a monomolecular film exhibiting the behavior of a two-dimensional system is left on the water surface 3-1-. When the areal density of molecules is low, it is called a gas film of secondary gas. By moving the float 4 to the right, the expanse of the water surface 3 on which single molecules develop is reduced and the surface density is increased. As a result, the interaction between molecules becomes stronger, and the two-dimensional Transforms into a solid film. When this solid film is formed, the molecules are arranged and oriented neatly, resulting in the high degree of order and uniform ultra-thin film properties required of materials that constitute semiconductors.

As a method of transferring the monomolecular film from above the water surface 3 to the surface of the substrate 7, the substrate 7 attached to the substrate holter 8a is transferred while applying a constant surface pressure suitable for cumulative operation to the monomolecular film on the water surface 3''. There is a vertical dipping method in which a monomolecular film is transferred by moving up and down in the vertical direction 9.

In this method, the monomolecular film 10 adheres only during dipping, as shown in FIG. Y type, 3rd
There are three types of Z type, in which the monomolecular film 10 is attached only during pulling as shown in Figure (C). In addition, in the molecule of Figure 3, 11
is a hydrophilic portion, and 12 is a hydrophobic portion.

Another method is a horizontal adhesion method in which the monomolecular film on the water surface is transferred by moving the substrate 1" downward while keeping the monomolecular adhesion surface of the substrate horizontal. In this horizontal adhesion method, it is thought that the orientation state of the monomolecular film on the water surface can be directly transferred to the substrate-L. A Z-shape can be formed. In addition, accumulation can be carried out even at low surface pressures where membrane penetration cannot be achieved with the vertical immersion method.

[Problems to be Solved by the Invention] Conventional film forming methods are carried out using an apparatus to which the above-mentioned vertical immersion method is applied, and the horizontal old-fashioned method is not often used.

The vertical dipping method has a problem in that during the accumulation of a monomolecular film, the monomolecular film slips down due to the influence of gravity, etc., causing film flow, which changes the orientation state of the accumulated film. Further, the film deposition speed was slow at several mm-cm/win, making it unsuitable for film formation over a large area.

On the other hand, in the horizontal deposition method, the orientation state of the monomolecular film at the liquid surface -1- can be directly transferred to the substrate.

It also has the advantage of being able to accumulate even under low surface pressures that would not allow film formation with the vertical immersion method. However, with this horizontal deposition method, when the substrate is pulled out after the film has been deposited, the liquid flows onto the surface of the substrate on which the film is to be deposited, making it difficult to produce a clean film such as two layers of film being deposited at the edge of the substrate. Conventionally, film formation has been carried out using equipment that applies the vertical immersion method.

The present invention was made in view of the problems of the conventional method as described in -L, and it prevents the middle molecule film from folding back to the edge of the substrate, and makes it possible to implement the horizontal side stone method, which was not possible with the conventional method. This paper proposes an apparatus that improves the efficiency of film deposition.

[Means for Solving the Problems] The present invention is a film forming apparatus that transfers a group of film forming molecules developed on a water surface onto a substrate in small portions or as a cumulative film thereof. , is a film forming apparatus characterized by having a structure in which the molecular groups are separated using frames.

FIG. 1 schematically shows an example of the film forming apparatus of the present invention.

A frame 13 and a horizontally held substrate 7 are installed on one side of the monomolecular film 10 which is pressurized to an arbitrary surface pressure (see Fig. 1a).
). The frame 13 is lowered and the monomolecular film 10 is sectioned to match the substrate 7 (FIG. 1b). In this state, the substrate 7 is lowered to fit inside the frame 13, and the monomolecular film 10 is attached (FIG. 1C). Remove the substrate 7 and completely cover the monolayer 10 with the substrate 7.
2 (Fig. 1 d). The frame 13 is lifted to complete the film application process (Fig. 1e).

In this way, hold the substrate horizontally and move it up and down to place the film on the substrate.
By providing a frame when transferring the monomolecular film to the substrate, it is possible to prevent the monomolecular film from folding back to the edge of the substrate, and a clean film can be produced on the substrate.

In the above example, we explained the fabrication of an X-shaped membrane in which the substrate and frame were brought closer to the top of the monomolecular film and the film was transferred. We can manufacture X-type membranes. Further, it is also possible to have a positional relationship in which the frame is placed in the liquid and the substrate is placed from one side, and vice versa. Also,
Although we have given an example in which the substrate and frame move up and down, it is sufficient that the membrane, substrate, and frame adhere to each other, and the water surface may move up and down. Furthermore, the present invention can be applied even when the substrate is held diagonally, rather than horizontally.

With such an apparatus, film deposition is carried out almost instantaneously, and considering that film deposition using the vertical immersion method is performed at a speed of several mm to cm/win, there is a large difference in efficiency in film production.

Another advantage is that a film can be applied to a large area of a substrate in one go.

By dividing the water surface with a frame, the film-forming molecules spread out on the water surface are cut into approximately the same area as the substrate.

By bringing the substrate into contact with the cut molecules within this frame and adhering the monomolecular film to the substrate, it is possible to prevent the monomolecular film from folding back toward the edge of the substrate, which occurs when the substrate is pulled up.

"Example" An example of the present invention is shown in FIG. 4a. 1 is a water tank in which the monomolecular film 10 is developed, 7 is a substrate to which the monomolecular film is transferred, 8b is a substrate holder that holds the substrate 7, 13 is a frame that partitions the monomolecular film, and 14 is a fixing frame 13 and the upper plate 15. The guide rod 16 is the main body frame and is integrated with the water tank l. Frame 1
3 is suspended from the main body frame 16 by means of a spring 17, an upper plate 15, and a guide rod 14. 18 is the substrate holder 8
19 is a support plate that supports b, and 19 is a spring that determines the vertical distance between the frame 13 and the substrate 7. Figure 4: Substrate 7 and frame 1
FIG.

Next, we will explain the time required to attach the film. A monomolecular film 10 set to an arbitrary surface pressure is formed on the water surface of the water tank 1.

The upper plate 15 is pushed down in the direction of arrow A to lower the frame 13 and partition the monomolecular film 10 on the liquid surface. This means that the portion to be transferred to the substrate 7 has been cut out. Therefore, the board holder 8b
is pushed down in the direction of arrow B, the substrate 7 is lowered, and the monomolecular film partitioned by the frame 13 is transferred. Then, the board 7 and the frame 1
3 from the liquid level, one step of transferring the monomolecular film 10 onto the substrate 7 is completed. Furthermore, if surface pressure is applied to a monomolecular film and the same action is performed, a cumulative film can be created.

Another embodiment is shown in FIG. In FIG. 5a, 1 is a water tank, 3 is a liquid surface forming a monomolecular film, and 13 is a lattice-like frame that partitions the monomolecular film. The frame 13 is tilted forward onto the liquid surface 3 on which a monomolecular film has been formed by applying a set value of surface pressure to partition the monomolecular film (FIG. 5b). In this state, the substrate 7 is moved up and down according to the individual partitions, and the monomolecular film is transferred (A). Furthermore, move the substrate to the next partition and move it up and down to transfer the monolayer (
B). By repeating this operation, a cumulative film can be easily formed.

In the above example, a single substrate was moved according to the lattice-shaped frame to produce a cumulative film, but it is possible to place the substrates according to the number of partitions in the lattice-shaped frame and apply films to many substrates at the same time. It is also possible to do so (FIG. 5C). Further, in this embodiment, the shape of the frame is rectangular, but there is no need to be particular about the shape, and patterns such as triangular, circular, and other patterns to some extent can be used. Further, the substrate 7 may be lowered first and then the frame 13 may be lowered, or they may be lowered at the same time.

[Effect of the invention J As explained above, in a film forming apparatus that performs film deposition while holding the substrate horizontally, a frame is provided above the surface of the film forming liquid to separate the groups of molecules for film forming. By dividing the group of molecules for use, it is possible to easily and efficiently form a monomolecular film or a cumulative film thereof on a substrate without folding or disordered orientation.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram of the film forming method of the present invention, Fig. 2 is a schematic perspective view of a conventional film forming apparatus, Fig. 3 is a classification diagram of the structure of a medium molecular film or a cumulative film as seen from the molecular orientation, and Fig. Figure 4a is a #1 side view of an embodiment of the present invention, Figure 4 is a perspective view of the main parts of the embodiment, and Figure 5 is a perspective view of an embodiment in which a plurality of frames are provided in a grid pattern. . 1: Water tank, 2: Partition, 3: Water surface, 4: Float, 5: Wire, 6: Winding device, 7: Substrate, 8a, 8b: Substrate halter-1] 0: Monomolecular film, 11: Current aqueous part , 12:@
Water-based part, 13: frame, 14: guide rod, 15: dish plate, 1
62 main frame, 17: spring, 1st: support plate, 19:
Spring.

Claims (1)

[Claims] It is a film forming apparatus that transfers a group of molecules for film forming developed on a water surface onto a substrate as a monomolecular film or a cumulative film thereof, and has a structure in which the group of molecules is separated using a frame. Membrane device.