JPS61271049A - Film forming device - Google Patents

Abstract

PURPOSE:To carry out easily necessary chemical and physical reactions by providing a treating vessel adjacent to a liq. tank and alternately transferring a substrate supported by a holder between the liq. tank and the treating vessel with a substrate control part. CONSTITUTION:With respect to a film forming device in the fields of semiconductor techniques, optical techniques, etc., rectangular liq. tanks 1a and 1b are provided in parallel and barriers 4a and 4b for controlling the pressure of a monomolecular film and film pressure sensors 10a and 10b are respectively furnished on developed water surfaces 3a and 3b. Besides, a towery substrate control part 12 is vertically provided on intermediate stands of the two liq. tanks 1a and 1b and substrates 7a-7d are supported on the leading end part of an armlike substrate holder 8 which is almost horizontally extended from the top end. The control part 12 is rotated and moved up and down, the holder 8 is successively arranged, the substrates 7a-7d are lowered into the liq. tanks 1a and 1b and treating vessels 11a and 11b and a film is formed.

Description

[Detailed Description of the Invention] [Industrial Field of Application] Kiwamon relates to film forming equipment for organic thin films, which are the main components of devices, for example in the semiconductor technology field and the optical technology field, and particularly in the field of molecular layer The present invention relates to a film forming apparatus that can efficiently transfer a monomolecular film or a cumulative film thereof arranged in an orderly manner to a substrate and perform the accompanying processing.

[Prior Art] Conventionally, the use of materials in the semiconductor technology field and the optical technology field has mainly focused on inorganic materials that are relatively easy to handle.

However, recent technological progress in the field of organic chemistry has been remarkable, and the logical element L,
Integrated circuit devices such as memory elements and photoelectric conversion elements,
There have been proposals to construct part or all of the functional parts (mainly thin film parts) of optical devices such as microlens arrays and optical waveguides with organic thin films instead of conventional inorganic thin films.

The aliphatic thin film that is the main component of such devices is fabricated using a single molecule accumulation method. The perfect accumulation method (also known as the Langmuir-Prodgett method, LB method) is a single molecule that uses the hydrophilicity and hydrophobicity of molecules with parent wood groups and hydrophobic groups to expand into water in an orderly manner. After forming a film, it is transferred to the substrate surface to create a monomolecular cumulative film in which middle molecular films or single molecules are laminated on the substrate (these are called LB films).
It is possible to form

Conventionally, in this type of device, as shown in FIG. 2, a frame 2 is placed inside a shallow and wide rectangular liquid tank 1 so as to partition a water surface 3 into a water tank. The frame 2 functions as a two-dimensional cylinder, and a rectangular float 4 is floated inside the frame 2, and the width of the float 4 is made slightly narrower than the inner dimension of the frame 2, so that it can move smoothly from side to side as a two-dimensional piston. It is possible to move. In order to move the float 4 from side to side, the float 4 is connected to a winding device 6 using a motor or the like via a wire 5.

When forming a medium molecular film, the constituent materials of the film are dissolved in a volatile solvent such as benzene or chloroform, and the solution is dropped onto the water surface 3, JH. After the solvent evaporates, a monomolecular film exhibiting the behavior of a two-dimensional system is left on the water surface 3. When the areal density of molecules is low, it is called a gas film of secondary gas. By moving the float 4 to the right, the expanse of the water surface 3 on which single molecules expand is reduced and the surface density is increased. As a result, interactions between molecules become stronger, and two-dimensional liquids pass through a liquid film of two-dimensional liquid. Transforms into a solid film. When this solid film is formed, the molecules are arranged and oriented in a neat manner, resulting in a high degree of order and uniform ultra-thin film properties required for materials constituting semiconductors and the like.

As a method of transferring the film from the water surface 3F to the surface of the substrate 7, the substrate 7 is attached to the substrate holder 8 while maintaining a constant surface pressure suitable for cumulative operation on the middle molecular film of the water surface 3L.
There is a direct dipping method in which a monomolecular film is transferred by moving the monolayer up and down in the vertical direction 9. In this method, as shown in FIG. 3(a), the monomolecular film 10 is attached only during immersion, and
There are three types: Y type, in which the monomolecular film 10 adheres both during immersion and during pulling, as shown in ), and X type, in which the monomolecular film 10 adheres only during pulling, as shown in Figure 3 (C). . In the molecule shown in FIG. 2, 11 is a hydrophilic portion and 12 is a hydrophobic portion.

In addition to this, another method not shown is a horizontal adhesion method in which the monomolecular film is transferred by moving the substrate up and down with the medium molecular film adhesion surface of the substrate approximately parallel to the water surface. .

[Problems to be Solved by the Invention] In the conventional apparatus as described above, only the means for depositing the monomolecular film or the cumulative film thereof on the plate surface of the substrate is used, and the attached monomolecular film or the cumulative film thereof is not deposited. Drying, polymerization, etc. are performed in completely separate equipment.

Therefore, in order to perform these processes, it is necessary to carry and reset the board each time, which poses a problem of poor work efficiency.

[L Stage for Solving the Problems] Measures taken to solve the above problems will be explained with reference to FIG. 1, which corresponds to an embodiment of the present invention.
A processing tank 11a is adjacent to lb.

11b is provided, and the substrates 7a to 7d held on the substrate holder 8 are transferred to the liquid tank 1a, lb and the processing tank 11a.
, a substrate control unit 12 for mutually transferring between
The purpose of the present invention is to provide a film forming apparatus having the following features.

In the present invention, the processing tanks 11a and 11b refer to, for example, those for drying and polymerizing the monomolecular film or the accumulated film thereof transferred to the substrates 7a to 7d.
b and the processing tanks 11a and llb may each be singular. In addition, when providing a plurality of liquid tanks 1a and lb, if the water surface on which the film-forming molecule group is developed is divided into multiple parts, the liquid tank 1
There is no need to separate a and lb themselves.

"Function" The substrate control unit 12 transfers the substrates 7a to 7d from the liquid tanks La and lb to the processing tanks 11a and llb, and from the processing tanks 11a and llb to the liquid tanks 1a and lb. Therefore, the monomolecular film or its cumulative film can be transferred to the substrates 78 to 7d and the associated processing can be performed without having to carry and reset the substrates 7a to 7d one by one.

[Examples] Hereinafter, the present invention will be described in detail with reference to drawings showing examples.

FIG. 1 is a perspective view showing an example of a film forming apparatus according to the present invention. In FIG. 1, the film forming apparatus has two rectangular liquid tanks 1a and 1bt which are arranged parallel to each other, and barriers 4 for controlling the film pressure of the monomolecular film are placed on the developed water surfaces 3a and 3b, respectively.
a and 4b, and membrane pressure sensors 10a and 10b are provided. The barriers 4a and 4b are arranged so as to be slidable in the longitudinal direction of the liquid tanks 1a and lb, and the first monomolecular constituent substance A is dropped onto the water surface 3a, and the second monomolecular constituent substance B is dropped onto the water surface 3b. Thereafter, while monitoring the surface pressure with the membrane pressure sensors 10a and 10b, the barriers 4a and 4b are slid to set the desired surface pressure. A tower-shaped substrate control section 12 is installed on the intermediate stand between the two liquid tanks 1a and 1b, and the tips of four arm-shaped substrate holders 8 extend almost horizontally in all directions from the top end of the tower-shaped substrate control section 12. Substrates 7a and 7b on which film formation is performed are shown in FIG.
.

Holds 7c and 7d. Further, on the same intermediate stand, a pot-shaped processing tank 11 is placed at a distance corresponding to the arm length of the substrate holder 8 at a symmetrical position centering on the substrate control unit 12.
a and llb are provided. The substrate control unit 12 can be rotated and moved up and down, and by rotating 80 degrees at a time, the tips of the four substrate holders 8 are sequentially moved above the two liquid tanks 1a, lb and the two processing tanks 11a, llb. Each substrate 7a, 7b can be placed by vertical movement.

7c, 7d can be lowered into their tanks.

Assuming that the substrate 7a is lowered into the first liquid tank 1a,
The substrate 7c held at the symmetrical position is lowered into the second liquid tank 1b, and the middle molecular film A or B is transferred, respectively, and if this is repeated, a cumulative film is formed. After transferring the desired cumulative layer, the substrate control section 12
When rotated 90 degrees counterclockwise and lowered, the board 7
a to the first processing tank 11a, and the substrate 7c to the second processing tank 1.
Descend to 1b. At the same time, substrates 7b and 7d are placed in liquid tank l.
a, descend to lb.

For example, as a monomolecular constituent substance A, CIIH23CmiC-C*C-(CH2)8-COOH
After dissolving the diacetylene derivative compound shown in the formula in chloroform to a concentration of 3 X 1O-3saR/R,
pH 6.2, cadmium chloride concentration I x 10-3m
oi'/j) on the water surface 3a, and after the solvent chloroform is removed by evaporation, the surface pressure is increased to 20 dyne/cm. While keeping the surface pressure constant, the substrate 7a, whose surface is sufficiently clean and wood-friendly, is gently moved downward by L at a vertical movement speed of 1.0 cm/win in the direction across the water surface, and diacetylene monomolecules are removed. By transferring a plurality of layers of the film onto the substrate 7a, a diacetylene monomolecular cumulative film can be formed.

This substrate 7a is moved 90 degrees as described above, for example, by 2
When moved up and down to the treatment tank 11a, which is a photopolymerization tank containing a 54r+m ultraviolet radiation lamp, the diacetylene cumulative a film can be photopolymerized. This can be confirmed because the diacetylene film turns blue. Note that it is necessary to irradiate the diacetylene film uniformly and sufficiently with the ultraviolet rays.

According to such an apparatus, film transfer and photopolymerization can be performed in parallel while moving the substrate, so that rapid and uniform ultraviolet irradiation is possible.

As for the method of using the treatment tank, although photopolymerization was explained in the above embodiment, a thermal reaction may also be used by providing a heater or the like in the treatment tank. Additionally, a drying effect using a heater can also be used. Furthermore, one reaction tank may be used as a liquid tank to perform a chemical reaction with the monomolecular film.

FIG. 7jS3 is a perspective view showing another example of a film forming apparatus embodying the present invention. In FIG. 3, the film forming apparatus includes a circular tank, which is partitioned by a radial frame 2 into a plurality of fan-shaped tanks. The fan-shaped tanks are liquid tanks 1a and lb in which middle molecular layers are developed.

A processing tank 11a stores lc, ld and a chemical reaction liquid.

11b, llc, and lid are arranged alternately at every other location. A tower-shaped substrate control section 12 is provided at the center of the circular tank, and film formation is performed on the tips of four substrate holders 8 extending in all directions from the top end almost like a water mower. Substrates 7a, 7b.

Holds 7c and 7d. This board control section 1
2 can be rotated and moved up and down, and by rotating in 45 degree increments and moving up and down, the monomolecular film is first transferred to each substrate in a liquid bath and then chemically reacted in an adjacent treatment bath. Can be repeated. Of course, the treatment tank can be used not only for chemical reactions, but also for photopolymerization, thermal reactions, drying, and the like.

Furthermore, there is no limit to the number of partitions in the circular tank, and in this example, the liquid tank and the processing tank were arranged in a mating manner, but this can also be arranged in a way that corresponds to the process. The desired number of substrate holders may be provided as long as the number can correspond to the number of partitions of the circular tank and the process.

[Effects of the Invention] As explained above, according to the present invention, by providing a processing tank in a film forming apparatus, necessary chemical and physical It is possible to provide a film forming apparatus that can easily carry out reactions.

[Brief explanation of drawings]

FIG. 1 is a perspective view of one embodiment of the present invention, FIG. 2 is a perspective view of a conventional example, and FIG. 3 is a perspective view of another embodiment of the present invention. 1a-1d...Liquid tank, 2...Frame, 3...Water surface, 4
a, 4b... Barrier, 7a-7d... Substrate. 8...Substrate holder, 10a, tube...Membrane pressure sensor, 11a N11d...Reaction tank, 12...Substrate control section. Figure 1 Figure 2

Claims (1)

[Claims] I) A film forming apparatus characterized in that a processing tank is provided adjacent to the liquid tank, and a substrate control unit that mutually transfers a substrate held in a substrate holder between the liquid tank and the processing tank.