JPS62294434A - Apparatus for forming monomolecular built-up film - Google Patents

Apparatus for forming monomolecular built-up film

Info

Publication number
JPS62294434A
JPS62294434A JP13685086A JP13685086A JPS62294434A JP S62294434 A JPS62294434 A JP S62294434A JP 13685086 A JP13685086 A JP 13685086A JP 13685086 A JP13685086 A JP 13685086A JP S62294434 A JPS62294434 A JP S62294434A
Authority
JP
Japan
Prior art keywords
barrier
monomolecular
film
carrier
water tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13685086A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Urata
浦田 佳幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYOWA KAIMEN KAGAKU KK
Original Assignee
KYOWA KAIMEN KAGAKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KYOWA KAIMEN KAGAKU KK filed Critical KYOWA KAIMEN KAGAKU KK
Priority to JP13685086A priority Critical patent/JPS62294434A/en
Publication of JPS62294434A publication Critical patent/JPS62294434A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/18Processes for applying liquids or other fluent materials performed by dipping
    • B05D1/20Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
    • B05D1/202Langmuir Blodgett films (LB films)
    • B05D1/206LB troughs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating Or Analysing Biological Materials (AREA)

Abstract

PURPOSE:To obtain a high quality monomolecular built-up film simply and efficiently, by partitioning the monomolecular film developed to the water surface of a single developing water tank into a plurality of sections by partition barriers and transferring the partitioned films to a carrier successively. CONSTITUTION:Molecules (a) are diffused onto the water surface of a developing water tank and a moving barrier 12 is moved to form a monomolecular film. Next, a plurality of partition barriers 7 surface-treated so as to have the same property as the surface of a carrier are placed on a rising and falling arm 8 and the partition barriers are allowed to fall until the bottom surfaces thereof are contacted with the monomolecular film (a). At this time, since the bottom surfaces of the partition barriers are brought to a state of adsorbing the monomolecular film, to change is generated in the densities of the monomolecular films on the partitioned water surfaces. Next, the monomolecular films on the water surfaces of the partitioned developing water tanks S are successively transferred while a carrier 19 is moved to build up a multilayered monomolecular film on the surface of the carrier. By this method, a built-up film is obtained by simple operation without taking a process for adjusting the density of a molecule at every one transfer as is conventional.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は例えばたんばく質などの構造解析を行5際に使
用される試料として、ガラスなどの固体(以下担体と称
する)の表面に、展開水槽に満たした液体の表面に展開
された単分子膜を移しとる成膜方法のうち、担体を液面
とは平行に静かに降下させた後、担体を引き上げて、単
層の分子膜を担体表面に移しとる成膜装置(通称水平付
着法と呼ばれて因る。)において、担体上に複数層の単
分子膜を重ねて成膜する単分子累積膜の成膜装置に関す
る。
Detailed Description of the Invention [Industrial Field of Application] The present invention is applicable to a sample used for structural analysis of proteins, etc., on the surface of a solid such as glass (hereinafter referred to as a carrier). Among film formation methods that transfer the developed monomolecular film onto the surface of a liquid filled in a developing tank, the carrier is gently lowered parallel to the liquid surface, and then the carrier is pulled up to form a monolayer molecular film. The present invention relates to a film forming apparatus for depositing a monomolecular cumulative film on a carrier surface (commonly referred to as a horizontal deposition method) for forming a plurality of monomolecular films in a stacked manner on a carrier.

[従来の技術] 従来、単分子膜を複数層間−の担体に累積する装置とし
て、単一の液槽内に満たした水、アルコールなどの液体
の表面に、採取すべき種類の物質の分子を一層の分子膜
となるように展開させておき、表面処理を施したガラス
などの担体を液面に平行に浸した後、担体を引き上げて
まず一層の単分子膜を移しと9、久に展開水槽の上辺に
沿って移動する移動バリヤを、担体によって移し取られ
た分子の占める面積分だけ移動して、展開物質の分子密
度を初期の分子密度に補正した後、すでに単分子膜が移
しとられている担体を再び液面上に水平に浸し、これを
引き上げて2層目の単分子膜を累積し、以下同様の方法
を反復することによシ、複数層の同種の単分子膜を累積
するということが行われていた。しかし、上記従来の単
一の水槽のみを使用する場合、担体に展開物質を移しと
る度毎に、液面上の展開物質の分子密度が変わるため、
移動バリヤを精密な計算にもとすき移動させなければな
らず、また、途中で分子密度を測定して、展開物質の状
態を監視する必要があるため、累積層の大きい累積膜の
成膜には非常に多くの時間が費やされるという欠点があ
った。
[Prior Art] Conventionally, as a device for accumulating a monomolecular film on a carrier between multiple layers, molecules of the type of substance to be collected are deposited on the surface of a liquid such as water or alcohol filled in a single liquid tank. After developing it to form a single layer of molecular film, immerse a carrier such as surface-treated glass parallel to the liquid surface, then pull up the carrier and transfer the single layer of monolayer film. After correcting the molecular density of the developing substance to the initial molecular density by moving the migration barrier that moves along the top of the water tank by the area occupied by the molecules transferred by the carrier, the monomolecular film has already been transferred. The carrier is immersed horizontally above the liquid level again, pulled up to accumulate a second monolayer, and the same method is repeated to form multiple layers of the same monolayer. Accumulation was being done. However, when using only the conventional single water tank mentioned above, the molecular density of the developing substance on the liquid surface changes every time the developing substance is transferred to the carrier.
The moving barrier must be moved carefully for precise calculations, and the state of the developed material must be monitored by measuring the molecular density along the way, making it difficult to deposit large cumulative layers. had the disadvantage that it was very time consuming.

[発明が解決しようとする問題点] 本発明は前記従来の一槽の展開水槽による複数層の単分
子膜を成膜する際に、担体に単分子層を移しとる度毎に
移動バリヤ金移動するという煩雑な工程をとることなく
、より簡単な工程で複数層の単分子累′!jt、膜金成
膜できる装置を提供しようとするものであシ、かつ従来
使用していた展開水槽を生かして使用できるようにした
経済性をも考慮した装置を提供しようとするものである
[Problems to be Solved by the Invention] The present invention provides a method for forming a multi-layer monomolecular film using the conventional single development water tank, in which the moving barrier gold is moved each time a monomolecular layer is transferred to a carrier. Create multiple layers of monomolecules in a simpler process without having to go through the complicated process of layering! The purpose of this invention is to provide an apparatus capable of forming a gold film, and also to provide an apparatus that takes economic efficiency into account by making use of the conventionally used expansion tank.

[問題点を解決するための手段および作用コ本発明は前
記問題点を解決するために、単一の展開水槽を使用する
点は従来と同じであるが、単一の展開水槽の液面に展開
された単分子膜層を、分子密度が変わらないように仕切
バリヤで複数に仕切った仕切展開水槽の展開物質を任意
の順番で担体上に移しとることができるようにすること
により、問題点を解決しようとするものである。
[Means and effects for solving the problems] In order to solve the above-mentioned problems, the present invention uses a single expansion tank, which is the same as the conventional technology, but the liquid level of the single expansion tank is Problems can be solved by making it possible to transfer the developed substances in a partitioned development tank, which is divided into multiple partitioned development tanks using partition barriers so that the developed monolayer layer does not change the molecular density, onto the carrier in any order. This is an attempt to solve the problem.

し実施例] 以下、実施例を示す図面に従い本発明の詳細な説明する
EXAMPLES] Hereinafter, the present invention will be described in detail with reference to the drawings showing examples.

第1図は本発明装置の全体を示す本ので、図中1は展開
水槽で、温度調整用還流水の流入口2と流出口3が設け
られている。4は展開水槽1の長手方向辺部1aの内側
に沿って嵌めた断面矩形の仕切バーである。5は流しで
あり、流し底部から突出する支持棒6によって展開水槽
1が支持されている。7は仕切バリヤで、一対のバリヤ
昇降アーム8,8の上辺に載置されている。9はバリヤ
昇降−・ンドルでありバリヤ昇降アームsesをH開水
槽1の長手方向辺部1aの上面と平行に昇降させるもの
であって、これを時計方向に回すとバリヤ昇降アーム8
.8が上昇し、第2図に示すように仕切バリヤ7の底面
7mが展開水槽1の上辺1aから離れるようになってい
る。バリヤ昇降アーム8,8は門形の支持脚10と昇降
部11とによって流し5の底部によって支えられておシ
、昇降メカニズムは門形の支持脚10に内蔵されている
。12は移動バリヤで、展開水槽1の上辺1aに置かれ
、バリヤ移送杆13によって、展開水槽の長手方向に沿
って移動できるようになっている。
FIG. 1 is a book showing the entire apparatus of the present invention. In the figure, 1 is a developing water tank, which is provided with an inlet 2 and an outlet 3 for temperature-adjusting reflux water. Reference numeral 4 denotes a partition bar having a rectangular cross section and fitted along the inside of the longitudinal side portion 1a of the expansion water tank 1. 5 is a sink, and the expansion water tank 1 is supported by a support rod 6 protruding from the bottom of the sink. A partition barrier 7 is placed on the upper side of a pair of barrier lifting arms 8, 8. Reference numeral 9 denotes a barrier lifting arm which raises and lowers the barrier lifting arm ses parallel to the upper surface of the longitudinal side 1a of the H open water tank 1, and when turned clockwise, the barrier lifting arm 8
.. 8 is raised, and the bottom surface 7m of the partition barrier 7 is separated from the upper side 1a of the expansion water tank 1, as shown in FIG. The barrier lifting arms 8, 8 are supported by the bottom of the sink 5 by a portal-shaped support leg 10 and a lifting section 11, and the lifting mechanism is built into the portal-shaped support leg 10. Reference numeral 12 denotes a movable barrier, which is placed on the upper side 1a of the expansion tank 1, and is movable along the longitudinal direction of the expansion tank by means of a barrier transfer rod 13.

14はバリヤ制御部であり、バリヤ移送杆13を移動さ
せるステッピングモータが内蔵されている。
Reference numeral 14 denotes a barrier control section, which has a built-in stepping motor for moving the barrier transfer rod 13.

15は基台部であり、基台部の底部の四隅には水平維持
用のネジ16が突出している。また17は分子膜圧計で
あり、吊下された!ロープ18を昇降させることによp
1展開水槽1に満たした液体R上の展開物質九の分子膜
圧dyn//ctn2を計測するものである。19はガ
ラス板などの担体であシ、保持具20を介して担体昇降
装置21に液面とは水平に吊り下げられている。上記構
成になる本発明装置によって単分子膜を累積する過程を
以下に記す。
Reference numeral 15 denotes a base, and screws 16 for maintaining horizontality protrude from the four corners of the bottom of the base. Also, 17 is a molecular membrane pressure meter, which is suspended! By raising and lowering the rope 18,
1 The molecular membrane pressure dyn//ctn2 of the developing substance 9 on the liquid R filled in the developing water tank 1 is measured. Reference numeral 19 is a carrier such as a glass plate, which is suspended from a carrier lifting device 21 via a holder 20 horizontally with respect to the liquid level. The process of accumulating a monomolecular film using the apparatus of the present invention having the above configuration will be described below.

(1)展開水槽1を水平維持用ネジ16を調整して水平
状態にした後、展開水槽1内に水、アルコールなどの液
体を、液面が展開水槽の上面と面一になるように満たす
。このとき、バリヤ昇降アーム8.8は、第2図、第4
図に示す上昇状態にあり、仕切バリヤ7は第2図、第4
図に示すように展開水槽1の上面IILからは離れてい
る。
(1) After adjusting the horizontal maintenance screw 16 to bring the expansion tank 1 into a horizontal state, fill the expansion tank 1 with a liquid such as water or alcohol so that the liquid level is flush with the top surface of the expansion tank. . At this time, the barrier lifting arm 8.8 is
The partition barrier 7 is in the raised state shown in FIG.
As shown in the figure, it is away from the upper surface IIL of the expansion water tank 1.

(2)次に展開すべき物質の分子aを水面上に拡散させ
、分子が水面上で単分子状態となるように移動バリヤ1
2を移動しピストン圧をかけて調整する。
(2) Diffuse the molecules a of the substance to be developed next on the water surface, and use the moving barrier 1 so that the molecules become monomolecular on the water surface.
Move 2 and apply piston pressure to adjust.

(3)複数本の仕切バリヤ7をバリヤ昇降アーム上に載
置する。この仕切バリヤ7の相互の間隔は担体19が通
過できれば任意でよいが、作業中の移動を防ぐため、バ
リヤ昇降アーム8の上面には位置決め孔8&を設け、ま
た、仕切バリヤ7の両端部底面には位置決めビン7aを
突設し、両者を嵌6一 合することにより、仕切バリヤ7がバリヤ昇降アーム8
によって等間隔に固定されるようにしである。そして仕
切バリヤ7の素材は担体表面と同じ性質(親水性か疎水
性か)に表面処理されている。
(3) Place a plurality of partition barriers 7 on the barrier lifting arm. The mutual spacing between the partition barriers 7 may be arbitrary as long as the carrier 19 can pass through, but in order to prevent movement during work, positioning holes 8& are provided in the upper surface of the barrier lifting arm 8. A positioning pin 7a is provided protruding from the side, and by fitting the two together 6, the partition barrier 7 becomes the barrier lifting arm 8.
so that they are fixed at equal intervals. The material of the partition barrier 7 is surface-treated to have the same properties (hydrophilic or hydrophobic) as the surface of the carrier.

(4)前記の状態のまま、バリヤ昇降−・ンドル9を反
時計方向に回すと、バリヤ昇降アーム8.8は、水平状
態のまま同時に降下し、第3図、第5図に示すように仕
切バリヤ7の底面7bは展開水槽1の上面1aおよび液
体R上の展開された単分子膜aに接触する。このとき、
仕切バリヤ7の底面7bは単分子膜aを吸着した状態と
なるため、仕切バリヤ7の底面7bが接触しない部分の
液面上の単分子膜の密度に変化がないため、複数本の仕
切バリヤ7で仕切られた液面上の単分子膜密度は全て同
じものとなる。
(4) In the above state, when the barrier lift arm 8.8 is turned counterclockwise, the barrier lift arm 8.8 lowers at the same time while remaining in the horizontal position, as shown in Figs. 3 and 5. The bottom surface 7b of the partition barrier 7 contacts the upper surface 1a of the developing water tank 1 and the developed monomolecular film a on the liquid R. At this time,
Since the bottom surface 7b of the partition barrier 7 is in a state where the monomolecular film a is adsorbed, there is no change in the density of the monomolecular film on the liquid surface in the part where the bottom surface 7b of the partition barrier 7 does not contact. The monomolecular film densities on the liquid surface partitioned by 7 are all the same.

(5)カくシテ、仕切バリヤ7によって展開水槽1は、
同じ分子密度を有する複数の仕切シ展開水槽18が現出
するので、担体19を担体昇降装置21を展開水槽1の
長手方向に移動させながら、仕切υ展開水槽1sの単分
子膜aを順々に移し取ってゆくことによシ、担体19の
表面1!数層の単分子膜を累積してゆくことができる。
(5) The water tank 1 can be expanded by the partition barrier 7.
Since a plurality of partitioned developing tanks 18 having the same molecular density appear, while moving the carrier 19 with the carrier lifting device 21 in the longitudinal direction of the developing tank 1, the monomolecular film a of the partitioned υ developing tank 1s is sequentially moved. By transferring it to the surface 1 of the carrier 19! Several monolayer layers can be accumulated.

この状態を第6図以下の図面で模型的に示している。す
なわち第6図は第1回採取状態、第7図は第1回引き上
げ状態、第8図は第2回採取状態、第9図は第2回引き
上げ状態を示し、以後同様の過程を所望回数反復するこ
とにより、希望する層数の単分子累積膜を成膜すること
ができる。
This state is schematically shown in the drawings from FIG. 6 onwards. That is, Fig. 6 shows the first sampling state, Fig. 7 shows the first pulling state, Fig. 8 shows the second collecting state, and Fig. 9 shows the second pulling state. By repeating this process, a monomolecular cumulative film having a desired number of layers can be formed.

なお、仕切バー4の作用は、従来の大きな開口面を有す
る展開水槽を使用する場合、そのままでは液1j上に展
開物質の量が多いということ、および水面の面積が大き
いと液面が安定し難いことによシ、展開水槽の幅を狭め
て、液面の表面積を減少させるものである。これによっ
て液面上の展開物質の量を減少させ、また仕切バリヤ7
で仕切られた仕切展開水槽IBの幅寸法が仕切バー4に
よって左右から狭められているため、液面の揺動が著し
く減少し、液面が安定するので担体19を展開物質に浸
す際の作業能率が大幅に向上するという効果を有するも
のである。
Note that the function of the partition bar 4 is that when using a conventional developing water tank with a large opening surface, the amount of developing substance on the liquid 1j is large, and the liquid level is unstable if the area of the water surface is large. Unfortunately, the width of the expansion tank is narrowed to reduce the surface area of the liquid. This reduces the amount of developing material on the liquid surface and also
Since the width of the partitioned development water tank IB is narrowed from the left and right by the partition bar 4, fluctuations in the liquid level are significantly reduced and the liquid level is stabilized, making it easier to immerse the carrier 19 in the developing substance. This has the effect of greatly improving efficiency.

[発明の効果] 以上のように本発明になる単分子累積膜成膜装置は、従
来の1回の採堆毎に展開物質の分子密度を調整するとい
う煩雑な工程を径ることなく、単一の展開水槽を使用し
ながら、液面上に予め展開した単分子膜を分子密度を変
えることなく複数個の小さな仕切展開水槽に仕切ること
Kよシ、複数の展開水槽が現出したのと同じ効果を生じ
、このため、担体を順々に仕切展開水槽の上に移動して
採取してゆ(という簡単な操作によシ、積層数の大きい
累積膜でも高品質のものが得られる優れた発明である。
[Effects of the Invention] As described above, the monomolecular cumulative film forming apparatus according to the present invention does not require the conventional complicated process of adjusting the molecular density of the spread material for each deposition. It is possible to partition the monomolecular film pre-deployed on the liquid surface into multiple small partitioned development tanks without changing the molecular density while using one development tank. The same effect is produced, and for this reason, it is possible to obtain high-quality films even with a large number of stacked layers by a simple operation such as moving the carriers one after another onto a partitioned development tank and collecting them. This is a great invention.

【図面の簡単な説明】[Brief explanation of the drawing]

図面はいずれも本発明の実施例を示すもので、第1図は
装置全体を示す斜視図、第2図は第1図中の■−■線に
沿う要部縦断面、第3図は第2図においてバリヤ昇降ア
ームが下降した状態を示す要部縦断面図、第4図は、第
2図中の■−■線に沿う拡大断面図、第5図は第3図中
のv −vm!に沿う拡大断面図、第6図、第7図、第
8図、第9図はいずれも、単分子累積膜成膜の過程を模
型的に示した説明図である。 1・・・展開水槽、4・・・仕切バー、7・・・仕切バ
リヤ、8・・・バリヤ昇降アーム、9・・・バリヤ昇降
−・ンドル、12・・・移動バリヤ、7IL・・・決置
決めピン、8m・・・決置決め孔。 出願人代理人 弁理士 鈴 江 武 彦−1〇− 第3図7」 第6図 q 第7図 第8図 第9図
The drawings all show embodiments of the present invention; Fig. 1 is a perspective view showing the entire device, Fig. 2 is a vertical cross-section of the main part along line ■-■ in Fig. 2 is a vertical sectional view of the main part showing the lowered state of the barrier lifting arm, FIG. 4 is an enlarged sectional view along the line ■-■ in FIG. 2, and FIG. ! 6, 7, 8, and 9 are explanatory diagrams schematically showing the process of forming a monomolecular cumulative film. DESCRIPTION OF SYMBOLS 1... Deployment water tank, 4... Partition bar, 7... Partition barrier, 8... Barrier elevating arm, 9... Barrier elevating arm, 12... Moving barrier, 7IL... Fixing pin, 8m...fixing hole. Applicant's agent Patent attorney Takehiko Suzue -10- Figure 3 7'' Figure 6 q Figure 7 Figure 8 Figure 9

Claims (3)

【特許請求の範囲】[Claims] (1)液面上の展開物質にピストン圧をかける移動バリ
ヤを有する展開水槽と、展開水槽の長手方向辺部外側に
平行に設けたバリヤ昇降アームと、バリヤ昇降アームを
水平に昇降させる昇降機構を有することを特徴とする単
分子累積膜成膜装置。
(1) A deployment water tank having a moving barrier that applies piston pressure to the deployable substance on the liquid surface, a barrier lifting arm provided parallel to the outside of the longitudinal side of the deployment tank, and a lifting mechanism that horizontally raises and lowers the barrier lifting arm. A monomolecular cumulative film forming apparatus characterized by having:
(2)バリヤ昇降アーム上面に仕切バリヤ固定用の位置
決め孔を等間隔に設けてなる特許請求の範囲第(1)項
記載の単分子累積膜成膜装置。
(2) The monomolecular cumulative film forming apparatus according to claim (1), wherein positioning holes for fixing the partition barrier are provided at equal intervals on the upper surface of the barrier lifting arm.
(3)展開水槽の長手方向辺部内側に沿って展開水槽内
径と同じ長さの棒状の仕切バーを取り付けて展開水槽の
有効面積を減縮した展開水槽を有する特許請求の範囲第
(1)項記載の単分子累積膜成膜装置。
(3) Claim (1) comprising a deployment water tank in which the effective area of the deployment water tank is reduced by attaching a rod-shaped partition bar with the same length as the inner diameter of the deployment tank along the inside of the longitudinal side of the deployment water tank. The monomolecular cumulative film deposition apparatus described above.
JP13685086A 1986-06-12 1986-06-12 Apparatus for forming monomolecular built-up film Pending JPS62294434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13685086A JPS62294434A (en) 1986-06-12 1986-06-12 Apparatus for forming monomolecular built-up film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13685086A JPS62294434A (en) 1986-06-12 1986-06-12 Apparatus for forming monomolecular built-up film

Publications (1)

Publication Number Publication Date
JPS62294434A true JPS62294434A (en) 1987-12-21

Family

ID=15184963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13685086A Pending JPS62294434A (en) 1986-06-12 1986-06-12 Apparatus for forming monomolecular built-up film

Country Status (1)

Country Link
JP (1) JPS62294434A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988006926A1 (en) * 1987-03-16 1988-09-22 Shingijyutsu Kaihatsu Jigyoudan Formation of monomolecular film and apparatus for laminating said films
JPH02160072A (en) * 1988-12-13 1990-06-20 Fujitsu Ltd Device and method for producing film
US5217670A (en) * 1987-03-16 1993-06-08 Shingitjyutsu Kaihatsu Jigyoudan Method of forming monomolecular film and overlaying apparatus thereof
US10688521B1 (en) * 2019-06-04 2020-06-23 Weixing Lu Langmuir-Blodgett double trough system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988006926A1 (en) * 1987-03-16 1988-09-22 Shingijyutsu Kaihatsu Jigyoudan Formation of monomolecular film and apparatus for laminating said films
US5217670A (en) * 1987-03-16 1993-06-08 Shingitjyutsu Kaihatsu Jigyoudan Method of forming monomolecular film and overlaying apparatus thereof
JPH02160072A (en) * 1988-12-13 1990-06-20 Fujitsu Ltd Device and method for producing film
US10688521B1 (en) * 2019-06-04 2020-06-23 Weixing Lu Langmuir-Blodgett double trough system

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