JPS6317655Y2 - - Google Patents

Info

Publication number
JPS6317655Y2
JPS6317655Y2 JP1982154502U JP15450282U JPS6317655Y2 JP S6317655 Y2 JPS6317655 Y2 JP S6317655Y2 JP 1982154502 U JP1982154502 U JP 1982154502U JP 15450282 U JP15450282 U JP 15450282U JP S6317655 Y2 JPS6317655 Y2 JP S6317655Y2
Authority
JP
Japan
Prior art keywords
valve
main body
valve chamber
cylindrical main
push button
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982154502U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5958936U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15450282U priority Critical patent/JPS5958936U/ja
Publication of JPS5958936U publication Critical patent/JPS5958936U/ja
Application granted granted Critical
Publication of JPS6317655Y2 publication Critical patent/JPS6317655Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP15450282U 1982-10-14 1982-10-14 弗素樹脂製真空ピンセツト Granted JPS5958936U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15450282U JPS5958936U (ja) 1982-10-14 1982-10-14 弗素樹脂製真空ピンセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15450282U JPS5958936U (ja) 1982-10-14 1982-10-14 弗素樹脂製真空ピンセツト

Publications (2)

Publication Number Publication Date
JPS5958936U JPS5958936U (ja) 1984-04-17
JPS6317655Y2 true JPS6317655Y2 (h) 1988-05-18

Family

ID=30341510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15450282U Granted JPS5958936U (ja) 1982-10-14 1982-10-14 弗素樹脂製真空ピンセツト

Country Status (1)

Country Link
JP (1) JPS5958936U (h)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0354851Y2 (h) * 1984-10-04 1991-12-04
JPS6241473A (ja) * 1985-08-17 1987-02-23 Kiyoshi Takahashi 真空ピンセット
JP2648876B2 (ja) * 1987-10-12 1997-09-03 東京エレクトロン株式会社 ウエハキャリア搬送用チャック

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957498A (h) * 1972-10-04 1974-06-04
JPS5146835U (h) * 1974-10-05 1976-04-07

Also Published As

Publication number Publication date
JPS5958936U (ja) 1984-04-17

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