JPS6317589B2 - - Google Patents
Info
- Publication number
- JPS6317589B2 JPS6317589B2 JP54002453A JP245379A JPS6317589B2 JP S6317589 B2 JPS6317589 B2 JP S6317589B2 JP 54002453 A JP54002453 A JP 54002453A JP 245379 A JP245379 A JP 245379A JP S6317589 B2 JPS6317589 B2 JP S6317589B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- workpiece
- water
- wax
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP245379A JPS5596267A (en) | 1979-01-12 | 1979-01-12 | Parts working method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP245379A JPS5596267A (en) | 1979-01-12 | 1979-01-12 | Parts working method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5596267A JPS5596267A (en) | 1980-07-22 |
| JPS6317589B2 true JPS6317589B2 (enrdf_load_stackoverflow) | 1988-04-14 |
Family
ID=11529698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP245379A Granted JPS5596267A (en) | 1979-01-12 | 1979-01-12 | Parts working method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5596267A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58137555A (ja) * | 1982-02-09 | 1983-08-16 | Kyocera Corp | 研摩盤とそれを用いた研摩方法 |
| DE102006021647A1 (de) | 2005-11-09 | 2007-11-15 | Coenen, Wolfgang, Dipl.-Ing. | Verfahren zur Vereinzelung von scheibenförmigen Substraten unter Nutzung von Adhäsionskräften |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5911423B2 (ja) * | 1974-04-10 | 1984-03-15 | 株式会社日立製作所 | ラツピング装置 |
-
1979
- 1979-01-12 JP JP245379A patent/JPS5596267A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5596267A (en) | 1980-07-22 |
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