JPS5596267A - Parts working method - Google Patents
Parts working methodInfo
- Publication number
- JPS5596267A JPS5596267A JP245379A JP245379A JPS5596267A JP S5596267 A JPS5596267 A JP S5596267A JP 245379 A JP245379 A JP 245379A JP 245379 A JP245379 A JP 245379A JP S5596267 A JPS5596267 A JP S5596267A
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- water
- bonding
- impregnated
- work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 4
- 238000001035 drying Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP245379A JPS5596267A (en) | 1979-01-12 | 1979-01-12 | Parts working method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP245379A JPS5596267A (en) | 1979-01-12 | 1979-01-12 | Parts working method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5596267A true JPS5596267A (en) | 1980-07-22 |
JPS6317589B2 JPS6317589B2 (enrdf_load_stackoverflow) | 1988-04-14 |
Family
ID=11529698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP245379A Granted JPS5596267A (en) | 1979-01-12 | 1979-01-12 | Parts working method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5596267A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58137555A (ja) * | 1982-02-09 | 1983-08-16 | Kyocera Corp | 研摩盤とそれを用いた研摩方法 |
EP1951490B1 (de) * | 2005-11-09 | 2011-06-22 | Wolfgang Coenen | Vorrichtung und verfahren zur vereinzelung von scheibenförmigen substraten unter nutzung von adhäsionskräften |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50133596A (enrdf_load_stackoverflow) * | 1974-04-10 | 1975-10-22 |
-
1979
- 1979-01-12 JP JP245379A patent/JPS5596267A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50133596A (enrdf_load_stackoverflow) * | 1974-04-10 | 1975-10-22 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58137555A (ja) * | 1982-02-09 | 1983-08-16 | Kyocera Corp | 研摩盤とそれを用いた研摩方法 |
EP1951490B1 (de) * | 2005-11-09 | 2011-06-22 | Wolfgang Coenen | Vorrichtung und verfahren zur vereinzelung von scheibenförmigen substraten unter nutzung von adhäsionskräften |
US8043890B2 (en) | 2005-11-09 | 2011-10-25 | Wolfgang Coenen | Process for separating disk-shaped substrates with the use of adhesive powers |
Also Published As
Publication number | Publication date |
---|---|
JPS6317589B2 (enrdf_load_stackoverflow) | 1988-04-14 |
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