JPS6317334B2 - - Google Patents
Info
- Publication number
- JPS6317334B2 JPS6317334B2 JP57162730A JP16273082A JPS6317334B2 JP S6317334 B2 JPS6317334 B2 JP S6317334B2 JP 57162730 A JP57162730 A JP 57162730A JP 16273082 A JP16273082 A JP 16273082A JP S6317334 B2 JPS6317334 B2 JP S6317334B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- film
- silicon dioxide
- dielectric film
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16273082A JPS5951544A (ja) | 1982-09-17 | 1982-09-17 | 誘電体分離半導体集積回路装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16273082A JPS5951544A (ja) | 1982-09-17 | 1982-09-17 | 誘電体分離半導体集積回路装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5951544A JPS5951544A (ja) | 1984-03-26 |
| JPS6317334B2 true JPS6317334B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-04-13 |
Family
ID=15760174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16273082A Granted JPS5951544A (ja) | 1982-09-17 | 1982-09-17 | 誘電体分離半導体集積回路装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5951544A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60177644A (ja) * | 1984-02-23 | 1985-09-11 | Matsushita Electric Works Ltd | 高耐圧半導体装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS568842A (en) * | 1979-07-04 | 1981-01-29 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit device |
-
1982
- 1982-09-17 JP JP16273082A patent/JPS5951544A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5951544A (ja) | 1984-03-26 |