JPS6317254Y2 - - Google Patents

Info

Publication number
JPS6317254Y2
JPS6317254Y2 JP1982176640U JP17664082U JPS6317254Y2 JP S6317254 Y2 JPS6317254 Y2 JP S6317254Y2 JP 1982176640 U JP1982176640 U JP 1982176640U JP 17664082 U JP17664082 U JP 17664082U JP S6317254 Y2 JPS6317254 Y2 JP S6317254Y2
Authority
JP
Japan
Prior art keywords
wafer
air
tunnel
wafer transfer
clean air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982176640U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5981034U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17664082U priority Critical patent/JPS5981034U/ja
Publication of JPS5981034U publication Critical patent/JPS5981034U/ja
Application granted granted Critical
Publication of JPS6317254Y2 publication Critical patent/JPS6317254Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Advancing Webs (AREA)
JP17664082U 1982-11-22 1982-11-22 ウエハ搬送装置 Granted JPS5981034U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17664082U JPS5981034U (ja) 1982-11-22 1982-11-22 ウエハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17664082U JPS5981034U (ja) 1982-11-22 1982-11-22 ウエハ搬送装置

Publications (2)

Publication Number Publication Date
JPS5981034U JPS5981034U (ja) 1984-05-31
JPS6317254Y2 true JPS6317254Y2 (enEXAMPLES) 1988-05-16

Family

ID=30383985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17664082U Granted JPS5981034U (ja) 1982-11-22 1982-11-22 ウエハ搬送装置

Country Status (1)

Country Link
JP (1) JPS5981034U (enEXAMPLES)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004040641A1 (ja) * 2002-10-29 2004-05-13 Takehide Hayashi 搬送機用クリーントンネル
JP5467905B2 (ja) * 2010-03-25 2014-04-09 富士フイルム株式会社 フイルム搬送装置及び方法、フイルム製造装置及び方法
CN109592496A (zh) * 2018-11-23 2019-04-09 嘉兴学院 一种用于卷绕纺线的具有清洁功能的纺织设备

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3976330A (en) * 1975-10-01 1976-08-24 International Business Machines Corporation Transport system for semiconductor wafer multiprocessing station system
JPS55134239A (en) * 1979-04-04 1980-10-18 Toshiba Corp Clean box
JPS5619635A (en) * 1979-07-27 1981-02-24 Hitachi Ltd Manufacturing apparatus

Also Published As

Publication number Publication date
JPS5981034U (ja) 1984-05-31

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