JPS63172420A - 光ｃｖｄ装置における光源の設置構造 - Google Patents

光ｃｖｄ装置における光源の設置構造

Info

Publication number
JPS63172420A
JPS63172420A JP311787A JP311787A JPS63172420A JP S63172420 A JPS63172420 A JP S63172420A JP 311787 A JP311787 A JP 311787A JP 311787 A JP311787 A JP 311787A JP S63172420 A JPS63172420 A JP S63172420A
Authority
JP
Japan
Prior art keywords
reaction chamber
lamp house
quartz window
light source
purge gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP311787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530298B2 (enrdf_load_stackoverflow
Inventor
Shinichiro Yoshida
吉田　伸一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YKK Corp
Original Assignee
YKK Corp
Yoshida Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YKK Corp, Yoshida Kogyo KK filed Critical YKK Corp
Priority to JP311787A priority Critical patent/JPS63172420A/ja
Publication of JPS63172420A publication Critical patent/JPS63172420A/ja
Publication of JPH0530298B2 publication Critical patent/JPH0530298B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP311787A 1987-01-12 1987-01-12 光ｃｖｄ装置における光源の設置構造 Granted JPS63172420A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP311787A JPS63172420A (ja) 1987-01-12 1987-01-12 光ｃｖｄ装置における光源の設置構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP311787A JPS63172420A (ja) 1987-01-12 1987-01-12 光ｃｖｄ装置における光源の設置構造

Publications (2)

Publication Number Publication Date
JPS63172420A true JPS63172420A (ja) 1988-07-16
JPH0530298B2 JPH0530298B2 (enrdf_load_stackoverflow) 1993-05-07

Family

ID=11548410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP311787A Granted JPS63172420A (ja) 1987-01-12 1987-01-12 光ｃｖｄ装置における光源の設置構造

Country Status (1)

Country Link
JP (1) JPS63172420A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0237744A (ja) * 1988-07-27 1990-02-07 Tokyo Electron Ltd 搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0237744A (ja) * 1988-07-27 1990-02-07 Tokyo Electron Ltd 搬送装置

Also Published As

Publication number Publication date
JPH0530298B2 (enrdf_load_stackoverflow) 1993-05-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees