JPS63170472U - - Google Patents
Info
- Publication number
- JPS63170472U JPS63170472U JP6212487U JP6212487U JPS63170472U JP S63170472 U JPS63170472 U JP S63170472U JP 6212487 U JP6212487 U JP 6212487U JP 6212487 U JP6212487 U JP 6212487U JP S63170472 U JPS63170472 U JP S63170472U
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- horizontal quartz
- single crystal
- support member
- gallium arsenide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 239000003708 ampul Substances 0.000 description 3
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は、本考案の一実施例に係る砒化ガリウ
ム単結晶製造装置における石英アンプル内を示す
断面図、第２図は本考案の支持部材が設置された
石英ボートを示す平面図、第３図及び第４図は、
従来例における石英アンプル内を示す断面図。
１：石英アンプル、２：石英ボート（角型）、
３：石英ボート支持架台、４：ＧａＡｓ単結晶、
５，６：高温耐熱性支持部材。
FIG. 1 is a cross-sectional view showing the inside of a quartz ampoule in a gallium arsenide single crystal production apparatus according to an embodiment of the present invention, FIG. 2 is a plan view showing a quartz boat in which a supporting member of the present invention is installed, and FIG. Figures and Figure 4 are
FIG. 3 is a sectional view showing the inside of a quartz ampoule in a conventional example. 1: Quartz ampoule, 2: Quartz boat (square type),
3: Quartz boat support frame, 4: GaAs single crystal,
5, 6: High temperature heat resistant support member.
Claims (1)
支持架台上に、横型石英ボートが配置され、該横
型石英ボート内に収容した砒化ガリウム融液から
単結晶を得る装置において、前記横型石英ボート
の外周に該横型石英ボートの側面及び底面を覆う
高温耐熱性物質から成る支持部材が設けられてお
り、該支持部材が横型石英ボートの底面及び側面
開口最上部においてのみ接し、軸方向両端部が開
放になつていることを特徴とする砒化ガリウム単
結晶製造装置。 In an apparatus for obtaining a single crystal from a gallium arsenide melt contained in the horizontal quartz boat, a horizontal quartz boat is disposed on a quartz boat support frame provided in a reaction vessel having a circular cross section. A support member made of a high-temperature heat-resistant material is provided to cover the side and bottom surfaces of the horizontal quartz boat, and the support member contacts only the bottom and the top of the side opening of the horizontal quartz boat, and both ends in the axial direction are open. A gallium arsenide single crystal manufacturing device characterized by a smooth structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6212487U JPS63170472U (en) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6212487U JPS63170472U (en) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170472U true JPS63170472U (en) | 1988-11-07 |
Family
ID=30896099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6212487U Pending JPS63170472U (en) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170472U (en) |
-
1987
- 1987-04-24 JP JP6212487U patent/JPS63170472U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63170472U (en) | ||
| JPH01119062U (en) | ||
| JPS6437034U (en) | ||
| JPH02122431U (en) | ||
| JPH0158930U (en) | ||
| JPS62203272U (en) | ||
| JPS63118942U (en) | ||
| JPS62165838U (en) | ||
| JPS6245826U (en) | ||
| JPS6274330U (en) | ||
| JPS6445766U (en) | ||
| JPH0197546U (en) | ||
| JPH0256435U (en) | ||
| JPS62109851U (en) | ||
| JPH01113330U (en) | ||
| JPS6422025U (en) | ||
| JPS6338314U (en) | ||
| JPS6259396A (en) | Support structure of vertically set heat exchanger | |
| JPH0165865U (en) | ||
| JPH0389387U (en) | ||
| JPS6355532U (en) | ||
| JPH0287075U (en) | ||
| JPS62177031U (en) | ||
| JPH01149471U (en) | ||
| JPH0194467U (en) |