JPS6245826U - - Google Patents
Info
- Publication number
- JPS6245826U JPS6245826U JP6437685U JP6437685U JPS6245826U JP S6245826 U JPS6245826 U JP S6245826U JP 6437685 U JP6437685 U JP 6437685U JP 6437685 U JP6437685 U JP 6437685U JP S6245826 U JPS6245826 U JP S6245826U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- diffusion furnace
- quartz boat
- groove
- reinforcing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000012779 reinforcing material Substances 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の拡散用石英ボートの側面図、
第２図は第１図のＡ―Ａ′線断面図、第３図は従
来の拡散炉用ボートの側面図、第４図は高温のた
めに変形した従来の拡散炉用ボートの側面図であ
る。
１０……石英ボート本体、２０……シリコンカ
ーバイト（補強材）、３０……溝。
Figure 1 is a side view of the quartz boat for diffusion of the present invention.
Figure 2 is a cross-sectional view taken along the line A-A' in Figure 1, Figure 3 is a side view of a conventional diffusion furnace boat, and Figure 4 is a side view of a conventional diffusion furnace boat deformed due to high temperatures. be. 10...Quartz boat body, 20...Silicon carbide (reinforcing material), 30...Groove.
Claims (1)
用拡散炉内で支える石英ボートにおいて、石英ボ
ート本体の前記溝部分を補強材にて裏打ちしたこ
とを特徴とする拡散炉用石英ボートの構造。 A structure of a quartz boat for a diffusion furnace, in which a wafer is propped up in a groove and the wafer is supported in a high-temperature diffusion furnace, characterized in that the groove portion of the quartz boat body is lined with a reinforcing material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6437685U JPS6245826U (en) | 1985-04-30 | 1985-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6437685U JPS6245826U (en) | 1985-04-30 | 1985-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6245826U true JPS6245826U (en) | 1987-03-19 |
Family
ID=30900474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6437685U Pending JPS6245826U (en) | 1985-04-30 | 1985-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6245826U (en) |
-
1985
- 1985-04-30 JP JP6437685U patent/JPS6245826U/ja active Pending