JPS6445766U - - Google Patents
Info
- Publication number
- JPS6445766U JPS6445766U JP14123587U JP14123587U JPS6445766U JP S6445766 U JPS6445766 U JP S6445766U JP 14123587 U JP14123587 U JP 14123587U JP 14123587 U JP14123587 U JP 14123587U JP S6445766 U JPS6445766 U JP S6445766U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heat sink
- reaction tube
- crystal
- welded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第1図及び第2図は本考案に関するもので、第
1図は成長装置の断面図、第2図は基板結晶周囲
の斜視図、第3図は従来の成長装置の断面図であ
る。
符号の説明、1……成長反応管、2……きざみ
部、3……ヒートシンク、4……基板結晶、5…
…基板止め、7……空間、9……溶液。
FIGS. 1 and 2 relate to the present invention; FIG. 1 is a sectional view of a growth apparatus, FIG. 2 is a perspective view of the periphery of a substrate crystal, and FIG. 3 is a sectional view of a conventional growth apparatus. Explanation of symbols, 1...Growth reaction tube, 2...Notch portion, 3...Heat sink, 4...Substrate crystal, 5...
...Substrate stop, 7...Space, 9...Solution.
Claims (1)
棒状ヒートシンクを、一方端を閉じた成長反応管
の下方に一定空間を設けた態様で収納し、該きざ
み部位置の成長反応管の溶着部を溶着し、該ヒー
トシンクの上面に接触させて基板結晶を配置する
とともに、該基板結晶を基板止めで固定し、かつ
該基板止めの上部位置の成長反応管の基板止め溶
着部を溶着して基板結晶を固定し、密封したこと
を特徴としてなる半導体結晶の結晶成長装置。 A rod-shaped heat sink with a large coefficient of thermal expansion with a notched portion at its upper end is housed with a certain space provided below a growth reaction tube with one end closed, and the welded portion of the growth reaction tube at the notched portion is closed. The substrate crystal is placed in contact with the upper surface of the heat sink, the substrate crystal is fixed with a substrate stopper, and the substrate stopper welded part of the growth reaction tube located above the substrate stopper is welded to place the substrate crystal in contact with the upper surface of the heat sink. A semiconductor crystal growth device characterized by fixed and sealed semiconductor crystals.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14123587U JPH0519340Y2 (en) | 1987-09-16 | 1987-09-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14123587U JPH0519340Y2 (en) | 1987-09-16 | 1987-09-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6445766U true JPS6445766U (en) | 1989-03-20 |
JPH0519340Y2 JPH0519340Y2 (en) | 1993-05-21 |
Family
ID=31406129
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14123587U Expired - Lifetime JPH0519340Y2 (en) | 1987-09-16 | 1987-09-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0519340Y2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03194922A (en) * | 1989-12-22 | 1991-08-26 | Stanley Electric Co Ltd | Device for crystal-growing ii-vi compound semiconductor |
JP2012101114A (en) * | 2005-09-12 | 2012-05-31 | Rtc Industries Inc | Product management display system with trackless pusher mechanism |
-
1987
- 1987-09-16 JP JP14123587U patent/JPH0519340Y2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03194922A (en) * | 1989-12-22 | 1991-08-26 | Stanley Electric Co Ltd | Device for crystal-growing ii-vi compound semiconductor |
JP2012101114A (en) * | 2005-09-12 | 2012-05-31 | Rtc Industries Inc | Product management display system with trackless pusher mechanism |
Also Published As
Publication number | Publication date |
---|---|
JPH0519340Y2 (en) | 1993-05-21 |
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