JPS6316455A - デイスククランプ装置 - Google Patents
デイスククランプ装置Info
- Publication number
- JPS6316455A JPS6316455A JP61161062A JP16106286A JPS6316455A JP S6316455 A JPS6316455 A JP S6316455A JP 61161062 A JP61161062 A JP 61161062A JP 16106286 A JP16106286 A JP 16106286A JP S6316455 A JPS6316455 A JP S6316455A
- Authority
- JP
- Japan
- Prior art keywords
- disk
- retainer
- turntable
- spindle
- centering hub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Holding Or Fastening Of Disk On Rotational Shaft (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61161062A JPS6316455A (ja) | 1986-07-08 | 1986-07-08 | デイスククランプ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61161062A JPS6316455A (ja) | 1986-07-08 | 1986-07-08 | デイスククランプ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6316455A true JPS6316455A (ja) | 1988-01-23 |
| JPH0555947B2 JPH0555947B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-18 |
Family
ID=15727886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61161062A Granted JPS6316455A (ja) | 1986-07-08 | 1986-07-08 | デイスククランプ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316455A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6629539B1 (en) * | 1998-11-06 | 2003-10-07 | Canon Kabushiki Kaisha | Sample processing system |
| US7579257B2 (en) | 1998-11-06 | 2009-08-25 | Canon Kabuhsiki Kaisha | Sample separating apparatus and method, and substrate manufacturing method |
-
1986
- 1986-07-08 JP JP61161062A patent/JPS6316455A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6629539B1 (en) * | 1998-11-06 | 2003-10-07 | Canon Kabushiki Kaisha | Sample processing system |
| US7579257B2 (en) | 1998-11-06 | 2009-08-25 | Canon Kabuhsiki Kaisha | Sample separating apparatus and method, and substrate manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0555947B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-18 |