JPS6316446U - - Google Patents
Info
- Publication number
- JPS6316446U JPS6316446U JP10968186U JP10968186U JPS6316446U JP S6316446 U JPS6316446 U JP S6316446U JP 10968186 U JP10968186 U JP 10968186U JP 10968186 U JP10968186 U JP 10968186U JP S6316446 U JPS6316446 U JP S6316446U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chemical solution
- liquid tank
- processing liquid
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
- 230000007246 mechanism Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10968186U JPS6316446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-07-17 | 1986-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10968186U JPS6316446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-07-17 | 1986-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6316446U true JPS6316446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-02-03 |
Family
ID=30987999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10968186U Pending JPS6316446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-07-17 | 1986-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07273077A (ja) * | 1994-03-28 | 1995-10-20 | Shin Etsu Handotai Co Ltd | ウエーハのリンス方法及びリンス装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5472979A (en) * | 1977-11-22 | 1979-06-11 | Nec Corp | Feeder for thin piece |
-
1986
- 1986-07-17 JP JP10968186U patent/JPS6316446U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5472979A (en) * | 1977-11-22 | 1979-06-11 | Nec Corp | Feeder for thin piece |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07273077A (ja) * | 1994-03-28 | 1995-10-20 | Shin Etsu Handotai Co Ltd | ウエーハのリンス方法及びリンス装置 |