JPS63159757U - - Google Patents
Info
- Publication number
- JPS63159757U JPS63159757U JP5273387U JP5273387U JPS63159757U JP S63159757 U JPS63159757 U JP S63159757U JP 5273387 U JP5273387 U JP 5273387U JP 5273387 U JP5273387 U JP 5273387U JP S63159757 U JPS63159757 U JP S63159757U
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- lens
- conversion member
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims 5
- 230000007547 defect Effects 0.000 claims 5
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000012806 monitoring device Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5273387U JPS63159757U (sv) | 1987-04-09 | 1987-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5273387U JPS63159757U (sv) | 1987-04-09 | 1987-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159757U true JPS63159757U (sv) | 1988-10-19 |
Family
ID=30878162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5273387U Pending JPS63159757U (sv) | 1987-04-09 | 1987-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159757U (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05296942A (ja) * | 1992-04-15 | 1993-11-12 | Sumitomo Electric Ind Ltd | 線状体樹脂被覆内気泡検出装置 |
-
1987
- 1987-04-09 JP JP5273387U patent/JPS63159757U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05296942A (ja) * | 1992-04-15 | 1993-11-12 | Sumitomo Electric Ind Ltd | 線状体樹脂被覆内気泡検出装置 |
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