JPS63157382A - デイスク部材のチヤツク装置 - Google Patents
デイスク部材のチヤツク装置Info
- Publication number
- JPS63157382A JPS63157382A JP30384786A JP30384786A JPS63157382A JP S63157382 A JPS63157382 A JP S63157382A JP 30384786 A JP30384786 A JP 30384786A JP 30384786 A JP30384786 A JP 30384786A JP S63157382 A JPS63157382 A JP S63157382A
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- arm
- disk member
- base
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Holding Or Fastening Of Disk On Rotational Shaft (AREA)
- Manipulator (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30384786A JPS63157382A (ja) | 1986-12-22 | 1986-12-22 | デイスク部材のチヤツク装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30384786A JPS63157382A (ja) | 1986-12-22 | 1986-12-22 | デイスク部材のチヤツク装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63157382A true JPS63157382A (ja) | 1988-06-30 |
| JPH0557653B2 JPH0557653B2 (enrdf_load_stackoverflow) | 1993-08-24 |
Family
ID=17926019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30384786A Granted JPS63157382A (ja) | 1986-12-22 | 1986-12-22 | デイスク部材のチヤツク装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157382A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06278072A (ja) * | 1993-03-25 | 1994-10-04 | Ngk Insulators Ltd | 把持方法及び把持装置 |
-
1986
- 1986-12-22 JP JP30384786A patent/JPS63157382A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06278072A (ja) * | 1993-03-25 | 1994-10-04 | Ngk Insulators Ltd | 把持方法及び把持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0557653B2 (enrdf_load_stackoverflow) | 1993-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB2035942A (en) | Positioning apparatus for a workpiece carrier | |
| CN112397438B (zh) | 半导体清洗设备及其夹持机构 | |
| JP3345033B2 (ja) | 工作機械のパレット交換装置 | |
| CN215588483U (zh) | 一种定位机构 | |
| JPS63157382A (ja) | デイスク部材のチヤツク装置 | |
| US4006651A (en) | Work table index mechanism | |
| US6062953A (en) | Wafer positioning method and apparatus | |
| JPH0611728Y2 (ja) | ワーククランプ装置 | |
| JP3270115B2 (ja) | 刃先位置検出装置 | |
| JP2002321063A (ja) | 抵抗溶接装置 | |
| JPS6024529Y2 (ja) | 位置決め装置 | |
| JP3086121B2 (ja) | ワーク位置決め治具 | |
| US5489089A (en) | Automatic alignmant vise | |
| JP2627065B2 (ja) | 試料のセット装置 | |
| JP2694164B2 (ja) | 板状体の保持装置 | |
| US3538778A (en) | Apparatus for accurately aligning a device with a workpiece | |
| KR960013627B1 (ko) | 지지 장치 | |
| JPH0239710Y2 (enrdf_load_stackoverflow) | ||
| JPH01635A (ja) | 試料のセット装置 | |
| JPS6218383Y2 (enrdf_load_stackoverflow) | ||
| JPH0721992Y2 (ja) | 移動装置 | |
| JPH032338Y2 (enrdf_load_stackoverflow) | ||
| JPS6117618B2 (enrdf_load_stackoverflow) | ||
| JPH0550351A (ja) | ワーク位置決め装置 | |
| JPH0239711Y2 (enrdf_load_stackoverflow) |