JPS6315719B2 - - Google Patents
Info
- Publication number
- JPS6315719B2 JPS6315719B2 JP55121423A JP12142380A JPS6315719B2 JP S6315719 B2 JPS6315719 B2 JP S6315719B2 JP 55121423 A JP55121423 A JP 55121423A JP 12142380 A JP12142380 A JP 12142380A JP S6315719 B2 JPS6315719 B2 JP S6315719B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- light
- electrode
- film
- panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 25
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 18
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 12
- 229910052961 molybdenite Inorganic materials 0.000 claims description 6
- 239000010408 film Substances 0.000 description 13
- 239000007789 gas Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- 239000005083 Zinc sulfide Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052984 zinc sulfide Inorganic materials 0.000 description 4
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 125000004434 sulfur atom Chemical group 0.000 description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- LKNRQYTYDPPUOX-UHFFFAOYSA-K trifluoroterbium Chemical compound F[Tb](F)F LKNRQYTYDPPUOX-UHFFFAOYSA-K 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55121423A JPS5746493A (en) | 1980-09-01 | 1980-09-01 | Electrode structure for thin film el panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55121423A JPS5746493A (en) | 1980-09-01 | 1980-09-01 | Electrode structure for thin film el panel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5746493A JPS5746493A (en) | 1982-03-16 |
| JPS6315719B2 true JPS6315719B2 (zh) | 1988-04-06 |
Family
ID=14810770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55121423A Granted JPS5746493A (en) | 1980-09-01 | 1980-09-01 | Electrode structure for thin film el panel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5746493A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0788297A1 (en) | 1996-01-31 | 1997-08-06 | Sharp Kabushiki Kaisha | Electroluminescence device and method of manifacturing same |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62268097A (ja) * | 1986-05-15 | 1987-11-20 | 日亜化学工業株式会社 | 電磁気センサーに使用するｅｌ発光素子 |
| JPH046157Y2 (zh) * | 1986-12-26 | 1992-02-20 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5033786A (zh) * | 1973-07-25 | 1975-04-01 |
-
1980
- 1980-09-01 JP JP55121423A patent/JPS5746493A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5033786A (zh) * | 1973-07-25 | 1975-04-01 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0788297A1 (en) | 1996-01-31 | 1997-08-06 | Sharp Kabushiki Kaisha | Electroluminescence device and method of manifacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5746493A (en) | 1982-03-16 |
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