JPS63146265A - 基板処理装置 - Google Patents

基板処理装置

Info

Publication number
JPS63146265A
JPS63146265A JP61294339A JP29433986A JPS63146265A JP S63146265 A JPS63146265 A JP S63146265A JP 61294339 A JP61294339 A JP 61294339A JP 29433986 A JP29433986 A JP 29433986A JP S63146265 A JPS63146265 A JP S63146265A
Authority
JP
Japan
Prior art keywords
substrate
hole
holding device
processing
substrate holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61294339A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0554187B2 (enExample
Inventor
Masahide Urushibara
漆原　正英
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP61294339A priority Critical patent/JPS63146265A/ja
Publication of JPS63146265A publication Critical patent/JPS63146265A/ja
Publication of JPH0554187B2 publication Critical patent/JPH0554187B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)
  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP61294339A 1986-12-09 1986-12-09 基板処理装置 Granted JPS63146265A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61294339A JPS63146265A (ja) 1986-12-09 1986-12-09 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61294339A JPS63146265A (ja) 1986-12-09 1986-12-09 基板処理装置

Publications (2)

Publication Number Publication Date
JPS63146265A true JPS63146265A (ja) 1988-06-18
JPH0554187B2 JPH0554187B2 (enExample) 1993-08-11

Family

ID=17806422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61294339A Granted JPS63146265A (ja) 1986-12-09 1986-12-09 基板処理装置

Country Status (1)

Country Link
JP (1) JPS63146265A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0773372A3 (en) * 1995-10-13 2000-02-16 Kitano Engineering Co., Ltd. Rotation holding table for rotating and holding a storage disc thereon and a boss thereof
EP1172812A1 (en) * 2000-07-14 2002-01-16 O.T.B. Group B.V. Method and device for producing a DVD
WO2002077985A1 (de) * 2001-03-21 2002-10-03 Steag Hamatech Ag Vorrichtung zum zusammenfügen von substraten
WO2003028024A1 (en) * 2001-09-20 2003-04-03 Tdk Corporation Method for producing multilayer optical recording medium and system for producing multilayer optical recording medium
WO2003030161A1 (en) * 2001-09-27 2003-04-10 Tdk Corporation Method and device for manufacturing optical recording medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598177A (ja) * 1982-07-06 1984-01-17 Seiko Epson Corp デイスク・クランプ機構
JPS61214273A (ja) * 1985-03-20 1986-09-24 Matsushita Electric Ind Co Ltd 円盤状記録媒体の回転駆動装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598177A (ja) * 1982-07-06 1984-01-17 Seiko Epson Corp デイスク・クランプ機構
JPS61214273A (ja) * 1985-03-20 1986-09-24 Matsushita Electric Ind Co Ltd 円盤状記録媒体の回転駆動装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0773372A3 (en) * 1995-10-13 2000-02-16 Kitano Engineering Co., Ltd. Rotation holding table for rotating and holding a storage disc thereon and a boss thereof
EP1172812A1 (en) * 2000-07-14 2002-01-16 O.T.B. Group B.V. Method and device for producing a DVD
NL1017267C2 (nl) * 2000-07-14 2002-01-18 Otb Group Bv Werkwijze en inrichting voor het vervaardigen van een DVD-schijf.
WO2002077985A1 (de) * 2001-03-21 2002-10-03 Steag Hamatech Ag Vorrichtung zum zusammenfügen von substraten
WO2003028024A1 (en) * 2001-09-20 2003-04-03 Tdk Corporation Method for producing multilayer optical recording medium and system for producing multilayer optical recording medium
WO2003030161A1 (en) * 2001-09-27 2003-04-10 Tdk Corporation Method and device for manufacturing optical recording medium

Also Published As

Publication number Publication date
JPH0554187B2 (enExample) 1993-08-11

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