JPS6314459Y2 - - Google Patents

Info

Publication number
JPS6314459Y2
JPS6314459Y2 JP1979072820U JP7282079U JPS6314459Y2 JP S6314459 Y2 JPS6314459 Y2 JP S6314459Y2 JP 1979072820 U JP1979072820 U JP 1979072820U JP 7282079 U JP7282079 U JP 7282079U JP S6314459 Y2 JPS6314459 Y2 JP S6314459Y2
Authority
JP
Japan
Prior art keywords
mask
chamber
transferred
pattern
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979072820U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55173138U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979072820U priority Critical patent/JPS6314459Y2/ja
Publication of JPS55173138U publication Critical patent/JPS55173138U/ja
Application granted granted Critical
Publication of JPS6314459Y2 publication Critical patent/JPS6314459Y2/ja
Expired legal-status Critical Current

Links

JP1979072820U 1979-05-30 1979-05-30 Expired JPS6314459Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979072820U JPS6314459Y2 (enrdf_load_stackoverflow) 1979-05-30 1979-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979072820U JPS6314459Y2 (enrdf_load_stackoverflow) 1979-05-30 1979-05-30

Publications (2)

Publication Number Publication Date
JPS55173138U JPS55173138U (enrdf_load_stackoverflow) 1980-12-12
JPS6314459Y2 true JPS6314459Y2 (enrdf_load_stackoverflow) 1988-04-22

Family

ID=29306451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979072820U Expired JPS6314459Y2 (enrdf_load_stackoverflow) 1979-05-30 1979-05-30

Country Status (1)

Country Link
JP (1) JPS6314459Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4938726A (enrdf_load_stackoverflow) * 1972-08-22 1974-04-11

Also Published As

Publication number Publication date
JPS55173138U (enrdf_load_stackoverflow) 1980-12-12

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