JPS63143246A - Production of high tension high conductivity copper alloy - Google Patents
Production of high tension high conductivity copper alloyInfo
- Publication number
- JPS63143246A JPS63143246A JP28969086A JP28969086A JPS63143246A JP S63143246 A JPS63143246 A JP S63143246A JP 28969086 A JP28969086 A JP 28969086A JP 28969086 A JP28969086 A JP 28969086A JP S63143246 A JPS63143246 A JP S63143246A
- Authority
- JP
- Japan
- Prior art keywords
- annealing
- copper alloy
- temperature
- copper
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000881 Cu alloy Inorganic materials 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000000137 annealing Methods 0.000 claims abstract description 33
- 238000005097 cold rolling Methods 0.000 claims abstract description 11
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 9
- 239000000956 alloy Substances 0.000 claims abstract description 9
- 238000005098 hot rolling Methods 0.000 claims abstract description 7
- 238000001816 cooling Methods 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 16
- 239000000463 material Substances 0.000 abstract description 12
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000005554 pickling Methods 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 229910000851 Alloy steel Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000012733 comparative method Methods 0.000 description 1
- 238000009749 continuous casting Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Conductive Materials (AREA)
Abstract
Description
【発明の詳細な説明】
１産業上の利用分野コ
本発明は高力、高導電性銅合金の製造方法に関し、さら
に詳しくは、電子部品、特に、半導体リードフレームお
よび端子等の材料に使用することができる引張強さ３３
ｉ＜ｇｆ／ｍｍ’以上、伸び２５％以上および導電率
６５％Ｉ ＡＣ３を有する高力、高導電性銅合金の製造
方法に関する。DETAILED DESCRIPTION OF THE INVENTION 1. Field of Industrial Application The present invention relates to a method for manufacturing a high-strength, high-conductivity copper alloy, more specifically for use in materials for electronic components, particularly semiconductor lead frames and terminals. Tensile strength 33
The present invention relates to a method for manufacturing a high-strength, highly conductive copper alloy having i<gf/mm' or more, elongation of 25% or more, and electrical conductivity of 65% I AC3.
［従来技術］
従来においても、Ｆｅ １．５〜３．０ｗｔ％を含有す
る銅合金を加工して電子部品等の材料を製造することは
、特公昭５２−０２０４０４号公報、特公昭５５−０１
４１３２号公報、特公昭５５−０１４１３３号公報およ
び特公昭５５−０１４１３．４号公報に記載されている
。[Prior Art] Conventionally, manufacturing materials such as electronic parts by processing copper alloys containing 1.5 to 3.0 wt% Fe has been disclosed in Japanese Patent Publications No. 52-020404 and Japanese Patent Publication No. 55-01.
It is described in Japanese Patent Publication No. 4132, Japanese Patent Publication No. 55-014133, and Japanese Patent Publication No. 55-01413.4.
しかして、電子部品材料も製法が簡単で、省エネルギー
、省工程の製造法が開発され、採用されてきている。Therefore, manufacturing methods for electronic component materials that are simple, energy-saving, and process-saving have been developed and are being adopted.
即ち、上記した特公昭５５−０１４１３４号公報には、
Ｐ’ｅ １．５〜３．ｈｔ％を含有し、本質的に残部Ｃ
ｕである銅合金を８００〜１０２０℃の温度で熱間加工
し、さらに、３０％以上の圧下率で冷間加工し、４００
〜５５０℃の温度で３０分１’ｉｆ１以上の時効焼鈍を
行ない、さらに、２００℃／１時間以下の冷却速度で冷
却する方法が示されている。That is, in the above-mentioned Japanese Patent Publication No. 55-014134,
P'e 1.5-3. ht% with essentially the remainder C
The copper alloy that is
A method is disclosed in which age annealing is performed at a temperature of 1'if1 or more for 30 minutes at a temperature of ~550°C, and further cooling is performed at a cooling rate of 200°C/1 hour or less.
そして、この方法においては、冷間圧延と時効焼鈍との
組み合わせが−サイクルとする説明はなく、三サイクル
が最も望ましいとあり、機械的性質や導電率もある程度
の値が得られている。In this method, there is no explanation that the combination of cold rolling and age annealing is a -cycle, but it is stated that a three-cycle is the most desirable, and a certain level of mechanical properties and electrical conductivity can be obtained.
［発明が解決しようとする問題点］
本発明は上記に説明した従来法の処理工程か複雑である
という問題点に鑑み、本発明者が鋭意研究を行なった結
果、従来法のように三サイクル工程を行なう必要がなく
、冷間圧延と時効焼鈍の組み合わけが−サイクルで行な
うことにより、従来法と同等の引張強さく３５ 、２
ｋｇｆ／ｍ＋ｎり、伸び（２７，５％）および導電率（
７３，５％１ＡＣ９）を有する電子部品等に好適な高力
、高導電性鋼合金の製造方法を開発したのである。[Problems to be Solved by the Invention] In view of the problem that the processing steps of the conventional method explained above are complicated, the present inventor has conducted intensive research, and as a result, it has been found that There is no need to carry out additional processes, and the combination of cold rolling and age annealing is carried out in a cycle, resulting in the same tensile strength as the conventional method.35,2
kgf/m+n, elongation (27.5%) and conductivity (
They have developed a method for manufacturing a high-strength, high-conductivity steel alloy suitable for electronic parts, etc., which has a 73.5% 1AC9).
［問題点を解決するための手段］
本発明に係る高力、高導電性銅合金の製造方法の特徴と
するところは、
Ｆｅ １．５〜３．０ｗｔ％
を含有し、残部Ｃｕよりなる銅基合金の鋳塊を、８００
〜１０５０℃り温度で熱間圧延し、その後、トータル減
面率９０％以上の冷間圧延を行ない、５５０℃（但し５
５０℃を含まず）〜６００℃の、盆度で３０分以上の焼
鈍後、冷却途中で・１５０℃〜５２５℃の温度において
３０分間以上の焼鈍を行なうことにある。[Means for Solving the Problems] The method for producing a high-strength, high-conductivity copper alloy according to the present invention is characterized by a copper alloy containing 1.5 to 3.0 wt% of Fe and the balance consisting of Cu. The base alloy ingot is 800
Hot rolling is carried out at a temperature of ~1050°C, followed by cold rolling with a total area reduction of 90% or more.
After annealing at a temperature of 30 minutes or more at a temperature of 50°C to 600°C, annealing is performed at a temperature of 150°C to 525°C for 30 minutes or more during cooling.
本発明に係る高力、高導電性銅合金の製造方法について
以下詳細に説明する。The method for producing a high-strength, high-conductivity copper alloy according to the present invention will be described in detail below.
本発明に係る高力、高導電性銅合金の製造方法において
は、通常の銅合金の連続鋳造法により造塊し、少なくと
ら８００℃の温度で、トータル減面率８０％以上で熱間
圧延を行ない、熱間圧延終了温度は６５０℃であり、二
の６５０℃の温度の材料をシャワー水による冷却装置に
より冷却し、その後、トータル減面率９０％の冷間圧延
を行ない、５５０℃（５５０℃を含まず）〜６００℃の
温度て３０分間の焼鈍後、冷却途中て４５０〜５２５℃
の温度に達した時に３０分間以上保持するという、所謂
、２段時効焼鈍によって、引張強さ３３ ｋｇｆ／ ｍ
ｍ”、伸び２５％以上および導電率６０％（ＡＣ５以上
を有する高力、高導電性銅合金を製造する方法である。In the method for producing a high-strength, high-conductivity copper alloy according to the present invention, ingots are formed by a conventional continuous casting method for copper alloys, and hot-rolled at a temperature of at least 800°C with a total area reduction of 80% or more. The finishing temperature of hot rolling was 650°C. Second, the material at a temperature of 650°C was cooled by a cooling device using shower water, and then cold rolling was performed with a total area reduction of 90% to 550°C ( After annealing at a temperature of 550℃ to 600℃ for 30 minutes, 450 to 525℃ during cooling.
A tensile strength of 33 kgf/m is achieved by so-called two-stage aging annealing, which is held for 30 minutes or more when the temperature reaches
m'', elongation of 25% or more, and electrical conductivity of 60% (AC5 or more).
なお、さらに性質を向上さ仕るために冷間圧延を行ない
、そして、この冷間圧延によって生じた局部歪みを除去
するために、３００〜・１００℃（４００℃を含まず）
の温度で５秒間以上の焼鈍を行なってもよい。In addition, in order to further improve the properties, cold rolling is performed, and in order to remove the local distortion caused by this cold rolling, the temperature is 300 to 100°C (not including 400°C).
Annealing may be performed at a temperature of 5 seconds or more.
しかして、従来のＦｅ１．５〜３．０ｗｔ％を含有する
本質的に残部Ｃｕからなる銅合金の処理工程は、基本的
には４００〜５５０℃の温度で３０分間以上の焼鈍と３
０％以上の圧下率の冷間圧延をニサイクル以上、理想的
には三すイクル行なうことがノ須であり、従って、これ
らの工程を考えると焼鈍はコイル状態でベル型炉中で行
なわれるので、焼鈍前は焼鈍時の密着防止対策さらに焼
鈍後は酸化スケールの除去の工程か２〜３回必要となっ
ている。Therefore, the conventional treatment process for copper alloys containing 1.5 to 3.0 wt% of Fe and the balance essentially consists of annealing at a temperature of 400 to 550°C for 30 minutes or more and 3.
It is essential to perform cold rolling with a rolling reduction of 0% or more for two or more cycles, ideally three cycles. Therefore, considering these processes, annealing is performed in a coiled state in a bell-shaped furnace. Before annealing, it is necessary to take measures to prevent adhesion during annealing, and after annealing, it is necessary to remove oxide scale two to three times.
本発明に係る高力、高導電性銅合金の製造方法において
は、５５０〜６００℃の温度での焼鈍は１回であり、焼
鈍前の密着防止対策と焼鈍後の酸化スケールの除去はそ
れぞれ１回で済むので工程の短縮化が図れる。In the method for producing a high-strength, high-conductivity copper alloy according to the present invention, annealing at a temperature of 550 to 600°C is performed once, and adhesion prevention measures before annealing and removal of oxide scale after annealing are performed once each. The process can be shortened since it only takes a few times.
また、本発明に係る高力、高導電性銅合金の製造方法に
おいて、使用する銅合金にはＰ Ｏ，０２〜０．１ｖｔ
％、Ｚｎ ０．０１〜０．５ｗｔ％の内から選んだｔａ
または２種を含有しても、目標とする特性、特に導電率
は満足てきる。In addition, in the method for producing a high-strength, high-conductivity copper alloy according to the present invention, the copper alloy used includes P O, 02 to 0.1 vt.
%, Zn ta selected from 0.01-0.5wt%
Or, even if two types are contained, the target properties, especially the electrical conductivity, can be satisfied.
さらに、Ｍｎ、 Ｓｎ、 、へ１．Ｎ＋ＳＴｌおよびＣ
ｒは０．００２〜０．２ｗｔ％含有されても、導電率６
５％ｌＡＣ３を満足するので許容される。Furthermore, Mn, Sn, , 1. N+STl and C
Even if r is contained at 0.002 to 0.2 wt%, the conductivity is 6
It is acceptable because it satisfies 5% lAC3.
［実 施 例ｊ
本発明に係る高力、高導電性銅合金の製造方法の実施例
を説明する。[Example j An example of the method for manufacturing a high-strength, high-conductivity copper alloy according to the present invention will be described.
実施例
小型電気炉で木炭被覆下に、Ｃｕ−２，３ｗｔ％Ｆｅ−
Ｇ、１５ｗｔ％Ｚｎ−０，Ｑ３ｗｔ％Ｐを溶解し、傾注
式の鋳鉄製のブックモール１ζに鋳込み、厚さ６０ｍｍ
、幅６０ｍｍ、長さ１８０ｍｍの鋳塊を製作した。Example: Cu-2,3wt%Fe- was coated with charcoal in a small electric furnace.
G, 15 wt% Zn-0, Q3 wt% P was melted and cast into a tilting cast iron book molding 1ζ, with a thickness of 60 mm.
An ingot with a width of 60 mm and a length of 180 mm was produced.
これろの鋳塊の表面および裏面をそれぞれ２ 、５ ｍ
ｍ面開削、９００℃の温度で熱間圧延を開始し、厚さ１
０ｍｍとし、７００℃の温度かろ水中に投入して急冷し
た。ごの熱間圧延材の表面の酸化スケールをグラインダ
ーにより除去してから、４分割した。The front and back sides of this ingot are 2 and 5 m long, respectively.
Hot rolling was started at a temperature of 900℃, and the thickness was 1.
0 mm, and was rapidly cooled by putting it into filtered water at a temperature of 700°C. After removing the oxidized scale on the surface of the hot-rolled material using a grinder, it was divided into four pieces.
そのうちの一つは、本発明に係る高力、高導電性鋼合金
の製造方法を適用し、残りの三個は比較方法を適用した
。For one of them, the method for producing a high strength, high conductivity steel alloy according to the present invention was applied, and for the remaining three, a comparative method was applied.
本発明に係る高力、高導電性銅合金の製造方法により製
造されたものは、冷間圧延ロールで厚さ１０ｍｍから厚
さ ０．６３５ｍｍまで加工したが、耳割れ等は生じな
かった。The high-strength, high-conductivity copper alloy manufactured by the method for manufacturing a high-strength, high-conductivity copper alloy according to the present invention was processed with cold rolling rolls from a thickness of 10 mm to a thickness of 0.635 mm, but no edge cracking or the like occurred.
この材料を、トリクレンで脱脂後、窒素ガス炉中で５７
５℃の温度で２時間焼鈍後、冷却の途中で５００℃に達
した時、さらに、４時間の焼鈍を行なって冷却し、第１
表の結果を得た。 ゛比較方法は、厚さ１０ｍｍ
の板材を冷間圧延して厚さ２．５４ｍｍとし、この材料
を４９０℃の温度で２時間の焼鈍を行ない、酸洗後、冷
間圧延して厚さ１．２７ｍｍとし、次いで、この材料を
４４０℃の温度で２時間の焼鈍を行ない、さらに、酸洗
後、冷間圧延して厚さ０．６３５ｍｍとし、この材料を
４４０℃の温度で２時間の焼鈍を行ない、第１表の結果
を得た。After degreasing this material with trichlene, it was heated to 57°C in a nitrogen gas furnace.
After annealing at a temperature of 5°C for 2 hours, when the temperature reached 500°C during cooling, annealing was further performed for 4 hours, and the first
Obtained the results in the table.゛Comparison method is 10mm thickness
The plate material was cold rolled to a thickness of 2.54 mm, this material was annealed at a temperature of 490°C for 2 hours, and after pickling, cold rolled to a thickness of 1.27 mm. The material was annealed at a temperature of 440°C for 2 hours, and then, after pickling, it was cold rolled to a thickness of 0.635 mm. This material was annealed at a temperature of 440°C for 2 hours. Got the results.
焼鈍に際しては、トリクレン脱脂後窒素ガス炉中て行な
い、焼鈍後は１８４ｇ／ｌの硫酸を含む水溶液で酸化ス
ケールを除去した。Annealing was carried out in a nitrogen gas furnace after degreasing with trichlene, and after annealing, oxidized scale was removed with an aqueous solution containing 184 g/l of sulfuric acid.
引張強さの引張り方向は、圧延方向に平行に行ない、試
験片の形状はＡＳＴＭＥ８とした。The tensile strength was determined in a direction parallel to the rolling direction, and the shape of the test piece was ASTM8.
第１表から次のことが明らかである。From Table 1, the following is clear.
本発明に係る高力、高導電性銅合金の製造方法による銅
基合金は、比較例のＮｏ、７に示すような３回の焼鈍を
行なわなくてら、引張強さ３３ｋｇｆ／ｒｎｍ’以上、
伸び２５％以上および導電率６５％Ｉ ＡＣＳ以上を有
しており、Ｎ０１４と同等の特性を示している。The copper-based alloy manufactured by the method for producing a high-strength, high-conductivity copper alloy according to the present invention has a tensile strength of 33 kgf/rnm' or more without annealing three times as shown in Comparative Example No. 7.
It has an elongation of 25% or more and an electrical conductivity of 65% IACS or more, showing properties equivalent to N014.
また、Ｎｏ、８およびＮ０９９に示すように、２次時効
焼鈍の２回目の焼鈍温度が５２５℃を越える場合或いは
４５０℃未満の場合は、導電率か６５％［ＡＣＳを満足
していないことを示している。In addition, as shown in No. 8 and No. 099, if the second annealing temperature of the secondary aging annealing exceeds 525°C or is less than 450°C, the electrical conductivity may be 65% [not satisfying ACS]. It shows.
この焼鈍の後、性質調整のための適正な冷間加工と圧延
によって生じる局部歪みを除去するための３００〜４０
０’Ｃ（４００℃を含まず）の温度で５秒以上の焼鈍を
行なうことらできろ。After this annealing, appropriate cold working to adjust the properties and 300~400°C to remove local distortion caused by rolling.
It can be done by annealing at a temperature of 0'C (not including 400C) for 5 seconds or more.
［発明の効果］
以上説明したように、本発明に係る高力、高導電性銅合
金の製造方法は上記の構成であるから、従来から使用さ
れているＦｅ １．５〜３．０ｗｔ％含有し、残部Ｃｕ
からなる銅基合金の熱間圧延後の加工工程を簡略化した
もので、それにも拘わらず従来工程材料と全く同等の特
性を有しているしのであり、さらに、ロールに占めろ段
取り等を含めた時間の節約、焼鈍炉に関する段取り等を
含めた時間の節約、酸洗回数の減少、圧延、焼鈍、酸洗
を繰り返す毎に生じる歩留まりの低下の抑制、かつ、コ
ストの低減等の効果があり、省資源、省エネルギーから
工業的に大きく貢献するものである。[Effects of the Invention] As explained above, since the method for producing a high-strength, high-conductivity copper alloy according to the present invention has the above-mentioned configuration, it contains 1.5 to 3.0 wt% of Fe, which is conventionally used. and the remainder Cu
It is a simplified processing process after hot rolling of a copper-based alloy made of copper-based alloys, and despite this, it has exactly the same properties as conventional process materials. This has the effect of saving time including setting up the annealing furnace, reducing the number of times of pickling, suppressing the decline in yield that occurs each time rolling, annealing, and pickling are repeated, and reducing costs. This makes a significant contribution to industry through resource and energy conservation.
Claims (1)
〜１０５０℃り温度で熱間圧延し、その後、トータル減
面率９０％以上の冷間圧延を行ない、５５０℃（但し５
５０℃を含まず）〜６００℃の温度で３０分以上の焼鈍
後、冷却途中で４５０℃〜５２５℃の温度において３０
分間以上の焼鈍を行なうことを特徴とする高力、高導電
性銅合金の製造方法。[Claims] An ingot of a copper-based alloy containing 1.5 to 3.0 wt% of Fe and the balance being Cu is
Hot rolling is carried out at a temperature of ~1050°C, followed by cold rolling with a total area reduction of 90% or more.
After annealing at a temperature of 50℃ to 600℃ for 30 minutes or more, annealing at a temperature of 450℃ to 525℃ during cooling for 30 minutes or more.
A method for producing a high-strength, high-conductivity copper alloy, characterized by annealing for more than 1 minute.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61289690A JPH0611904B2 (en) | 1986-12-04 | 1986-12-04 | High-strength, high-conductivity copper alloy manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61289690A JPH0611904B2 (en) | 1986-12-04 | 1986-12-04 | High-strength, high-conductivity copper alloy manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63143246A true JPS63143246A (en) | 1988-06-15 |
| JPH0611904B2 JPH0611904B2 (en) | 1994-02-16 |
Family
ID=17746484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61289690A Expired - Fee Related JPH0611904B2 (en) | 1986-12-04 | 1986-12-04 | High-strength, high-conductivity copper alloy manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0611904B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0762800A2 (en) * | 1995-09-07 | 1997-03-12 | Star Micronics Co., Ltd. | Lead frame for electroacoustic transducer and electroacoustic transducer |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5514132A (en) * | 1978-07-13 | 1980-01-31 | Kyoei Seikou Kk | Preventing method for oxygen entry of cast ingot in continuous casting and device thereof |
| JPS562150A (en) * | 1979-06-15 | 1981-01-10 | Berstorff Gmbh Masch Hermann | Double stage press |
-
1986
- 1986-12-04 JP JP61289690A patent/JPH0611904B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5514132A (en) * | 1978-07-13 | 1980-01-31 | Kyoei Seikou Kk | Preventing method for oxygen entry of cast ingot in continuous casting and device thereof |
| JPS562150A (en) * | 1979-06-15 | 1981-01-10 | Berstorff Gmbh Masch Hermann | Double stage press |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0762800A2 (en) * | 1995-09-07 | 1997-03-12 | Star Micronics Co., Ltd. | Lead frame for electroacoustic transducer and electroacoustic transducer |
| EP0762800A3 (en) * | 1995-09-07 | 1997-04-23 | Star Mfg Co |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0611904B2 (en) | 1994-02-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |